KR101226071B1 - 음향 에너지를 발생시키기 위한 장치, 및 그것을 만드는 방법 - Google Patents

음향 에너지를 발생시키기 위한 장치, 및 그것을 만드는 방법 Download PDF

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Publication number
KR101226071B1
KR101226071B1 KR1020107012447A KR20107012447A KR101226071B1 KR 101226071 B1 KR101226071 B1 KR 101226071B1 KR 1020107012447 A KR1020107012447 A KR 1020107012447A KR 20107012447 A KR20107012447 A KR 20107012447A KR 101226071 B1 KR101226071 B1 KR 101226071B1
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composite assembly
electrode
pillar
pillars
width
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KR20100098525A (ko
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존 코블러
리차드 노박
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아크리온 테크놀로지즈 인코포레이티드
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Assigned to 아크리온 시스템즈 엘엘씨 reassignment 아크리온 시스템즈 엘엘씨 권리의 전부이전등록 Assignors: 아크리온 테크놀로지즈 인코포레이티드
Assigned to 나우라 아크리온 인코포레이티드 reassignment 나우라 아크리온 인코포레이티드 권리의 전부이전등록 Assignors: 아크리온 시스템즈 엘엘씨
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/092—Forming composite materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
KR1020107012447A 2007-11-06 2008-11-06 음향 에너지를 발생시키기 위한 장치, 및 그것을 만드는 방법 Active KR101226071B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US98594707P 2007-11-06 2007-11-06
US60/985,947 2007-11-06
US3414208P 2008-03-05 2008-03-05
US61/034,142 2008-03-05
PCT/US2008/082701 WO2009061970A1 (en) 2007-11-06 2008-11-06 Composite transducer apparatus and system for processing a substrate and method of constructing the same

Publications (2)

Publication Number Publication Date
KR20100098525A KR20100098525A (ko) 2010-09-07
KR101226071B1 true KR101226071B1 (ko) 2013-01-24

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KR1020107012447A Active KR101226071B1 (ko) 2007-11-06 2008-11-06 음향 에너지를 발생시키기 위한 장치, 및 그것을 만드는 방법

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US (2) US8279712B2 (https=)
JP (2) JP5422847B2 (https=)
KR (1) KR101226071B1 (https=)
CN (2) CN102974524B (https=)
WO (1) WO2009061970A1 (https=)

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US9049520B2 (en) 2006-01-20 2015-06-02 Akrion Systems Llc Composite transducer apparatus and system for processing a substrate and method of constructing the same
CN102974524B (zh) * 2007-11-06 2016-06-22 艾奎昂系统有限责任公司 用声能处理物体的装置和方法
US8805031B2 (en) * 2008-05-08 2014-08-12 Sonavation, Inc. Method and system for acoustic impediography biometric sensing
CN102468117B (zh) * 2010-11-05 2015-05-27 北京七星华创电子股份有限公司 一种清洁晶片装置
KR101299966B1 (ko) * 2010-11-22 2013-08-26 주식회사 휴먼스캔 고출력 초음파 프로브
CN102594278B (zh) * 2011-01-05 2014-12-31 香港理工大学 一种复合压电振子及其制备方法
US8551251B2 (en) 2011-04-28 2013-10-08 Lam Research Ag Ultrasonic treatment method and apparatus
CN102570901B (zh) * 2012-01-17 2015-12-23 罗振华 压力发电模块
JP5990930B2 (ja) 2012-02-24 2016-09-14 セイコーエプソン株式会社 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置
KR102130372B1 (ko) * 2013-02-02 2020-07-06 나우라 아크리온 인코포레이티드 음향 에너지를 이용하여 기판을 처리하기 위한 시스템
US9981139B2 (en) 2013-05-08 2018-05-29 Dalhousie University Acoustic transmitter and implantable receiver
ES2989602T3 (es) 2014-07-11 2024-11-27 Microtech Medical Technologies Ltd Transductor de múltiples celdas
FR3029435B1 (fr) * 2014-12-08 2019-11-15 Institut Polytechnique De Grenoble Dispositif vibrant comportant des reflecteurs mecaniques encastres pour definir une zone active de propagation de modes de plaque et appareil mobile comportant le dispositif
CN104646350B (zh) * 2015-02-12 2016-10-19 北京七星华创电子股份有限公司 一种图形晶圆无损伤清洗装置
KR102339058B1 (ko) 2016-03-11 2021-12-16 한국전자통신연구원 유연 압전 콤포지트 및 이를 포함하는 압전 장치
JP6907539B2 (ja) * 2017-01-06 2021-07-21 セイコーエプソン株式会社 超音波デバイス、超音波プローブ、及び超音波装置
KR101919454B1 (ko) 2017-07-31 2018-11-16 엘지디스플레이 주식회사 디스플레이 장치 및 이를 이용한 컴퓨팅 장치
EP3613514B1 (en) 2018-08-20 2025-05-21 LG Display Co., Ltd. Method of manufacturing a flexible vibration module
KR102683447B1 (ko) * 2019-03-29 2024-07-08 엘지디스플레이 주식회사 표시 장치
KR102721452B1 (ko) 2019-03-29 2024-10-23 엘지디스플레이 주식회사 플렉서블 진동 모듈 및 이를 포함하는 표시 장치
KR102662671B1 (ko) * 2019-03-29 2024-04-30 엘지디스플레이 주식회사 표시 장치
KR102679871B1 (ko) * 2019-04-03 2024-06-28 엘지디스플레이 주식회사 표시장치
CN110572756A (zh) * 2019-09-11 2019-12-13 京东方科技集团股份有限公司 定向薄膜换能器及其制备方法、扬声器
KR102759031B1 (ko) 2019-12-09 2025-01-22 엘지디스플레이 주식회사 표시장치
KR102763470B1 (ko) 2019-12-16 2025-02-05 엘지디스플레이 주식회사 표시장치
CN111085942B (zh) * 2019-12-31 2021-10-15 中国计量大学 一种基于相控空化效应的磨粒微射流抛光方法及抛光装置
KR102743312B1 (ko) * 2020-03-04 2024-12-13 엘지디스플레이 주식회사 표시장치
US12114117B2 (en) * 2020-12-09 2024-10-08 Lg Display Co., Ltd. Apparatus including vibration member to generate sound and vibration for enhancing sound characteristic and sound pressure level characteristic
KR102867807B1 (ko) * 2020-12-09 2025-10-01 엘지디스플레이 주식회사 장치
KR102904853B1 (ko) * 2020-12-22 2025-12-24 엘지디스플레이 주식회사 진동 장치 및 이를 포함하는 장치
CN113058767B (zh) * 2021-03-05 2022-05-31 Tcl华星光电技术有限公司 支撑柱及对位机构
KR20230084941A (ko) * 2021-12-06 2023-06-13 엘지디스플레이 주식회사 장치
KR20230096545A (ko) * 2021-12-23 2023-06-30 엘지디스플레이 주식회사 장치
KR20230103751A (ko) * 2021-12-31 2023-07-07 엘지디스플레이 주식회사 장치 및 이를 포함하는 운송 장치
CN116159730A (zh) * 2022-12-23 2023-05-26 东莞市西喆电子有限公司 一种超声波兆声清洗振板

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US6859984B2 (en) * 2002-09-05 2005-03-01 Vermon Method for providing a matrix array ultrasonic transducer with an integrated interconnection means
US20060235300A1 (en) * 1999-12-23 2006-10-19 Lee Weng Ultrasound transducers for imaging and therapy

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US20060235300A1 (en) * 1999-12-23 2006-10-19 Lee Weng Ultrasound transducers for imaging and therapy
US6859984B2 (en) * 2002-09-05 2005-03-01 Vermon Method for providing a matrix array ultrasonic transducer with an integrated interconnection means

Also Published As

Publication number Publication date
CN102974524B (zh) 2016-06-22
JP2014112829A (ja) 2014-06-19
CN101918151B (zh) 2013-01-02
US8279712B2 (en) 2012-10-02
JP5422847B2 (ja) 2014-02-19
CN102974524A (zh) 2013-03-20
US20090231959A1 (en) 2009-09-17
US20130167881A1 (en) 2013-07-04
CN101918151A (zh) 2010-12-15
KR20100098525A (ko) 2010-09-07
WO2009061970A1 (en) 2009-05-14
JP2011504134A (ja) 2011-02-03

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