JPS55147820A - Working method of substrate for elastic surface wave filter - Google Patents

Working method of substrate for elastic surface wave filter

Info

Publication number
JPS55147820A
JPS55147820A JP5568579A JP5568579A JPS55147820A JP S55147820 A JPS55147820 A JP S55147820A JP 5568579 A JP5568579 A JP 5568579A JP 5568579 A JP5568579 A JP 5568579A JP S55147820 A JPS55147820 A JP S55147820A
Authority
JP
Japan
Prior art keywords
jig
fitted
wafer
cone
main face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5568579A
Other languages
Japanese (ja)
Inventor
Teruo Kurokawa
Hitoshi Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5568579A priority Critical patent/JPS55147820A/en
Publication of JPS55147820A publication Critical patent/JPS55147820A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To eliminate the influence of the bulk wave to improve the characteristic by arranging a jig fitted to an ultrasonic oscillation unit onto the second main face of the substrate and by giving ultrasonic vibration to the jig above, where the main face is made rough, so that the jig may be vibrated in parallel with the main face to make the main face rough. CONSTITUTION:In ultrasonic oscillation unit 10, magnetostriction converting element 12 is fitted to ultrasonic osillator 11, and cone 13 is fitted to element 12. Plate- shaped material 21 having an area larger than that of the piezoelectric substrate wafer of a processed material is held by support material 22 in the jig fitted to cone 13, and jig 20 is fitted to cone 13 by this support material 22, and many trigonal pyramid-shaped protrusions 23 are formed on the bottom face of plate-shaped material 21, and at a working time, this jig is brought into contact with the surface of the wafer and is arranged so that the bottom face may be opposite to the surface of the wafer. For the working of the wafer surface, jig 20 has the bottom face brought into contact with the surface of wafer 24 fixed onto working stand 25 and so on, and unit 10 is operated to generate ultrasonic vibration, and this vibration is given to jig 20 through cone 13 to vibrate jig 20 in the transverse direction.
JP5568579A 1979-05-09 1979-05-09 Working method of substrate for elastic surface wave filter Pending JPS55147820A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5568579A JPS55147820A (en) 1979-05-09 1979-05-09 Working method of substrate for elastic surface wave filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5568579A JPS55147820A (en) 1979-05-09 1979-05-09 Working method of substrate for elastic surface wave filter

Publications (1)

Publication Number Publication Date
JPS55147820A true JPS55147820A (en) 1980-11-18

Family

ID=13005747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5568579A Pending JPS55147820A (en) 1979-05-09 1979-05-09 Working method of substrate for elastic surface wave filter

Country Status (1)

Country Link
JP (1) JPS55147820A (en)

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