KR101575833B1 - 전자 부품 및/또는 캐리어를 배출 장치에 대하여 위치 결정하기 위한 장치 및 방법 - Google Patents

전자 부품 및/또는 캐리어를 배출 장치에 대하여 위치 결정하기 위한 장치 및 방법 Download PDF

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KR101575833B1
KR101575833B1 KR1020147001173A KR20147001173A KR101575833B1 KR 101575833 B1 KR101575833 B1 KR 101575833B1 KR 1020147001173 A KR1020147001173 A KR 1020147001173A KR 20147001173 A KR20147001173 A KR 20147001173A KR 101575833 B1 KR101575833 B1 KR 101575833B1
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electronic component
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discharge device
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KR20140041754A (ko
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울라디미르 프라카펜카
라이너 미엘리히
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뮐바우어 게엠베하 운트 콤파니 카게
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02—Feeding of components
    • H05K13/021—Loading or unloading of containers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02—Feeding of components
    • H05K13/022—Feeding of components with orientation of the elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0442—Apparatus for placing on an insulating substrate, e.g. tape

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Supply And Installment Of Electrical Components (AREA)
KR1020147001173A 2011-06-15 2012-06-12 전자 부품 및/또는 캐리어를 배출 장치에 대하여 위치 결정하기 위한 장치 및 방법 Active KR101575833B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011104225.7 2011-06-15
DE102011104225.7A DE102011104225B4 (de) 2011-06-15 2011-06-15 Vorrichtung und Verfahren zum Positionieren eines elektronischen Bauteils und / oder eines Trägers relativ zu einer Ausstoßeinrichtung
PCT/EP2012/002482 WO2012171633A1 (de) 2011-06-15 2012-06-12 Vorrichtung und verfahren zum positionieren eines elektronischen bauteils und/oder eines trägers relativ zu einer ausstosseinrichtung

Publications (2)

Publication Number Publication Date
KR20140041754A KR20140041754A (ko) 2014-04-04
KR101575833B1 true KR101575833B1 (ko) 2015-12-08

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Country Link
US (1) US8948905B2 (enExample)
EP (1) EP2721635B1 (enExample)
JP (1) JP5886948B2 (enExample)
KR (1) KR101575833B1 (enExample)
CN (1) CN103843125B (enExample)
DE (1) DE102011104225B4 (enExample)
MY (1) MY185205A (enExample)
WO (1) WO2012171633A1 (enExample)

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US9633883B2 (en) 2015-03-20 2017-04-25 Rohinni, LLC Apparatus for transfer of semiconductor devices
DE102015013500A1 (de) * 2015-10-16 2017-04-20 Mühlbauer Gmbh & Co. Kg Bildgebender Sensor für eine Bauteilhandhabungsvorrichtung
DE102015016763B3 (de) 2015-12-23 2017-03-30 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zum Positionieren und Übertragen auf einem Substrat bereitgestellter elektronischer Bauteile
JP6420806B2 (ja) * 2016-01-07 2018-11-07 白光株式会社 加熱機器及び電子部品の取り外し方法
DE102016009765B4 (de) 2016-08-11 2018-07-05 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zum Übertragen eines elektronischen Bauteils von einem Träger zu einem Substrat
US10141215B2 (en) 2016-11-03 2018-11-27 Rohinni, LLC Compliant needle for direct transfer of semiconductor devices
US10471545B2 (en) 2016-11-23 2019-11-12 Rohinni, LLC Top-side laser for direct transfer of semiconductor devices
US10504767B2 (en) 2016-11-23 2019-12-10 Rohinni, LLC Direct transfer apparatus for a pattern array of semiconductor device die
US10297478B2 (en) 2016-11-23 2019-05-21 Rohinni, LLC Method and apparatus for embedding semiconductor devices
US10062588B2 (en) * 2017-01-18 2018-08-28 Rohinni, LLC Flexible support substrate for transfer of semiconductor devices
TWI606530B (zh) * 2017-03-29 2017-11-21 台灣愛司帝科技股份有限公司 位置偵測與晶片分離裝置
US10410905B1 (en) * 2018-05-12 2019-09-10 Rohinni, LLC Method and apparatus for direct transfer of multiple semiconductor devices
DE102018006760A1 (de) * 2018-08-27 2020-02-27 Mühlbauer Gmbh & Co. Kg Inspektion beim Übertragen elektronischer Bauteile von einem ersten zu einem zweiten Träger
DE102018006771B4 (de) * 2018-08-27 2022-09-08 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zum Übertragen elektronischer Bauteile von einem ersten zu einem zweiten Träger
US11001078B2 (en) 2018-09-28 2021-05-11 Rohinni, LLC Interchangeable guide head for transfer mechanism
US11232968B2 (en) 2018-09-28 2022-01-25 Rohinni, LLC Variable pitch multi-needle head for transfer of semiconductor devices
US11094571B2 (en) 2018-09-28 2021-08-17 Rohinni, LLC Apparatus to increase transferspeed of semiconductor devices with micro-adjustment
CN109524316B (zh) * 2018-10-25 2021-09-21 通富微电子股份有限公司 一种半导体芯片封装方法和半导体芯片封装用载盘
US11217471B2 (en) * 2019-03-06 2022-01-04 Rohinni, LLC Multi-axis movement for transfer of semiconductor devices
CN110379738B (zh) * 2019-07-11 2021-03-02 东莞普莱信智能技术有限公司 一种微型电子元件排料转移与定位装置及其方法
CN110911334B (zh) * 2019-11-13 2021-06-15 东莞普莱信智能技术有限公司 一种微型电子元件定位贴合装置及其方法
DE102020001439B3 (de) 2020-02-21 2021-06-10 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zum Übertragen elektronischer Bauteile von einem ersten zu einem zweiten Träger
DE102020005484A1 (de) 2020-09-07 2022-03-10 Mühlbauer Gmbh & Co. Kg Vorrichtungen und Verfahren zum Betreiben von mindestens zwei Werkzeugen
DE102021111953A1 (de) * 2021-05-07 2022-11-10 Mühlbauer Gmbh & Co. Kg Optische Bauteilinspektion
CN113252686B (zh) * 2021-05-13 2021-12-17 中科长光精拓智能装备(苏州)有限公司 一种电子元件邦定方法
JP2024024567A (ja) * 2022-08-09 2024-02-22 ファスフォードテクノロジ株式会社 半導体製造装置および半導体装置の製造方法

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WO2003098990A1 (en) 2002-05-22 2003-11-27 Assembleon N.V. Method of placing a component by means of a placement device at a desired position on a substrate holder, and device suitable for performing such a method
US20110061227A1 (en) 2009-08-12 2011-03-17 Chia-Chun Tsou Assembly of die ejecting device and image capture device

Also Published As

Publication number Publication date
WO2012171633A1 (de) 2012-12-20
DE102011104225B4 (de) 2017-08-24
US8948905B2 (en) 2015-02-03
US20140142740A1 (en) 2014-05-22
KR20140041754A (ko) 2014-04-04
DE102011104225A1 (de) 2012-12-20
EP2721635B1 (de) 2015-07-29
CN103843125B (zh) 2016-08-17
EP2721635A1 (de) 2014-04-23
JP5886948B2 (ja) 2016-03-16
MY185205A (en) 2021-04-30
CN103843125A (zh) 2014-06-04
JP2014517539A (ja) 2014-07-17

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