KR101617231B1 - 전류 흐름에 대한 가요성 접속부의 불연속성을 검출하는 장치 및 그 방법 - Google Patents

전류 흐름에 대한 가요성 접속부의 불연속성을 검출하는 장치 및 그 방법 Download PDF

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KR101617231B1
KR101617231B1 KR1020117025584A KR20117025584A KR101617231B1 KR 101617231 B1 KR101617231 B1 KR 101617231B1 KR 1020117025584 A KR1020117025584 A KR 1020117025584A KR 20117025584 A KR20117025584 A KR 20117025584A KR 101617231 B1 KR101617231 B1 KR 101617231B1
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flexible connector
current flow
coil
current
connector
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KR20120020104A (ko
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세예드 자파르 자파리안-테라니
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램 리써치 코포레이션
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/52—Testing for short-circuits, leakage current or ground faults
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/54—Testing for continuity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Drying Of Semiconductors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
KR1020117025584A 2009-04-28 2010-04-26 전류 흐름에 대한 가요성 접속부의 불연속성을 검출하는 장치 및 그 방법 Active KR101617231B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/431,593 US8466697B2 (en) 2009-04-28 2009-04-28 Arrangements for detecting discontinuity of flexible connections for current flow and methods thereof
US12/431,593 2009-04-28

Publications (2)

Publication Number Publication Date
KR20120020104A KR20120020104A (ko) 2012-03-07
KR101617231B1 true KR101617231B1 (ko) 2016-05-02

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KR1020117025584A Active KR101617231B1 (ko) 2009-04-28 2010-04-26 전류 흐름에 대한 가요성 접속부의 불연속성을 검출하는 장치 및 그 방법

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US (1) US8466697B2 (enExample)
JP (1) JP5781064B2 (enExample)
KR (1) KR101617231B1 (enExample)
CN (2) CN102415221B (enExample)
SG (1) SG175164A1 (enExample)
TW (1) TWI489117B (enExample)
WO (1) WO2010129229A2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
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KR102018733B1 (ko) 2013-06-13 2019-09-06 삼성디스플레이 주식회사 플렉서블 표시장치
CN105116271B (zh) * 2015-08-07 2019-04-26 深圳一电航空技术有限公司 桨叶检测装置及方法、桨叶组件、飞行器及其控制方法
KR102417178B1 (ko) * 2015-09-03 2022-07-05 삼성전자주식회사 마이크로파 탐침, 그 탐침을 구비한 플라즈마 모니터링 시스템, 및 그 시스템을 이용한 반도체 소자 제조방법
US20210073610A1 (en) * 2017-12-27 2021-03-11 Semiconductor Energy Laboratory Co., Ltd. Thin film manufacturing apparatus and thin film manufacturing apparatus using neural network
CN115825529B (zh) * 2022-12-25 2023-11-17 北京屹唐半导体科技股份有限公司 射频探头、射频匹配器、射频电源及射频测量仪

Citations (1)

* Cited by examiner, † Cited by third party
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JP2002202328A (ja) * 2000-12-28 2002-07-19 Japan System Engineering Kk 磁界型電流センサ

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CA2100135C (en) * 1992-07-10 1997-11-04 Makoto Kawakami Dc current sensor
JPH09257861A (ja) * 1996-03-21 1997-10-03 Toshiba Corp 心線損傷検出装置
JPH1079350A (ja) 1996-09-04 1998-03-24 Kokusai Electric Co Ltd プラズマ処理装置
US6221221B1 (en) * 1998-11-16 2001-04-24 Applied Materials, Inc. Apparatus for providing RF return current path control in a semiconductor wafer processing system
US7271580B1 (en) * 2001-10-26 2007-09-18 Schweitzer Engineering Laboratories, Inc. Apparatus and method for programmable trip settings in a faulted circuit indicator
JP3773189B2 (ja) 2002-04-24 2006-05-10 独立行政法人科学技術振興機構 窓型プローブ、プラズマ監視装置、及び、プラズマ処理装置
KR100483355B1 (ko) 2002-11-14 2005-04-15 학교법인 성균관대학 자장강화된 외장형 선형 안테나를 구비하는 대면적 처리용유도 결합 플라즈마 소오스
US6876205B2 (en) * 2003-06-06 2005-04-05 Advanced Energy Industries, Inc. Stored energy arc detection and arc reduction circuit
US7145345B2 (en) * 2003-12-23 2006-12-05 General Electric Company Current transformers for partial discharge detection on aircraft cables and wires
JP4359521B2 (ja) * 2004-02-20 2009-11-04 東京エレクトロン株式会社 プラズマ処理装置及びその制御方法
US8004293B2 (en) * 2006-11-20 2011-08-23 Applied Materials, Inc. Plasma processing chamber with ground member integrity indicator and method for using the same
US7972470B2 (en) * 2007-05-03 2011-07-05 Applied Materials, Inc. Asymmetric grounding of rectangular susceptor
US8343305B2 (en) 2007-09-04 2013-01-01 Lam Research Corporation Method and apparatus for diagnosing status of parts in real time in plasma processing equipment

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2002202328A (ja) * 2000-12-28 2002-07-19 Japan System Engineering Kk 磁界型電流センサ

Also Published As

Publication number Publication date
WO2010129229A2 (en) 2010-11-11
CN102415221B (zh) 2014-11-19
US8466697B2 (en) 2013-06-18
CN102415221A (zh) 2012-04-11
WO2010129229A3 (en) 2011-02-03
KR20120020104A (ko) 2012-03-07
CN104360211A (zh) 2015-02-18
US20100271040A1 (en) 2010-10-28
TW201126179A (en) 2011-08-01
JP2012525683A (ja) 2012-10-22
SG175164A1 (en) 2011-11-28
TWI489117B (zh) 2015-06-21
JP5781064B2 (ja) 2015-09-16
CN104360211B (zh) 2017-11-24

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