KR101201577B1 - 향상된 조직 균일성을 가진 내화 금속판 - Google Patents

향상된 조직 균일성을 가진 내화 금속판 Download PDF

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Publication number
KR101201577B1
KR101201577B1 KR1020107002603A KR20107002603A KR101201577B1 KR 101201577 B1 KR101201577 B1 KR 101201577B1 KR 1020107002603 A KR1020107002603 A KR 1020107002603A KR 20107002603 A KR20107002603 A KR 20107002603A KR 101201577 B1 KR101201577 B1 KR 101201577B1
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South Korea
Prior art keywords
refractory metal
thickness
plate
metal plate
gradient
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Korean (ko)
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KR20100054127A (ko
Inventor
피터 알. 젭슨
딘서 보즈카야
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에이치. 씨. 스타아크 아이앤씨
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
    • B21B1/22—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
    • B21B1/22—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling plates, strips, bands or sheets of indefinite length
    • B21B1/227—Surface roughening or texturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/18—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces by using pressure rollers
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18—High-melting or refractory metals or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B2265/00—Forming parameters
    • B21B2265/24—Forming parameters asymmetric rolling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B2267/00—Roll parameters
    • B21B2267/02—Roll dimensions
    • B21B2267/06—Roll diameter
    • B21B2267/065—Top and bottom roll have different diameters; Asymmetrical rolling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B2273/00—Path parameters
    • B21B2273/02—Vertical deviation, e.g. slack, looper height
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21B—ROLLING OF METAL
    • B21B39/00—Arrangements for moving, supporting, or positioning work, or controlling its movement, combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills
    • B21B39/02—Feeding or supporting work; Braking or tensioning arrangements, e.g. threading arrangements
    • B21B39/04—Lifting or lowering work for conveying purposes, e.g. tilting tables arranged immediately in front of or behind the pass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12014—All metal or with adjacent metals having metal particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12458—All metal or with adjacent metals having composition, density, or hardness gradient

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Metal Rolling (AREA)
  • Powder Metallurgy (AREA)
  • Control Of Metal Rolling (AREA)
  • Forging (AREA)
KR1020107002603A 2007-08-06 2008-08-05 향상된 조직 균일성을 가진 내화 금속판 Active KR101201577B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US96361607P 2007-08-06 2007-08-06
US60/963,616 2007-08-06
PCT/US2008/009388 WO2009020587A1 (en) 2007-08-06 2008-08-05 Refractory metal plates with improved uniformity of texture

Publications (2)

Publication Number Publication Date
KR20100054127A KR20100054127A (ko) 2010-05-24
KR101201577B1 true KR101201577B1 (ko) 2012-11-14

Family

ID=40020260

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020107002603A Active KR101201577B1 (ko) 2007-08-06 2008-08-05 향상된 조직 균일성을 가진 내화 금속판
KR1020107002711A Active KR101204245B1 (ko) 2007-08-06 2008-08-06 틸트 압연에 의해 플레이트 및 시트의 조직을 제어하기 위한 방법 및 장치
KR1020127018608A Active KR101365774B1 (ko) 2007-08-06 2008-08-06 틸트 압연에 의해 플레이트 및 시트의 조직을 제어하기 위한 방법 및 장치

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020107002711A Active KR101204245B1 (ko) 2007-08-06 2008-08-06 틸트 압연에 의해 플레이트 및 시트의 조직을 제어하기 위한 방법 및 장치
KR1020127018608A Active KR101365774B1 (ko) 2007-08-06 2008-08-06 틸트 압연에 의해 플레이트 및 시트의 조직을 제어하기 위한 방법 및 장치

Country Status (7)

Country Link
US (5) US9095885B2 (https=)
EP (3) EP2185300B1 (https=)
JP (6) JP5389802B2 (https=)
KR (3) KR101201577B1 (https=)
CN (2) CN103350108B (https=)
CA (1) CA2694355A1 (https=)
WO (2) WO2009020587A1 (https=)

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US7837929B2 (en) * 2005-10-20 2010-11-23 H.C. Starck Inc. Methods of making molybdenum titanium sputtering plates and targets
EP2185300B1 (en) 2007-08-06 2018-10-24 H. C. Starck, Inc. Refractory metal plates with improved uniformity of texture
KR101626286B1 (ko) * 2008-11-03 2016-06-01 토소우 에스엠디, 인크 스퍼터 타겟 제조 방법 및 이에 의해 제조된 스퍼터 타겟
US8449817B2 (en) 2010-06-30 2013-05-28 H.C. Stark, Inc. Molybdenum-containing targets comprising three metal elements
US8449818B2 (en) 2010-06-30 2013-05-28 H. C. Starck, Inc. Molybdenum containing targets
KR20160021299A (ko) 2011-05-10 2016-02-24 에이치. 씨. 스타아크 아이앤씨 멀티-블록 스퍼터링 타겟 및 이에 관한 제조방법 및 물품
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CN102719772B (zh) * 2012-07-04 2013-08-07 北京科技大学 有两表面不同粗糙度和非对称梯度组织的铜材及成形方法
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CN104646416B (zh) * 2015-01-16 2016-08-17 湖南科技大学 一种金属板材强剪切轧制成形方法与装置
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WO2016190159A1 (ja) * 2015-05-22 2016-12-01 Ｊｘ金属株式会社 タンタルスパッタリングターゲット及びその製造方法
JP6638639B2 (ja) * 2016-12-19 2020-01-29 トヨタ自動車株式会社 差厚金属板の製造方法、プレス部品の製造方法及び加工機
CN106756832B (zh) * 2016-12-27 2019-03-12 宁夏东方钽业股份有限公司 一种靶材的制备方法
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CN109213086B (zh) * 2017-06-29 2020-10-23 台湾积体电路制造股份有限公司 制程系统与制程方法
CN108465700B (zh) * 2018-03-13 2020-09-08 重庆大学 一种获得均匀组织和织构的溅射靶材用钽板轧制方法
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CN115116857B (zh) * 2022-07-01 2024-08-02 江西蓝微电子科技有限公司 一种绝缘覆合金键合丝及其制备方法
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US9767999B2 (en) 2017-09-19
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