JPS6443385A - Ultrasonic washer - Google Patents

Ultrasonic washer

Info

Publication number
JPS6443385A
JPS6443385A JP19630487A JP19630487A JPS6443385A JP S6443385 A JPS6443385 A JP S6443385A JP 19630487 A JP19630487 A JP 19630487A JP 19630487 A JP19630487 A JP 19630487A JP S6443385 A JPS6443385 A JP S6443385A
Authority
JP
Japan
Prior art keywords
ultrasonic
inorg
synthetic resin
ultrasonic oscillator
prismatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19630487A
Other languages
Japanese (ja)
Other versions
JPH0583313B2 (en
Inventor
Keishin Ohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Kasei Co Ltd
Original Assignee
Sekisui Plastics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Plastics Co Ltd filed Critical Sekisui Plastics Co Ltd
Priority to JP19630487A priority Critical patent/JPS6443385A/en
Publication of JPS6443385A publication Critical patent/JPS6443385A/en
Publication of JPH0583313B2 publication Critical patent/JPH0583313B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To easily remove superfine particles of small grain sides by constituting an ultrasonic oscillator as a composite piezoelectric substance regularly arrayed with prismatic inorg. piezoelectric substances in a synthetic resin matrix and oscillating ultrasonic waves of a high frequency and high energy by the same. CONSTITUTION: The ultrasonic oscillator 3 of the ultrasonic washing device constituted by mounting the ultrasonic oscillator 3 at the bottom of a washing tank 1 is constituted as the composite piezoelectric substance regularly arrayed with the prismatic inorg. piezoelectric substances 31 consisting of barium titanate or the like in the synthetic resin matrix 32, such as silicon, by which the ultrasonic waves of the high frequency and the high energy are oscillated. The synthetic resin of the matrix 32 has a modulus of elasticity of 1 to 50 kg.f/mm<2> and the inorg. piezoelectric substance 31 has a moudlus of elasticity of 6,000 kg.f/mm<2> . Consequently, the superfine particles of the small grain sizes may be easily removed. Even the particles of intricate shapes may be washed and the easy washing of highly integrated semiconductor devices is made possible.
JP19630487A 1987-08-07 1987-08-07 Ultrasonic washer Granted JPS6443385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19630487A JPS6443385A (en) 1987-08-07 1987-08-07 Ultrasonic washer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19630487A JPS6443385A (en) 1987-08-07 1987-08-07 Ultrasonic washer

Publications (2)

Publication Number Publication Date
JPS6443385A true JPS6443385A (en) 1989-02-15
JPH0583313B2 JPH0583313B2 (en) 1993-11-25

Family

ID=16355581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19630487A Granted JPS6443385A (en) 1987-08-07 1987-08-07 Ultrasonic washer

Country Status (1)

Country Link
JP (1) JPS6443385A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012043090A1 (en) * 2010-09-30 2012-04-05 コニカミノルタオプト株式会社 Method of producing substrate for use in information recording medium, and washing device used in production thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102974524B (en) * 2007-11-06 2016-06-22 艾奎昂系统有限责任公司 The apparatus and method of object are processed with acoustic energy

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945563A (en) * 1972-09-07 1974-05-01
JPS5419151A (en) * 1977-07-13 1979-02-13 Mitsubishi Electric Corp Multishunt constant voltage device
JPS5654977U (en) * 1979-10-05 1981-05-13
JPS59182418A (en) * 1983-03-31 1984-10-17 Tdk Corp Washing device of contact lens

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4945563A (en) * 1972-09-07 1974-05-01
JPS5419151A (en) * 1977-07-13 1979-02-13 Mitsubishi Electric Corp Multishunt constant voltage device
JPS5654977U (en) * 1979-10-05 1981-05-13
JPS59182418A (en) * 1983-03-31 1984-10-17 Tdk Corp Washing device of contact lens

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012043090A1 (en) * 2010-09-30 2012-04-05 コニカミノルタオプト株式会社 Method of producing substrate for use in information recording medium, and washing device used in production thereof
JPWO2012043090A1 (en) * 2010-09-30 2014-02-06 コニカミノルタ株式会社 Manufacturing method of substrate for information recording medium and cleaning apparatus used for manufacturing the same

Also Published As

Publication number Publication date
JPH0583313B2 (en) 1993-11-25

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