JPS6411342A - Holding of semiconductor substrate - Google Patents
Holding of semiconductor substrateInfo
- Publication number
- JPS6411342A JPS6411342A JP62166996A JP16699687A JPS6411342A JP S6411342 A JPS6411342 A JP S6411342A JP 62166996 A JP62166996 A JP 62166996A JP 16699687 A JP16699687 A JP 16699687A JP S6411342 A JPS6411342 A JP S6411342A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- liquid
- holding
- abrasive
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To avoid penetration of abrasive liquid between a substrate and a wafer mounting assembly and also prevent detachment of the substrate as well as etching of the rear by using liquid insoluble in abrasive liquid as liquid attracting the substrate when a polishing treatment of the semiconductor substrate is performed. CONSTITUTION:Holding liquid 3 applied on a mounting material 22 has insolubility in water-soluble abrasive liquid solvent for polishing. A substrate 4 is pressed into the mounting material 22 through holding liquid 3 and is attracted to the mounting material 22 by surface tension of holding liquid 3. If the substrate 4 is held in this way, attachment and detachment of the substrate 4 can be easily performed in the same manner as that is attracted with water and further, when washed in and after, the process of polishing, holding liquid 3 is so insoluble in abrasive liquid that no abrasive liquid enters the rear of the substrate 4 to come up to the surface or no etching takes place in the rear of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62166996A JPS6411342A (en) | 1987-07-06 | 1987-07-06 | Holding of semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62166996A JPS6411342A (en) | 1987-07-06 | 1987-07-06 | Holding of semiconductor substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6411342A true JPS6411342A (en) | 1989-01-13 |
Family
ID=15841447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62166996A Pending JPS6411342A (en) | 1987-07-06 | 1987-07-06 | Holding of semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6411342A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06132397A (en) * | 1992-10-19 | 1994-05-13 | Rohm Co Ltd | Dicing method |
| EP0811494A2 (en) * | 1996-06-07 | 1997-12-10 | Canon Kabushiki Kaisha | Method for manufacturing a component having a movable member for use of liquid discharge, and method for manufacturing a liquid jet head using such component, and liquid jet head manufactured by such method |
| CN105280534A (en) * | 2014-06-02 | 2016-01-27 | 晶元光电股份有限公司 | Susceptor |
-
1987
- 1987-07-06 JP JP62166996A patent/JPS6411342A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06132397A (en) * | 1992-10-19 | 1994-05-13 | Rohm Co Ltd | Dicing method |
| EP0811494A2 (en) * | 1996-06-07 | 1997-12-10 | Canon Kabushiki Kaisha | Method for manufacturing a component having a movable member for use of liquid discharge, and method for manufacturing a liquid jet head using such component, and liquid jet head manufactured by such method |
| EP0811494A3 (en) * | 1996-06-07 | 2000-02-02 | Canon Kabushiki Kaisha | Method for manufacturing a component having a movable member for use of liquid discharge, and method for manufacturing a liquid jet head using such component, and liquid jet head manufactured by such method |
| US6516509B1 (en) | 1996-06-07 | 2003-02-11 | Canon Kabushiki Kaisha | Method of manufacturing a liquid jet head having a plurality of movable members |
| CN105280534A (en) * | 2014-06-02 | 2016-01-27 | 晶元光电股份有限公司 | Susceptor |
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