KR101305656B1 - 황산 전해조 및 황산 전해조를 이용한 황산 리사이클형 세정 시스템 - Google Patents

황산 전해조 및 황산 전해조를 이용한 황산 리사이클형 세정 시스템 Download PDF

Info

Publication number
KR101305656B1
KR101305656B1 KR1020090058404A KR20090058404A KR101305656B1 KR 101305656 B1 KR101305656 B1 KR 101305656B1 KR 1020090058404 A KR1020090058404 A KR 1020090058404A KR 20090058404 A KR20090058404 A KR 20090058404A KR 101305656 B1 KR101305656 B1 KR 101305656B1
Authority
KR
South Korea
Prior art keywords
sulfuric acid
conductive
cathode
anode
electrolytic cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020090058404A
Other languages
English (en)
Korean (ko)
Other versions
KR20100003231A (ko
Inventor
마사아키 가토
요시유키 세야
나오야 하야미즈
마키코 단게
요시아키 구로카와
노부오 고바야시
Original Assignee
크로린엔지니아즈 가부시키가이샤
시바우라 메카트로닉스 가부시끼가이샤
가부시끼가이샤 도시바
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 크로린엔지니아즈 가부시키가이샤, 시바우라 메카트로닉스 가부시끼가이샤, 가부시끼가이샤 도시바 filed Critical 크로린엔지니아즈 가부시키가이샤
Publication of KR20100003231A publication Critical patent/KR20100003231A/ko
Application granted granted Critical
Publication of KR101305656B1 publication Critical patent/KR101305656B1/ko
Assigned to 페르메렉덴꾜꾸가부시끼가이샤 reassignment 페르메렉덴꾜꾸가부시끼가이샤 권리지분의 전부이전등록 Assignors: 크로린엔지니아즈 가부시키가이샤
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B9/00—Cells or assemblies of cells; Constructional parts of cells; Assemblies of constructional parts, e.g. electrode-diaphragm assemblies; Process-related cell features
    • C25B9/17—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof
    • C25B9/19—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof with diaphragms
    • C25B9/23—Cells comprising dimensionally-stable non-movable electrodes; Assemblies of constructional parts thereof with diaphragms comprising ion-exchange membranes in or on which electrode material is embedded
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B1/00—Electrolytic production of inorganic compounds or non-metals
    • C25B1/01—Products
    • C25B1/28—Per-compounds
    • C25B1/29—Persulfates
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
    • C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
    • C25B11/042—Electrodes formed of a single material
    • C25B11/046—Alloys
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25B—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR
    • C25B11/00—Electrodes; Manufacture thereof not otherwise provided for
    • C25B11/04—Electrodes; Manufacture thereof not otherwise provided for characterised by the material
    • C25B11/051—Electrodes formed of electrocatalysts on a substrate or carrier
    • C25B11/073—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material
    • C25B11/075—Electrodes formed of electrocatalysts on a substrate or carrier characterised by the electrocatalyst material consisting of a single catalytic element or catalytic compound
    • C25B11/083—Diamond

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Electrodes For Compound Or Non-Metal Manufacture (AREA)
KR1020090058404A 2008-06-30 2009-06-29 황산 전해조 및 황산 전해조를 이용한 황산 리사이클형 세정 시스템 Active KR101305656B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008170096A JP5207529B2 (ja) 2008-06-30 2008-06-30 硫酸電解槽及び硫酸電解槽を用いた硫酸リサイクル型洗浄システム
JPJP-P-2008-170096 2008-06-30

Publications (2)

Publication Number Publication Date
KR20100003231A KR20100003231A (ko) 2010-01-07
KR101305656B1 true KR101305656B1 (ko) 2013-09-09

Family

ID=41446087

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090058404A Active KR101305656B1 (ko) 2008-06-30 2009-06-29 황산 전해조 및 황산 전해조를 이용한 황산 리사이클형 세정 시스템

Country Status (4)

Country Link
US (1) US8137513B2 (https=)
JP (1) JP5207529B2 (https=)
KR (1) KR101305656B1 (https=)
TW (1) TWI467058B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20121909A1 (it) * 2012-11-09 2014-05-10 Industrie De Nora Spa Cella elettrolitica dotata di microelettrodi
JP6750293B2 (ja) * 2016-04-28 2020-09-02 栗田工業株式会社 プラスチック表面の処理方法
DE102018208624A1 (de) 2018-05-30 2019-12-05 Thyssenkrupp Uhde Chlorine Engineers Gmbh Verfahren und Vorrichtung zum Bereitstellen von wenigstens einem Produktstrom durch Elektrolyse sowie Verwendung
JP6992190B2 (ja) * 2018-09-06 2022-01-13 Ｐｈｃ株式会社 培養装置
WO2021015120A1 (ja) * 2019-07-19 2021-01-28 デノラ・ペルメレック株式会社 電解槽用ガスケット及びそれを用いた電解槽
CN116254536A (zh) * 2023-02-17 2023-06-13 九江斯坦德能源工业有限公司 一种生箔机钛阳极板清洗剂及清洗方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030079726A (ko) * 2002-04-02 2003-10-10 페르메렉덴꾜꾸가부시끼가이샤 기능수, 이의 제조방법 및 제조장치, 및 당해 기능수를사용하는 전자부품의 세정방법 및 세정장치
JP2006225694A (ja) * 2005-02-16 2006-08-31 Kurita Water Ind Ltd 電気分解セル
KR20070120055A (ko) * 2006-06-16 2007-12-21 가부시끼가이샤 도시바 세정 시스템 및 세정 방법

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1595193A (en) * 1977-03-04 1981-08-12 Ici Ltd Diaphragm cell
JP3596997B2 (ja) * 1996-11-12 2004-12-02 ペルメレック電極株式会社 電極給電体、その製造方法及び過酸化水素製造用電解槽
DE10019683A1 (de) * 2000-04-20 2001-10-25 Degussa Verfahren zur Herstellung von Alkalimetall- und Ammoniumperoxodisulfat
EP1254972A1 (fr) 2001-05-01 2002-11-06 CSEM Centre Suisse d'Electronique et de Microtechnique SA Cellule electrochimique modulaire
JP4053805B2 (ja) * 2002-04-02 2008-02-27 シルトロニック・ジャパン株式会社 機能水、その製造方法及び製造装置
JP4116949B2 (ja) * 2003-07-29 2008-07-09 ペルメレック電極株式会社 電気化学的殺菌及び制菌方法
JP4407529B2 (ja) * 2005-02-16 2010-02-03 栗田工業株式会社 硫酸リサイクル型洗浄システム
JP4673696B2 (ja) * 2005-08-01 2011-04-20 ペルメレック電極株式会社 導電性ダイヤモンド電極及びその製造方法
JP4500745B2 (ja) * 2005-08-03 2010-07-14 ペルメレック電極株式会社 電解用電極の製造方法
JP4623307B2 (ja) 2006-03-29 2011-02-02 栗田工業株式会社 電解セルおよび該電解セルを用いた硫酸リサイクル型洗浄システム
JP4808551B2 (ja) 2006-06-16 2011-11-02 クロリンエンジニアズ株式会社 過硫酸の製造方法
KR20090093323A (ko) * 2008-02-29 2009-09-02 삼성전자주식회사 탈이온화 장치 및 그 제조방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030079726A (ko) * 2002-04-02 2003-10-10 페르메렉덴꾜꾸가부시끼가이샤 기능수, 이의 제조방법 및 제조장치, 및 당해 기능수를사용하는 전자부품의 세정방법 및 세정장치
JP2006225694A (ja) * 2005-02-16 2006-08-31 Kurita Water Ind Ltd 電気分解セル
KR20070120055A (ko) * 2006-06-16 2007-12-21 가부시끼가이샤 도시바 세정 시스템 및 세정 방법
KR100913449B1 (ko) 2006-06-16 2009-08-25 가부시끼가이샤 도시바 세정 시스템 및 세정 방법

Also Published As

Publication number Publication date
JP5207529B2 (ja) 2013-06-12
TW201000677A (en) 2010-01-01
TWI467058B (zh) 2015-01-01
US20090321252A1 (en) 2009-12-31
US8137513B2 (en) 2012-03-20
JP2010007151A (ja) 2010-01-14
KR20100003231A (ko) 2010-01-07

Similar Documents

Publication Publication Date Title
US8277623B2 (en) Conductive diamond electrode and ozone generator using the same
KR101340239B1 (ko) 오존 생성 장치
KR101246525B1 (ko) 전해 황산에 의한 세정방법 및 반도체장치의 제조방법
US5900127A (en) Electrode for electrolysis and electrolytic cell using the electrode
KR101305656B1 (ko) 황산 전해조 및 황산 전해조를 이용한 황산 리사이클형 세정 시스템
US7566387B2 (en) Apparatus for producing ozone by electrolysis
KR101286426B1 (ko) 황산 전해방법
JPH11333458A (ja) 電解水製造装置
JP2001192874A (ja) 過硫酸溶解水の製造方法
WO2012156668A1 (en) Electrode assembly and an electrochemical cell comprising the same
JP4808551B2 (ja) 過硫酸の製造方法
JP2010007151A5 (https=)
JP4623307B2 (ja) 電解セルおよび該電解セルを用いた硫酸リサイクル型洗浄システム
JPH08206661A (ja) 硝酸塩の電気化学的回収方法及び装置
KR20060041230A (ko) 액중 전극 및 그 재료
JP3538271B2 (ja) 塩酸電解装置
Brosler et al. boron-doped diamond electrodes for electrochemical degradation of water pollutants: A critical

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R14-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

FPAY Annual fee payment

Payment date: 20160818

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20170818

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20180816

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 13

R18 Changes to party contact information recorded

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R18-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000