KR101161961B1 - 도포 장치 및 도포 방법 - Google Patents

도포 장치 및 도포 방법 Download PDF

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Publication number
KR101161961B1
KR101161961B1 KR1020100054780A KR20100054780A KR101161961B1 KR 101161961 B1 KR101161961 B1 KR 101161961B1 KR 1020100054780 A KR1020100054780 A KR 1020100054780A KR 20100054780 A KR20100054780 A KR 20100054780A KR 101161961 B1 KR101161961 B1 KR 101161961B1
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KR
South Korea
Prior art keywords
substrate
board
coating
gantry
loading table
Prior art date
Application number
KR1020100054780A
Other languages
English (en)
Korean (ko)
Other versions
KR20100132929A (ko
Inventor
다다오 고스게
신지 마에하라
유끼히로 가와스미
이사무 마루야마
시게루 이시다
Original Assignee
가부시키가이샤 히타치플랜트테크놀로지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 가부시키가이샤 히타치플랜트테크놀로지 filed Critical 가부시키가이샤 히타치플랜트테크놀로지
Publication of KR20100132929A publication Critical patent/KR20100132929A/ko
Application granted granted Critical
Publication of KR101161961B1 publication Critical patent/KR101161961B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G02F1/13415—Drop filling process

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Liquid Crystal (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1020100054780A 2009-06-10 2010-06-10 도포 장치 및 도포 방법 KR101161961B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2009-139430 2009-06-10
JP2009139430A JP5525190B2 (ja) 2009-06-10 2009-06-10 塗布装置及び塗布方法

Publications (2)

Publication Number Publication Date
KR20100132929A KR20100132929A (ko) 2010-12-20
KR101161961B1 true KR101161961B1 (ko) 2012-07-04

Family

ID=43335597

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020100054780A KR101161961B1 (ko) 2009-06-10 2010-06-10 도포 장치 및 도포 방법

Country Status (4)

Country Link
JP (1) JP5525190B2 (ja)
KR (1) KR101161961B1 (ja)
CN (1) CN101920235B (ja)
TW (1) TWI460020B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112742668A (zh) * 2020-12-24 2021-05-04 苏州桐力光电股份有限公司 显示屏点胶线

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5897263B2 (ja) * 2011-03-18 2016-03-30 株式会社日立製作所 ペースト塗布ヘッド，ペースト塗布装置及びペースト塗布方法
TW201314372A (zh) * 2011-09-26 2013-04-01 Dainippon Screen Mfg 塗佈裝置
JP5943855B2 (ja) * 2013-02-15 2016-07-05 中外炉工業株式会社 ロール搬送式コータ
CN105618300B (zh) * 2015-12-25 2018-10-30 天津滨海光热反射技术有限公司 专用于制作光热发电反射镜的喷涂设备及其运行方法
CN105728264B (zh) * 2016-04-18 2018-07-17 大连华工创新科技股份有限公司 太阳能玻璃板自动涂胶设备
US10881005B2 (en) * 2016-06-08 2020-12-29 Nordson Corporation Methods for dispensing a liquid or viscous material onto a substrate
CN105964501A (zh) * 2016-06-28 2016-09-28 海宁辛帝亚自动化科技有限公司 一种自动输料装置
JP6737649B2 (ja) * 2016-07-04 2020-08-12 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
CN107952616A (zh) * 2018-01-16 2018-04-24 江苏中矿大正表面工程技术有限公司 一种用于大型桥隧钢沉管外表面的涂装设备
JP6931249B2 (ja) * 2019-03-28 2021-09-01 Ａｉメカテック株式会社 インクジェット方式の薄膜形成装置
US11282730B2 (en) 2019-08-02 2022-03-22 Rohinni, LLC Bridge apparatus for semiconductor die transfer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004195371A (ja) * 2002-12-18 2004-07-15 Seiko Epson Corp 液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器
JP2004298775A (ja) * 2003-03-31 2004-10-28 Dainippon Printing Co Ltd 塗布装置及び塗布方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125549U (ja) * 1988-02-22 1989-08-28
JP3701882B2 (ja) * 2001-05-25 2005-10-05 株式会社 日立インダストリイズ ペースト塗布機
JP3823050B2 (ja) * 2001-12-07 2006-09-20 株式会社 日立インダストリイズ ペースト塗布機
JP3690380B2 (ja) * 2002-08-02 2005-08-31 セイコーエプソン株式会社 材料の配置方法、電子装置の製造方法、電気光学装置の製造方法
JP2007105643A (ja) * 2005-10-14 2007-04-26 Hitachi Plant Technologies Ltd ペースト塗布装置
JP4893016B2 (ja) * 2006-02-17 2012-03-07 株式会社日立プラントテクノロジー ペースト塗布機
JP4971730B2 (ja) * 2006-09-06 2012-07-11 積水化学工業株式会社 プラズマ表面処理装置
TW200914146A (en) * 2007-02-06 2009-04-01 Shibaura Mechatronics Corp Paste applicator and paste application method
KR20100056124A (ko) * 2008-11-19 2010-05-27 주식회사 탑 엔지니어링 페이스트 디스펜서 및 이를 이용한 페이스트 도포방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004195371A (ja) * 2002-12-18 2004-07-15 Seiko Epson Corp 液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器
JP2004298775A (ja) * 2003-03-31 2004-10-28 Dainippon Printing Co Ltd 塗布装置及び塗布方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112742668A (zh) * 2020-12-24 2021-05-04 苏州桐力光电股份有限公司 显示屏点胶线
CN112742668B (zh) * 2020-12-24 2022-02-11 苏州桐力光电股份有限公司 显示屏点胶线

Also Published As

Publication number Publication date
TWI460020B (zh) 2014-11-11
CN101920235B (zh) 2013-08-28
CN101920235A (zh) 2010-12-22
JP2010284580A (ja) 2010-12-24
TW201111061A (en) 2011-04-01
KR20100132929A (ko) 2010-12-20
JP5525190B2 (ja) 2014-06-18

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