KR101881789B1 - 방전램프, 접속용 케이블, 광원장치 및 노광장치 - Google Patents

방전램프, 접속용 케이블, 광원장치 및 노광장치 Download PDF

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Publication number
KR101881789B1
KR101881789B1 KR1020177004663A KR20177004663A KR101881789B1 KR 101881789 B1 KR101881789 B1 KR 101881789B1 KR 1020177004663 A KR1020177004663 A KR 1020177004663A KR 20177004663 A KR20177004663 A KR 20177004663A KR 101881789 B1 KR101881789 B1 KR 101881789B1
Authority
KR
South Korea
Prior art keywords
cable
light source
connection
discharge lamp
source device
Prior art date
Application number
KR1020177004663A
Other languages
English (en)
Korean (ko)
Other versions
KR20170021913A (ko
Inventor
다카유키 기쿠치
Original Assignee
가부시키가이샤 니콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 니콘 filed Critical 가부시키가이샤 니콘
Publication of KR20170021913A publication Critical patent/KR20170021913A/ko
Application granted granted Critical
Publication of KR101881789B1 publication Critical patent/KR101881789B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/56—Cooling arrangements using liquid coolants
    • F21V29/58—Cooling arrangements using liquid coolants characterised by the coolants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/70—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks
    • F21V29/83—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks the elements having apertures, ducts or channels, e.g. heat radiation holes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H01J5/54—Means forming part of the tube or lamps for the purpose of providing electrical connection to it supported by a separate part, e.g. base
    • H01J5/62—Connection of wires protruding from the vessel to connectors carried by the separate part
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H01J61/523—Heating or cooling particular parts of the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
KR1020177004663A 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치 KR101881789B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US90765407P 2007-04-12 2007-04-12
US60/907,654 2007-04-12
PCT/JP2008/056718 WO2008129931A1 (ja) 2007-04-12 2008-04-03 放電ランプ、接続用ケーブル、光源装置、及び露光装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020167004734A Division KR101834803B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020187020801A Division KR101994887B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치

Publications (2)

Publication Number Publication Date
KR20170021913A KR20170021913A (ko) 2017-02-28
KR101881789B1 true KR101881789B1 (ko) 2018-07-25

Family

ID=39875459

Family Applications (8)

Application Number Title Priority Date Filing Date
KR1020167004734A KR101834803B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020177004663A KR101881789B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020147030351A KR101599180B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020187020801A KR101994887B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020207023071A KR102277930B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020197018340A KR102144972B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020217021643A KR20210090288A (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020097000773A KR101549670B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1020167004734A KR101834803B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치

Family Applications After (6)

Application Number Title Priority Date Filing Date
KR1020147030351A KR101599180B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020187020801A KR101994887B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020207023071A KR102277930B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020197018340A KR102144972B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020217021643A KR20210090288A (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치
KR1020097000773A KR101549670B1 (ko) 2007-04-12 2008-04-03 방전램프, 접속용 케이블, 광원장치 및 노광장치

Country Status (5)

Country Link
JP (2) JP5131468B2 (ja)
KR (8) KR101834803B1 (ja)
CN (1) CN101548133B (ja)
TW (2) TWI478205B (ja)
WO (1) WO2008129931A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5131468B2 (ja) * 2007-04-12 2013-01-30 株式会社ニコン 放電ランプ、光源装置、及び露光装置
JP4991834B2 (ja) 2009-12-17 2012-08-01 シャープ株式会社 車両用前照灯
JP5232815B2 (ja) 2010-02-10 2013-07-10 シャープ株式会社 車両用前照灯
US8733996B2 (en) 2010-05-17 2014-05-27 Sharp Kabushiki Kaisha Light emitting device, illuminating device, and vehicle headlamp
JP5053415B2 (ja) * 2010-05-17 2012-10-17 シャープ株式会社 発光装置、照明装置および車両用前照灯
US9816677B2 (en) 2010-10-29 2017-11-14 Sharp Kabushiki Kaisha Light emitting device, vehicle headlamp, illumination device, and laser element
TWI771788B (zh) * 2014-03-28 2022-07-21 日商尼康股份有限公司 光源裝置
DE102016102187B3 (de) * 2016-02-09 2017-08-10 Heraeus Noblelight Gmbh Vorrichtung für die Behandlung eines Substrats mit UV-Strahlung und Verwendung der Vorrichtung
KR102334956B1 (ko) 2018-11-01 2021-12-02 주식회사 엘지화학 차량용 램프 및 이의 제조 방법
JP7178240B2 (ja) * 2018-11-14 2022-11-25 東京エレクトロン株式会社 光照射装置

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Also Published As

Publication number Publication date
JP5131468B2 (ja) 2013-01-30
KR102277930B1 (ko) 2021-07-16
TWI411003B (zh) 2013-10-01
JP2008262910A (ja) 2008-10-30
KR20160025634A (ko) 2016-03-08
KR101994887B1 (ko) 2019-07-02
KR20190077613A (ko) 2019-07-03
KR20100014216A (ko) 2010-02-10
KR101599180B1 (ko) 2016-03-03
TW200905719A (en) 2009-02-01
JP2012253041A (ja) 2012-12-20
TWI478205B (zh) 2015-03-21
KR101834803B1 (ko) 2018-03-06
KR20200097819A (ko) 2020-08-19
KR20180086282A (ko) 2018-07-30
KR101549670B1 (ko) 2015-09-03
CN101548133A (zh) 2009-09-30
WO2008129931A1 (ja) 2008-10-30
KR20210090288A (ko) 2021-07-19
KR20170021913A (ko) 2017-02-28
KR102144972B1 (ko) 2020-08-14
TW201308393A (zh) 2013-02-16
CN101548133B (zh) 2014-03-12
KR20140141694A (ko) 2014-12-10
JP5569824B2 (ja) 2014-08-13

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