KR101399343B1 - 실리콘 단결정 웨이퍼의 마무리 연마방법 및 실리콘 단결정 웨이퍼 - Google Patents

실리콘 단결정 웨이퍼의 마무리 연마방법 및 실리콘 단결정 웨이퍼 Download PDF

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KR101399343B1
KR101399343B1 KR1020097017021A KR20097017021A KR101399343B1 KR 101399343 B1 KR101399343 B1 KR 101399343B1 KR 1020097017021 A KR1020097017021 A KR 1020097017021A KR 20097017021 A KR20097017021 A KR 20097017021A KR 101399343 B1 KR101399343 B1 KR 101399343B1
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South Korea
Prior art keywords
polishing
single crystal
silicon single
crystal wafer
wafer
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Korean (ko)
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KR20090125058A (ko
Inventor
나오토 이즈카
히로타가 쿠리모토
코이치 코사카
후미아키 마루야마
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신에쯔 한도타이 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/12—Preparing bulk and homogeneous wafers
    • H10P90/129—Preparing bulk and homogeneous wafers by polishing

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
KR1020097017021A 2007-02-20 2008-01-29 실리콘 단결정 웨이퍼의 마무리 연마방법 및 실리콘 단결정 웨이퍼 Active KR101399343B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2007-038937 2007-02-20
JP2007038937A JP4696086B2 (ja) 2007-02-20 2007-02-20 シリコン単結晶ウエーハの仕上げ研磨方法及びシリコン単結晶ウエーハ
PCT/JP2008/000101 WO2008102521A1 (ja) 2007-02-20 2008-01-29 シリコン単結晶ウエーハの仕上げ研磨方法及びシリコン単結晶ウエーハ

Publications (2)

Publication Number Publication Date
KR20090125058A KR20090125058A (ko) 2009-12-03
KR101399343B1 true KR101399343B1 (ko) 2014-05-27

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Family Applications (1)

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KR1020097017021A Active KR101399343B1 (ko) 2007-02-20 2008-01-29 실리콘 단결정 웨이퍼의 마무리 연마방법 및 실리콘 단결정 웨이퍼

Country Status (6)

Country Link
US (1) US8569148B2 (https=)
JP (1) JP4696086B2 (https=)
KR (1) KR101399343B1 (https=)
DE (1) DE112008000396T5 (https=)
TW (1) TWI414012B (https=)
WO (1) WO2008102521A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010131683A (ja) * 2008-12-02 2010-06-17 Sumco Corp シリコンウェーハの研磨方法
WO2010140671A1 (ja) 2009-06-05 2010-12-09 株式会社Sumco シリコンウェーハの研磨方法及びシリコンウェーハ
DE112010002718B4 (de) 2009-06-26 2019-11-21 Sumco Corp. Verfahren zur reinigung eines siliciumwafers sowie verfahren zur herstellung eines epitaktischen wafers unter verwendung des reinigungsverfahrens
JP5888280B2 (ja) 2013-04-18 2016-03-16 信越半導体株式会社 シリコンウエーハの研磨方法およびエピタキシャルウエーハの製造方法
JP6160579B2 (ja) * 2014-08-05 2017-07-12 信越半導体株式会社 シリコンウェーハの仕上げ研磨方法
JP6418174B2 (ja) * 2016-02-03 2018-11-07 株式会社Sumco シリコンウェーハの片面研磨方法
JP2018085411A (ja) * 2016-11-22 2018-05-31 株式会社ディスコ ウエーハの加工方法
US10636673B2 (en) * 2017-09-28 2020-04-28 Taiwan Semiconductor Manufacturing Co., Ltd. Method for forming semiconductor device structure
JP6879272B2 (ja) 2018-03-22 2021-06-02 信越半導体株式会社 シリコンウェーハの製造方法
KR102104073B1 (ko) * 2018-09-06 2020-04-23 에스케이실트론 주식회사 웨이퍼의 마무리 연마 방법 및 장치
WO2020195149A1 (ja) * 2019-03-27 2020-10-01 株式会社フジミインコーポレーテッド ケイ素－ケイ素結合を有する材料を含む研磨対象物の研磨方法
JP6780800B1 (ja) 2020-04-09 2020-11-04 信越半導体株式会社 ウェーハの研磨方法及び研磨装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114526A (ja) * 1988-10-24 1990-04-26 Shin Etsu Handotai Co Ltd シリコンウエーハ及びその研磨方法並びにこのシリコンウエーハを用いた半導体電子装置
US6530826B2 (en) 2000-11-24 2003-03-11 WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG Process for the surface polishing of silicon wafers
JP2005045102A (ja) 2003-07-24 2005-02-17 Shin Etsu Handotai Co Ltd ウエーハの研磨方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001015460A (ja) * 1999-06-30 2001-01-19 Toshiba Corp 半導体装置の製造方法
WO2003021651A1 (en) 2001-08-16 2003-03-13 Asahi Kasei Chemicals Corporation Polishing fluid for metallic film and method for producing semiconductor substrate using the same
JP2004193529A (ja) 2002-10-16 2004-07-08 Shin Etsu Handotai Co Ltd ウエーハの評価方法及び装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114526A (ja) * 1988-10-24 1990-04-26 Shin Etsu Handotai Co Ltd シリコンウエーハ及びその研磨方法並びにこのシリコンウエーハを用いた半導体電子装置
US6530826B2 (en) 2000-11-24 2003-03-11 WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG Process for the surface polishing of silicon wafers
JP2005045102A (ja) 2003-07-24 2005-02-17 Shin Etsu Handotai Co Ltd ウエーハの研磨方法

Also Published As

Publication number Publication date
KR20090125058A (ko) 2009-12-03
JP4696086B2 (ja) 2011-06-08
DE112008000396T5 (de) 2010-01-07
JP2008205147A (ja) 2008-09-04
TW200849365A (en) 2008-12-16
US8569148B2 (en) 2013-10-29
TWI414012B (zh) 2013-11-01
US20100090314A1 (en) 2010-04-15
WO2008102521A1 (ja) 2008-08-28

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