KR101122744B1 - Sheet type contactor with contact pad having vertex - Google Patents

Abstract

The present invention relates to a sheet-type contactor having an electrode provided with a vertex and a method for manufacturing the sheet-type contactor, and more particularly, a hemispherical upper terminal requiring contact and a lower terminal disposed at a lower position corresponding to the upper terminal. A sheet-type contactor positioned between and electrically connecting the upper terminal and the lower terminal to each other, comprising: a sheet member having a via hole formed at a position corresponding to the upper terminal, a sheet member inserted into a via hole of the sheet member, The electrode is spaced apart from each other with respect to the surface direction and has an electrode extending in the thickness direction of the sheet member, the electrode is exposed to the surface of the sheet member and protrudes from the surface of the sheet member and the sheet from the upper surface A hole extending along the thickness direction of the member is formed, the upper end of the inner peripheral wall of the hole Least the surface portion with a vertex at least three edges meet is formed; A rear portion exposed to the rear surface of the sheet member and protruding from the rear surface of the sheet member; And a connection part disposed in the via hole, the connection part being integrally connected to the surface part and the rear part so as to electrically connect the surface part and the back part to each other.

Description

Sheet-type contactor having an electrode provided with a vertex {Sheet type contactor with contact pad having vertex}

The present invention relates to a sheet-type contactor having an electrode provided with a vertex, and more particularly, to a sheet-type contactor provided with a vertex on an electrode to be contacted so that terminals can be reliably electrically connected through the vertex of the electrode.

In general, a sheet-type contactor is used for coupling between terminals requiring electrical connection. Such a sheet contactor is particularly disposed between a terminal of a semiconductor device requiring electrical inspection and a test apparatus that detects a defect by applying an electrical signal to the terminal of the semiconductor device. The reason for this is that when the terminals of many semiconductor devices are in direct contact with the test apparatus, the terminals of the test apparatus may be damaged. Therefore, the semiconductor device is used so that the signal of the test apparatus can be indirectly applied by contacting the sheet contactor in a state in which the intermediate means is mounted in the test apparatus, such as the sheet contactor.

Such a sheet contactor may be used by itself, or may be used together with an anisotropic conductive sheet or used with pogo pins or the like.

On the other hand, the prior art for such a sheet-type contactor has a structure in which the electrode 30 exposed through the surface and the back is formed in the sheet member 20 in which the via hole 21 is formed, as shown in FIG.

As shown in FIG. 3, the electrode 30 has a hole 31 having a circular cross section at the center thereof, and the hole 31 has a shape corresponding to the via hole 21. On the other hand, such an electrode 30 is formed through a process such as conventional deposition and etching.

The sheet-type contactor according to the related art is in contact with the terminal 41 of the semiconductor device 40 disposed on the upper side in the state of being mounted in the test apparatus as shown in FIG. 2. ) And the terminal 51 of the test device 50 are electrically connected to each other.

Subsequently, when a predetermined electrical signal flows from the test apparatus 50, the electrical signal flows into the terminal 41 of the semiconductor device 40 through the terminal 51 and the electrode 30. The test can be performed.

The sheet type contactor according to the prior art has the following problems.

First, the terminal of the semiconductor device has a BGA (Ball Grid Array) form, the terminal is in contact with the peripheral wall of the hole formed in the center of the electrode. At this time, the contact between the electrode and the terminal is a line contact is a factor that makes it impossible to establish an electrically reliable connection.

In addition, as the terminals of the semiconductor device frequently come into contact with each other, foreign matters, etc. buried in the terminals may accumulate on the electrodes, which causes a problem that the foreign matters interfere with the electrical connection with the terminals.

On the other hand, in order to prevent a decrease in the electrical connection force due to foreign matter, a fine nickel powder may be attached to the surface of the electrode.

However, in the case of contacting the nickel powder with such an electrode, there is a disadvantage that the size of the powder may be uneven, which may damage the terminal. In other words, the nickel powder is attached to the surface of the electrode by a predetermined plating joint, wherein it is difficult to make the nickel powder uniform in size, so that powder particles having different sizes are used. When adhered to the surface of the electrode, the large particles penetrate deeply into the surface of the terminal of the semiconductor device, thereby damaging the terminal.

In addition, the process of preparing and bonding the fine nickel powder after forming the electrode in this way has a disadvantage in that the manufacturing cost is relatively high, resulting in an excessive increase in the manufacturing cost.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and the sheet-type contactor and the sheet-type contactor having an electrode provided with vertices with low-cost manufacturing costs can be made stably and reliably in electrical connection with terminals requiring contact. Provide a method.

The sheet-type contactor according to the present invention for achieving the above object is located between the hemispherical upper terminal to be contacted and the lower terminal disposed in a lower position corresponding to the upper terminal and the upper terminal and the lower terminal. In the sheet-type contactor electrically connected to each other,

A sheet member having a through hole formed at a position corresponding to the upper terminal,

Inserted into the through-hole of the sheet member and disposed spaced apart from each other with respect to the surface direction of the sheet member and has an electrode extending in the thickness direction of the sheet member,

The electrode,

A hole is exposed on the surface of the sheet member and protrudes from the surface of the sheet member, and a hole is formed extending from the top surface in the thickness direction of the sheet member, and at the top of the inner circumferential wall of the hole, at least three corners meet. The surface portion is formed;

A rear portion exposed to the rear surface of the sheet member and protruding from the rear surface of the sheet member; And

A connection part disposed in the through hole and integrally connected to the surface part and the rear part so as to electrically connect the surface part and the rear part to each other.

In the sheet contactor,

It is preferable that a plurality of the vertices are formed at equal intervals along the circumference of the hole.

In the sheet contactor,

The vertices are arranged such that at least one pair faces each other, and the distance between the pairs of vertices facing each other is L, and when D is the maximum diameter of the upper terminal, it is preferably 0.1 × D <L <D.

In the sheet contactor,

Preferably, the hole extends to the connecting portion.

In the sheet contactor,

The bottom surface of the back portion has a flat planar shape and is preferably shaped to close the via hole.

In the sheet contactor,

It is preferable that the said hole extends to the lower end of the said back part.

In the sheet contactor,

It is preferable that the said hole has a cross-sectional shape, such as "x", "" "," * ", and the like.

In the manufacturing method of the sheet-type contactor electrically connecting the hemispherical upper terminal and the plate-shaped lower terminal for achieving the above object,

A dynamic layer plate forming step of forming the dynamic layer plate on the surface and the back of the composite sheet;

Forming a via hole to penetrate the dynamic layer plate and the composite sheet, wherein the via hole is formed to form a vertex at which at least three corners meet at an upper end of the inner circumferential wall;

Copper plating a via hole of the composite sheet so that a copper plating layer is formed on an inner wall surface of the via hole so that a pair of dynamic layer plates on the surface and the rear surface of the composite sheet can be electrically connected to each other;

An etching step of photo-etching such that only a portion of the dynamic layer plate remains; It includes.

In the manufacturing method of the sheet-type contactor, the via hole shape step,

It is preferable to form via holes using a laser.

In the manufacturing method of the sheet-type contactor, the via hole forming step,

Preferably, the via hole is formed only in the dynamic layer plate and the composite sheet disposed on the surface of the composite sheet.

In the manufacturing method of the sheet-type contactor,

The via hole preferably has a cross-sectional shape such as "x", "k", "*", or the like.

In the manufacturing method of the sheet-type contactor, after the etching step,

It is preferable that the plating layer forming step of sequentially stacking the nickel plating layer and the gold plating layer is further included.

The sheet-type contactor according to the present invention has the advantage that the vertex is formed on the terminal, it is possible to ensure a reliable electrical connection with the electrode compared to the electrode having a conventional via hole.

In addition, the sheet-type contactor according to the present invention has the advantage that the foreign matter can be broken by the vertices even if the foreign matter, etc. on the surface of the electrode or the terminal to enable a stable connection between the electrode and the terminal.

In addition, similar electrical connections can be made by electrodes formed around the via holes without contacts made of nickel powder, thereby reducing manufacturing costs and maintaining the size of the vertices of the electrodes. There is an advantage that it is possible to prevent the occurrence of excessive damage.

1 is a plan view of a sheet-type contactor according to the prior art.
2 is an operation diagram of FIG.
3 is a plan view of FIG.
4 is a plan view of a sheet-type contactor according to a preferred embodiment of the present invention.
5 is a cross-sectional view
FIG. 6 is a perspective view of the sheet type contactor of FIG. 4. FIG.
7 is a photograph of a practical use of the sheet-type contactor according to FIG.
8 is a view showing a sheet-type contactor manufacturing method of FIG.
9 is a flowchart of the manufacturing method of FIG. 8.

Hereinafter, a sheet-type contactor having an electrode provided with a vertex according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Figure 4 is a plan view of a sheet-type contactor according to a preferred embodiment of the present invention, Figure 5 is a V-V cross-sectional view, Figure 6 is a perspective view of the sheet-type contactor of Figure 4, Figure 7 is a practical use of the sheet-type contactor according to FIG. It is a photograph.

The sheet-type contactor 100 according to the preferred embodiment of the present invention is located between the upper terminal 131 which requires contact and the lower terminal 141 disposed at a lower position corresponding to the upper terminal 131. The upper terminal 131 and the lower terminal 141 are electrically connected. In the present embodiment, the upper terminal 131 preferably has a hemispherical ball shape formed on the bottom surface of the semiconductor device 130. On the other hand, the lower terminal 141 is preferably a terminal of the test device 140, but is not limited thereto.

The sheet contactor 100 includes a sheet member 110 and an electrode 120.

The sheet member 110 is not particularly limited as long as it is an insulating flexible material. For example, a resin sheet made of a polyimide resin, a liquid crystal polymer, a polyester, a fluorine resin, or the like is impregnated with a resin woven cross. Although a sheet etc. can be used, polyimide is preferable.

The thickness d of the sheet member 110 is not particularly limited as long as the sheet member 110 is flexible, but it is preferably 10 to 50 µm, more preferably 10 to 25 µm. However, the present invention is not limited thereto and may have various thicknesses depending on the field of use.

The sheet member 110 has a via hole 111 formed at a position corresponding to the upper terminal. The via hole has a cross-sectional shape of “╋”, and the via hole 111 may be manufactured by a laser.

The electrode 120 has an upper end in contact with the upper terminal 131 and a lower end in contact with the lower terminal 141 to electrically connect the upper terminal 131 and the lower terminal 141. Nickel, copper, gold, silver, palladium, iron, or the like may be used as the metal constituting the electrode 120. The electrode 120 is made of an alloy of two or more metals, even though the electrode 120 is entirely made of a single metal. Or two or more metals may be laminated.

The electrode 120 includes a surface portion 121, a rear portion 122, and a connection portion 123.

The surface portion 121 is exposed to the surface of the sheet member 110 and protrudes from the surface of the sheet member 110 and extends along the thickness direction of the sheet member 110 from the top surface 124. ) Is formed, and a vertex 121b is formed at the top of the inner circumferential wall of the hole 124 where at least three corners 121a meet.

The back portion 122 is exposed to the rear surface of the sheet member 110 and protrudes from the rear surface of the sheet member 110.

The connection part 123 is disposed inside the via hole 111, and is integrally connected to the surface part 121 and the rear part 122 to electrically connect the surface part 121 and the rear part 122 to each other. Will be.

On the other hand, a plurality of vertices 121b of the surface portion 121 is formed at equal intervals along the circumference of the hole 124, wherein the vertices 121b are arranged so that at least one pair faces each other. When the distance between the pair of vertices 121b is referred to as L and D of the maximum diameter of the upper terminal 131, it is preferable that 0.1 × D <L <D, more preferably 0.2 × D <L <0.8 × D is preferred.

In this case, when L = <0.1 × D, since the distance between the vertices 121b is too short, the electrode 120 does not sufficiently contact the incline with respect to the vertex 121b, and simply contacts the upper surface of the vertex 121b. This prevents stable contact. In addition, when L> = D, the terminal is sandwiched between the vertex 121b and the vertex 121b, which makes it impossible to contact the vertex 121b.

On the other hand, the hole 124 is extended only to the connecting portion 123, it is preferable not to extend to the back portion 122. That is, it is preferable that the rear part 122 is shaped so that the lower surface may have a flat planar shape, and closes the via hole 111. As such, when the rear surface portion 122 has a flat planar shape, the contact area between the rear surface portion 122 and the lower terminal 141 is increased to enable reliable electrical connection.

In addition, the hole 124 preferably has a cross "╋" similar to the cross section of the via hole 111.

Meanwhile, in order to prevent oxidation of the electrode 120 and to obtain a portion of the electrode 120 having a low contact resistance, the surfaces of the surface portion 121 and the rear portion 122 of the electrode 120 may be formed of gold, silver, A chemically stable, conductive metal film such as palladium may be formed. Such a metal film may be formed by itself, but is preferably formed by being laminated on it in a state where nickel or the like is plated.

The diameter d1 of the surface portion 121 is set in consideration of the above conditions, the diameter of the electrode 120 to be connected, and the like, but is, for example, 30 to 80 µm, preferably 30 to 50 µm.

The height of the protruding height h1 of the surface portion 121 is preferably 15 to 50 μm, more preferably 15 to 30 μm in terms of achieving a stable electrical connection with respect to the electrode 120 to be connected. .

In addition, the protrusion height h2 of the back portion 122 is preferably 10 to 40 µm, more preferably 15 to 35 µm, in that the strength is sufficiently high and excellent repeat durability is obtained.

In addition, since the separation distance between the adjacent surface portions 121 is sufficiently secured by having the surface portion 121 having a small diameter, flexibility by the sheet member 110 is sufficiently exhibited, and as a result, the electrode ( The stable electrical connection state can also be achieved reliably also with the circuit apparatus in which 120) was formed.

A method of manufacturing the sheet contactor according to the preferred embodiment of the present invention will be described with reference to FIG.

Sheet-type contactor for electrically connecting the hemispherical upper terminal and the plate-shaped lower terminal according to the present invention includes a dynamic layer plate forming step (S100), via hole forming step (S200), copper plating step (S300) and etching step (S400). .

The dynamic layer plate forming step (S100) is to form the dynamic layer plates 121 ′ and 122 ′ on the surface and the back surface of the synthetic sheet 110 ′, such as polyimide prepared as shown in FIG. 8 (a) ( See FIG. 8 (b)). When heat resistance is not required here, polyester etc. can also be used as the synthetic sheet 110 '. Meanwhile, the dynamic layer plates 121 ′ and 122 ′ may be formed on the surface and the back of the composite sheet 110 ′ by evaporation, but are not limited thereto and may be variously formed by adhesion and other well-known techniques. have.

The via hole forming step (S200), as shown in FIG. 8 (c), drills a hole to pass through the dynamic layer plate 121 ′ and the composite sheet 110 ′, in which the via hole 111 ′ uses a laser. It is preferable to form using. On the other hand, it is possible to form the via hole 111 'according to a programmed form using a UV (Ultraviolet) laser or a CO ₂ (Carbon dioxide) laser, but is not limited thereto and may be formed by various methods. On the other hand, although the mechanical hole processing by a drill is possible, a laser is preferable in order to manufacture so that it may have a cross-sectional shape.

In this case, the formed via hole 111 ′ may be formed to have a “╋” cross-sectional shape. In this case, a vertex 121 b ′ at which three corners meet is formed at an upper end of the inner circumferential wall of the via hole. On the other hand, the corners constituting the vertex is not limited to three, but may be composed of four or more corners according to the situation.

The via hole 111 ′ is formed only on the composite sheet 110 ′ and the dynamic layer plate 121 ′ disposed on the surface of the composite sheet 110 ′, and is disposed on the rear surface of the composite sheet 110 ′. It is preferable that no via hole is formed at 122 '. For this purpose, it is preferable to form the via holes in a state in which the intensity of the laser is controlled in advance. On the other hand, after the via hole is formed, plasma cleaning or the like can be performed.

In the copper plating step (S300), the copper plating layer 123 'is formed on the inner wall surface of the via hole by copper plating the via hole 111' of the composite sheet 110 'as shown in FIG. 8 (d). The pair of dynamic layer plates 121 'and 122' on the surface and the back of the composite sheet 110 'are to be electrically connected to each other.

The etching step (S400), as shown in Figure 8 (e), so that only a portion of the dynamic layer plate 121 ', 122' by the known techniques such as PSR pattern formation, exposure and development, and PSR peeling. Photo etching is performed. On the other hand, the etching method is not limited to this, and any known technique can of course be possible.

After the etching step, a plating layer forming step of sequentially stacking a nickel plating layer and a gold plating layer (not shown) on the surfaces of the dynamic layer plates 121 ′ and 122 ′ left by etching may be added. On the other hand, such a plating layer forming step does not necessarily need to be made after the etching step, of course, can be made within the process of the etching step.

The sheet-type contactor according to the present invention has the following effects.

First, the sheet-type contactor according to the present embodiment has the advantage that a stable electrical current is possible because the upper terminal of the semiconductor device is in contact with the vertex of the electrode to make a point contact.

In addition, the sheet-type contactor according to the present embodiment has the advantage that even when foreign matters are attached to the terminal or the electrode, the foreign matter can be removed in the process of contacting the terminal with the terminal, thereby enabling more reliable electrical connection.

In addition, the sheet-type contactor according to the present embodiment can be manufactured relatively inexpensively as compared with an electrode to which nickel powder or the like is attached. In other words, when processing the via hole, if the cross-sectional shape of the hole is simply formed as "╋", the remaining part is manufactured according to the existing electrode manufacturing method, so that a vertex can be formed on the electrode without increasing the process. It will be an advantage.

In addition, the sheet-type contactor according to the present embodiment can form a vertex of a relatively uniform shape by a laser, whereas the method using a nickel powder is difficult to control the size of the powder particles within a desired range and accordingly a relatively large In the case where particles are included, the terminals may not come into contact with small particles around them or excessive pressure may be applied to the large particles, thereby damaging the surface of the terminal.

In addition, the sheet-type contactor according to the present embodiment has the advantage that the optimum electrical connection state can be maintained because the distance between the vertices is limited within a certain range.

In addition, the sheet-type contactor according to the present embodiment has an advantage in that a contact contact between the rear portion and the lower terminal is wider and a more reliable connection state can be obtained because no hole or the like is formed in the rear portion. On the contrary, in the related art, holes and the like are formed in the rear part, so that the contact area is reduced by that, which makes it difficult to make reliable electrical connection.

The sheet-type contactor of this invention can also be modified as follows.

First, in the above-described embodiment, but illustrated that the hole is formed only in the surface portion and the connecting portion, but is not limited to this, it is also possible that the hole is also formed in the rear portion. That is, it is a matter of course that the hole can be entirely penetrated. On the other hand, it is not limited to this, the hole is not formed in the connection portion, or of course it is possible to form a hole only in the upper portion of the surface portion.

In addition, in the above-described embodiment, the shape of the hole or the via hole is illustrated as "×", "╋", "*", but is not limited to this. Of course it is possible.

In addition, although the nickel plating layer and the gold plating layer are illustrated as the plating layer in the above-described embodiment, the present invention is not limited thereto, and various metal components other than gold may be used for plating.

The sheet-type contactor and the manufacturing method of the present invention described above is not limited thereto, and the scope of rights may be extended as long as it can be interpreted by the claims.

100 ... Contactor 110 ... Seat member
111 Via holes 120 Electrodes
121 ... Surface 121a ... Edge
121 b ... vertex 122 ... back
123 Connections 124 Holes

Claims (12)

In the sheet-type contactor which is located between the hemispherical upper terminal to be contacted and the lower terminal disposed in the lower position corresponding to the upper terminal and electrically connecting the upper terminal and the lower terminal to each other,
A sheet member having a via hole formed at a position corresponding to the upper terminal,
The electrode is inserted into the via hole of the sheet member and is spaced apart from each other in a plane direction perpendicular to the thickness direction of the sheet member, and has electrodes extending in the thickness direction of the sheet member.
The electrode
A hole is exposed on the surface of the sheet member and protrudes from the surface of the sheet member, and a hole is formed extending from the top surface in the thickness direction of the sheet member. The surface portion is formed;
A rear portion exposed to the rear surface of the sheet member and protruding from the rear surface of the sheet member; And
A sheet-type contactor having an electrode disposed at the inside of the via hole, the electrode having a vertex including a connecting portion integrally connected to the surface portion and the rear portion so as to electrically connect the surface portion and the rear portion to each other. The method of claim 1,
The vertex sheet contactor having an electrode provided with a vertex, characterized in that the plurality of vertices are formed at equal intervals along the circumference of the hole. The method of claim 1,
The vertices are arranged so that at least one pair faces each other, the distance between the pair of vertices facing each other is L, and when the maximum diameter of the upper terminal is D, 0.1 × D <L <D A sheet-type contactor having an electrode provided with a vertex. The method of claim 1,
And said hole extends to said connecting portion. The sheet-type contactor with an electrode provided with the vertex characterized by the above-mentioned. The method of claim 4, wherein
The lower surface of the back portion has a flat planar shape and the sheet-type contactor having an electrode provided with a vertex, characterized in that it is shaped to close the via hole. The method of claim 1,
And said hole extends to the lower end of said back portion. The method of claim 1,
The hole is a sheet-type contactor having an electrode provided with a vertex, characterized in that it has a cross-sectional shape of any one of "x", "╋", "*". In the manufacturing method of the sheet-type contactor electrically connecting the hemispherical upper terminal and the plate-shaped lower terminal,
A dynamic layer plate forming step of forming the dynamic layer plate on the surface and the back of the composite sheet;
Forming a via hole penetrating the dynamic layer plate and the composite sheet, wherein the via hole is formed to form a vertex at which at least three corners meet at an upper end of the inner circumferential wall;
Copper plating a via hole of the composite sheet so that a copper plating layer is formed on an inner wall surface of the via hole so that a pair of dynamic layer plates on the surface and the rear surface of the composite sheet can be electrically connected to each other;
An etching step of photo-etching such that only a portion of the dynamic layer plate remains; The manufacturing method of the sheet-type contactor which has an electrode provided with the vertex containing. The method of claim 8,
The via hole shape step,
A method of manufacturing a sheet-type contactor having an electrode provided with a vertex, the via hole being formed using a laser. The method of claim 8,
The via hole forming step,
A method of manufacturing a sheet-type contactor having electrodes provided with vertices, wherein the via holes are formed only on a dynamic layer plate disposed on the surface of the composite sheet and the composite sheet. 10. The method of claim 9,
The via hole is a manufacturing method of a sheet-type contactor having an electrode provided with a vertex, characterized in that having a cross-sectional shape of any one of "x", "╋", "*". The method of claim 8,
After the etching step,
And a plating layer forming step of laminating a nickel plated layer on the dynamic layer plate and laminating a gold plated layer on the nickel plated layer.

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