JPS6443385A - Ultrasonic washer - Google Patents
Ultrasonic washerInfo
- Publication number
- JPS6443385A JPS6443385A JP19630487A JP19630487A JPS6443385A JP S6443385 A JPS6443385 A JP S6443385A JP 19630487 A JP19630487 A JP 19630487A JP 19630487 A JP19630487 A JP 19630487A JP S6443385 A JPS6443385 A JP S6443385A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- inorg
- synthetic resin
- ultrasonic oscillator
- prismatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To easily remove superfine particles of small grain sides by constituting an ultrasonic oscillator as a composite piezoelectric substance regularly arrayed with prismatic inorg. piezoelectric substances in a synthetic resin matrix and oscillating ultrasonic waves of a high frequency and high energy by the same. CONSTITUTION: The ultrasonic oscillator 3 of the ultrasonic washing device constituted by mounting the ultrasonic oscillator 3 at the bottom of a washing tank 1 is constituted as the composite piezoelectric substance regularly arrayed with the prismatic inorg. piezoelectric substances 31 consisting of barium titanate or the like in the synthetic resin matrix 32, such as silicon, by which the ultrasonic waves of the high frequency and the high energy are oscillated. The synthetic resin of the matrix 32 has a modulus of elasticity of 1 to 50 kg.f/mm<2> and the inorg. piezoelectric substance 31 has a moudlus of elasticity of 6,000 kg.f/mm<2> . Consequently, the superfine particles of the small grain sizes may be easily removed. Even the particles of intricate shapes may be washed and the easy washing of highly integrated semiconductor devices is made possible.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19630487A JPS6443385A (en) | 1987-08-07 | 1987-08-07 | Ultrasonic washer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19630487A JPS6443385A (en) | 1987-08-07 | 1987-08-07 | Ultrasonic washer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6443385A true JPS6443385A (en) | 1989-02-15 |
JPH0583313B2 JPH0583313B2 (en) | 1993-11-25 |
Family
ID=16355581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19630487A Granted JPS6443385A (en) | 1987-08-07 | 1987-08-07 | Ultrasonic washer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6443385A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012043090A1 (en) * | 2010-09-30 | 2012-04-05 | コニカミノルタオプト株式会社 | Method of producing substrate for use in information recording medium, and washing device used in production thereof |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102974524B (en) * | 2007-11-06 | 2016-06-22 | 艾奎昂系统有限责任公司 | The apparatus and method of object are processed with acoustic energy |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4945563A (en) * | 1972-09-07 | 1974-05-01 | ||
JPS5419151A (en) * | 1977-07-13 | 1979-02-13 | Mitsubishi Electric Corp | Multishunt constant voltage device |
JPS5654977U (en) * | 1979-10-05 | 1981-05-13 | ||
JPS59182418A (en) * | 1983-03-31 | 1984-10-17 | Tdk Corp | Washing device of contact lens |
-
1987
- 1987-08-07 JP JP19630487A patent/JPS6443385A/en active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4945563A (en) * | 1972-09-07 | 1974-05-01 | ||
JPS5419151A (en) * | 1977-07-13 | 1979-02-13 | Mitsubishi Electric Corp | Multishunt constant voltage device |
JPS5654977U (en) * | 1979-10-05 | 1981-05-13 | ||
JPS59182418A (en) * | 1983-03-31 | 1984-10-17 | Tdk Corp | Washing device of contact lens |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012043090A1 (en) * | 2010-09-30 | 2012-04-05 | コニカミノルタオプト株式会社 | Method of producing substrate for use in information recording medium, and washing device used in production thereof |
JPWO2012043090A1 (en) * | 2010-09-30 | 2014-02-06 | コニカミノルタ株式会社 | Manufacturing method of substrate for information recording medium and cleaning apparatus used for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JPH0583313B2 (en) | 1993-11-25 |
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