KR101950988B1 - Nozzle for jetting mixed-phase fluid - Google Patents

Abstract

The mixed fluid jet nozzle according to an embodiment of the present invention includes a body that separates an inner space from an outer space and has a first space portion and a second space portion that are separated from each other and a body having the first space portion and the second space portion in the inner space, A steam inflow pipe for sucking steam into the second space part, a liquid inflow pipe for sucking the liquid to the lower part of the first space part and the second space part of the inner space, A mixture region in which a liquid is mixed to form a mixed-phase fluid, an injection hole for injecting the mixed fluid into an object to be cleaned, and a spray tube for transferring the mixed fluid to the injection hole, And the width of the vertical cross section includes a section that is narrower than the sum of the widths of the first space portion and the vertical section of the second space portion.

Description

BACKGROUND OF THE INVENTION Field of the Invention [0001] The present invention relates to a nozzle-

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an injection nozzle, and more particularly, to a mixed fluid injection nozzle that injects a mixed fluid.

Background Art [0002] Recently, as a semiconductor device becomes highly integrated, circuit patterns to be implemented on a substrate are also becoming finer. Thus, the pattern on the substrate can cause defective semiconductor devices even with very fine contaminants, and the importance of the cleaning process is becoming more and more important.

In this cleaning process, pure water is generally sprayed through an ultrasonic oscillator, or pure water is sprayed using a high-pressure nozzle. However, if the substrate is cleaned by applying such ultrasonic waves or using only high-pressure pure water, contaminants that are simply adhered to the surface of the substrate can be removed, but they are strongly bonded to the surface of the substrate such as a photoresist, In the case of contaminants, it can not be effectively removed in a short time. Thus, contaminants that have not been removed can reduce the uniformity of the film quality in subsequent processes or can lead to substrate defects.

Accordingly, in order to remove contaminants which can not be removed well, the pressure of the pure water to be sprayed is increased to carry out high-pressure pure water cleaning. However, as the injection pressure increases, the patterns of the fine semiconductor circuits are broken down, which causes a problem that the semiconductor circuit does not operate properly.

Further, even if the injection pressure is increased, since the particle size of the pure water itself is not small enough to be interposed between the patterns of the semiconductor circuit, there is still a problem that there is still a gap between the patterns that can not be cleaned.

Therefore, in place of high-pressure pure water cleaning for spraying high-pressure pure water, three-stage chemical cleaning using ozone (O ₃ ) and plasma, primary physical cleaning using a brush, and secondary cleaning for cleaning remaining residual contaminants Cleaning has been carried out.

However, such a general method has a disadvantage that the manufacturing line must be lengthened. In addition, since the cleaning process is performed through various processes, the cleaning time is increased and the production efficiency is lowered. The substrate may be re-contaminated each time the cleaning is performed between the cleaning and the cleaning.

SUMMARY OF THE INVENTION An object of the present invention is to provide a mixed fluid jetting nozzle which prevents a decrease in production efficiency due to a lengthening of a production line, an increase in cleaning time, and a re-contamination between cleaning and cleaning due to cleaning in a plurality of stages.

It is another object of the present invention to provide a mixed phase fluid injection nozzle that prevents pattern collapse of the substrate due to high pressure pure cleaning.

It is still another object of the present invention to provide a mixed phase fluid jet nozzle capable of cleaning between fine patterns.

According to an aspect of the present invention, there is provided a mixed-phase fluid injection nozzle for separating an inner space from an outer space and including a first space part and a second space part in the inner space, A steam generator comprising: a body; a gas inflow tube for blowing gas into the first space part; a steam inflow tube for drawing steam into the second space part; a liquid inflowing liquid to the lower part of the first space part and the second space part of the internal space A mixed region in which a mixed-phase fluid is formed by mixing an inlet pipe, the gas, the steam, and the liquid; an injector for injecting the mixed fluid into an object to be cleaned; And the width of the vertical cross section of the mixed region includes a section that is narrower than the sum of the widths of the first and second spatial sections in the vertical direction.

In an embodiment, the mixed phase fluid may comprise a mist formed from the liquid.

In an embodiment, the first space portion may include a section where a width of a vertical cross section in a direction toward the injection tube is narrowed.

In an embodiment, the second space portion may include a section where a width of a vertical cross section in a direction toward the injection tube is narrowed.

In an embodiment, the width of the vertical section of the second space portion may be wider than the width of the vertical section of the first space portion.

In an embodiment, the body may have a convex protrusion in a direction toward the inner space in a section where the liquid is introduced from the liquid inflow pipe.

In an embodiment, the projections can reduce the width of the vertical cross section of the mixed region.

In an embodiment, the gas may include at least one of clean dry air (CDA), nitrogen (N ₂ ), oxygen (O ₂ ), and steam.

In an embodiment, the liquid may be pure water or ozonated water.

In an embodiment, the pure water may include at least one of deionized water (DIW) and ultrapure water (UPW).

In an embodiment, the injection port may be a slit-shaped injection port that injects the mixed fluid linearly including an imaginary line perpendicular to the traveling direction of the object.

In one embodiment of the present invention, the apparatus may further include a liquid curtain forming unit located outside the body and located at a front end and a rear end of the ejection opening in the advancing direction of the ejection opening to form a liquid curtain.

In an embodiment, the liquid curtain may comprise at least one of pure water and ozonated water.

In an embodiment, the pure water may include at least one of deionized water (DIW) and ultrapure water (UPW).

The effect of the mixed fluid jet nozzle according to the present invention is as follows.

According to at least one of the embodiments of the present invention, it is possible to increase the production efficiency by increasing the length of the production line, increasing the cleaning time, and reducing the amount of re-contamination between cleaning and cleaning due to cleaning in a plurality of stages.

Further, according to at least one of the embodiments of the present invention, pattern collapse of the substrate due to high-pressure pure cleaning can be prevented.

In addition, according to at least one of the embodiments of the present invention, cleaning between the micronized patterns may be possible.

1 is a vertical cross-sectional view of a mixed fluid jet nozzle according to an embodiment of the present invention.
2 is a perspective view of a mixed fluid jet nozzle according to another embodiment of the present invention.
3 is an enlarged view of a mixed region of steam, gas, and liquid of the mixed-phase fluid injection nozzle according to another embodiment of the present invention.
4 is a vertical cross-sectional view of a mixed fluid jet nozzle according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals are used to designate identical or similar elements, and redundant description thereof will be omitted. The suffix "module" and " part "for the components used in the following description are given or mixed in consideration of ease of specification, and do not have their own meaning or role. In the following description of the embodiments of the present invention, a detailed description of related arts will be omitted when it is determined that the gist of the embodiments disclosed herein may be blurred. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. , ≪ / RTI > equivalents, and alternatives.

Terms including ordinals, such as first, second, etc., may be used to describe various elements, but the elements are not limited to these terms. The terms are used only for the purpose of distinguishing one component from another.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

1 is a vertical cross-sectional view of a mixed fluid jet nozzle according to an embodiment of the present invention.

Hereinafter, the process of steam cleaning through the mixed-phase fluid injection nozzle will be described in detail.

Referring to FIG. 1, the mixed-phase fluid injection nozzle includes a body 100 having a first space 106 and a second space 107 separated from each other by separating an inner space from an outer space, A gas inflow pipe 206 for letting the gas 22 into the first space 106, a steam inflow pipe 204 for sucking the steam 20 into the second space 107, The liquid inflow pipe 202, the gas 22, the steam 20 and the liquid 10 which mix the liquid 10 to the lower portion of the space portion 106 and the second space portion 107 are mixed to form a mixed fluid a mixed region A where mixed-phase fluid is formed, an injection hole 222 for injecting the mixed fluid into an object to be cleaned, and a spray pipe 220 for delivering the mixed fluid to the injection hole 222.

At this time, the width of the vertical cross section of the mixed region A may include a section that is narrower than the sum of the widths of the vertical sections of the first and second spatial sections 106 and 107.

On the other hand, the gas 22 may include at least one of clean air (CDA), nitrogen (N ₂ ), oxygen (O ₂ ), and steam 20, It may be ozonated water. At this time, the pure water may include at least one of deionized water (DIW) not containing ions and ultrapure water (UPW) containing no impurities other than ions and ions.

Particularly, when ozone water is introduced as the liquid 10, it is possible to perform cleaning more effectively than when pure water is used as the liquid 10. A detailed explanation is as follows. First, when injecting the ozone water as the liquid 10 through the liquid inlet pipe 202, the injected mixed fluid 30 may contain the oxygen radical O · and the hydroxy radical OH ·. Here, a radical is a species that is electrically neutral and has a non-covalent electron pair unlike an ion. Therefore, the radical is strong in chemical reactivity because it obtains electrons elsewhere and fills a non-covalent electron pair, or attempts to break the state of a non-covalent electron pair by abandoning the excited electron. In other words, the radicals are strongly chemically reactive and can act as an important factor in the separation of contaminants. Therefore, when the ozone water is introduced as liquid through the liquid inlet pipe 202, the radicals are combined with contaminants present on the surface of the object to be cleaned, thereby providing a cleaning effect for separating and removing contaminants from the object to be cleaned have.

The mixed fluid injection nozzle is configured to inject the gas 22 from the outside of the body 100 into the first space 106 through the gas inlet pipe 206 and the second space 107 through the steam inlet pipe 204. [ The steam 20 can be introduced. Each of the introduced gas 22 and the steam 20 is supplied to the mixing region (lower portion) of the first space portion 106 and the second space portion 107 via the first space portion 106 and the second space portion 107 A). At the same time, the liquid 10 can be introduced into the lower portion of the first space portion 106 and the second space portion 107 through the liquid inflow pipe 202.

Thereafter, in the mixed region A, the gas 22 and the liquid 20 moved from the first space portion 106 and the second space portion 107 and the liquid 10 taken in from the liquid inflow tube 202 , Mixed-phase fluid 30 may be formed.

At this time, the width of the vertical cross section of the mixed region A may include a section that is narrower than the sum of the widths of the vertical sections of the first and second spatial sections 106 and 107.

Each of the first space portion 106 and the second space portion 107 may include a section where the width is narrowed in the direction toward the spray tube 220.

At this time, the width of the vertical section of the second spatial section 107 may be wider than the width of the vertical section of the first spatial section 106. As a result, the mixed phase fluid 30 can contain the steam 20 as a main component rather than the gas 22.

Thereafter, the mixed-phase fluid injection nozzle can inject the mixed fluid 30 formed in the mixed region A through the injection pipe 220 and the injection port 222 into an object to be cleaned. The injected mixed phase fluid 30 can provide a cleaning effect for separating and removing contaminants from the object to be cleaned. The cleaning effect will be described later.

2 is a perspective view of a mixed fluid jet nozzle according to another embodiment of the present invention.

2, the jetting port 222 of the mixed-phase fluid jetting nozzle has a slit-like shape for jetting the mixed fluid 30 in a linear shape including an imaginary line perpendicular to the traveling direction of the object to be cleaned And may be an injection port 222. As a result, the mixed fluid 30 injected from the injection port 222 can be injected in a linear form including an imaginary line perpendicular to the traveling direction of the object, thereby instantaneously cleaning the linear region of the object surface have. As a result, when the mixed phase fluid injection nozzle including the slit-shaped injection port 222 moves with a relative speed with respect to the object to be cleaned in the direction perpendicular to the long axis of the injection port 222 with the passage of time , It is possible to clean a relatively larger area for the same time period as compared with the mixed-phase fluid jetting nozzle for cleaning a spot in an instant.

3 is an enlarged view of a mixed region of steam, gas, and liquid of the mixed-phase fluid injection nozzle according to another embodiment of the present invention.

Hereinafter, the process of mixing the steam 20, the base 22 and the liquid 10 will be described in detail with reference to FIG.

3, the mixed phase fluid 30 may be formed by mixing the liquid 10, the gas 22, and the steam 20 in the mixing section 230 before reaching the injection tube 220. At this time, the liquid 10 may be introduced into the mixing section 230 from the liquid inlet 203 through the liquid inlet pipe. Here, the liquid inlet 203 may have a narrower passage than the liquid inlet pipe.

1, the width of the cross section in the vertical direction of the mixed region A may include a section that is narrower than the sum of the widths of the first and second space sections in the vertical direction. Each of the first space portion 106 and the second space portion 107 may include a section where the width is narrowed in the direction toward the spray tube 220. The gas 22 and the steam 20 can be introduced into the mixing section 230 through the lower portion of each of the first space portion and the second space portion which are narrowed in width.

As a result, each of the liquid 10, the gas 22, and the steam 20 has an increased speed than the speed of movement in each of the liquid inlet pipe, the first space portion and the second space portion, depending on the venturi effect And into the mixing section 230 at a wide spray angle. As a result, each of the liquid 10, the gas 22, and the steam 20 can be evenly scattered in the mixing section 230. Further, the liquid 10 can be misted by the collision of the liquid 10 with the gas 22 of increased speed and the steam 20. As a result, the size of the particles contained in the liquid is generally reduced, and the surface area of the liquid can be increased. For each of the above reasons, each of the liquid 10, the gas 22 and the steam 20 can be mixed more effectively to achieve the mixed phase fluid 30. [

The cleaning effect that separates and removes contaminants from the mixed-phase fluid injection nozzle is as follows. Specifically, there may be a chemical cleaning effect and a physical cleaning effect.

Hereinafter, the chemical cleaning effect will be described in detail.

First, as described above, the liquid 10, the gas 22, and the steam 20 can be introduced into the mixing section 230 and diffused and scattered, respectively, to form the mixed phase fluid 30. In this process, the molecules of the liquid 10, the molecules of the gas 22, and the molecules of the steam 20 actively heat-exchange and phase change and emit latent heat, Vibration may occur. Water molecules (H ₂ O) of the steam 20 and the liquid 10 can receive energy from the sonic vibration and dissociate into hydrogen ions (H ⁺ ) and hydroxyl atom ions (OH ^- ).

Next, the mixed phase fluid 30 containing hydrogen ions and hydroxide atom ions can be injected into the object to be cleaned through the injection pipe and the injection port. Hydrogen ions and hydroxide atomic ions contained in the injected mixed fluid 30 are combined with contaminants present on the surface of the object to be cleaned, and contaminants can be separated from the object.

Thereafter, the separated contaminants can be removed from the object by the pressure of the mixed fluid 30 injected from the injection port.

Hereinafter, the physical cleaning process will be described in detail.

First, as in the chemical cleaning effect, the steam 20 and the water molecule (H ₂ O) of the liquid can receive energy from the sonic vibration and dissociate into hydrogen ions (H ⁺ ) and hydroxyl atom ions (OH ^- ). The process up to this point is the same as the above description and is omitted because it is duplicated. The dissociated ions then release energy to the environment and can recombine back into water molecules.

Next, the mixed phase fluid 30 that releases energy to the periphery may be injected into the object to be cleaned through the injection pipe and the injection port. Then, the energy emitted from the injected mixed fluid (30) is absorbed by the contaminants present on the surface of the object to be cleaned, and the contaminants can be separated from the object.

Thereafter, the separated contaminants can be removed from the object by the pressure of the mixed fluid 30 injected from the injection port.

Such chemical cleaning effect and physical cleaning effect can be attributed to latent heat released through heat exchange and phase change between the molecules of the steam 20 and the molecules of the liquid 10.

On the other hand, the body may have a convex protrusion in a direction toward the inner space in a region where the liquid 10 is introduced from the liquid inflow pipe. The protruding portion narrows the width of the mixing section 230, thereby maximizing the venturi effect in the process of forming the mixed fluid 30. Thus, the liquid 10, the gas 22, and the steam 20 can be mixed more effectively and form the mixed phase fluid 30. As a result, the present invention can more effectively utilize latent heat through heat exchange and phase change between molecules of liquid 10, gas 22 and steam 20, respectively.

4 is a vertical cross-sectional view of a mixed fluid jet nozzle according to another embodiment of the present invention.

4, the mixed-phase fluid jet nozzle may further include a liquid curtain forming part 400 which is located outside the body and in the advancing direction of the jetting port, at the front end and the rear end of the jetting port to form a liquid curtain 405 have.

The liquid curtain forming portion 400 includes a liquid inflow pipe 402 for filling the liquid 4 to form the liquid curtain 405, a curtain-forming first unit 422 for forming the liquid curtain 405, And a second unit 424. The liquid 4 flows into the space formed by the curtain-forming first unit 422 and the curtain-forming second unit 424 through the liquid inflow pipe 402 and flows between the curtain-forming units 422 and 424 And is injected into a curtain-shaped thin film through a thin gap formed at the bottom. Here, the thin film is referred to as a liquid curtain 405.

The liquid curtain 405 can prevent the steam containing the contaminant from being scattered to the object that has already been cleaned or the object to be cleaned after the cleaning is performed.

In addition, the liquid curtain 405, which has reached the object to be cleaned and has formed a water film, floats the contaminants separated from the object on the water film, and the contaminant is removed together with the water film It is eliminated.

In addition, the liquid 4 that is introduced through the liquid inlet pipe 402 may include at least one of pure water or ozonated water. The pure water may include at least one of deionized water (DIW) not containing ions or ultrapure water (UPW) containing no impurities other than ions and ions.

Particularly, when the ozone water is introduced as liquid through the liquid inlet pipe 402, the injected liquid curtain 405 contains the oxygen radical O · and the hydroxy radical OH ·, And chemical contaminants are separated from the object to be cleaned, thereby providing a chemical cleaning effect.

The method of cleaning with the mixed fluid jet nozzle according to the present invention differs from the conventional cleaning method in that only a pure water of a high pressure is sprayed and a mixed fluid including a liquid and a steam at a pressure lower than that of the high pressure pure water is injected, This can be achieved.

First, it is possible to avoid collapsing and crushing of the pattern located on the object to be cleaned. In a general cleaning method of spraying high-pressure pure water, a pattern on a substrate to be cleaned due to a pressure for spraying high-pressure pure water may be crushed or crushed due to impact. However, the cleaning method using the mixed-phase fluid injection nozzle according to the present invention can prevent the pattern on the substrate from being crushed and crushed by not spraying high-pressure pure water.

Second, even when the pattern positioned on the object to be cleaned includes a fine pattern, it can be cleaned between the fine patterns. Recent patterns are getting finer and finer. In a general cleaning method of spraying only pure water, the size of water droplets acting on the contaminants is not small enough to penetrate between the fine patterns.

However, in the cleaning method using the mixed-phase fluid injection nozzle according to the present invention, the size of the cavity generated due to the cavitation is such that the diameter can penetrate between the fine patterns in a unit of micro (10 ^-6 ) It is small enough. Therefore, the cleaning method using the mixed fluid jet nozzle according to the present invention can clean the space between the fine patterns.

Third, the cleaning of a plurality of processes such as one chemical cleaning, one physical cleaning, and second cleaning included in the general cleaning method can be reduced to one injection phase of a 'hot mixed-bed fluid'. Generally, a first chemical cleaning process in which a contaminant of a target to be cleaned is separated from an object to be cleaned, a first physical cleaning process in which the contaminant is separated from the target by absorbing or pushing energy, And the cleaning of the same plural processes are respectively executed.

However, the cleaning method using the mixed-phase fluid jet nozzle according to the present invention can be carried out by including all of the above-mentioned cleaning operations in one step of 'injection of mixed fluid'.

Because of these advantages, the manufacturing line in the cleaning process of the semiconductor manufacturing process can be shortened and maintenance can be facilitated. Thus, the yield can also be improved.

The foregoing detailed description should not be construed in any way as being restrictive and should be considered illustrative. The scope of the present invention should be determined by rational interpretation of the appended claims, and all changes within the scope of equivalents of the present invention are included in the scope of the present invention.

4, 10: liquid
20: Steam
22: Gas
100: Body
101: interior space
106: first space portion
107:
202: liquid inlet pipe
203: liquid inlet
204: steam inlet pipe
206: gas inlet pipe
220: Distributor
222:
230: Mixed section
400: liquid curtain forming portion
405: Liquid curtain
402: liquid inlet pipe
422: curtain forming first unit
424: Curtain forming second unit
A: Mixed area

Claims (14)

A body separating an inner space from the outer space and having a first space part and a second space part separated from each other in the inner space;
A gas inflow pipe for introducing gas into the first space part;
A steam inlet pipe for supplying steam to the second space portion;
A liquid inflow pipe for injecting liquid into the first space portion and the lower portion of the second space portion of the internal space;
A mixed region in which the gas, the steam, and the liquid are mixed to form a mixed-phase fluid;
A jetting port for jetting the mixed fluid to an object to be cleaned; And
And a jetting tube for transmitting the mixed fluid to the jetting port,
The width of the cross section in the vertical direction of the mixed region,
And a width of the second space is smaller than a sum of widths of the first space and the second space,
The first space portion and the second space portion may include a first space portion,
And a space separating portion provided at a length from an upper portion of the body to a predetermined region of the lower portion,
The body,
A first region provided below the space separating portion and having a constant width toward the injection port; And
And a second region formed below the first region and having a width that is narrower than a width of the first region in a direction toward the injection port,
The injection pipe
Wherein the width of the second region is smaller than the width of the second region in the direction of the injection port.
The method according to claim 1,
The mixed fluid,
And a mist formed from the liquid.
The method according to claim 1,
The first space unit may include:
And a section in which the width of the vertical cross section in the direction toward the spray tube is narrowed.
The method according to claim 1,
The second space unit
And a section where the width is narrowed in a direction toward the spray tube.
The method according to claim 1,
The width of the vertical section of the second space portion
Wherein a width of the first space section is larger than a width of a vertical section of the first space section.
The method according to claim 1,
The body,
And a protruding portion protruding in a direction toward the inner space in a section where the liquid is introduced from the liquid inflow pipe.
The method according to claim 6,
The projection
And the width of the cross section in the vertical direction of the mixed region is reduced.
The method according to claim 1,
The gas,
Wherein at least one of air, clean air (CDA), nitrogen (N ₂ ), oxygen (O ₂ ), and steam is contained.
The method according to claim 1,
The liquid,
Pure water or ozone water.
10. The method of claim 9,
The pure water,
And at least one of deionized water (DIW) and ultrapure water (UPW).
The method according to claim 1,
The jetting port
And a slit-shaped injection port for injecting the mixed fluid in a linear shape including an imaginary line perpendicular to a traveling direction of the object.
The method according to claim 1,
Further comprising a liquid curtain-forming portion located outside the body and located at a front end and a rear end of the jetting port in a direction of travel of the jetting port to form a liquid curtain.
13. The method of claim 12,
The liquid curtain,
And at least one of pure water and ozone water.
14. The method of claim 13,
The pure water,
And at least one of deionized water (DIW) and ultrapure water (UPW).

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