KR101687423B1 - 가공 장치 - Google Patents

가공 장치 Download PDF

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Publication number
KR101687423B1
KR101687423B1 KR1020110073109A KR20110073109A KR101687423B1 KR 101687423 B1 KR101687423 B1 KR 101687423B1 KR 1020110073109 A KR1020110073109 A KR 1020110073109A KR 20110073109 A KR20110073109 A KR 20110073109A KR 101687423 B1 KR101687423 B1 KR 101687423B1
Authority
KR
South Korea
Prior art keywords
workpiece
turning
cooling water
chuck table
bite
Prior art date
Application number
KR1020110073109A
Other languages
English (en)
Korean (ko)
Other versions
KR20120011809A (ko
Inventor
신이치 나미오카
마사유키 가와세
료지 다니모토
Original Assignee
가부시기가이샤 디스코
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Publication date
Application filed by 가부시기가이샤 디스코 filed Critical 가부시기가이샤 디스코
Publication of KR20120011809A publication Critical patent/KR20120011809A/ko
Application granted granted Critical
Publication of KR101687423B1 publication Critical patent/KR101687423B1/ko

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Turning (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Milling Processes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1020110073109A 2010-07-28 2011-07-22 가공 장치 KR101687423B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010169085A JP5695359B2 (ja) 2010-07-28 2010-07-28 加工装置
JPJP-P-2010-169085 2010-07-28

Publications (2)

Publication Number Publication Date
KR20120011809A KR20120011809A (ko) 2012-02-08
KR101687423B1 true KR101687423B1 (ko) 2016-12-19

Family

ID=45542720

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110073109A KR101687423B1 (ko) 2010-07-28 2011-07-22 가공 장치

Country Status (4)

Country Link
JP (1) JP5695359B2 (zh)
KR (1) KR101687423B1 (zh)
CN (1) CN102343444B (zh)
TW (1) TWI546876B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013233629A (ja) * 2012-05-10 2013-11-21 Disco Corp バイト切削装置
CN106181400B (zh) * 2016-06-23 2018-05-08 慈溪市多邦电器有限公司 一种用于千斤顶手持杆自动打磨设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000084790A (ja) * 1998-09-08 2000-03-28 Ekoregu:Kk 工作加工方法およびそれに用いる霧状体供給装置
JP2005327838A (ja) * 2004-05-13 2005-11-24 Disco Abrasive Syst Ltd 板状物に形成された電極の加工装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4829859A (en) * 1986-08-29 1989-05-16 Ulticon Systems, Inc. Method of high speed machining
JPH0425309A (ja) * 1990-05-18 1992-01-29 Genichi Sato 切削方法およびそれに用いる装置
JP4216565B2 (ja) * 2002-10-28 2009-01-28 株式会社ディスコ 切削装置
JP4837973B2 (ja) * 2005-10-13 2011-12-14 株式会社ディスコ 切削ブレードの交換装置
CN201132274Y (zh) * 2007-12-26 2008-10-15 沈阳机床股份有限公司钣焊件厂 多功能机床冷却箱
JP2009285799A (ja) * 2008-05-30 2009-12-10 Disco Abrasive Syst Ltd 切削装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000084790A (ja) * 1998-09-08 2000-03-28 Ekoregu:Kk 工作加工方法およびそれに用いる霧状体供給装置
JP2005327838A (ja) * 2004-05-13 2005-11-24 Disco Abrasive Syst Ltd 板状物に形成された電極の加工装置

Also Published As

Publication number Publication date
TW201209950A (en) 2012-03-01
TWI546876B (zh) 2016-08-21
KR20120011809A (ko) 2012-02-08
CN102343444B (zh) 2015-12-16
JP5695359B2 (ja) 2015-04-01
JP2012030290A (ja) 2012-02-16
CN102343444A (zh) 2012-02-08

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