KR101483314B1 - 수명이 연장된 연마 물품 및 방법 - Google Patents
수명이 연장된 연마 물품 및 방법 Download PDFInfo
- Publication number
- KR101483314B1 KR101483314B1 KR20097004215A KR20097004215A KR101483314B1 KR 101483314 B1 KR101483314 B1 KR 101483314B1 KR 20097004215 A KR20097004215 A KR 20097004215A KR 20097004215 A KR20097004215 A KR 20097004215A KR 101483314 B1 KR101483314 B1 KR 101483314B1
- Authority
- KR
- South Korea
- Prior art keywords
- delete delete
- abrasive
- foil
- alloy
- abrasive particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/08—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for close-grained structure, e.g. using metal with low melting point
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
- B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US82404806P | 2006-08-30 | 2006-08-30 | |
| US60/824,048 | 2006-08-30 | ||
| PCT/US2007/075791 WO2008027714A1 (en) | 2006-08-30 | 2007-08-13 | Extended life abrasive article and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20090049594A KR20090049594A (ko) | 2009-05-18 |
| KR101483314B1 true KR101483314B1 (ko) | 2015-01-15 |
Family
ID=39136260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR20097004215A Expired - Fee Related KR101483314B1 (ko) | 2006-08-30 | 2007-08-13 | 수명이 연장된 연마 물품 및 방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8377158B2 (https=) |
| EP (1) | EP2076360A4 (https=) |
| JP (1) | JP5285609B2 (https=) |
| KR (1) | KR101483314B1 (https=) |
| CN (1) | CN101511542B (https=) |
| TW (1) | TWI522447B (https=) |
| WO (1) | WO2008027714A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102227790B1 (ko) * | 2019-11-11 | 2021-03-15 | 동신다이아몬드공업 주식회사 | 다이아몬드 배열 및 패턴을 다양하게 형성시킬수 있도록 제조되는 다이아몬드공구 및 그 제조방법 |
Families Citing this family (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
| US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
| US9199357B2 (en) * | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9138862B2 (en) | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
| US8678878B2 (en) | 2009-09-29 | 2014-03-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
| US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
| US8974270B2 (en) | 2011-05-23 | 2015-03-10 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
| US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
| DE102008021636B3 (de) * | 2008-04-30 | 2009-11-19 | Esk Ceramics Gmbh & Co. Kg | Verfahren zum Fixieren eines Verbindungselements auf einem Werkstück und Bauteil aus einem Werkstück mit einem darauf fixierten Verbindungselement |
| JP2009302136A (ja) * | 2008-06-10 | 2009-12-24 | Panasonic Corp | 半導体集積回路 |
| US8801497B2 (en) | 2009-04-30 | 2014-08-12 | Rdc Holdings, Llc | Array of abrasive members with resilient support |
| US20110159784A1 (en) * | 2009-04-30 | 2011-06-30 | First Principles LLC | Abrasive article with array of gimballed abrasive members and method of use |
| US9221148B2 (en) | 2009-04-30 | 2015-12-29 | Rdc Holdings, Llc | Method and apparatus for processing sliders for disk drives, and to various processing media for the same |
| US20100330890A1 (en) | 2009-06-30 | 2010-12-30 | Zine-Eddine Boutaghou | Polishing pad with array of fluidized gimballed abrasive members |
| EP2464486A2 (en) | 2009-08-14 | 2012-06-20 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body, and methods of forming thereof |
| EP2464485A2 (en) | 2009-08-14 | 2012-06-20 | Saint-Gobain Abrasives, Inc. | Abrasive articles including abrasive particles bonded to an elongated body |
| US20110073094A1 (en) * | 2009-09-28 | 2011-03-31 | 3M Innovative Properties Company | Abrasive article with solid core and methods of making the same |
| DE102010038324B4 (de) * | 2010-07-23 | 2012-03-22 | Hilti Aktiengesellschaft | Vorrichtung zum Positionieren von Schneidpartikeln |
| TW201223699A (en) * | 2010-09-03 | 2012-06-16 | Saint Gobain Abrasives Inc | Bonded abrasive articles, method of forming such articles, and grinding performance of such articles |
| TWI544064B (zh) | 2010-09-03 | 2016-08-01 | 聖高拜磨料有限公司 | 粘結的磨料物品及形成方法 |
| TWI466990B (zh) | 2010-12-30 | 2015-01-01 | 聖高拜磨料有限公司 | 磨料物品及形成方法 |
| CN102601747B (zh) * | 2011-01-20 | 2015-12-09 | 中芯国际集成电路制造(上海)有限公司 | 一种研磨垫及其制备方法、使用方法 |
| WO2013040423A2 (en) | 2011-09-16 | 2013-03-21 | Saint-Gobain Abrasives, Inc. | Abrasive article and method of forming |
| JP5869680B2 (ja) | 2011-09-29 | 2016-02-24 | サンーゴバン アブレイシブズ,インコーポレイティド | バリア層を有する細長い基板本体に結合した研磨粒子を含む研磨物品及びその形成方法 |
| US9644283B2 (en) * | 2011-09-30 | 2017-05-09 | Apple Inc. | Laser texturizing and anodization surface treatment |
| CN102601746B (zh) * | 2012-02-29 | 2015-04-08 | 河南富耐克超硬材料股份有限公司 | 一种柔性磨具用磨片及该磨片的制造方法 |
| JP5972032B2 (ja) * | 2012-05-01 | 2016-08-17 | 新技術開発株式会社 | 高効率精密加工用研磨工具及びその製法 |
| SG11201407232YA (en) * | 2012-05-04 | 2014-12-30 | Entegris Inc | Cmp conditioner pads with superabrasive grit enhancement |
| TW201402274A (zh) | 2012-06-29 | 2014-01-16 | 聖高拜磨料有限公司 | 研磨物品及形成方法 |
| TWI474889B (zh) | 2012-06-29 | 2015-03-01 | 聖高拜磨料有限公司 | 研磨物品及形成方法 |
| TWI477343B (zh) | 2012-06-29 | 2015-03-21 | Saint Gobain Abrasives Inc | 研磨物品及形成方法 |
| TW201404527A (zh) | 2012-06-29 | 2014-02-01 | 聖高拜磨料有限公司 | 研磨物品及形成方法 |
| KR101736085B1 (ko) * | 2012-10-15 | 2017-05-16 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 특정한 형태들을 가진 연마 입자들 및 이러한 입자들을 형성하는 방법들 |
| WO2014106157A1 (en) | 2012-12-31 | 2014-07-03 | Saint-Gobain Abrasives, Inc. | Bonded abrasive article and method of grinding |
| WO2014106156A1 (en) | 2012-12-31 | 2014-07-03 | Saint-Gobain Abrasives, Inc. | Bonded abrasive article and method of grinding |
| US9102039B2 (en) | 2012-12-31 | 2015-08-11 | Saint-Gobain Abrasives, Inc. | Bonded abrasive article and method of grinding |
| US9833877B2 (en) | 2013-03-31 | 2017-12-05 | Saint-Gobain Abrasives, Inc. | Bonded abrasive article and method of grinding |
| TW201441355A (zh) | 2013-04-19 | 2014-11-01 | 聖高拜磨料有限公司 | 研磨製品及其形成方法 |
| EP2835220B1 (de) * | 2013-08-07 | 2019-09-11 | Reishauer AG | Abrichtwerkzeug sowie ein Verfahren zu dessen Herstellung |
| EP2859997B1 (en) | 2013-10-08 | 2015-09-30 | Valentini, Guido | Method for manufacturing a polishing pad and polishing pad |
| US10786875B2 (en) * | 2014-07-02 | 2020-09-29 | Raytheon Technologies Corporation | Abrasive preforms and manufacture and use methods |
| KR20170096025A (ko) * | 2014-12-22 | 2017-08-23 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 제거 가능한 연마 부재를 갖는 연마 용품 및 이들의 분리 및 교체 방법 |
| TWI664057B (zh) | 2015-06-29 | 2019-07-01 | 美商聖高拜磨料有限公司 | 研磨物品及形成方法 |
| CN107520770B (zh) * | 2017-05-04 | 2019-03-08 | 漳州职业技术学院 | 一种磨粒晶体定向分布的耐磨金刚石砂轮制备方法 |
| CN107081688A (zh) * | 2017-05-27 | 2017-08-22 | 江苏省江南新型复合研磨材料及制品工程技术研究中心有限公司 | 一种高强度高性能的复合研磨片及其制造方法 |
| KR102013386B1 (ko) * | 2018-01-29 | 2019-08-22 | 새솔다이아몬드공업 주식회사 | 역도금 패드 컨디셔너 제조방법 및 패드 컨디셔너 |
| KR102554674B1 (ko) * | 2018-02-08 | 2023-07-11 | 스미토모덴키고교가부시키가이샤 | 초지립 및 초지립 휠 |
| US11331767B2 (en) | 2019-02-01 | 2022-05-17 | Micron Technology, Inc. | Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3675311A (en) * | 1970-07-02 | 1972-07-11 | Northrop Corp | Thin-film diffusion brazing of nickel and nickel base alloys |
| US6669745B2 (en) * | 2001-02-21 | 2003-12-30 | 3M Innovative Properties Company | Abrasive article with optimally oriented abrasive particles and method of making the same |
| US20040112359A1 (en) * | 1997-04-04 | 2004-06-17 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4029479A (en) * | 1973-01-29 | 1977-06-14 | Rohr Industries, Inc. | Plated foil for liquid interface bonding of titanium |
| US4706872A (en) * | 1986-10-16 | 1987-11-17 | Rohr Industries, Inc. | Method of bonding columbium to nickel and nickel based alloys using low bonding pressures and temperatures |
| JPH0197570A (ja) * | 1987-10-06 | 1989-04-17 | Noritake Dia Kk | メタルボンド砥石用ダイヤモンド砥材 |
| JPH01246516A (ja) * | 1988-03-29 | 1989-10-02 | Sony Corp | 焦点位置検出装置 |
| US5049165B1 (en) | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Composite material |
| JP3026988B2 (ja) * | 1990-02-05 | 2000-03-27 | 東京磁気印刷株式会社 | 研磨具 |
| JPH04129660A (ja) * | 1990-09-19 | 1992-04-30 | Hitachi Ltd | 磁気ディスクおよびその基板の表面加工方法 |
| CN2104731U (zh) * | 1991-07-24 | 1992-05-20 | 张希浩 | 电镀金刚石磨削工具 |
| US5234152A (en) * | 1992-01-07 | 1993-08-10 | Regents Of The University Of California | Transient liquid phase ceramic bonding |
| US6654061B2 (en) * | 1995-06-14 | 2003-11-25 | Canon Kabushiki Kaisha | Automatic focus adjusting apparatus and method utilized by an image sensing apparatus |
| TW394723B (en) * | 1997-04-04 | 2000-06-21 | Sung Chien Min | Abrasive tools with patterned grit distribution and method of manufacture |
| US6884155B2 (en) * | 1999-11-22 | 2005-04-26 | Kinik | Diamond grid CMP pad dresser |
| US7124753B2 (en) * | 1997-04-04 | 2006-10-24 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US6537140B1 (en) * | 1997-05-14 | 2003-03-25 | Saint-Gobain Abrasives Technology Company | Patterned abrasive tools |
| US6123612A (en) * | 1998-04-15 | 2000-09-26 | 3M Innovative Properties Company | Corrosion resistant abrasive article and method of making |
| JP2000106353A (ja) * | 1998-07-31 | 2000-04-11 | Nippon Steel Corp | 半導体基板用研磨布のドレッサ― |
| TW467809B (en) * | 1999-12-17 | 2001-12-11 | Ultimate Abrasive Systems Llc | Abrasive surface and article and methods for making them |
| US20020012063A1 (en) * | 2000-03-10 | 2002-01-31 | Olympus Optical Co., Ltd. | Apparatus for automatically detecting focus and camera equipped with automatic focus detecting apparatus |
| JP2002209912A (ja) * | 2001-01-22 | 2002-07-30 | Masayuki Nakagawa | 歯科技工用モデルトリーマー専用ディスク形超砥粒電着砥石の構造並に製造の方法。 |
| FR2820666B1 (fr) * | 2001-02-14 | 2003-04-11 | Arjo Wiggins Sa | Support autoagrippant pour un produit abrasif applique et procede de fabrication dudit produit abrasif l'incorporant |
| JP2003051980A (ja) * | 2001-08-08 | 2003-02-21 | Matsushita Electric Ind Co Ltd | オートフォーカス装置及び撮像装置並びにカメラシステム |
| JP3795786B2 (ja) * | 2001-10-09 | 2006-07-12 | 敬久 山崎 | ろう付けしたダイヤモンド及びダイヤモンドのろう付け方法 |
| JP3975395B2 (ja) * | 2002-02-26 | 2007-09-12 | フジノン株式会社 | カメラシステム |
| JP4045483B2 (ja) * | 2002-03-13 | 2008-02-13 | フジノン株式会社 | ピント状態検出装置 |
| JP4647885B2 (ja) * | 2003-02-17 | 2011-03-09 | 株式会社ニコン | カメラ |
| JP4463084B2 (ja) * | 2003-11-27 | 2010-05-12 | 株式会社オクテック | ドレッシング工具 |
| JP2005219152A (ja) * | 2004-02-04 | 2005-08-18 | Ebara Corp | ドレッサおよびその製造方法 |
| JP4506634B2 (ja) | 2005-10-03 | 2010-07-21 | トヨタ紡織株式会社 | フィルタ及びクリーナ |
-
2007
- 2007-08-13 JP JP2009526795A patent/JP5285609B2/ja not_active Expired - Fee Related
- 2007-08-13 CN CN2007800324263A patent/CN101511542B/zh not_active Expired - Fee Related
- 2007-08-13 US US11/837,774 patent/US8377158B2/en not_active Expired - Fee Related
- 2007-08-13 EP EP07814031A patent/EP2076360A4/en not_active Withdrawn
- 2007-08-13 WO PCT/US2007/075791 patent/WO2008027714A1/en not_active Ceased
- 2007-08-13 KR KR20097004215A patent/KR101483314B1/ko not_active Expired - Fee Related
- 2007-08-23 TW TW096131276A patent/TWI522447B/zh not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3675311A (en) * | 1970-07-02 | 1972-07-11 | Northrop Corp | Thin-film diffusion brazing of nickel and nickel base alloys |
| US20040112359A1 (en) * | 1997-04-04 | 2004-06-17 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US6669745B2 (en) * | 2001-02-21 | 2003-12-30 | 3M Innovative Properties Company | Abrasive article with optimally oriented abrasive particles and method of making the same |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102227790B1 (ko) * | 2019-11-11 | 2021-03-15 | 동신다이아몬드공업 주식회사 | 다이아몬드 배열 및 패턴을 다양하게 형성시킬수 있도록 제조되는 다이아몬드공구 및 그 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20080053000A1 (en) | 2008-03-06 |
| CN101511542A (zh) | 2009-08-19 |
| JP5285609B2 (ja) | 2013-09-11 |
| EP2076360A1 (en) | 2009-07-08 |
| TWI522447B (zh) | 2016-02-21 |
| WO2008027714A1 (en) | 2008-03-06 |
| CN101511542B (zh) | 2011-05-25 |
| JP2010502458A (ja) | 2010-01-28 |
| KR20090049594A (ko) | 2009-05-18 |
| EP2076360A4 (en) | 2012-12-19 |
| US8377158B2 (en) | 2013-02-19 |
| TW200819523A (en) | 2008-05-01 |
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