KR101915053B1 - All-in-one steam nozzle forming liquid curtain - Google Patents

Abstract

According to an embodiment of the present invention, the liquid curtain-forming integrated type steam nozzle includes a body separating an inner space from an outer space, a steam inlet pipe for introducing steam into the body, and a liquid curtain A liquid curtain forming part And an ejection opening for ejecting the steam to an object to be cleaned.

Description

{ALL-IN-ONE STEAM NOZZLE FORMING LIQUID CURTAIN}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing facility and a manufacturing method using the same, and relates to a cleaning apparatus for a semiconductor substrate. More particularly, to a liquid curtain-formed integral type steam nozzle used for cleaning.

As the semiconductor device becomes highly integrated, the circuit pattern to be implemented on the substrate is also becoming finer. Thus, the pattern on the substrate can cause defective semiconductor devices even with very fine contaminants, and the importance of the cleaning process is becoming more and more important.

In this cleaning process, pure water is generally sprayed through an ultrasonic oscillator, or pure water is sprayed using a high-pressure nozzle. However, if the substrate is cleaned by applying such ultrasonic waves or using only high-pressure pure water, contaminants that are simply adhered to the surface of the substrate can be removed, but they are strongly bonded to the surface of the substrate such as a photoresist, In the case of contaminants, it can not be effectively removed in a short time. Thus, contaminants that have not been removed can reduce the uniformity of the film quality in subsequent processes or can lead to substrate defects.

Accordingly, the pressure of the pure water injected has been increased in order to remove contaminants which can not be removed well. However, as the injection pressure increases, the patterns of the fine semiconductor circuits are broken down, which causes a problem that the semiconductor circuit does not operate properly.

Further, even if the injection pressure is increased, since the particle size of the pure water itself is not small enough to be interposed between the patterns of the semiconductor circuit, there is still a problem that there is still a gap between the patterns that can not be cleaned.

In recent years, in order to solve these two problems in a cleaning method of spraying pure water, a cleaning method using steam having a particle size sufficiently small and sufficient thermal energy for cleaning has been carried out. However, here too, there is a problem that after steam is sprayed from the cleaning nozzle to perform substrate cleaning, it contains contaminants, and then steam containing contaminants is scattered in all directions, which may cause re-contamination of already cleaned substrates have.

It is an object of the present invention to provide a liquid curtain-formed integral steam nozzle which prevents steam, which is to contain contaminants after carrying out substrate cleaning, from splashing onto already cleaned substrates.

Another object of the present invention is to provide a liquid curtain-formed integral steam nozzle in which steam containing contaminants is removed from the substrate without being scattered to the substrate already cleaned after the substrate cleaning is performed.

According to an aspect of the present invention, there is provided a liquid curtain-forming integrated type steam nozzle comprising: a body separating an inner space from an outer space; a steam inlet pipe for drawing steam into the body; A liquid curtain forming unit positioned outside the liquid curtain forming unit to form a liquid curtain, and an ejection opening for ejecting the steam to an object to be cleaned.

In one embodiment of the present invention, at least one of the steam, the pure water, and the ozonated water may be injected through the injection port, the first inlet pipe injecting pure water or ozonated water into the body.

In an embodiment, the pure water may include at least one of deionized water (DIW) and ultrapure water (UPW).

In an exemplary embodiment, at least one of the steam and the cleaning gas may be injected through the injection port, further comprising an additional inlet pipe for injecting a cleaning gas into the body.

In an embodiment, the cleaning gas may include at least one of clean air (CDA), nitrogen (N ₂ ), oxygen (O ₂ ), and steam.

In an embodiment, the liquid curtain may comprise at least one of pure water and ozonated water.

In the embodiment, the liquid curtain forming portion may inject the liquid curtain at a position in a direction parallel to the long axis of the injection port.

In an embodiment, the liquid curtain forming part may be located at least one of a front end and a rear end of the injection port in the advancing direction of the injection port.

In an embodiment, the apparatus may further include a suction portion for sucking at least one of the steam sprayed from the jetting nozzle and the contaminants separated from the object, outside the body.

In an embodiment, the suction section may suck at least one of the steam and the contaminants from a position in a direction parallel to the long axis of the injection port.

In an embodiment, the suction portion may be located at least one of a front end and a rear end of the injection port in a traveling direction of the injection port.

In an embodiment, the liquid curtain forming portion may be located at a front end of the injection opening in the advancing direction of the injection opening, and the suction portion may be located at a rear end of the injection opening in the advancing direction of the injection opening.

In an embodiment, the liquid curtain forming portion may be located at a front end and a rear end of the jetting port in a traveling direction of the jetting port, and the suction portion may be located at an outer end than the liquid curtain formed from the liquid curtain forming portion.

In an embodiment, the suction unit may include an exhaust pipe for exhausting at least one of the steam and the contaminant that is sucked into the suction hood.

In an exemplary embodiment, the body may include a first body and a second body, and the body may be formed as a closed space.

In an embodiment, the liquid curtain forming portion may form a liquid curtain having an angle of 0 ^o to 90 ^o with respect to a direction of spraying the steam.

The effect of the integral liquid type curtain-forming steam nozzle according to the present invention will be described as follows.

According to at least one of the embodiments of the present invention, it is possible to prevent the steam containing the contaminant from being scattered to the substrate already cleaned after performing the substrate cleaning.

Further, according to at least one of the embodiments of the present invention, after the substrate cleaning is performed, the steam containing the contaminant can be removed from the substrate without being scattered to the substrate already cleaned.

1 is a cross-sectional view showing a liquid curtain-formed integral-type steam nozzle according to an embodiment of the present invention;
2 is a perspective view of a liquid curtain-forming integral steam nozzle according to one embodiment of the present invention.
3 is a cross-sectional view showing a liquid curtain-formed integral type steam nozzle including a suction portion, according to another embodiment of the present invention.
4 is a perspective view of a liquid curtain-formed integral steam nozzle including a suction portion, according to another embodiment of the present invention.
According to another aspect of the present invention, there is provided a liquid curtain forming apparatus, comprising: a liquid curtain forming unit arranged at a front end and a rear end of a jetting port in a traveling direction of an ejection orifice; 1 is a cross-sectional view showing a single-piece integrated steam nozzle.
FIG. 6 is a cross-sectional view of a liquid curtain-forming integrated type steam nozzle in which a body is formed of a first body and a second body to form a closed space, and FIG.
7 is a bottom view of a liquid curtain-formed integral steam nozzle according to another embodiment of the present invention. (a) The liquid curtain forming portion is located at one end side parallel to the long axis direction of the jetting port, and the suction portion is located at the opposite side of the one end with respect to the jetting port. (b) The liquid curtain-forming portion is located at the front end, the rear end, and both sides of the jetting port in the advancing direction of the jetting port, and the suction portion is located at the outer end of the liquid curtain formed from the liquid curtain- .
8 is a cross-sectional view illustrating forming a liquid curtain with an angle of a certain range with the sprayed liquid curtain forming portion according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals are used to designate identical or similar elements, and redundant description thereof will be omitted. The suffix "module" and " part "for the components used in the following description are given or mixed in consideration of ease of specification, and do not have their own meaning or role. In the following description of the embodiments of the present invention, a detailed description of related arts will be omitted when it is determined that the gist of the embodiments disclosed herein may be blurred. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. , ≪ / RTI > equivalents, and alternatives.

Terms including ordinals, such as first, second, etc., may be used to describe various elements, but the elements are not limited to these terms. The terms are used only for the purpose of distinguishing one component from another.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

1 is a cross-sectional view showing a liquid curtain-formed integral-type steam nozzle according to an embodiment of the present invention;

According to an embodiment of the present invention, the liquid curtain-forming integrated type steam nozzle includes a body 100 separating an inner space from an outer space, a steam inlet pipe 204 for drawing steam into the body, a body 100, A liquid curtain forming part 500 which forms a liquid curtain 510 and a jet opening 222 for jetting the steam 20 onto an object to be cleaned.

An embodiment of the present invention will be described in detail as follows. The steam 20 is introduced into the inside of the body 101 from the outside of the body 100 through the steam inlet pipe 204. However, since it includes steam in the inside of the body 101, it is possible to generate the steam 20 directly from the inside of the body 101 without allowing the steam 20 from the outside of the body 100.

The steam 20 located in the inside of the body 101 is injected into the object to be cleaned through the injection pipe 220 and the injection port 222.

On the other hand, the liquid curtain forming portion 500 includes a liquid inlet pipe 502 for filling the liquid 5 to form the liquid curtain 505, a curtain-forming first unit 522 for forming the liquid curtain 505, And a curtain-forming second unit 524. The liquid 5 flows into the space formed by the curtain-forming first unit 522 and the curtain-forming second unit 524 through the liquid inflow pipe 502 and flows between the curtain-forming units 522 and 524 And is injected into a curtain-shaped thin film through a thin gap formed at the bottom.

Here, the thin film is referred to as a liquid curtain 505. This liquid curtain 505 is a liquid curtain 505 which, when cleaning using steam, performs a cleaning process on the steam containing contaminants, It is possible to prevent scattering.

The liquid curtain 505 which reaches the object to be cleaned and formed with a water film floats the contaminants separated from the object on the water film, and the contaminant is removed from the water curtain when the object is out of the step of cleaning the steam, It is eliminated.

Further, the liquid 5 to be introduced through the liquid inlet pipe 502 may include at least one of pure water or ozonated water. The pure water may include at least one of deionized water (DIW) not containing ions or ultrapure water (UPW) containing no impurities other than ions and ions.

On the other hand, if a liquid containing ozone water is introduced through the liquid inflow pipe 502, the injected liquid curtain 505 will contain an oxygen radical O · and a hydroxy radical OH ·, To provide a chemical cleaning effect by separating contaminants from the object to be cleaned.

Referring to FIG. 1, the liquid curtain-forming integrated steam nozzle may further include a first inlet pipe 202 for injecting pure water or ozonated water into the inside of the body 101. The description of the range referred to pure water is redundant and will be omitted. Further, in Fig. 1, it may further include an additional inflow pipe for sweeping the cleaning gas.

That is, at least one or more of pure water, ozonated water, and scrubbing gas may be introduced as additional fluid through the first inlet pipe 202 and the additional inlet pipe. (Here, the fluid is a generic term of a state in which the fluid is composed of a liquid and a gas and flows in an unspecified form). Thus, the jetting fluid 30 containing steam and the additional fluid is jetted to the object to be cleaned through the jetting port 222 can do.

Further, as the body further introduces additional fluid with the steam 20, the volume of total fluid flowing into the body per hour increases. Here, the total fluid refers to the sum of steam (20), pure water, ozonated water, and cleaning gas located inside the body. The total fluid inside the body is ejected to the object to be cleaned through the injection port 222 at a higher flow rate so as to be discharged at the same time ratio as before the volume is increased from the inside of the body. As a result, a higher cleaning effect can be obtained due to the rapid jetting due to the increased flow rate.

2 is a perspective view of a liquid curtain-forming integral steam nozzle according to one embodiment of the present invention.

Referring to FIGS. 1 and 2, the liquid curtain-forming integrated type steam nozzle may be a cleaning nozzle in the form of a slit that can be linearly cleaned. In the case of a liquid curtain-forming integral-type steam nozzle in the form of a slit, it is possible to clean, in an instant, a linear cleaning area. Therefore, if the slit-shaped nozzle for performing such cleaning moves at a relative speed with respect to the object to be cleaned in the direction perpendicular to the long axis of the jetting port 222 with the passage of time, Compared with the nozzle, during the same time, a relatively large area of the object to be cleaned can be cleaned.

Referring to FIGS. 1 and 2, the liquid curtain forming portion 500 can jet the liquid curtain 505 to a position in a direction parallel to the long axis of the ejection opening 222. The liquid curtain 505 is formed in a direction parallel to the ejection port 222 to effectively prevent scattering of the ejection fluid 30 that is ejected onto the long axis of the ejection port 222. [

The liquid curtain forming part 500 may be located at least one of the front end and the rear end of the injection port 222 in the advancing direction of the ejection port 222. In one embodiment, the liquid curtain forming portion 500 may be located at the rear end of the jetting port 222. [ Thereby, it is possible to prevent the steam 20 containing the contaminant from being scattered to the object that has already been cleaned after cleaning.

3 is a cross-sectional view showing a liquid curtain-formed integral steam nozzle including a suction portion 600, according to an embodiment of the present invention.

3, the suction hood 610 includes at least one suction fluid 30, steam 20, and contaminants separated from the object to be cleaned, (600). < / RTI >

The suction unit 600 may further include an exhaust pipe 602. The suction unit 600 further includes an exhaust pipe 602 communicated to the outside of the suction hood 610 so that the suction hood 610 continuously supplies the steam 20 and at least the contaminants separated from the object to be cleaned More than one can be inhaled.

Consequently, after performing the cleaning of the object to be cleaned, at least one or more of the jetting fluid 30, the steam 20, and the contaminants separated from the object to be cleaned is not scattered to the object that has already been cleaned It can be removed from the object.

4 is a perspective view of a liquid curtain-forming integral steam nozzle including a suction portion 600, according to an embodiment of the present invention.

3 and 4, the suction unit 600 can suck at least one of the steam 20 and the contaminants from a position in a direction parallel to the long axis of the injection port 222. [ The suction portion 600 is formed in a direction parallel to the longitudinal axis of the injection port 222 so that the splashing fluid 30 sprayed from the injection port 222 can be effectively sucked and exhausted through the exhaust pipe 602.

The suction part 600 may be located at least one of the front end and the rear end of the injection port 222 in the advancing direction of the ejection port 222. In one embodiment, the liquid curtain forming part 500 may be positioned at the front end in the advancing direction of the injection port 222, and the suction part 600 at the rear end.

Thus, the liquid curtain 505 ejected from the liquid curtain forming portion 500 reaches the object to be cleaned, and a water film is formed at the front end of the ejecting opening 222. Therefore, contaminants generated around the jetting port 222 are not scattered during cleaning and can be directly suspended on the water film.

At the same time, since the suction part 600 is positioned at the rear end of the injection port 222, the suction hood 610 of the suction part 600 can be prevented from being splashed by the liquid curtain 505, 20) and at least one of the contaminants separated from the object to be cleaned. At least one or more of the injection fluid 30 sucked into the suction hood 610, the steam 20 and the contaminants separated from the object to be cleaned can be removed from the suction hood 610 through the exhaust pipe 602.

5 is a perspective view of the liquid curtain forming unit 500 according to an embodiment of the present invention. The liquid curtain forming unit 500 is located at the front end and the rear end of the jetting port 222 in the advancing direction of the jetting port 222, Sectional view showing a liquid curtain-forming integral-type steam nozzle which is located at an outer end than the liquid curtain 505 formed from the liquid curtain 500 shown in Fig.

The liquid curtain-forming integrated type steam nozzle of the present embodiment is more effective than the other embodiments in which the liquid curtain forming portion 500 and the suction portion 600 are located only at either one end (the front end or the rear end in the advancing direction of the injection port 222) The steam 20, and the contaminants separated from the object to be cleaned can be prevented from being scattered and removed. Meanwhile, since the liquid curtain forming unit 500 and the suction unit 600 are similar to those described above, a detailed description thereof will be omitted.

6 is a perspective view of a body 100 according to an embodiment of the present invention. The body 100 includes a first body 105 and a second body 107 to form a body 101 as a closed space. Fig.

The body of the steam nozzle is formed to include unit pieces such as an upper body, a lower first body, a lower second body, a first body and a second body, and each unit piece may be formed by fastening means such as bolts and screws Can be bound. As a result, when heat is applied to the body of the steam nozzle, the bond between the unit pieces is loosened. By this action, the volume of the inside of the body 101 can be increased and thus the pressure and the velocity of the jetting fluid injected through the jetting port can be reduced.

6, an embodiment of the present invention is characterized in that the body inside 101 is divided into a smaller number of unit pieces composed of the first body 105 and the second body 107, . Accordingly, the present invention provides a liquid curtain-formed integral steam nozzle in which a reduction in the pressure and speed of the jetting fluid 30 injected through the jetting port 222 is minimized when heat is applied to the body 100 of the steaming nozzle .

7 is a bottom view of a liquid curtain-formed integral steam nozzle according to another embodiment of the present invention. (a) The liquid curtain forming portion is located at one end side parallel to the long axis direction of the jetting port, and the suction portion is located at the opposite side of the one end with respect to the jetting port. (b) The liquid curtain-forming portion is located at the front end, the rear end, and both sides of the jetting port in the advancing direction of the jetting port, and the suction portion is located at the outer end of the liquid curtain formed from the liquid curtain- .

7A, the liquid curtain injection port 526 can prevent scattering of the injection fluid 30 injected from the injection port 222, and the suction hood 610 can supply the injection fluid 30, At least one of the detergent 20 and the contaminants separated from the object to be cleaned can be sucked. It is possible to prevent the jetting fluid 30 sprayed from the jetting port 222 from being scattered to both ends by both ends of the liquid curtain jetting port 526 being curved inward, The injection fluid 30 diffracted from both ends of the liquid curtain injection hole 526 can be sucked to prevent scattering of the injection fluid 30 by being positioned wider than both ends of the curtain injection hole 526. [

7B, the liquid curtain injection port 526 may prevent scattering of the injection fluid 30 injected from the injection port 222, and the suction hood 610 may be connected to the injection fluid 30, At least one of the detergent 20 and the contaminants separated from the object to be cleaned can be sucked. Since the suction hood 610 is positioned at the outer end than the liquid curtain injection opening 526, the injection fluid 30 injected from the injection opening 222 can be prevented from scattering in all directions.

8 is a cross-sectional view illustrating forming a liquid curtain with an angle of a certain range with the sprayed liquid curtain forming portion according to another embodiment of the present invention.

Referring to Figure 8, the liquid curtain forming portion may be formed in the injection fluid 30 is injected from the injection port 0 ^o to 90 ^o liquid curtain 506 forms an angle of. In particular, the liquid curtain 506 may be formed with an angle of 45 ^o from the injection fluid (30). This angle is an angle capable of minimizing the liquid film formed at the position where the jetting fluid 30 reaches the target while maintaining the liquid curtain reaching the object to be cleaned. Here, the liquid film can lower the cleaning force of the integrated liquid-curtain-forming steam nozzle of the present invention as a film covering the surface of the object, thereby minimizing the liquid film can improve the cleaning efficiency.

Accordingly, the foregoing detailed description should not be construed in any way as limiting and should be considered illustrative. The scope of the present invention should be determined by rational interpretation of the appended claims, and all changes within the scope of equivalents of the present invention are included in the scope of the present invention.

5: liquid
10: pure water
12: ozonated water
20: Steam
22: cleaning gas
30: Injection fluid
100: Body
101: inside of the body
102: upper body
104: lower first body
105: first body
106: lower second body
107: Second body
200: inlet
202: first inlet pipe
204: steam inlet pipe
206: Additional inflow pipe
220: Distributor
222:
500: liquid curtain forming part
502: liquid inlet pipe
505: Liquid curtain
506: Liquid curtain
510: Pure curtains
512: Ozonated water curtain
522: curtain forming first unit
524: curtain forming second unit
526: Liquid curtain nozzle
600: Suction part
610: Suction hood
602: Exhaust pipe

Claims (16)

A body separating the inner space from the outer space;
A steam inlet pipe for introducing steam into the body;
A liquid curtain forming unit located outside the body, the liquid curtain forming unit forming a liquid curtain; And
And a jetting port for jetting the steam to an object to be cleaned,
Further comprising a suction portion for sucking at least one of the steam sprayed from the jetting nozzle and the contaminants separated from the object, outside the body,
The liquid curtain-
The liquid curtain is injected in the form of a slit at a position in a direction parallel to the major axis of the injection port and is located at the front end of the injection port in the advancing direction of the injection port,
The suction portion
Wherein the liquid curtain injection nozzle is located at a rear end of the jet opening in a traveling direction of the jet opening, and both ends thereof are positioned wider than both ends of the liquid curtain jet opening.
The method according to claim 1,
Further comprising a first inlet pipe for injecting pure water or ozonated water into the body, wherein at least one of the steam, the pure water and the ozonated water is injected through the injection port.
3. The method of claim 2,
The pure water,
Characterized in that it comprises at least one of deionized water (DIW) and ultrapure water (UPW).
The method according to claim 1,
Further comprising an additional inlet pipe for injecting a cleaning gas into the body, wherein at least one of the steam and the cleaning gas is injected through the injection port.
5. The method of claim 4,
The cleaning gas,
Characterized in that it comprises at least one of clean air (CDA), nitrogen (N ₂ ), oxygen (O ₂ ) and steam.
The method according to claim 1,
The liquid curtain,
And at least one of pure water, ozone water, and pure water.
delete delete delete The method according to claim 1,
The suction portion
Wherein at least one of the steam and the contaminant is sucked from a position in a direction parallel to the major axis of the jetting port.
delete delete delete The method according to claim 1,
The suction portion
And an exhaust pipe for exhausting at least one of the steam and the contaminant that has been sucked into the suction hood.
The method according to claim 1,
The body,
Wherein the first body and the second body form an inside of the body which is a closed space.
The method according to claim 1,
The liquid curtain-
Liquid curtain formed integral steam nozzle as to form a liquid curtain forms an angle of 0 ^o to 90 ^o with respect to the direction for injecting the steam.

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