JP2010007151A5 - - Google Patents
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- Publication number
- JP2010007151A5 JP2010007151A5 JP2008170096A JP2008170096A JP2010007151A5 JP 2010007151 A5 JP2010007151 A5 JP 2010007151A5 JP 2008170096 A JP2008170096 A JP 2008170096A JP 2008170096 A JP2008170096 A JP 2008170096A JP 2010007151 A5 JP2010007151 A5 JP 2010007151A5
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- sulfuric acid
- anode
- conductive
- electrolytic cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 48
- 229910003460 diamond Inorganic materials 0.000 claims description 46
- 239000010432 diamond Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 27
- 238000005868 electrolysis reaction Methods 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims 3
- 239000013626 chemical specie Substances 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 description 10
- 239000001301 oxygen Substances 0.000 description 10
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 9
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- 239000012528 membrane Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 4
- YADSGOSSYOOKMP-UHFFFAOYSA-N dioxolead Chemical compound O=[Pb]=O YADSGOSSYOOKMP-UHFFFAOYSA-N 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000003014 ion exchange membrane Substances 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- -1 persulfate ions Chemical class 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000544 Gore-Tex Polymers 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-M hydrogensulfate Chemical compound OS([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-M 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 150000004968 peroxymonosulfuric acids Chemical class 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910003446 platinum oxide Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008170096A JP5207529B2 (ja) | 2008-06-30 | 2008-06-30 | 硫酸電解槽及び硫酸電解槽を用いた硫酸リサイクル型洗浄システム |
| US12/459,134 US8137513B2 (en) | 2008-06-30 | 2009-06-26 | Sulfuric acid electrolytic cell and a sulfuric acid recycle type cleaning system applying the sulfuric acid electrolytic cell |
| TW98121491A TWI467058B (zh) | 2008-06-30 | 2009-06-26 | 硫酸電解槽及使用硫酸電解槽之硫酸循環型清洗系統 |
| KR1020090058404A KR101305656B1 (ko) | 2008-06-30 | 2009-06-29 | 황산 전해조 및 황산 전해조를 이용한 황산 리사이클형 세정 시스템 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008170096A JP5207529B2 (ja) | 2008-06-30 | 2008-06-30 | 硫酸電解槽及び硫酸電解槽を用いた硫酸リサイクル型洗浄システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010007151A JP2010007151A (ja) | 2010-01-14 |
| JP2010007151A5 true JP2010007151A5 (https=) | 2010-12-02 |
| JP5207529B2 JP5207529B2 (ja) | 2013-06-12 |
Family
ID=41446087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008170096A Active JP5207529B2 (ja) | 2008-06-30 | 2008-06-30 | 硫酸電解槽及び硫酸電解槽を用いた硫酸リサイクル型洗浄システム |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8137513B2 (https=) |
| JP (1) | JP5207529B2 (https=) |
| KR (1) | KR101305656B1 (https=) |
| TW (1) | TWI467058B (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITMI20121909A1 (it) * | 2012-11-09 | 2014-05-10 | Industrie De Nora Spa | Cella elettrolitica dotata di microelettrodi |
| JP6750293B2 (ja) * | 2016-04-28 | 2020-09-02 | 栗田工業株式会社 | プラスチック表面の処理方法 |
| DE102018208624A1 (de) | 2018-05-30 | 2019-12-05 | Thyssenkrupp Uhde Chlorine Engineers Gmbh | Verfahren und Vorrichtung zum Bereitstellen von wenigstens einem Produktstrom durch Elektrolyse sowie Verwendung |
| JP6992190B2 (ja) * | 2018-09-06 | 2022-01-13 | Ｐｈｃ株式会社 | 培養装置 |
| WO2021015120A1 (ja) * | 2019-07-19 | 2021-01-28 | デノラ・ペルメレック株式会社 | 電解槽用ガスケット及びそれを用いた電解槽 |
| CN116254536A (zh) * | 2023-02-17 | 2023-06-13 | 九江斯坦德能源工业有限公司 | 一种生箔机钛阳极板清洗剂及清洗方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1595193A (en) * | 1977-03-04 | 1981-08-12 | Ici Ltd | Diaphragm cell |
| JP3596997B2 (ja) * | 1996-11-12 | 2004-12-02 | ペルメレック電極株式会社 | 電極給電体、その製造方法及び過酸化水素製造用電解槽 |
| DE10019683A1 (de) * | 2000-04-20 | 2001-10-25 | Degussa | Verfahren zur Herstellung von Alkalimetall- und Ammoniumperoxodisulfat |
| EP1254972A1 (fr) | 2001-05-01 | 2002-11-06 | CSEM Centre Suisse d'Electronique et de Microtechnique SA | Cellule electrochimique modulaire |
| KR100684064B1 (ko) * | 2002-04-02 | 2007-02-16 | 페르메렉덴꾜꾸가부시끼가이샤 | 기능수, 및 이의 제조방법 및 제조장치 |
| JP4053805B2 (ja) * | 2002-04-02 | 2008-02-27 | シルトロニック・ジャパン株式会社 | 機能水、その製造方法及び製造装置 |
| JP4116949B2 (ja) * | 2003-07-29 | 2008-07-09 | ペルメレック電極株式会社 | 電気化学的殺菌及び制菌方法 |
| JP4407529B2 (ja) * | 2005-02-16 | 2010-02-03 | 栗田工業株式会社 | 硫酸リサイクル型洗浄システム |
| JP2006225694A (ja) * | 2005-02-16 | 2006-08-31 | Kurita Water Ind Ltd | 電気分解セル |
| JP4673696B2 (ja) * | 2005-08-01 | 2011-04-20 | ペルメレック電極株式会社 | 導電性ダイヤモンド電極及びその製造方法 |
| JP4500745B2 (ja) * | 2005-08-03 | 2010-07-14 | ペルメレック電極株式会社 | 電解用電極の製造方法 |
| JP4623307B2 (ja) | 2006-03-29 | 2011-02-02 | 栗田工業株式会社 | 電解セルおよび該電解セルを用いた硫酸リサイクル型洗浄システム |
| JP4808551B2 (ja) | 2006-06-16 | 2011-11-02 | クロリンエンジニアズ株式会社 | 過硫酸の製造方法 |
| TWI351446B (en) * | 2006-06-16 | 2011-11-01 | Toshiba Kk | Cleaning system and cleaning method |
| KR20090093323A (ko) * | 2008-02-29 | 2009-09-02 | 삼성전자주식회사 | 탈이온화 장치 및 그 제조방법 |
-
2008
- 2008-06-30 JP JP2008170096A patent/JP5207529B2/ja active Active
-
2009
- 2009-06-26 US US12/459,134 patent/US8137513B2/en active Active
- 2009-06-26 TW TW98121491A patent/TWI467058B/zh active
- 2009-06-29 KR KR1020090058404A patent/KR101305656B1/ko active Active
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