JPS6448712A - Transport device - Google Patents

Transport device

Info

Publication number
JPS6448712A
JPS6448712A JP20377887A JP20377887A JPS6448712A JP S6448712 A JPS6448712 A JP S6448712A JP 20377887 A JP20377887 A JP 20377887A JP 20377887 A JP20377887 A JP 20377887A JP S6448712 A JPS6448712 A JP S6448712A
Authority
JP
Japan
Prior art keywords
amplitude
rail
time series
wave form
easy adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20377887A
Other languages
Japanese (ja)
Inventor
Shinichi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP20377887A priority Critical patent/JPS6448712A/en
Publication of JPS6448712A publication Critical patent/JPS6448712A/en
Pending legal-status Critical Current

Links

Landscapes

  • Jigging Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To provide a semiconductor element transport device with easy adjustment and good accuracy by incorporating a number of ultrasonic vibrators to the transport surface of a rail having steps for placing of objects, and by allowing the amplitude of each vibrator to vary in a wave form with time series. CONSTITUTION:A control device 5 gives a signal to each ultrasonic vibrator 4, and its amplitude is varied in a wave form with time series. Thereby a lead frame 3 is transported in a certain direction. This provides easy adjustment and changeover of the transport amount, prevent objects and the rail from damages, and enhances the accuracy.
JP20377887A 1987-08-17 1987-08-17 Transport device Pending JPS6448712A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20377887A JPS6448712A (en) 1987-08-17 1987-08-17 Transport device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20377887A JPS6448712A (en) 1987-08-17 1987-08-17 Transport device

Publications (1)

Publication Number Publication Date
JPS6448712A true JPS6448712A (en) 1989-02-23

Family

ID=16479625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20377887A Pending JPS6448712A (en) 1987-08-17 1987-08-17 Transport device

Country Status (1)

Country Link
JP (1) JPS6448712A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5556831A (en) * 1991-11-29 1996-09-17 Alactel Alsthom Compagnie Generale D'electricite Method of treating a part made of a superconductive ceramic of the (Ln).sub. Ba2 Cu3 O7-δ type
JP2006199416A (en) * 2005-01-19 2006-08-03 Sankyo Mfg Co Ltd Article carrying device
JP2006199415A (en) * 2005-01-19 2006-08-03 Sankyo Mfg Co Ltd Article carrying device
JP2017043431A (en) * 2015-08-24 2017-03-02 シンフォニアテクノロジー株式会社 Workpiece carrier device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5556831A (en) * 1991-11-29 1996-09-17 Alactel Alsthom Compagnie Generale D'electricite Method of treating a part made of a superconductive ceramic of the (Ln).sub. Ba2 Cu3 O7-δ type
JP2006199416A (en) * 2005-01-19 2006-08-03 Sankyo Mfg Co Ltd Article carrying device
JP2006199415A (en) * 2005-01-19 2006-08-03 Sankyo Mfg Co Ltd Article carrying device
JP2017043431A (en) * 2015-08-24 2017-03-02 シンフォニアテクノロジー株式会社 Workpiece carrier device
CN106477249A (en) * 2015-08-24 2017-03-08 昕芙旎雅有限公司 Work transfer device

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