KR101987709B1 - Nozzle for spraying mixed flow of four - Google Patents

Abstract

The body fluid nozzle according to an embodiment of the present invention includes a body for separating an inner space from an outer space, a steam inflow tube for introducing steam into the body, a liquid inflow tube for injecting liquid into the body, An object to be cleaned, comprising: a gas inflow pipe for blowing gas; a chemical inflow pipe for introducing a chemical into the inside of the body; and an injection fluid containing at least one of the steam, the liquid, And includes a jetting port for jetting, and can control the pressure at which the jetting fluid is jetted through the gas.

Description

{NOZZLE FOR SPRAYING MIXED FLOW OF FOUR}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a mixed-substance nozzle, and more particularly, to a mixed-substance nozzle for spraying a mixed substance including steam.

As the semiconductor device becomes highly integrated, the circuit pattern to be implemented on the substrate is also becoming finer. A fine pattern on such a substrate can cause defective semiconductor devices even with very fine contaminants. As a result, the importance of the cleaning process in the semiconductor manufacturing process is becoming more significant.

In a general cleaning process, pure water is sprayed through an ultrasonic oscillator, or pure water is sprayed through a high-pressure nozzle. However, when the substrate is cleaned with only pure water through an ultrasonic oscillator or a high-pressure nozzle, it is possible to remove contaminants that are simply adhered to the surface of the substrate. However, when the substrate is strongly bonded to the surface of the substrate, , It can not be effectively removed in a short time. Thus, contaminants that have not been removed can reduce the uniformity of the film quality in subsequent processes or can lead to substrate defects.

Accordingly, in order to remove contaminants which can not be removed well, the pressure of pure water to be sprayed has been increased. However, as the injection pressure increases, the patterns of the fine semiconductor circuits are broken down, which causes a problem that the semiconductor circuit does not operate properly.

Further, even if the injection pressure is increased, since the particle size of the pure water itself is not small enough to enter between the patterns of the semiconductor circuit, there is still a problem that there is still a gap between patterns that can not be cleaned.

In recent years, in order to solve these two problems in a cleaning method of spraying pure water, a cleaning method using steam having a particle size sufficiently small and sufficient thermal energy for cleaning has been carried out.

In the case of a general nozzle for spraying only steam, in order to increase the pressure of the fluid to be injected, the amount of steam consumed in the nozzle must be increased, which may require considerable cost and energy to generate the required steam.

In addition, when the cleaning process is performed through the mixed fluid due to the mixing of two or more fluids, mixing of two or more fluids occurs only by diffusion due to the molecular motion of the particles, so that the cleaning efficiency may be low.

It is an object of the present invention to provide a fluid nozzle capable of adjusting the pressure of a fluid to be injected through a fluid other than steam.

It is another object of the present invention to provide a fluid nozzle capable of reducing the amount of steam consumed in cleaning by controlling the pressure of fluid to be injected through a fluid other than steam.

It is still another object of the present invention to provide a living body nozzle capable of reducing energy and cost required for a cleaning process.

It is another object of the present invention to provide a living body nozzle in which a vibrator included in a body of a nozzle assists mixing of two or more fluids.

According to an aspect of the present invention, there is provided a multichannel nozzle comprising: a body separating an internal space from an external space; a steam inlet pipe for introducing steam into the body; At least one of the steam, the liquid, the gas, and the chemical substance is introduced into the body through a liquid inlet pipe, a gas inlet pipe through which the gas flows into the body, a chemical inlet pipe through which chemicals are introduced into the body, And a jet port for jetting the jetting fluid to the object to be cleaned, and the pressure at which the jetting fluid is jetted through the jet can be controlled.

In an embodiment, the gas may divide the size of the liquid particles through a pressure ejected into the body.

In an embodiment, the apparatus may further include a vibrating unit that provides vibration to the mixture when the injection fluid is formed by mixing at least two of the steam, the liquid, the gas, and the chemical substance.

In an embodiment, at least one or more of the steam, the liquid, the gas, and the chemical may be introduced diagonally toward the upper portion of the body.

In an embodiment, the gas may be introduced from below the steam, the liquid and the chemical, toward a region where the steam, the liquid and the chemical are mixed.

In an embodiment, the liquid may comprise pure water or ozonated water.

In an embodiment, the pure water may include at least one of deionized water (DIW) and ultrapure water (UPW).

In an embodiment, the gas may include at least one of clean air (CDA), oxygen (O ₂ ), and nitrogen (N ₂ ).

In an exemplary embodiment, the apparatus may further include a liquid curtain forming unit located at least one of a front end and a rear end of the ejection opening in the advancing direction of the ejection opening with respect to the object, and forming a liquid curtain.

In an embodiment, the liquid curtain may comprise pure water or ozonated water.

In an embodiment, at least one or more of the injection fluid and the contaminants separated from the object, which are located at least one of the front end and the rear end of the injection port in the traveling direction of the injection port with respect to the object, And may further include suction suction.

In the embodiment, the liquid curtain forming unit may include at least one of a front end and a rear end of the ejection orifice in the advancing direction of the ejection orifice with respect to the object, And a suction unit for sucking at least one of the jetting fluid jetted from the jetting nozzle and the contaminants separated from the object.

The effect of the ambience nozzle according to the present invention is as follows.

According to at least one of the embodiments of the present invention, the pressure of the ejected fluid can be adjusted through the fluid other than steam.

Further, according to at least one of the embodiments of the present invention, the amount of steam consumed in cleaning can be reduced by controlling the pressure of the fluid to be injected through the fluid other than steam.

Also, according to at least one of the embodiments of the present invention, the energy and cost required for the cleaning process can be reduced.

Also, according to at least one of the embodiments of the present invention, the vibrator included in the body of the nozzle can assist in mixing two or more fluids.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a vertical cross-sectional view of a fluid nozzle according to an embodiment of the present invention; FIG.
FIG. 2 is a vertical cross-sectional view of a residual fluid nozzle according to another embodiment of the present invention. FIG.
3 is a perspective view of a body fluid nozzle according to another embodiment of the present invention.
FIG. 4 is a vertical cross-sectional view of a residual nozzle according to another embodiment of the present invention. FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals are used to designate identical or similar elements, and redundant description thereof will be omitted. The suffix "module" and " part "for the components used in the following description are given or mixed in consideration of ease of specification, and do not have their own meaning or role. In the following description of the embodiments of the present invention, a detailed description of related arts will be omitted when it is determined that the gist of the embodiments disclosed herein may be blurred. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. , ≪ / RTI > equivalents, and alternatives.

Terms including ordinals, such as first, second, etc., may be used to describe various elements, but the elements are not limited to these terms. The terms are used only for the purpose of distinguishing one component from another.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a vertical cross-sectional view of a fluid nozzle according to an embodiment of the present invention; FIG.

1, the entrainment nozzle includes a body 100 for separating the inner space from the outer space, a steam inlet pipe 121 for receiving the steam 11 into the body 101, A gas inflow pipe 126 for inflating the gas 16 into the inside of the body 101 and a chemical inflow pipe for introducing the chemical substance 18 into the inside of the body 101, And a tube 128.

The entrainer nozzle as described above injects the injecting fluid 13 containing at least one of the steam 11, the liquid 14, the gas 16 and the chemical 18 introduced into the inside of the body 101, To the object to be cleaned.

Here, the jetting fluid 13 is one of the steam 11, the liquid 14, the gas 16 and the chemical 18, which are introduced into the inside of the body 101, the steam 11, the liquid 14, the gas 16, and the chemical 18 may be a mixed fluid formed by diffusing and scattering, respectively. Hereinafter, it is assumed that the injection fluid is a mixed fluid.

The formed mixed fluid 13 may be injected through the injection port 122 to an object to be cleaned. At this time, the gas 16 introduced into the body can control the pressure of the mixed fluid 13. Alternatively, the gas 16 and the steam 11 may control the pressure at which the mixed fluid 13 is injected.

Accordingly, it is possible to reduce the amount of steam 11 consumed in washing through the steam injection. Generally, the generation of steam requires a high-temperature condition in order that the pure water in the liquid state changes its state to the steam including the gaseous state. As a result, high energy and high cost may be required for cleaning through general steam injection. However, in the case of performing cleaning through the entrained body nozzle according to the present invention, by controlling the pressure of the mixed fluid 13 injected through the fluid other than the steam 11 by the residual fluid nozzle, The amount can be reduced.

On the other hand, the gas 16 may include at least one of clean air (CDA), nitrogen (N ₂ ), and oxygen (O ₂ ), and the liquid 14 may be pure water or ozonated water.

Here, the pure water may include at least one of deionized water (DIW) not containing ions and ultrapure water (UPW) containing no ions and impurities other than ions.

Particularly, when the liquid 14 containing ozone water is introduced, cleaning can be performed more effectively than when the liquid 14 containing pure water is introduced. A detailed explanation is as follows.

First, when the liquid 14 containing ozone water is introduced through the liquid inlet pipe 124, the mixed fluid may include the oxygen radical O · and the hydroxy radical OH ·. Here, a radical is a species that is electrically neutral and has a non-covalent electron pair unlike an ion. Therefore, the radical is strong in chemical reactivity because it obtains electrons elsewhere and fills a non-covalent electron pair, or attempts to break the state of a non-covalent electron pair by abandoning the excited electron. In other words, the radicals are strongly chemically reactive and can act as an important factor in the separation of contaminants.

Accordingly, when the liquid 14 containing ozone water is introduced through the liquid inlet pipe 124, the radicals combine with the contaminants present on the surface of the object to be cleaned to separate and remove the contaminants from the object to be cleaned It is possible to provide a cleaning effect.

The entrainment nozzle can jet the mixed fluid 13 to separate and remove contaminants from the object to be cleaned. This can be realized through a chemical cleaning effect and a physical cleaning effect in detail.

Hereinafter, the chemical cleaning effect will be described in detail.

At least two or more of the steam 11, the liquid 14, the gas 16, and the chemical 18 introduced into the inside of the body 101 diffuse and scatter, respectively, and the mixed fluid 13 . In this process, the molecules of the steam 11, the molecules of the liquid 14, the molecules of the gas 16, and the molecules of the chemical 18 actively oscillate, sonic vibrations may occur. Water molecules (H ₂ O) of the steam 11 and the liquid 14 can receive energy from the sonic vibration and dissociate into hydrogen ions (H ⁺ ) and hydroxide atom ions (OH ^- ).

Next, the mixed phase fluid 13 containing hydrogen ions and hydroxide atom ions can be injected through the injection port 122 into the object to be cleaned. Hydrogen ions and hydroxide atomic ions contained in the injected mixed fluid 13 combine with contaminants present on the surface of the object to be cleaned, and contaminants can be separated from the object.

Thereafter, the separated contaminants can be removed from the object by the pressure of the mixed fluid injected from the injection port 122.

Hereinafter, the physical cleaning effect will be described in detail. There are two cases of physical cleaning effects.

First, water molecules (H ₂ O) of the steam 11 and the liquid 14 can be dissociated into hydrogen ions (H ⁺ ) and hydroxyl atom ions (OH ^- ) by receiving energy from the sonic vibration as in the chemical cleaning effect . The process up to this point is the same as the above description and is omitted because it is duplicated. The dissociated ions then release energy to the environment and can recombine back into water molecules.

The mixed fluid 13 that releases energy to the periphery can be injected through the injection port 122 into the object to be cleaned. Then, the energy emitted from the injected mixed fluid 13 is absorbed by the contaminants existing on the surface of the object to be cleaned, and the contaminants can be separated from the object.

Thereafter, the separated contaminants can be removed from the object by the pressure of the mixed fluid 13 injected from the injection port 122.

Next, the pressure of the mixed fluid 13 varies with time due to the sonic vibration. As a result, cavities (micro bubbles) can be generated in the mixed fluid 13.

The mixed phase fluid 13 containing the cavity can be injected through the injection port into the object to be cleaned. The cavities contained in the injected mixed fluid 13 can burst from the surface of the object to be cleaned and the contaminants can be separated from the object by pushing the contaminants from the surface of the object with the heat and pressure generated at that time. This phenomenon can be called cavitation. The temperature of the heat is about several hundreds to several thousand degrees, and the pressure can be about several tens to several thousand atmospheres.

Such cavitation occurs continuously on the surface of the object to be cleaned, thereby cracking the hardened contaminant, making cracks, penetrating into the cracks, and repeating the bursting. Thereafter, the separated contaminants can be removed from the object by the pressure of the mixed fluid 13 injected from the injection port 13. As a result, the fluid nozzle for jetting the mixed-phase fluid 13 can clean the hardened contaminants on the object to be cleaned.

Meanwhile, the shapes of the nozzles shown in FIGS. 1 to 4 are only exemplary shapes that represent the present invention, and the shapes of the fluid nozzle according to the present invention are not limited and limited. Accordingly, it is apparent to those skilled in the art that the multivalent nozzle according to the present invention can be implemented through a shape different from the shape of the nozzle shown in FIGS.

FIG. 2 is a vertical cross-sectional view of a residual fluid nozzle according to another embodiment of the present invention. FIG.

2, at least one of the steam 21, the liquid 24, the gas 26, and the chemical 28 may be introduced obliquely toward the upper portion of the inside 201 of the body.

Particularly, when at least two of the steam 21, the liquid 24, the gas 26 and the chemical 28 introduced into the inside of the body 201 respectively diffuse and scatter and form a mixed phase fluid, the steam 21 The gas 26 may be introduced from below the liquid 24 and the chemical 28 toward the region where the steam 21, the liquid 24 and the chemical 28 are mixed. In this case, the gas 26 can divide the particle size of the liquid 24 through the pressure that flows into the inside of the body 101. As a result, the particle size of the liquid 24 is reduced overall, and the surface area of the liquid 24 can be increased.

The humidifier nozzle according to the present invention further includes a vibration section 250 that provides vibration to a mixture of at least two of the steam 21, the liquid 24, the gas 26 and the chemical 28 . Vibrations provided in the vibration section 250 can act as energy contributing to the diffusion of the particles of the steam 21, the liquid 24, the gas 26, and the chemical substance 28.

For the above reasons, each of the steam 21, the liquid 24, the gas 26, and the chemical 28 may more effectively diffuse and scatter, and a mixed phase fluid may be formed. As a result, the cleaning effect of the residual fluid through the mixed fluid can be increased.

3 is a perspective view of a body fluid nozzle according to another embodiment of the present invention.

Referring to FIG. 3, the residual fluid nozzle may include a jetting port 322 in the form of a slit. In the case where the entrainer nozzle includes the slit-shaped injection port 322, it is possible to perform cleaning for a cleaning area in a linear shape at a moment. Therefore, if the municipal nozzle performing such cleaning moves with a relative speed to the object to be cleaned in a direction perpendicular to the long axis of the jetting port 322 over time, ), It is possible to clean a wider area during the same period of time.

FIG. 4 is a vertical cross-sectional view of a residual nozzle according to another embodiment of the present invention. FIG.

4, the entrainment nozzle may further include a liquid curtain forming part 400, which is located outside the body and at the front end and the rear end of the ejection opening in the advancing direction of the ejection opening, to form a liquid curtain 405 .

The liquid curtain forming portion 400 includes a liquid inflow pipe 402 for filling the liquid 4 to form the liquid curtain 405, a curtain-forming first unit 422 for forming the liquid curtain 405, And a second unit 424. The liquid 4 flows into the space formed by the curtain-forming first unit 422 and the curtain-forming second unit 424 through the liquid inflow pipe 402 and flows between the curtain-forming units 422 and 424 And is injected into a curtain-shaped thin film through a thin gap formed at the bottom. Here, the thin film is referred to as a liquid curtain 405.

The liquid curtain 405 can prevent the jetting fluid containing the contaminant from being scattered to the object that has already been cleaned or the object to be cleaned after the cleaning is performed.

In addition, the liquid curtain 405 having reached the object to be cleaned and having formed a water film floats the contaminants separated from the object, and the contaminant is removed along with the water film when the object is out of the cleaning stage do.

In addition, the liquid 4 that is introduced through the liquid inlet pipe 402 may include at least one of pure water or ozonated water. Here, the pure water may include at least one of deionized water not containing ions or ultrapure water containing no impurities other than ions and ions.

Particularly, when the ozone water is introduced as liquid through the liquid inlet pipe 402, the injected liquid curtain 405 contains the oxygen radical O · and the hydroxy radical OH ·, And chemical contaminants are separated from the object to be cleaned, thereby providing a chemical cleaning effect.

In the meantime, the multivalent nozzle according to the present invention is disposed in at least one of the front end and the rear end of the injection port in the advancing direction of the injection port with respect to the object, and at least one of the injection fluid ejected from the ejection port, And a suction unit for sucking the fluid.

First, at least one or more of the jetting fluid ejected from the jetting nozzle and the contaminants separated from the object may be sucked into the suction-hood 452. Thereafter, at least one or more of the injection fluid sucked into the suction hood 452 and the contaminants separated from the object are exhausted from the suction hood 452 through the exhaust pipe 454, whereby the suction hood 452 ) Can continuously perform inhalation.

Specifically, the suction portion 450 may be located at one of the front end and the rear end of the injection port in the advancing direction of the injection port. For example, the liquid curtain forming part 400 may be positioned at the front end in the advancing direction of the injection port, and the suction part 450 may be positioned at the rear end of the advancing direction of the injection port. At this time, the suction unit 450 may include a suction hood 452 and an exhaust pipe 454.

In this case, the liquid curtain 405 ejected from the liquid curtain forming portion 400 reaches the object to be cleaned, and a water film can be formed at the front end of the ejection opening. Accordingly, the contaminants located in the object after cleaning can be floated on the water film formed from the liquid curtain 405 without scattering.

At the same time, since the suction portion 450 is located at the rear end of the jetting port, the suction hood 452 contained in the suction portion 450 is separated from the jetting fluid prevented from scattering by the liquid curtain 405, At least one can be inhaled. At least one or more of the injection fluid sucked into the suction hood 452 and the contaminants separated from the object can be removed from the inside of the suction hood 452 through the exhaust pipe 454. [

4, the liquid curtain forming portion is located at the front end and the rear end of the ejection opening in the advancing direction of the ejection opening, and the suction portion may be located at the outer end than the liquid curtain formed from the liquid curtain forming portion.

In this case, the entrainment nozzle can efficiently scatter at least one of the jetting fluid and the contaminants separated from the object, as compared with the case where each of the liquid curtain forming section and the suction section is located only at one end (front end or rear end in the advancing direction of the jetting port) You can block, remove.

The cleaning method using the entangled nozzle according to the present invention differs from the conventional cleaning method in that it ejects pure water only at a high pressure when compared with a general cleaning method and a lower pressure injection fluid (steam, liquid, gas, A mixed fluid formed by mixing at least two of gas and chemicals), and the pressure of the injected fluid to be injected can be controlled through an inflow gas rather than steam. In addition, you can get the following four benefits:

First, the energy and cost required for the cleaning process can be reduced.

Generally, the generation of steam requires a high-temperature condition in order that the pure water in the liquid state changes its state to the steam including the gaseous state. As a result, cleaning with general steam injection may require high energy and high cost.

However, in the case of performing the cleaning through the entrained body nozzle according to the present invention, the entrained body nozzle according to the present invention adjusts the pressure of the mixed fluid injected through the fluid other than steam, . Thus, the energy and cost required for the cleaning process can be reduced.

Second, it is possible to avoid collapsing and crushing of the pattern located on the object to be cleaned. In a general cleaning method of spraying high-pressure pure water, a pattern on a substrate to be cleaned due to a pressure for spraying high-pressure pure water may be crushed or crushed due to impact. However, according to the cleaning method of the present invention, it is possible to avoid collapsing and crushing of patterns on the substrate by not spraying high-pressure pure water.

Third, even when the pattern positioned on the object to be cleaned includes a fine pattern, it can be cleaned up to the interval between the fine patterns. Recent patterns are getting finer and finer. In a general cleaning method of spraying only pure water, the size of water droplets acting on the contaminants is not small enough to penetrate between the fine patterns.

However, in the cleaning method using the entangled nozzle according to the present invention, the size of the cavity caused by the cavitation is small enough to penetrate between fine patterns with a diameter of 10 ^-6 (micro) small. Therefore, the cleaning method using the entangled body nozzle according to the present invention can clean the area between the fine patterns.

Fourth, the cleaning of a plurality of processes such as the first chemical cleaning, the first physical cleaning, and the second cleaning included in the general cleaning method can be reduced to a single 'mixed phase injection step'.

Generally, a primary chemical cleaning in which the contaminants of the object to be cleaned are separated from the object to be cleaned, a primary physical cleaning in which the contaminant is separated from the object by absorbing or pumping energy, and a secondary cleaning And the like, respectively.

However, the cleaning method using the multivalent nozzle according to the present invention can be carried out by including all of the above-described plural cleaning operations in one 'mixed phase of mixed fluid'.

Due to the above advantages, the fluid nozzle can shorten the manufacturing line in the cleaning process of the semiconductor manufacturing process and facilitate the maintenance. Accordingly, the yield of the semiconductor manufacturing process can also be improved.

The foregoing detailed description should not be construed in any way as being restrictive and should be considered illustrative. The scope of the present invention should be determined by rational interpretation of the appended claims, and all changes within the scope of equivalents of the present invention are included in the scope of the present invention.

Claims (13)

A body separating the inner space from the outer space;
A steam inlet pipe for introducing steam into the body;
A liquid inlet pipe for injecting liquid into the body;
A gas inflow pipe for blowing gas into the body;
A chemical inlet pipe for introducing the chemical into the body; And
And an injection port for injecting an injection fluid containing at least one of the steam, the liquid, the gas and the chemical substance to an object to be cleaned,
Controls the pressure at which the jetting fluid is jetted through the gas,
The body (100)
An upper body 110; And
And a lower body 140 composed of a first lower body 120 and a second lower body 130,
The steam inlet pipe, the liquid inlet pipe, the gas inlet pipe, and the chemical inlet pipe are connected to the upper body 110,
The inner region of the lower body (140)
A first region (141) having a width narrower by a predetermined length in the direction of the injection port;
A second region 142 formed below the first region 141 and having a constant width in a direction toward the injection port;
A third region 143 provided below the second region 142 and narrower in width by a predetermined width than the width of the second region 142 in the direction of the injection port; And
And a fourth region (144) formed below the third region (143) and having a constant width in the direction of the injection port.
The method according to claim 1,
The gas,
Wherein a particle size of the liquid is divided through pressure introduced into the body.
The method according to claim 1,
Further comprising a vibrating part for vibrating the mixture when the injection fluid is formed by mixing at least two of the steam, the liquid, the gas and the chemical substance,
The vibrating unit may include:
Wherein the nozzle is provided inside the upper body (110).
The method according to claim 1,
Wherein at least one of the steam, the liquid, the gas,
Wherein the nozzle is slanted toward the upper portion of the body.
The method according to claim 1,
The gas,
Wherein the steam, the liquid, and the chemical are introduced from a lower side of the steam toward the region where the steam, the liquid, and the chemical are mixed.
The method according to claim 1,
The liquid,
Characterized in that the nozzle comprises pure water or ozonated water.
The method according to claim 6,
The pure water,
Wherein at least one of deionized water (DIW) and ultrapure water (UPW) is contained.
The method according to claim 1,
The gas,
Characterized in that it comprises at least one of clean air (CDA), oxygen (O ₂ ), and nitrogen (N ₂ ).
The method according to claim 1,
Further comprising a liquid curtain-forming portion located in at least one of a front end and a rear end of the injection port in the traveling direction of the injection port with respect to the object, and forming a liquid curtain.
10. The method of claim 9,
The liquid curtain,
Characterized in that the nozzle comprises pure water or ozonated water.
The method according to claim 1,
A sucking part located at least one of a front end and a rear end of the injection port in the traveling direction of the injection port with respect to the object and sucking at least one of the injection fluid sprayed from the injection port and the contaminant separated from the object further comprising a plurality of suction nozzles.
The method according to claim 1,
A liquid curtain forming unit located at least one of a front end and a rear end of the ejection orifice in the advancing direction of the ejection orifice with respect to the object and forming a liquid curtain; And
Further comprising a suction portion located at least one of the front end and the rear end and sucking at least one of the injection fluid sprayed from the injection port and the contaminants separated from the object. Nozzle. A body (100) separating the inner space from the outer space;
A first fluid inlet pipe (121) for introducing a first fluid into the body (100);
A second fluid inlet pipe (124) for receiving a second fluid into the body (100);
A third fluid inlet pipe (126) for receiving a third fluid into the body (100);
A fourth fluid inlet pipe (128) for receiving a fourth fluid into the body (100); And
And a jetting port (122) for jetting the jetting fluid containing at least one of the first fluid to the fourth fluid to an object to be cleaned,
Controls the pressure at which the injection fluid is injected through the third fluid,
The body (100)
An upper body 110; And
And a lower body 140 composed of a first lower body 120 and a second lower body 130,
The first fluid inlet pipe 121 is connected to the upper end of the upper body 110 and the second fluid inlet pipe 124 and the third fluid inlet pipe 126 are connected to the upper end of the upper body 110. [ And the fourth fluid inlet pipe 128 is connected to any one of the left and right side surfaces of the upper body 110 and the second fluid inlet pipe 124 and the third fluid inlet pipe 126 And the other side surface of the nozzle body is connected to the other side surface.

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