KR101497996B1 - 초소형전자정밀기계 방식의 잉크젯 프린트헤드 - Google Patents

초소형전자정밀기계 방식의 잉크젯 프린트헤드 Download PDF

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Publication number
KR101497996B1
KR101497996B1 KR1020080028749A KR20080028749A KR101497996B1 KR 101497996 B1 KR101497996 B1 KR 101497996B1 KR 1020080028749 A KR1020080028749 A KR 1020080028749A KR 20080028749 A KR20080028749 A KR 20080028749A KR 101497996 B1 KR101497996 B1 KR 101497996B1
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South Korea
Prior art keywords
component
membrane
layer
forming
substrate
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Expired - Fee Related
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KR1020080028749A
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English (en)
Korean (ko)
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KR20080088484A (ko
Inventor
피터 제이. 니스트롬
피터 엠. 굴빈
폴 더블유. 브라운
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제록스 코포레이션
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/22—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material
    • B41J2/23—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material using print wires
    • B41J2/235—Print head assemblies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Micromachines (AREA)
KR1020080028749A 2007-03-29 2008-03-28 초소형전자정밀기계 방식의 잉크젯 프린트헤드 Expired - Fee Related KR101497996B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/693,209 US8455271B2 (en) 2007-03-29 2007-03-29 Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads
US11/693,209 2007-03-29

Publications (2)

Publication Number Publication Date
KR20080088484A KR20080088484A (ko) 2008-10-02
KR101497996B1 true KR101497996B1 (ko) 2015-03-03

Family

ID=39534843

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080028749A Expired - Fee Related KR101497996B1 (ko) 2007-03-29 2008-03-28 초소형전자정밀기계 방식의 잉크젯 프린트헤드

Country Status (5)

Country Link
US (2) US8455271B2 (enExample)
EP (1) EP1974922B1 (enExample)
JP (1) JP5356706B2 (enExample)
KR (1) KR101497996B1 (enExample)
TW (1) TWI427002B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8328331B2 (en) * 2010-03-19 2012-12-11 Xerox Corporation Ink jet print head plate
WO2011149469A1 (en) * 2010-05-27 2011-12-01 Hewlett-Packard Development Company, L.P. Printhead and related methods and systems
US8567913B2 (en) * 2010-06-02 2013-10-29 Xerox Corporation Multiple priming holes for improved freeze/thaw cycling of MEMSjet printing devices
EP2617076B1 (en) * 2010-09-15 2014-12-10 Ricoh Company, Limited Electromechanical transducing device and manufacturing method thereof
US9096062B2 (en) * 2011-08-01 2015-08-04 Xerox Corporation Manufacturing process for an ink jet printhead including a coverlay
US9421772B2 (en) 2014-12-05 2016-08-23 Xerox Corporation Method of manufacturing ink jet printheads including electrostatic actuators

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000052544A (ja) * 1998-08-07 2000-02-22 Ricoh Co Ltd インクジェットヘッド
JP2004249729A (ja) * 2003-01-31 2004-09-09 Canon Inc 圧電体素子
KR20060074849A (ko) * 2004-12-27 2006-07-03 세이코 엡슨 가부시키가이샤 정전 액츄에이터, 액적 토출 헤드, 액적 토출 장치, 정전디바이스 및 그 제조 방법
JP2006175765A (ja) * 2004-12-24 2006-07-06 Ricoh Printing Systems Ltd シリコン部材の陽極接合法及びこれを用いたインクジェットヘッド製造方法並びにインクジェットヘッド及びこれを用いたインクジェット記録装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10157104A (ja) * 1996-11-28 1998-06-16 Tec Corp インクジェットプリンタヘッド
US6648453B2 (en) * 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
JP2001072073A (ja) 1999-08-31 2001-03-21 Yoshino Kogyosho Co Ltd 計量具
JP3796394B2 (ja) * 2000-06-21 2006-07-12 キヤノン株式会社 圧電素子の製造方法および液体噴射記録ヘッドの製造方法
JP2002052705A (ja) 2000-08-04 2002-02-19 Ricoh Co Ltd インクジェットヘッド、インクジェットヘッドの製造方法および当該ヘッドを用いた画像形成装置
JP4070175B2 (ja) 2000-09-29 2008-04-02 株式会社リコー 液滴吐出ヘッド、インクジェット記録装置、画像形成装置、液滴を吐出する装置
US6568794B2 (en) * 2000-08-30 2003-05-27 Ricoh Company, Ltd. Ink-jet head, method of producing the same, and ink-jet printing system including the same
JP4039799B2 (ja) 2000-11-06 2008-01-30 株式会社リコー 液滴吐出ヘッド、画像形成装置及び液滴を吐出する装置
JP3963341B2 (ja) 2000-08-30 2007-08-22 株式会社リコー 液滴吐出ヘッド
US6705708B2 (en) * 2001-02-09 2004-03-16 Seiko Espon Corporation Piezoelectric thin-film element, ink-jet head using the same, and method for manufacture thereof
JP4088817B2 (ja) * 2001-02-09 2008-05-21 セイコーエプソン株式会社 圧電体薄膜素子の製造方法、これを用いたインクジェットヘッド
JP3479530B2 (ja) * 2003-05-14 2003-12-15 ブラザー工業株式会社 インクジェットヘッドの形成方法
WO2005037558A2 (en) * 2003-10-10 2005-04-28 Dimatix, Inc. Print head with thin membrane
WO2006047326A1 (en) * 2004-10-21 2006-05-04 Fujifilm Dimatix, Inc. Sacrificial substrate for etching
JP2006187934A (ja) 2005-01-06 2006-07-20 Seiko Epson Corp 静電アクチュエータ及びその製造方法、液滴吐出ヘッド及びその製造方法、液滴吐出装置並びにデバイス
US7625073B2 (en) 2005-06-16 2009-12-01 Canon Kabushiki Kaisha Liquid discharge head and recording device
JP5087824B2 (ja) * 2005-07-25 2012-12-05 富士ゼロックス株式会社 圧電素子、液滴吐出ヘッド及び液滴吐出装置
US7993969B2 (en) * 2006-08-10 2011-08-09 Infineon Technologies Ag Method for producing a module with components stacked one above another

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000052544A (ja) * 1998-08-07 2000-02-22 Ricoh Co Ltd インクジェットヘッド
JP2004249729A (ja) * 2003-01-31 2004-09-09 Canon Inc 圧電体素子
JP2006175765A (ja) * 2004-12-24 2006-07-06 Ricoh Printing Systems Ltd シリコン部材の陽極接合法及びこれを用いたインクジェットヘッド製造方法並びにインクジェットヘッド及びこれを用いたインクジェット記録装置
KR20060074849A (ko) * 2004-12-27 2006-07-03 세이코 엡슨 가부시키가이샤 정전 액츄에이터, 액적 토출 헤드, 액적 토출 장치, 정전디바이스 및 그 제조 방법

Also Published As

Publication number Publication date
US20080238997A1 (en) 2008-10-02
US8828750B2 (en) 2014-09-09
US20130241999A1 (en) 2013-09-19
EP1974922B1 (en) 2013-05-15
TWI427002B (zh) 2014-02-21
EP1974922A1 (en) 2008-10-01
JP2008247031A (ja) 2008-10-16
US8455271B2 (en) 2013-06-04
KR20080088484A (ko) 2008-10-02
JP5356706B2 (ja) 2013-12-04
TW200906634A (en) 2009-02-16

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