KR101576375B1 - 구동 기구 및 로봇 - Google Patents

구동 기구 및 로봇 Download PDF

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Publication number
KR101576375B1
KR101576375B1 KR1020140076573A KR20140076573A KR101576375B1 KR 101576375 B1 KR101576375 B1 KR 101576375B1 KR 1020140076573 A KR1020140076573 A KR 1020140076573A KR 20140076573 A KR20140076573 A KR 20140076573A KR 101576375 B1 KR101576375 B1 KR 101576375B1
Authority
KR
South Korea
Prior art keywords
air
air supply
fan
robot
exhaust fan
Prior art date
Application number
KR1020140076573A
Other languages
English (en)
Korean (ko)
Other versions
KR20150001639A (ko
Inventor
다이스케 나미에
히사야 이노우에
사토시 스에요시
Original Assignee
가부시키가이샤 야스카와덴키
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 가부시키가이샤 야스카와덴키 filed Critical 가부시키가이샤 야스카와덴키
Publication of KR20150001639A publication Critical patent/KR20150001639A/ko
Application granted granted Critical
Publication of KR101576375B1 publication Critical patent/KR101576375B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0054—Cooling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020140076573A 2013-06-25 2014-06-23 구동 기구 및 로봇 KR101576375B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013132595A JP5817787B2 (ja) 2013-06-25 2013-06-25 ロボット
JPJP-P-2013-132595 2013-06-25

Publications (2)

Publication Number Publication Date
KR20150001639A KR20150001639A (ko) 2015-01-06
KR101576375B1 true KR101576375B1 (ko) 2015-12-09

Family

ID=51856267

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140076573A KR101576375B1 (ko) 2013-06-25 2014-06-23 구동 기구 및 로봇

Country Status (4)

Country Link
JP (1) JP5817787B2 (ja)
KR (1) KR101576375B1 (ja)
CN (2) CN203936920U (ja)
TW (1) TWI546171B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5817787B2 (ja) * 2013-06-25 2015-11-18 株式会社安川電機 ロボット
JP6730332B2 (ja) * 2016-01-30 2020-07-29 ライフロボティクス株式会社 ロボットアーム機構
JP6444946B2 (ja) 2016-06-23 2018-12-26 ファナック株式会社 ロボット
JP7140846B2 (ja) * 2018-12-28 2022-09-21 ヤマハ発動機株式会社 多関節ロボット
WO2021193240A1 (ja) * 2020-03-23 2021-09-30 川崎重工業株式会社 冷却媒体流路体、冷却装置、ロボット、及び冷却装置のロボットへの取り付け方法
JP2021146480A (ja) * 2020-03-23 2021-09-27 川崎重工業株式会社 冷却装置、ロボット、及び冷却装置のロボットへの取り付け方法
JP2021146481A (ja) * 2020-03-23 2021-09-27 川崎重工業株式会社 ロボット及び冷却装置のロボットへの取り付け方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60127996A (ja) * 1983-12-15 1985-07-08 松下電器産業株式会社 工業用ロボツトの塵埃飛散防止装置
JPH0413595A (ja) * 1990-05-01 1992-01-17 Mitsubishi Electric Corp クリーンロボット
JP2007283436A (ja) * 2006-04-17 2007-11-01 Nachi Fujikoshi Corp ロボット、ロボットシステム及びハンド装置の姿勢制御方法
JP5387622B2 (ja) * 2011-06-17 2014-01-15 株式会社安川電機 搬送ロボット
JP5500206B2 (ja) * 2012-06-01 2014-05-21 株式会社安川電機 搬送ロボットおよび搬送ロボットを備えた局所クリーン装置
JP5817787B2 (ja) * 2013-06-25 2015-11-18 株式会社安川電機 ロボット

Also Published As

Publication number Publication date
JP2015006711A (ja) 2015-01-15
JP5817787B2 (ja) 2015-11-18
CN203936920U (zh) 2014-11-12
KR20150001639A (ko) 2015-01-06
CN104249377B (zh) 2016-09-28
TW201515788A (zh) 2015-05-01
TWI546171B (zh) 2016-08-21
CN104249377A (zh) 2014-12-31

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