KR101473064B1 - 광학 시험 장치 - Google Patents

광학 시험 장치 Download PDF

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Publication number
KR101473064B1
KR101473064B1 KR1020120152328A KR20120152328A KR101473064B1 KR 101473064 B1 KR101473064 B1 KR 101473064B1 KR 1020120152328 A KR1020120152328 A KR 1020120152328A KR 20120152328 A KR20120152328 A KR 20120152328A KR 101473064 B1 KR101473064 B1 KR 101473064B1
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KR
South Korea
Prior art keywords
dummy
contact
probe
light emitting
light
Prior art date
Application number
KR1020120152328A
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English (en)
Korean (ko)
Other versions
KR20130079235A (ko
Inventor
렌 우치다
신지 이시카와
데츠야 사토
Original Assignee
샤프 가부시키가이샤
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Application filed by 샤프 가부시키가이샤 filed Critical 샤프 가부시키가이샤
Publication of KR20130079235A publication Critical patent/KR20130079235A/ko
Application granted granted Critical
Publication of KR101473064B1 publication Critical patent/KR101473064B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2632—Circuits therefor for testing diodes
    • G01R31/2635—Testing light-emitting diodes, laser diodes or photodiodes

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Led Devices (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
KR1020120152328A 2011-12-26 2012-12-24 광학 시험 장치 KR101473064B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011284266A JP5509190B2 (ja) 2011-12-26 2011-12-26 光学試験装置およびプローブカード
JPJP-P-2011-284266 2011-12-26

Publications (2)

Publication Number Publication Date
KR20130079235A KR20130079235A (ko) 2013-07-10
KR101473064B1 true KR101473064B1 (ko) 2014-12-15

Family

ID=48636102

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120152328A KR101473064B1 (ko) 2011-12-26 2012-12-24 광학 시험 장치

Country Status (4)

Country Link
JP (1) JP5509190B2 (zh)
KR (1) KR101473064B1 (zh)
CN (1) CN103176115B (zh)
TW (1) TWI481830B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101541233B1 (ko) * 2014-01-29 2015-08-03 한국광기술원 발광 디바이스 제조 장치
CN105632960B (zh) * 2016-01-15 2018-04-17 上海华虹宏力半导体制造有限公司 优化探针台测试针压参数的方法
CN106158689B (zh) * 2016-06-30 2019-04-23 华灿光电(苏州）有限公司 基于多组测试探针的二极管光电测试方法
CN113540144A (zh) * 2021-06-18 2021-10-22 泉州三安半导体科技有限公司 实现多颗led芯片esd测试的晶圆、正装led芯片及其制造方法
CN113639859A (zh) * 2021-08-25 2021-11-12 扬州和铵半导体有限公司 Led封装的光电测试装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0945957A (ja) * 1995-07-28 1997-02-14 Oki Electric Ind Co Ltd 端面発光型ｌｅｄアレイの製造方法及びその検査方法
JPH09246599A (ja) * 1996-03-08 1997-09-19 Sharp Corp 半導体素子の電気光学特性測定装置
JP2006319066A (ja) * 2005-05-11 2006-11-24 Hitachi Cable Ltd 発光ダイオードアレイ
JP2011237350A (ja) * 2010-05-12 2011-11-24 Showa Denko Kk 発光部品試験モジュールおよび発光部品試験装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3120760B2 (ja) * 1997-10-27 2000-12-25 日本電気株式会社 プローブカード及び該プローブカードを用いた試験方法
JP4615283B2 (ja) * 2004-10-18 2011-01-19 三菱電機株式会社 半導体デバイスの特性測定方法
TWI250603B (en) * 2004-12-27 2006-03-01 Advanced Semiconductor Eng Method for wafer-level testing photoelectric chips
KR101499047B1 (ko) * 2007-04-03 2015-03-05 스캐니메트릭스 인크. 활성 프로브 집적 회로를 이용한 전자 회로 테스팅
JP5021784B2 (ja) * 2010-04-01 2012-09-12 シャープ株式会社 発光測定装置および発光測定方法、制御プログラム、可読記録媒体

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0945957A (ja) * 1995-07-28 1997-02-14 Oki Electric Ind Co Ltd 端面発光型ｌｅｄアレイの製造方法及びその検査方法
JPH09246599A (ja) * 1996-03-08 1997-09-19 Sharp Corp 半導体素子の電気光学特性測定装置
JP2006319066A (ja) * 2005-05-11 2006-11-24 Hitachi Cable Ltd 発光ダイオードアレイ
JP2011237350A (ja) * 2010-05-12 2011-11-24 Showa Denko Kk 発光部品試験モジュールおよび発光部品試験装置

Also Published As

Publication number Publication date
TW201331559A (zh) 2013-08-01
JP5509190B2 (ja) 2014-06-04
CN103176115B (zh) 2016-01-06
KR20130079235A (ko) 2013-07-10
CN103176115A (zh) 2013-06-26
JP2013135074A (ja) 2013-07-08
TWI481830B (zh) 2015-04-21

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