KR101417987B1 - 열처리 화로용 로보트 암 장치 - Google Patents

열처리 화로용 로보트 암 장치 Download PDF

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Publication number
KR101417987B1
KR101417987B1 KR1020060062649A KR20060062649A KR101417987B1 KR 101417987 B1 KR101417987 B1 KR 101417987B1 KR 1020060062649 A KR1020060062649 A KR 1020060062649A KR 20060062649 A KR20060062649 A KR 20060062649A KR 101417987 B1 KR101417987 B1 KR 101417987B1
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KR
South Korea
Prior art keywords
heat treatment
arm
treatment furnace
arm portion
heater
Prior art date
Application number
KR1020060062649A
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English (en)
Korean (ko)
Other versions
KR20070080809A (ko
Inventor
켄이치 요시하라
Original Assignee
고요 써모 시스템 가부시끼 가이샤
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Application filed by 고요 써모 시스템 가부시끼 가이샤 filed Critical 고요 써모 시스템 가부시끼 가이샤
Publication of KR20070080809A publication Critical patent/KR20070080809A/ko
Application granted granted Critical
Publication of KR101417987B1 publication Critical patent/KR101417987B1/ko

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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nonlinear Science (AREA)
  • Liquid Crystal (AREA)
  • Tunnel Furnaces (AREA)
  • Robotics (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
  • Manipulator (AREA)
KR1020060062649A 2006-02-08 2006-07-04 열처리 화로용 로보트 암 장치 KR101417987B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006030977A JP5142471B2 (ja) 2006-02-08 2006-02-08 熱処理炉用ロボットアーム装置
JPJP-P-2006-00030977 2006-02-08

Publications (2)

Publication Number Publication Date
KR20070080809A KR20070080809A (ko) 2007-08-13
KR101417987B1 true KR101417987B1 (ko) 2014-07-09

Family

ID=38490644

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060062649A KR101417987B1 (ko) 2006-02-08 2006-07-04 열처리 화로용 로보트 암 장치

Country Status (4)

Country Link
JP (1) JP5142471B2 (zh)
KR (1) KR101417987B1 (zh)
CN (1) CN101016190B (zh)
TW (1) TWI356754B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011211160A (ja) * 2010-03-11 2011-10-20 Index:Kk ビーム材及び構造材並びにガラス基板支持ビーム及び基板カセット
JP6625391B2 (ja) * 2015-10-15 2019-12-25 豊田鉄工株式会社 加熱炉へのワーク搬出入装置
JP7231471B2 (ja) * 2019-04-23 2023-03-01 リョービ株式会社 焼入装置および焼入方法
CN112589670B (zh) * 2020-12-08 2022-05-10 重庆重玻节能玻璃有限公司 一种玻璃加工用双边快速磨边装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11176902A (ja) * 1997-12-10 1999-07-02 Oki Electric Ind Co Ltd 半導体製造装置及びその製造方法
JP3080143U (ja) * 2001-03-08 2001-09-14 オリンパス光学工業株式会社 基板搬送装置
JP2005279319A (ja) * 2004-03-26 2005-10-13 Dainippon Ink & Chem Inc 塗膜形成方法及び塗膜形成装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0697602B2 (ja) * 1988-09-20 1994-11-30 東芝ライテック株式会社 低圧水銀蒸気放電灯装置
JPH11270970A (ja) * 1998-03-23 1999-10-05 Toppan Printing Co Ltd ロボットアーム付着色レジスト焼成用オーブンおよび着色レジスト焼成方法
JP2002060054A (ja) * 2000-08-17 2002-02-26 Taiheiyo Cement Corp 基板搬送用トレイ及びその製造方法
KR20020077179A (ko) * 2001-03-29 2002-10-11 니폰 미쓰비시 오일 코포레이션 로봇 핸드 부재 및 그 제조 방법
JP2003266359A (ja) * 2002-03-08 2003-09-24 Tatsumo Kk 制振機能を持った搬送装置
JP2003303870A (ja) * 2002-04-10 2003-10-24 Nec Kansai Ltd 半導体ウェハー搬送機構
JP2005325691A (ja) * 2004-05-12 2005-11-24 Hino Motors Ltd 尿素水供給管

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11176902A (ja) * 1997-12-10 1999-07-02 Oki Electric Ind Co Ltd 半導体製造装置及びその製造方法
JP3080143U (ja) * 2001-03-08 2001-09-14 オリンパス光学工業株式会社 基板搬送装置
JP2005279319A (ja) * 2004-03-26 2005-10-13 Dainippon Ink & Chem Inc 塗膜形成方法及び塗膜形成装置

Also Published As

Publication number Publication date
CN101016190A (zh) 2007-08-15
JP2007212031A (ja) 2007-08-23
JP5142471B2 (ja) 2013-02-13
KR20070080809A (ko) 2007-08-13
TW200730308A (en) 2007-08-16
TWI356754B (en) 2012-01-21
CN101016190B (zh) 2011-06-08

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