KR101629984B1 - 광전 소자 제조 방법 및 광전 소자 - Google Patents

광전 소자 제조 방법 및 광전 소자 Download PDF

Info

Publication number
KR101629984B1
KR101629984B1 KR1020117000338A KR20117000338A KR101629984B1 KR 101629984 B1 KR101629984 B1 KR 101629984B1 KR 1020117000338 A KR1020117000338 A KR 1020117000338A KR 20117000338 A KR20117000338 A KR 20117000338A KR 101629984 B1 KR101629984 B1 KR 101629984B1
Authority
KR
South Korea
Prior art keywords
layer
partial
layer sequence
sequence
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020117000338A
Other languages
English (en)
Korean (ko)
Other versions
KR20110030542A (ko
Inventor
패트릭 로드
마틴 스트라스부르그
칼 엔글
루츠 호펠
Original Assignee
오스람 옵토 세미컨덕터스 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오스람 옵토 세미컨덕터스 게엠베하 filed Critical 오스람 옵토 세미컨덕터스 게엠베하
Publication of KR20110030542A publication Critical patent/KR20110030542A/ko
Application granted granted Critical
Publication of KR101629984B1 publication Critical patent/KR101629984B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/83—Electrodes
    • H10H20/831—Electrodes characterised by their shape
    • H10H20/8312—Electrodes characterised by their shape extending at least partially through the bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/815—Bodies having stress relaxation structures, e.g. buffer layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/814—Bodies having reflecting means, e.g. semiconductor Bragg reflectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/816—Bodies having carrier transport control structures, e.g. highly-doped semiconductor layers or current-blocking structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
    • H10H20/82—Roughened surfaces, e.g. at the interface between epitaxial layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/013—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
    • H10H20/0133—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials
    • H10H20/01335—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials with a substrate not being Group III-V materials the light-emitting regions comprising nitride materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/018—Bonding of wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07541—Controlling the environment, e.g. atmosphere composition or temperature
    • H10W72/07551—Controlling the environment, e.g. atmosphere composition or temperature characterised by changes in properties of the bond wires during the connecting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires

Landscapes

  • Led Devices (AREA)
  • Photovoltaic Devices (AREA)
KR1020117000338A 2008-06-27 2009-06-09 광전 소자 제조 방법 및 광전 소자 Active KR101629984B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008030584.7 2008-06-27
DE102008030584A DE102008030584A1 (de) 2008-06-27 2008-06-27 Verfahren zur Herstellung eines optoelektronischen Bauelementes und optoelektronisches Bauelement

Publications (2)

Publication Number Publication Date
KR20110030542A KR20110030542A (ko) 2011-03-23
KR101629984B1 true KR101629984B1 (ko) 2016-06-13

Family

ID=41211955

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117000338A Active KR101629984B1 (ko) 2008-06-27 2009-06-09 광전 소자 제조 방법 및 광전 소자

Country Status (8)

Country Link
US (2) US8283191B2 (https=)
EP (1) EP2289115B1 (https=)
JP (1) JP5520942B2 (https=)
KR (1) KR101629984B1 (https=)
CN (2) CN103280497B (https=)
DE (1) DE102008030584A1 (https=)
TW (1) TWI390773B (https=)
WO (1) WO2009155897A1 (https=)

Families Citing this family (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8471288B2 (en) * 2009-09-15 2013-06-25 Toyoda Gosei Co., Ltd. Group III nitride semiconductor light-emitting device including an auxiliary electrode in contact with a back surface of an n-type layer
KR101039999B1 (ko) * 2010-02-08 2011-06-09 엘지이노텍 주식회사 반도체 발광소자 및 그 제조방법
KR100986560B1 (ko) * 2010-02-11 2010-10-07 엘지이노텍 주식회사 발광소자 및 그 제조방법
DE102010025320B4 (de) * 2010-06-28 2021-11-11 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronisches Bauelement und Verfahren zu dessen Herstellung
KR101252032B1 (ko) 2010-07-08 2013-04-10 삼성전자주식회사 반도체 발광소자 및 이의 제조방법
KR101761385B1 (ko) 2010-07-12 2017-08-04 엘지이노텍 주식회사 발광 소자
KR101692410B1 (ko) * 2010-07-26 2017-01-03 삼성전자 주식회사 발광소자 및 그 제조방법
DE102010033137A1 (de) 2010-08-03 2012-02-09 Osram Opto Semiconductors Gmbh Leuchtdiodenchip
DE102010044986A1 (de) * 2010-09-10 2012-03-15 Osram Opto Semiconductors Gmbh Leuchtdiodenchip und Verfahren zur Herstellung eines Leuchtdiodenchips
KR101114191B1 (ko) * 2010-09-17 2012-03-13 엘지이노텍 주식회사 발광소자
KR101761386B1 (ko) * 2010-10-06 2017-07-25 엘지이노텍 주식회사 발광 소자
KR101730152B1 (ko) * 2010-10-06 2017-04-25 엘지이노텍 주식회사 발광 소자
EP2442374B1 (en) 2010-10-12 2016-09-21 LG Innotek Co., Ltd. Light emitting device
DE102011011140A1 (de) 2011-02-14 2012-08-16 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip und Verfahren zur Herstellung von optoelektronischen Halbleiterchips
JP5050109B2 (ja) 2011-03-14 2012-10-17 株式会社東芝 半導体発光素子
DE102011016302B4 (de) * 2011-04-07 2026-01-15 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronischer Halbleiterchip
TWI434405B (zh) * 2011-06-07 2014-04-11 國立交通大學 具有積體電路與發光二極體之異質整合結構及其製作方法
KR101880445B1 (ko) * 2011-07-14 2018-07-24 엘지이노텍 주식회사 발광소자, 발광소자 제조방법, 발광소자 패키지, 및 라이트 유닛
CN103000777B (zh) * 2011-09-15 2018-08-07 晶元光电股份有限公司 发光元件
KR101827975B1 (ko) * 2011-10-10 2018-03-29 엘지이노텍 주식회사 발광소자
CN103050593A (zh) * 2011-10-17 2013-04-17 大连美明外延片科技有限公司 AlGaInP四元系发光二极管外延片及其生长方法
EP2597687B1 (en) * 2011-11-23 2016-02-03 Imec Method for producing a GaN LED device
CN110246941A (zh) * 2012-03-19 2019-09-17 亮锐控股有限公司 在硅衬底上生长的发光器件
JP5740350B2 (ja) * 2012-05-31 2015-06-24 株式会社東芝 半導体発光素子
CN104350619B (zh) 2012-06-07 2017-08-04 皇家飞利浦有限公司 具有在晶片水平形成的模制化合物中的金属柱的芯片级发光器件
DE102012105176B4 (de) * 2012-06-14 2021-08-12 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronischer Halbleiterchip
TW201401552A (zh) * 2012-06-19 2014-01-01 High Power Optoelectronics Inc 發光二極體的熱應力釋放結構
US8552457B1 (en) * 2012-08-07 2013-10-08 High Power Opto. Inc. Thermal stress releasing structure of a light-emitting diode
JP5881560B2 (ja) 2012-08-30 2016-03-09 株式会社東芝 半導体発光装置及びその製造方法
US9082692B2 (en) * 2013-01-02 2015-07-14 Micron Technology, Inc. Engineered substrate assemblies with epitaxial templates and related systems, methods, and devices
DE102013103409A1 (de) * 2013-04-05 2014-10-09 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip und optoelektronisches Modul
KR102188495B1 (ko) 2014-01-21 2020-12-08 삼성전자주식회사 반도체 발광소자의 제조 방법
JP5788046B2 (ja) * 2014-04-03 2015-09-30 株式会社東芝 半導体発光素子
KR102163967B1 (ko) * 2014-04-16 2020-10-12 엘지이노텍 주식회사 발광소자 및 조명시스템
KR102163956B1 (ko) * 2014-04-07 2020-10-12 엘지이노텍 주식회사 발광소자 및 조명시스템
EP3131129B1 (en) * 2014-04-07 2020-07-15 LG Innotek Co., Ltd. Light-emitting element
KR102153125B1 (ko) * 2014-06-11 2020-09-07 엘지이노텍 주식회사 발광소자 및 조명시스템
DE102014108373A1 (de) 2014-06-13 2015-12-17 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip
DE102015105509A1 (de) * 2015-04-10 2016-10-13 Osram Opto Semiconductors Gmbh Bauelement und Verfahren zur Herstellung eines Bauelements
DE102015111046B9 (de) * 2015-07-08 2022-09-22 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronischer Halbleiterchip
KR102432015B1 (ko) * 2015-11-09 2022-08-12 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 자외선 발광소자 및 발광소자 패키지
CN105470359B (zh) * 2015-12-31 2018-05-08 天津三安光电有限公司 具有内嵌式电极结构的高功率led结构及其制备方法
DE102017103041B4 (de) * 2017-02-15 2023-12-14 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung einer Vielzahl von optoelektronischen Bauelementen und optoelektronisches Bauelement
US11282981B2 (en) 2017-11-27 2022-03-22 Seoul Viosys Co., Ltd. Passivation covered light emitting unit stack
US10892296B2 (en) * 2017-11-27 2021-01-12 Seoul Viosys Co., Ltd. Light emitting device having commonly connected LED sub-units
US11527519B2 (en) 2017-11-27 2022-12-13 Seoul Viosys Co., Ltd. LED unit for display and display apparatus having the same
US10892297B2 (en) 2017-11-27 2021-01-12 Seoul Viosys Co., Ltd. Light emitting diode (LED) stack for a display
US12100696B2 (en) 2017-11-27 2024-09-24 Seoul Viosys Co., Ltd. Light emitting diode for display and display apparatus having the same
US10748881B2 (en) 2017-12-05 2020-08-18 Seoul Viosys Co., Ltd. Light emitting device with LED stack for display and display apparatus having the same
US10886327B2 (en) 2017-12-14 2021-01-05 Seoul Viosys Co., Ltd. Light emitting stacked structure and display device having the same
US11552057B2 (en) 2017-12-20 2023-01-10 Seoul Viosys Co., Ltd. LED unit for display and display apparatus having the same
US11522006B2 (en) 2017-12-21 2022-12-06 Seoul Viosys Co., Ltd. Light emitting stacked structure and display device having the same
US11552061B2 (en) 2017-12-22 2023-01-10 Seoul Viosys Co., Ltd. Light emitting device with LED stack for display and display apparatus having the same
US11114499B2 (en) 2018-01-02 2021-09-07 Seoul Viosys Co., Ltd. Display device having light emitting stacked structure
US10784240B2 (en) 2018-01-03 2020-09-22 Seoul Viosys Co., Ltd. Light emitting device with LED stack for display and display apparatus having the same
DE102019106521A1 (de) * 2019-03-14 2020-09-17 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Aufwachsstruktur für ein Strahlung emittierendes Halbleiterbauelement und Strahlung emittierendes Halbleiterbauelement
US11296266B2 (en) * 2019-11-26 2022-04-05 Facebook Technologies, Llc LED array having transparent substrate with conductive layer for enhanced current spread
EP4419949B1 (en) * 2022-12-30 2026-01-21 Shanghai United Imaging Healthcare Co., Ltd. Photon-counting detectors for detecting radiation rays

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070197004A1 (en) 2006-02-23 2007-08-23 Armin Dadgar Nitride semiconductor component and process for its production

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6121638A (en) * 1995-09-12 2000-09-19 Kabushiki Kaisha Toshiba Multi-layer structured nitride-based semiconductor devices
US5763941A (en) * 1995-10-24 1998-06-09 Tessera, Inc. Connection component with releasable leads
DE59814431D1 (de) 1997-09-29 2010-03-25 Osram Opto Semiconductors Gmbh Halbleiterlichtquelle und Verfahren zu ihrer Herstellung
US6465744B2 (en) * 1998-03-27 2002-10-15 Tessera, Inc. Graded metallic leads for connection to microelectronic elements
EP2270875B1 (de) 2000-04-26 2018-01-10 OSRAM Opto Semiconductors GmbH Strahlungsmittierendes Halbleiterbauelement und dessen Herstellungsverfahren
DE10020464A1 (de) * 2000-04-26 2001-11-08 Osram Opto Semiconductors Gmbh Strahlungsemittierendes Halbleiterbauelement auf GaN-Basis
US20020017652A1 (en) 2000-08-08 2002-02-14 Stefan Illek Semiconductor chip for optoelectronics
DE10147886B4 (de) * 2001-09-28 2006-07-13 Osram Opto Semiconductors Gmbh Lumineszenzdiode mit vergrabenem Kontakt und Herstellungsverfahren
US6828596B2 (en) * 2002-06-13 2004-12-07 Lumileds Lighting U.S., Llc Contacting scheme for large and small area semiconductor light emitting flip chip devices
US7115896B2 (en) * 2002-12-04 2006-10-03 Emcore Corporation Semiconductor structures for gallium nitride-based devices
US7230292B2 (en) * 2003-08-05 2007-06-12 Micron Technology, Inc. Stud electrode and process for making same
DE102005007601B4 (de) * 2004-02-20 2023-03-23 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelektronisches Bauelement, Vorrichtung mit einer Mehrzahl optoelektronischer Bauelemente und Verfahren zur Herstellung eines optoelektronischen Bauelements
US20050205883A1 (en) * 2004-03-19 2005-09-22 Wierer Jonathan J Jr Photonic crystal light emitting device
DE102005016592A1 (de) * 2004-04-14 2005-11-24 Osram Opto Semiconductors Gmbh Leuchtdiodenchip
WO2006035664A1 (ja) * 2004-09-27 2006-04-06 Matsushita Electric Industrial Co., Ltd. 半導体発光素子、その製造方法及びその実装方法、並びに発光装置
JP4826703B2 (ja) * 2004-09-29 2011-11-30 サンケン電気株式会社 半導体素子の形成に使用するための板状基体
US20060124956A1 (en) 2004-12-13 2006-06-15 Hui Peng Quasi group III-nitride substrates and methods of mass production of the same
US7413918B2 (en) * 2005-01-11 2008-08-19 Semileds Corporation Method of making a light emitting diode
CN100372137C (zh) 2005-05-27 2008-02-27 晶能光电（江西）有限公司 具有上下电极结构的铟镓铝氮发光器件及其制造方法
DE102006008929A1 (de) * 2006-02-23 2007-08-30 Azzurro Semiconductors Ag Nitridhalbleiter-Bauelement und Verfahren zu seiner Herstellung
EP1883141B1 (de) 2006-07-27 2017-05-24 OSRAM Opto Semiconductors GmbH LD oder LED mit Übergitter-Mantelschicht
DE102006046237A1 (de) * 2006-07-27 2008-01-31 Osram Opto Semiconductors Gmbh Halbleiter-Schichtstruktur mit Übergitter
DE102006043400A1 (de) * 2006-09-15 2008-03-27 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip
US7697584B2 (en) * 2006-10-02 2010-04-13 Philips Lumileds Lighting Company, Llc Light emitting device including arrayed emitters defined by a photonic crystal

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070197004A1 (en) 2006-02-23 2007-08-23 Armin Dadgar Nitride semiconductor component and process for its production

Also Published As

Publication number Publication date
TW201004000A (en) 2010-01-16
US20120322186A1 (en) 2012-12-20
EP2289115A1 (de) 2011-03-02
US20110104836A1 (en) 2011-05-05
CN102067343A (zh) 2011-05-18
DE102008030584A1 (de) 2009-12-31
US8283191B2 (en) 2012-10-09
JP2011525708A (ja) 2011-09-22
TWI390773B (zh) 2013-03-21
CN103280497B (zh) 2016-08-03
CN102067343B (zh) 2013-05-08
CN103280497A (zh) 2013-09-04
US8956897B2 (en) 2015-02-17
EP2289115B1 (de) 2017-08-09
JP5520942B2 (ja) 2014-06-11
KR20110030542A (ko) 2011-03-23
WO2009155897A1 (de) 2009-12-30

Similar Documents

Publication Publication Date Title
KR101629984B1 (ko) 광전 소자 제조 방법 및 광전 소자
US9576951B2 (en) Devices formed from a non-polar plane of a crystalline material and method of making the same
US20110017972A1 (en) Light emitting structure with integral reverse voltage protection
EP2816614A1 (en) Semiconductor light emitting device and method of fabricating the same
US9130115B2 (en) Light-emitting diode with textured substrate
JP7447151B2 (ja) パッシベーション層を含む発光ダイオード前駆体
KR20130111577A (ko) Ⅲ족 질화물 발광 소자
US7772600B2 (en) Light emitting device having zener diode therein and method of fabricating the same
CN115566122A (zh) 用于减少的非辐射侧壁复合的led结构
US20210098432A1 (en) Optoelectronic device comprising a phosphor plate and method of manufacturing the optoelectronic device
KR20080000784A (ko) 제너 다이오드를 구비하는 발광소자 및 그 제조 방법
US12349506B2 (en) Preparation method for resonant cavity light-emitting diode
KR100700531B1 (ko) 발광 다이오드 및 그 제조 방법
KR20080002163A (ko) 제너 다이오드를 구비하는 발광 다이오드 패키지

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20110106

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20140609

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20150821

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20160328

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20160607

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20160607

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20190530

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20190530

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20210527

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20220530

Start annual number: 7

End annual number: 7

PR1001 Payment of annual fee

Payment date: 20240530

Start annual number: 9

End annual number: 9