JP3815571B2 - Manufacturing method of sheet-like probe - Google Patents

Description

The present invention relates to a sheet-like probe, a probe card, and a wafer inspection method used for electrical inspection of a circuit device. More specifically, for example, electrical inspection of a plurality of integrated circuits formed on a wafer is performed in a wafer state. The present invention relates to a method of manufacturing a sheet-like probe used for the purpose.

  For example, in an electrical inspection of a circuit device such as a wafer on which a large number of integrated circuits are formed or an electronic component such as a semiconductor element, a probe device having inspection electrodes arranged in accordance with a pattern of electrodes to be inspected of a circuit device to be inspected. It is used.

Conventionally, a probe device in which inspection electrodes (inspection probes) made of pins or blades are arranged is used as such a device.
When the circuit device to be inspected is a wafer on which a large number of integrated circuits are formed, it is necessary to arrange a large number of inspection probes in order to produce a wafer inspection probe device. It becomes expensive.

Further, when the pitch of the electrodes to be inspected is small, it is difficult to manufacture the probe device itself.
Further, since the wafer is generally warped, and the state of the warp varies depending on the product (wafer), each of the inspection probes of the probe apparatus can be stably and reliably applied to a large number of electrodes to be inspected on each wafer. It is practically difficult to make contact.

  In order to cope with such a problem, an anisotropic conductive sheet is arranged on one surface of a circuit board for inspection in which a plurality of inspection electrodes are formed according to the pattern of the electrode to be inspected on one surface. Further, a probe card in which a sheet-like probe in which a plurality of electrode structures extending through the insulating sheet in the thickness direction is arranged is arranged in Patent Document 1 (Japanese Patent Laid-Open No. 2001-15565) and Patent Document 2 ( Japanese Patent Laid-Open No. 2002-184821).

  As shown in FIG. 33, the probe 100 has a flexible circular insulating sheet 104 made of resin such as polyimide, and the insulating sheet 104 includes a plurality of electrodes extending in the thickness direction. The structures 102 are arranged according to the pattern of the electrodes to be inspected of the circuit device under inspection.

In addition, a ring-shaped support member 106 made of, for example, ceramics is provided on the periphery of the insulating sheet 104 for the purpose of controlling the thermal expansion of the insulating sheet 104.
The support member 106 controls thermal expansion in the surface direction of the insulating sheet 104, and prevents positional deviation between the electrode structure 102 and the electrode to be inspected due to temperature change in the burn-in test.

Further, each electrode structure 102 includes a protruding surface electrode portion 108 exposed on the surface of the insulating sheet 104 and a plate-like back surface electrode portion 110 exposed on the back surface of the insulating sheet 104, and the insulating sheet 104 has a thickness. The structure is integrally connected via a short-circuit portion 112 extending through in the direction.
Japanese Patent Laid-Open No. 2001-15565 Japanese Patent Laid-Open No. 2002-184821 Japanese Patent No. 2828410 JP 2002-76074 A Japanese Patent Application No. 2004-131864

However, such a sheet-like probe has the following problems.
For example, in a wafer having a diameter of 8 inches or more, 5000 or 10,000 or more electrodes to be inspected are formed, and the pitch of these electrodes to be inspected is 300 μm or less, and when it is fine, it is 160 μm or less.

  As a sheet-like probe for inspecting such a wafer, a probe having a large area corresponding to the wafer and having 5000 or 10,000 or more electrode structures arranged at a pitch of 300 μm or less is required. .

However, the linear thermal expansion coefficient of silicon, which is an example of the material constituting the wafer, is about 3.3 × 10 ⁻⁶ / K, while the linear thermal coefficient of polyimide, which is an example of the material constituting the insulating sheet of the sheet-like probe. The expansion coefficient is about 4.5 × 10 ⁻⁵ / K.

  Accordingly, for example, when each of a wafer and a sheet-like probe each having a diameter of 8 inches (20 cm) at 25 ° C. is heated from 25 ° C. to 125 ° C., the change in diameter of the wafer is theoretically only 66 μm. However, the change in the diameter of the insulating sheet of the sheet-like probe reaches 900 μm, and the difference in thermal expansion between them is 834 μm.

  In this way, when there is a large difference in the absolute amount of thermal expansion in the surface direction between the wafer and the insulating sheet of the sheet-like probe, the peripheral thermal expansion coefficient of the insulating sheet is equal to the linear thermal expansion coefficient of the wafer. Even if it is fixed by a support member having a high temperature, it is difficult to reliably prevent displacement between the electrode structure and the electrode to be inspected due to a temperature change during the burn-in test. It cannot be maintained.

  In addition, even if the inspection object is a small circuit device, if the distance between adjacent electrodes to be inspected is 50 μm or less, the position of the electrode structure and the electrode to be inspected due to temperature change during the burn-in test Since it is difficult to reliably prevent the deviation, a good electrical connection state cannot be stably maintained.

  With respect to such a problem, in Patent Document 3 (Japanese Patent No. 2828410), as shown in FIG. 34, the insulating sheet 204 is fixed to the ring-shaped support member 206 in a state where tension is applied. A method of relaxing the thermal expansion of the insulating sheet 204, that is, a method of controlling the thermal expansion coefficient A of the ring-shaped support member 206 and the thermal expansion coefficient B of the insulating sheet 204 to the same thermal expansion coefficient has been proposed.

However, with this method, it is extremely difficult to apply a uniform tension to all the surface directions of the insulating sheet 204.
Moreover, the balance of the tension | tensile_strength which acts on the insulating sheet 204 changes by forming the electrode structure 202, As a result, the insulating sheet 204 comes to have anisotropy regarding thermal expansion.

  For this reason, even though it is possible to suppress the thermal expansion in one direction in the plane direction, it is not possible to suppress the thermal expansion in the other direction that intersects with this one direction. It is impossible to prevent displacement between the electrode and the electrode to be inspected.

  Further, in order to fix the insulating sheet 204 to the support member 206 in a state where tension is applied, a complicated process of adhering the insulating sheet 204 to the support member 206 under heating is required, which increases the manufacturing cost. There is a problem of inviting.

  For this reason, in Patent Document 4 (Japanese Patent Laid-Open No. 2002-76074), a laminated film having a structure in which an insulating film and a conductive layer are laminated is attached to a ceramic ring at a predetermined temperature with tension applied thereto, and this laminated film is laminated. Bump holes are formed in the film, electroplating is performed, plating is grown in the bump holes to form the front electrode portion, and the conductive layer is selectively etched to form the back electrode portion to form the electrode structure. is doing.

Then, the insulating film is selectively etched to avoid the electrode structure portion and leave a ring shape to form a pattern.
In addition, the tension | tensile_strength of an insulating film is a very weak thing compared with the restoring force which tries to return to the original of a ceramic ring.

  For this reason, by forming an electrode structure, the tension balance acting on the insulating sheet, which is the cause of anisotropy with respect to thermal expansion, is changed, and the remaining pattern is formed on the insulating film, thereby forming the ceramic ring. It counters resilience.

  In addition, in the burn-in test, the applicant of Patent Document 5 (Japanese Patent Application No. 2004-131864) uses a large area wafer having a diameter of 8 inches or more or a circuit device having a very small pitch of electrodes to be inspected. A probe card that can stably maintain a good electrical connection state and a method for manufacturing the probe card have already been proposed.

  That is, in Patent Document 5 (Japanese Patent Application No. 2004-131864), as shown in FIG. 35A, the frame plate forming metal plate 302 and the frame plate forming metal plate 302 are integrally laminated. A laminated body 306 having an insulating layer forming resin sheet 304 is prepared, and through holes 308 are formed in the insulating layer forming resin sheet 304 of the laminated body 306.

  Further, as shown in FIG. 35 (b), a short circuit connected to the frame plate forming metal plate 302 in the through hole 308 of the insulating layer forming resin sheet 304 by plating the laminated body 306. The surface electrode part 312 connected with the part 310 and the short circuit part 310 is formed.

  Then, as shown in FIG. 35C, the frame plate forming metal plate 302 is etched to form a metal frame plate 316 in which the through holes 314 are formed, and one of the frame plate forming metal plates 302 is formed. The back electrode portion 318 connected to the short-circuit portion 310 is formed by the portion.

  Thus, the contact film 324 in which the electrode structure 320 having the front electrode portion 312 exposed on the front surface and the back electrode portion 318 exposed on the back surface is held by the insulating layer 322 made of a flexible resin, and the contact film A sheet-like probe 300 composed of a metal frame plate 316 that supports 324 is obtained.

  In such a sheet-like probe 300 of Patent Document 5 (Japanese Patent Application No. 2004-131864), the thermal expansion in the surface direction of the insulating layer 322 is reliably regulated by the metal frame plate 316, so that the inspection target is, for example, 8 inches in diameter. Even in the case of a circuit device with the above-mentioned large-area wafer and the extremely small pitch of the electrode to be inspected, the positional displacement between the electrode structure and the electrode to be inspected due to a temperature change is reliably prevented in the burn-in test, and good electrical connection is achieved. The state is maintained stably.

  However, in any case of Patent Document 4 (Japanese Patent Laid-Open No. 2002-76074) and Patent Document 5 (Japanese Patent Application No. 2004-131864), the insulating layer 322, the metal frame plate 316, and the ring-shaped support No consideration is given to the coefficient of thermal expansion between the member (not shown).

Therefore, the material for forming the insulating layer 322, the metal frame plate 316, and the ring-shaped support member (not shown) is, for example,
(1) The insulating layer 322 is made of a flexible resin such as a polyimide resin or a liquid crystal polymer,
(2) The metal frame plate 316 is made of iron-nickel alloy steel such as 42 alloy, Invar, Kovar,
(3) A ring-shaped support member (not shown) is made of a ceramic material such as alumina, silicon carbide, silicon nitride,
If the coefficient of thermal expansion between these different materials is not selected within an appropriate range, the displacement between the electrode structure and the electrode to be inspected due to temperature changes can be reliably prevented during the burn-in test. This makes it difficult to maintain a stable electrical connection state.

  Furthermore, as shown in FIG. 36 (a), the wafer 400 to be inspected is left in an air environment for a long time, or is exposed to a high temperature condition in a manufacturing process or an inspection process. ), An oxide film 404 may be formed on the surface of the electrode 402 to be inspected.

  And as shown to Fig.37 (a), in the sheet-like probe 300 provided with the electrode structure 320 which consists of the spherical surface electrode part 312 as shown in patent document 5 (Japanese Patent Application No. 2004-131864). As shown in FIG. 37B, it is difficult to break the oxide film 404 formed on the surface of the wafer 400, and the electrical structure of the electrode 402 to be inspected on the wafer 400 and the electrode structure 320 of the sheet-like probe 300 is difficult. Connection may be difficult.

  Therefore, as shown in FIG. 38A and FIG. 38B, the oxide film 404 formed on the surface of the inspection electrode 402 of the wafer 400 is broken at the time of contact, and the inspection electrode 402 and the sheet of the wafer 400 are broken. The tip shape of the surface electrode portion 502 of the electrode structure 504 formed on the sheet-like probe 500 is a pyramid or a truncated cone so that the electrode structure 504 of the probe 500 can easily be electrically connected. Can be considered.

  In such a truncated cone electrode, since the area of the surface electrode portion 502 in contact with the electrode to be inspected 402 is smaller than that of the spherical electrode, when the same load is applied, the load applied per unit area is large. The oxide film 404 can be easily broken.

Currently, the load applied at the time of wafer inspection is “8 g / electrode” calculated per electrode to be inspected.
For example, if the area of the contact portion in the case of the spherical electrode is b and the area of the contact portion in the case of the truncated cone electrode is 0.5b, the load per unit area at the time of contact for breaking the oxide film 404 is considered. Then, the load of “8 g / electrode” at the truncated cone electrode corresponds to the load of “16 g / electrode” at the spherical electrode.

  Therefore, when inspecting the wafer 400 having the electrode 402 to be inspected having the oxide film 404 formed of the truncated cone electrode, the total load required at the time of the inspection can be achieved with a smaller pressure in the truncated cone electrode. The fact that the pressurization mechanism of the apparatus can be reduced in size and can be inspected with a smaller pressure leads to an improvement in the repeated use durability of the anisotropically conductive connector, resulting in a reduction in the inspection cost.

  However, as shown in FIGS. 39A and 39B, when the tip shape of the surface electrode portion 502 of the electrode structure 504 formed on the sheet-like probe 500 is a pyramid or a truncated cone, the wafer 400 The size of the tip of the electrode structure 504 that can come into contact with the electrode 402 to be inspected is smaller than that of the electrode structure 320 having a spherical surface electrode portion.

In such a case, when the electrode structure of the sheet-like probe is displaced by the distance A, the spherical electrode structure 320 can be electrically connected to the electrode to be inspected, but the electrode structure 504 having a truncated cone shape. Then, the electrode 402 cannot be contacted and electrical connection is impossible.
Therefore, the sheet-like probe provided with the truncated cone electrode or the truncated pyramid electrode has a small positional displacement allowable amount of the electrode structure 504.

  For this reason, in the burn-in test, a poor connection due to a positional deviation between the electrode structure 504 and the electrode 402 to be inspected due to a temperature change is more likely to occur than when the shape of the surface electrode portion is spherical, and a good electrical connection state is achieved. It tends to be difficult to achieve stably.

  Therefore, selection of an appropriate range of thermal expansion coefficient between different materials of the insulating layer 322, the metal frame plate 316, and the ring-shaped support member (not shown) This is more important in order to reliably prevent misalignment with the electrode to be inspected and stably maintain a good electrical connection state.

In view of such a current situation, the present invention is intended to inspect an electrode structure and a substrate to be inspected by a temperature change in a burn-in test, even if the inspection object is a large-area wafer having a diameter of 8 inches or more or a circuit device having a very small pitch of electrodes to be inspected. It is an object of the present invention to provide a method for manufacturing a sheet-like probe that can reliably prevent misalignment with a test electrode and thereby stably maintain a good electrical connection state.

The present invention was invented in order to achieve the above-described problems and objects in the prior art, and the manufacturing method of the sheet-like probe of the present invention includes:
Preparing a laminate in which a surface-side metal layer is formed on the surface of the insulating sheet and a first back-side metal layer is formed on the back surface;
Forming a recess for forming a surface electrode portion from the first back surface side metal layer side according to a pattern corresponding to a pattern of an electrode structure to be formed on the surface side metal layer in the laminate;
Forming a resist pattern so as to cover the recess for forming the surface electrode part of the laminate from the first backside metal layer side;
A state in which a part of the first backside metal layer remains in the peripheral portion of the recess for forming the front surface electrode portion by etching the exposed portion other than the resist pattern of the first backside metal layer of the laminate. And a process of
Forming the insulating layer and the second back-side metal layer from above the surface electrode portion forming recess to close the surface electrode portion forming recess with the insulating layer to form a hollow state;
Forming an opening for forming an electrode structure larger than the recess for forming the surface electrode in the insulating layer;
Forming an electrode structure portion by electroplating the opening for forming the electrode structure; and
Separating the second back side metal layer into a metal frame plate portion and an electrode structure;
By etching the insulating sheet to reduce the thickness of the insulating sheet, the surface electrode portion of the electrode structure is projected and part of the surface electrode portion forming recess remains in the peripheral portion. The step of making the first back side metal layer buried in the insulating sheet;
And a step of providing a ring-shaped support member on the outer periphery of the metal frame plate so as to be separated from the insulating layer.

In addition, the manufacturing method of the sheet-like probe of the present invention,
In the step of embedding the first back side metal layer in the insulating sheet,
The first back-side metal layer is substantially the same as the surface of the insulating layer.

In addition, the manufacturing method of the sheet-like probe of the present invention,
In the step of embedding the first back side metal layer in the insulating sheet,
The first backside metal layer is partially buried in the insulating layer.

In addition, the manufacturing method of the sheet-like probe of the present invention,
Preparing a laminate in which a surface-side metal layer is formed on the surface of the insulating sheet and a first back-side metal layer is formed on the back surface;
Forming a front surface electrode portion forming recess from the first back surface side metal layer side according to a pattern corresponding to a pattern of an electrode structure to be formed on the front surface side metal layer in the laminate;
Forming the insulating layer and the second back-side metal layer from above the surface electrode portion forming recess to close the surface electrode portion forming recess with the insulating layer to form a hollow state;
Forming a shoulder between the surface electrode portion forming recess and the opening by forming an opening for forming the electrode structure larger than the surface electrode portion forming recess in the insulating layer; When,
Forming an electrode structure portion by electroplating the opening for forming the electrode structure; and
Separating the second back side metal layer into a metal frame plate portion and an electrode structure;
Etching the insulating sheet to reduce the thickness of the insulating sheet, thereby causing the surface electrode portion of the electrode structure to protrude and the shoulder to be buried in the insulating sheet When,
And a step of providing a ring-shaped support member on the outer periphery of the metal frame plate so as to be separated from the insulating layer.

In addition, the manufacturing method of the sheet-like probe of the present invention,
In the step of making the shoulder portion buried in the insulating sheet,
The shoulder portion is substantially the same as the surface of the insulating layer.

According to the method for manufacturing a sheet-like probe of the present invention, since the contact film is supported in the through hole of the metal frame plate, the area of the contact film disposed in the through hole can be reduced.
For example, if a metal frame plate in which a plurality of through holes are formed corresponding to the electrode region in which the electrode to be inspected of the circuit device to be inspected is used, the metal frame plate is disposed in each of these through holes and supported by the peripheral portion thereof. The area of each contact film formed can be greatly reduced.

  Since the contact film having such a small area has a small absolute amount of thermal expansion in the surface direction of the insulating layer, the thermal expansion of the insulating layer can be reliably regulated by the metal frame plate.

  Therefore, even if the inspection target is a large-area wafer having a diameter of 8 inches or more or a circuit device having a very small pitch of the electrodes to be inspected, the positional deviation between the electrode structure and the electrodes to be inspected due to temperature change during the burn-in test. Is reliably prevented, and a good electrical connection state can be stably maintained.

  Moreover, by providing the shoulder portion, the surface electrode portion of the electrode structure can be reduced, and the contact area between the through hole and the electrode structure can be increased by increasing the diameter of the short-circuit portion below the shoulder portion. And the electrode structure can be prevented from falling out of the through hole.

  Furthermore, by providing a holding part that is partially or entirely buried in the insulating layer, even when a repeated test is performed in a burn-in test or the like, deformation of the holding part is suppressed, and the holding part may be peeled off from the insulating layer. It is suppressed.

  Accordingly, the electrode structure can be further prevented from falling off the insulating layer, and the durability of the sheet-like probe can be further increased.

Hereinafter, embodiments (examples) of the present invention will be described in more detail with reference to the drawings.
The accompanying drawings are for illustration purposes, and specific sizes and shapes of the respective parts will be understood by those skilled in the art based on the description of the present specification and conventional techniques.
1. For sheet probes:
FIG. 1 is a view showing an embodiment of the sheet-like probe of the present invention, FIG. 1 (a) is a plan view, FIG. 1 (b) is a cross-sectional view taken along line XX, and FIG. 3 is an enlarged plan view showing the contact film of the sheet-like probe, and FIG. 3 is a partial cross-sectional view taken along line XX of FIG.

The sheet-like probe of this embodiment is used for conducting an electrical inspection of each integrated circuit in the state of the wafer on a wafer such as 8 inches on which a plurality of integrated circuits are formed.
As shown in FIGS. 1A and 2, the sheet-like probe 10 includes a metal frame plate 25 having through holes 12 formed at positions corresponding to integrated circuits on a wafer to be inspected. The contact film 9 is disposed in the through hole 12. The contact film 9 is supported by a support portion 24 on the edge of the through hole 12 of the metal frame plate 25.

Further, as shown in FIGS. 1B and 3, a resin insulating layer 18 is supported on the metal frame plate 25 in the support portion 24.
The contact film 9 has a structure in which an electrode structure 15 is formed through a flexible insulating layer 18.

  In other words, the plurality of electrode structures 15 extending in the thickness direction of the insulating layer 18 are arranged apart from each other in the surface direction of the insulating layer 18 according to a pattern corresponding to the inspection target electrode of the wafer to be inspected.

  As shown in FIG. 3, the electrode structure 15 has a protruding surface electrode part 15 a exposed on the surface of the insulating layer 18, a plate-like back electrode part 15 b exposed on the back surface of the insulating layer 18, The insulating layer 18 is integrated with the short-circuit portion 15c extending through in the thickness direction.

Furthermore, between the upper end part of the short circuit part 15c and the base end part of the surface electrode part 15a, the short circuit part 15
A shoulder portion 15d is provided so that the diameters of the upper end portion of c and the base end portion of the surface electrode portion 15a are different.

The shoulder portion 15 d is provided with a holding portion 15 e extending outward in the surface direction of the insulating layer 18, and the holding portion 15 e is buried in the insulating layer 18.
In this embodiment, the holding portion 15e is formed on the shoulder portion 15d. However, the holding portion 15e is not essential, and there is no holding portion as in other embodiments of the present invention described later. But that's fine.

  Further, the shoulder portion 15d may be buried in the insulating layer 18 without the holding portion 15e, or may be in a state substantially the same as the surface of the insulating layer 18, and is not particularly limited. is there.

In addition, such a sheet-like probe 10 is provided with a flat plate ring-shaped support member 2 having rigidity at the periphery.
<Metal frame plate>
The metal frame plate 25 preferably has a linear thermal expansion coefficient of 3 × 10 ⁻⁵ / K or less, more preferably −1 × 10 ⁻⁷ to 1 × 10 ⁻⁵ / K, and particularly preferably −1. × 10 ⁻⁶ to 8 × 10 ⁻⁶ / K.

  Specific examples of the material constituting the metal frame plate 25 include Invar type alloys such as Invar, Elinvar type alloys such as Erin bar, alloys such as Super Invar, Kovar, 42 alloy or alloy steel, molybdenum, molybdenum alloy or alloy steel. Is mentioned.

Furthermore, the thickness of the metal frame plate 25 is preferably 3 to 150 μm, more preferably 5 to 100 μm.
When this thickness is too small, the strength required for the metal frame plate 25 that supports the sheet-like probe 10 may not be obtained.

  On the other hand, if this thickness is excessive, it may be difficult to separate the metal frame plate 25 and the back electrode portion 15b from the second back side metal layer 17A by the etching process in the manufacturing method described later.

  In the embodiment shown in FIG. 1, as shown in FIG. 4A, a metal frame in which a plurality of through holes 12 are formed at each position corresponding to each integrated circuit on the wafer to be inspected. A plate 25 is formed, and insulating layers 18 are formed in these through holes 12 so as to be isolated from each other.

  However, as shown in FIG. 5 (FIG. 5 (a) is a plan view and FIG. 5 (b) is a cross-sectional view taken along line XX), the insulating layer 18 is integrated into one continuous support portion 24. As shown in FIG. 6 (FIG. 6A is a plan view and FIG. 6B is a cross-sectional view taken along line XX), the insulating layer 18 includes a plurality of contact films 9. It is also possible to divide the support portion 24 into a plurality of contact films 9 and to form a continuous support portion 24.

  Further, as shown in FIG. 4B, a ring-shaped metal frame plate 25 having one large-diameter through-hole 12 formed at the center is formed, as shown in FIG. 7 (FIG. 7A). Is a plan view, and FIG. 7B is a cross-sectional view taken along the line XX.) The insulating layer 18 is integrated with the through-hole 12, and the insulating layer 18 is an object to be inspected as one continuous support portion 24. It is also possible to form a plurality of electrode structures 15 at each position corresponding to each integrated circuit on the wafer.

Thus, by comprising from the metal metal frame board 25, the mechanical strength required at the time of use is obtained, and durability also becomes high also in repeated use.
Moreover, it is preferable that the thickness of the metal frame board 25 is 3-150 micrometers, More preferably, it is 5-100 micrometers.

When this thickness is too small, the strength required for the metal frame plate 25 that supports the contact film 9 may not be obtained.
By setting the thickness of the metal frame plate 25 in such a range, the influence due to the difference in thermal expansion coefficient among the insulating layer 18, the metal frame plate 25, and the ring-shaped support member 2, that is, the electrode structure 15 due to temperature change. And the displacement of the electrode to be inspected can be further suppressed.

<Insulating layer>
As the insulating layer 18, a flexible resin film is used.
The material for forming the insulating layer 18 is not particularly limited as long as it is an electrically insulating resin material, and for example, a polyimide resin, a liquid crystal polymer, and a composite material thereof can be used.

When the insulating layer 18 is formed of polyimide, it may be formed using a thermosetting polyimide, a thermoplastic polyimide, a photosensitive polyimide, a polyimide varnish diluted with a polyimide precursor in a solvent, a solution, or the like. preferable.
Furthermore, the thickness of the insulating layer 18 is preferably 5 to 150 μm, more preferably 7 to 100 μm, and still more preferably 10 to 50 μm from the viewpoint of obtaining good flexibility.

<Electrode structure>
Examples of the material of the electrode structure 15 include nickel, iron, copper, gold, silver, palladium, iron, cobalt, tungsten, rhodium, and alloys or alloy steels thereof.

The electrode structure 15 may be entirely formed of a single metal or alloy, or may be formed by stacking two or more kinds of metals or alloys.
Further, when an electrical inspection is performed on an electrode to be inspected having an oxide film formed on the surface, the electrode structure 15 of the sheet-like probe 10 is brought into contact with the electrode to be inspected, and the surface electrode portion 15a of the electrode structure 15 inspects the object to be inspected. It is necessary to electrically connect the electrode structure 15 and the electrode to be inspected by destroying the oxide film on the surface of the electrode.

Therefore, it is desirable that the surface electrode portion 15a of the electrode structure 15 has a hardness that can easily break the oxide film.
In order to obtain such a surface electrode portion 15a, a powder material having high hardness can be contained in the metal forming the surface electrode portion 15a.

Examples of such a powder substance include diamond powder, silicon nitride, silicon carbide, ceramics, and glass.
By containing an appropriate amount of these non-conductive powder substances, the oxide film formed on the surface of the electrode to be inspected is destroyed by the surface electrode portion 15a of the electrode structure 15 without impairing the conductivity of the electrode structure 15. be able to.

  Further, in order to easily destroy the oxide film on the surface of the electrode to be inspected, the shape of the surface electrode portion 15a of the electrode structure 15 may be a sharp protrusion, and the surface of the surface electrode portion 15a may have fine irregularities. It may be formed.

Thus, the shape of the surface electrode portion 15a may be an appropriate shape as necessary.
In addition, depending on the number of electrodes to be inspected of the integrated circuit on the wafer, for example, several tens or more electrode structures 15 are formed on one contact film 9.

First, the surface electrode portion 15a protrudes from the surface of the insulating layer 18A in the shape of a truncated cone whose diameter increases from the distal end diameter R1 to the proximal end diameter R2.
Next, the short-circuit portion 15c has a truncated cone shape having a diameter slightly larger than the diameter R2 of the proximal end portion of the surface electrode portion 15a, a distal end diameter R3, and a diameter increasing in accordance with the diameter R4 of the proximal end portion.

Moreover, the back surface electrode part 15b which has the rectangle and diameter R5 is provided in the base end part of the short circuit part 15c. The back electrode portion 15b is formed so as to protrude from the insulating layer 18A.
Furthermore, a shoulder portion 15d is formed between the base end portion of the surface electrode portion 15a and the base end portion of the short-circuit portion 15c due to the difference in diameter.

A rectangular holding portion 15e extending outward in the surface direction of the insulating layer 18A is provided on the shoulder portion 15d.
Further, a holding portion 15e having a rectangular shape is formed on the shoulder portion 15d. The holding portion 15e has a diameter R6 that is wider than the diameter R3 of the tip of the short-circuit portion 15c.

In the above description, since the back electrode portion 15b and the holding portion 15e are rectangular, the dimensions in the short direction of the vertical and horizontal dimensions are described as the diameters R5 and R6, respectively.
As described above, the diameters R1 to R5 from the front surface electrode portion 15a to the back surface electrode portion 15b are from the diameter R1 of the front end portion of the front surface electrode portion 15a to the diameter R2 of the base end portion, and further from the diameter R3 of the front end of the short circuit portion 15c The diameter is larger in the order of the diameter R4 of the portion and the diameter R5 of the back electrode portion 15b, which satisfies the following relationship.
R1 <R2 <R3 <R4 <R5
Further, the diameter R6 of the holding portion 15e preferably satisfies the following relationship.
R3 <R6 <R5
Such an electrode structure 15 penetrates above and below the insulating layer 18A and is formed at a constant arrangement pitch P.
In the above description, the back electrode portion 15b has been described as having a rectangular shape, but other shapes such as a circular shape and an elliptical shape may be used.

<Supporting member>
Examples of the material of the support member 2 include Invar type alloys such as Invar and Super Invar, Elinvar type alloys such as Erin bar, low thermal expansion metal materials such as Kovar and 42 alloy, and ceramic materials such as alumina, silicon carbide, and silicon nitride. .

Further, the thickness of the support member 2 is preferably 2 mm or more.
By setting the thickness of the ring-shaped support member 2 in such a range, the influence due to the difference in thermal expansion coefficient between the metal frame plate 25 and the support member 2, that is, the electrode structure 15 and the electrode to be inspected due to temperature change Can be further suppressed.

By supporting the sheet-like probe 10 with the rigidity of the support member 2 as described above, in the probe card described later, for example, a hole formed in the support member 2 and a guide pin provided on the probe card are engaged or supported. The electrode structure 15 provided on the contact film 9 of the sheet-like probe 10 can be attached to the inspection object of the object to be inspected or different by fitting the member 2 and the circumferential step provided on the peripheral edge of the probe card. It can be easily aligned with the conductive part of the directionally conductive connector.
Furthermore, even when used for repeated inspections, it is possible to reliably prevent sticking to the inspection object and displacement of the electrode structure 15 from a predetermined position.

<Coating film>
Although not necessary for the back electrode part 15b of the electrode structure 15, a coating film (not shown) may be provided.

Note that a coating film (not shown) may be provided, for example, when the material of the back electrode portion 15b is not chemically stable or when the conductivity is insufficient.
As a material, a highly conductive metal such as chemically stable gold, silver, palladium, or rhodium can be used.

  Also, a metal coating film can be formed on the surface electrode portion 15a of the electrode structure 15. For example, when the electrode to be inspected is formed of a solder material, the solder material is prevented from diffusing. In view of this, it is desirable to coat the surface electrode portion 15a with a diffusion-resistant metal such as silver, palladium, or rhodium.

  By the way, in the sheet-like probe 10 of the present invention, the thermal expansion coefficient of the insulating layer 18, the metal frame plate 25, and the ring-shaped support member 2 is controlled to the following conditions, whereby the electrode structure due to temperature change is obtained. The positional deviation between the body 15 and the electrode to be inspected is suppressed.

In the sheet-like probe 10 of the present invention,
The thermal expansion coefficient of the insulating layer 18 is H1,
The thermal linear expansion coefficient of the metal frame plate 25 is H2,
When the thermal expansion coefficient of the ring-shaped support member 2 is H3, the following conditions (1) to (3), that is,
Condition (1): H1 = 0.8 × 10 ⁻⁵ to 8 × 10 ⁻⁵ / K
Condition (2): H2 / H1 <1
Condition (3): H3 / H1 <1
Is set to satisfy.

Further, in the sheet-like probe 10 of the present invention, the thermal linear expansion coefficient of the metal frame plate 25 is H2, and the thermal linear expansion coefficient of the ring-shaped support member 2 is H3, the following condition (4):
Condition (4): H3 / H2 = 0.02-50
Is set to satisfy.

  By appropriately selecting a combination of materials of the insulating layer 18, the metal frame plate 25, and the ring-shaped support member 2 so as to satisfy such conditions, the electrode structure 15 and the electrode to be inspected due to temperature change are selected. Misalignment can be suppressed.

  In addition, the combination of the material of such an insulating layer 18, the metal frame board 25, and the ring-shaped support member 2 should just satisfy said conditions (1)-(4), and is specifically limited. is not.

As such a combination, for example, a material having the following thermal linear expansion coefficient, that is, (a) insulating layer 18 H1:
Polyimide = about 5 × 10 ⁻⁵ / K
(b) Metal frame plate 25 H2:
42 alloy = about 5 × 10 ⁻⁶ / K
Invar alloy = 1.2 x ^10-6 / K
Elinvar alloy = 8 × 10 ^-6 / K
Kovar alloy = 5 × 10 ^-5 / K
Stainless steel invariant steel = ± 0.1 × 10 ^-6 / K
(c) Support member 2 H3:
Silicon nitride = 3.5 × 10 ⁻⁶ / K
Silicon carbide = 4 × 10 ⁻⁶ / K
Invar alloy = 1.2 x ^10-6 / K
Stainless steel invariant steel = ± 0.1 × 10 ^-6 / K
You can choose from.

  In this way, the thermal linear expansion coefficient H1 of the insulating layer 18, the thermal linear expansion coefficient H2 of the metal frame plate 25, and the thermal linear expansion coefficient H3 of the ring-shaped support member 2 are set to the above conditions (1) to ( By setting the coefficient of thermal expansion between these members so as to satisfy 4), the influence of the difference in the coefficient of thermal expansion of these members, that is, the positional deviation between the electrode structure 15 and the electrode to be inspected due to a temperature change is prevented. Can be suppressed.

Further, in the sheet-like probe 10 of the present invention, the thermal linear expansion coefficient H2 of the metal frame plate 25 has the following condition (5), that is,
Condition (5): It is preferable to set so as to satisfy H2 = −1 × 10 ^{−7 to} 3 × 10 ⁻⁵ / K.

  Thus, by setting the coefficient of thermal expansion between these members so that the thermal expansion coefficient H2 of the metal frame plate 25 satisfies the above condition (5), the insulating layer 18 and the metal frame plate 25 are set. Further, it is possible to further suppress the influence due to the difference in the thermal expansion coefficient of the ring-shaped support member 2, that is, the positional deviation between the electrode structure 15 and the electrode to be inspected due to the temperature change.

Moreover, in the sheet-like probe 10 of the present invention, the thermal linear expansion coefficient H3 of the ring-shaped support member 2 has the following condition (6), that is,
Condition (6): It is preferable to set so as to satisfy H3 = −1 × 10 ^{−7 to} 3 × 10 ⁻⁵ / K.

  By setting the coefficient of thermal expansion between these members so that the thermal expansion coefficient H3 of the ring-shaped support member 2 satisfies the condition (6) as described above, the insulating layer 18, the metal frame, and the like. The influence due to the difference in thermal expansion coefficient between the plate 25 and the ring-shaped support member 2, that is, the positional deviation between the electrode structure 15 and the electrode to be inspected due to the temperature change can be further suppressed.

  According to such a sheet-like probe 10, since the contact film 9 is supported in the through hole 12 of the metal frame plate 25, the area of the contact film 9 disposed in the through hole 12 can be reduced.

  For example, if a metal frame plate 25 in which a plurality of through holes 12 are formed corresponding to an electrode region in which an electrode to be inspected of a circuit device to be inspected is formed, the metal frame plate 25 is disposed in each of these through holes 12, The area of each contact film 9 supported at the peripheral edge can be greatly reduced.

  Since the contact film 9 having such a small area has a small absolute amount of thermal expansion in the surface direction of the insulating layer 18, the thermal expansion of the insulating layer 18 can be reliably regulated by the metal frame plate 25.

Therefore, even if the inspection target is a large-area wafer having a diameter of 8 inches or more or a circuit device in which the pitch of the electrodes to be inspected is extremely small, the positions of the electrode structure 15 and the electrodes to be inspected due to temperature changes during the burn-in test. Since the deviation is reliably prevented, a good electrical connection state can be stably maintained.
2. About the manufacturing method of sheet probe:
Hereinafter, the manufacturing method of the 1st Example of the sheet-like probe 10 of this invention is demonstrated.

  As shown in FIG. 8A, the insulating sheet 11A, the surface-side metal layer 16A formed on the surface of the insulating sheet 11A, and the first back-side metal formed on the back surface of the insulating sheet 11A. A laminate 10A composed of the layer 19A is prepared.

  The insulating sheet 11A has a total thickness of the insulating sheet 11A and the first backside metal layer 19A equal to the protruding height of the surface electrode portion 15a in the electrode structure 15 to be formed. Is done.

  The material constituting the insulating sheet 11A is not particularly limited as long as it is flexible and has insulating properties. For example, a resin sheet made of polyimide resin, liquid crystal polymer, polyester, fluorine resin, or the like, fiber A sheet in which the above resin is impregnated into a cloth knitted can be used.

  Among these, it is preferable that the through hole for forming the surface electrode portion 15a can be easily formed by etching, and it is preferably made of an etchable material, and polyimide is particularly preferable.

  The thickness of the insulating sheet 11A is not particularly limited as long as the insulating sheet 11A is flexible, but is preferably 10 to 50 μm, more preferably 10 to 25 μm.

As such a laminated body 10A, for example, a laminated polyimide sheet in which a metal layer made of copper is laminated on both surfaces that are generally commercially available can be used.
For such a laminate 10A, as shown in FIG. 8 (b), a protective film 40A is laminated on the entire surface of the front surface side metal layer 16A and formed on the surface of the first back side metal layer 19A. An etching resist film 12A in which a plurality of pattern holes 12H are formed according to a pattern corresponding to the pattern of the electrode structure 15 to be formed is formed.

Here, as a material for forming the resist film 12A, various materials used as a photoresist for etching can be used.
Next, with respect to the first back surface side metal layer 19A, by etching the portion exposed through the pattern hole 12H of the resist film 12A and removing the portion, as shown in FIG. A plurality of pattern holes 19H communicating with the pattern holes 12H of the resist film 12A are formed in the first back side metal layer 19A.

  Thereafter, the insulating sheet 11A is subjected to an etching process to remove the portions exposed through the pattern holes 12H of the resist film 12A and the pattern holes 19H of the first backside metal layer 19A. Thus, as shown in FIG. 9 (a), the insulating sheet 11A is connected to the pattern hole 19H of the first back surface side metal layer 19A, and the taper becomes smaller in diameter from the back surface to the surface of the insulating sheet 11A. A plurality of through-holes 11H are formed.

Thereby, the pattern hole 1 of the first back surface side metal layer 19A is formed on the back surface of the laminate 10A.
9H and a plurality of surface electrode portion forming recesses 10K formed by communicating the through holes 11H of the insulating sheet 11A.

  In the above, the etching agent for etching the first backside metal layer 19A is appropriately selected according to the material constituting these metal layers, and when these metal layers are made of copper, for example. May be an aqueous ferric chloride solution.

  Further, as an etching solution for etching the insulating sheet 11A, an amine-based etching solution, a hydrazine-based aqueous solution, a potassium hydroxide aqueous solution, or the like can be used, and the insulating sheet 11A can be selected by selecting etching processing conditions. In addition, a tapered through hole 11H having a smaller diameter from the back surface to the front surface can be formed.

Thereafter, as shown in FIG. 9B, the resist film 12A is removed from the stacked body 10A in which the surface electrode portion forming recess 10K is formed.
Then, as illustrated in FIG. 9C, a resist pattern 14 is formed on the first back surface side metal layer 19 </ b> A of the multilayer body 10 </ b> A so as to cover the surface electrode portion formation recess 10 </ b> K.

  Further, as shown in FIG. 10A, most of the exposed portion other than the resist pattern 14 of the first back surface side metal layer 19A of the laminate 10A is removed by etching.

  Then, by removing the resist pattern 14 used in the step of FIG. 9C, as shown in FIG. 10B, the first back surface side metal layer 19A of the laminated body 10A becomes the peripheral portion of the through hole 11H. , Partially remaining.

  Further, as shown in FIG. 10C, the insulating layer 18 and the second back side metal layer 17A are formed on the front surface electrode portion forming recess 10K provided in the laminated body 10A, thereby forming a laminated layer. Form body 10B.

In this state, the surface electrode portion forming recess 10K is closed by the insulating layer 18 and is in a hollow state.
Then, as shown in FIG. 11 (a), a plurality of pattern holes 28H are formed on the surface of the second back surface side metal layer 17A of the laminated body 10B according to the pattern corresponding to the pattern of the electrode structure 15 to be formed. The etched resist film 28A is formed.

  Further, the second back side metal layer 17A is subjected to an etching process on a portion exposed through the pattern hole 28H of the resist film 28A to remove the portion, as shown in FIG. A plurality of pattern holes 17H communicating with the pattern holes 28H of the resist film 28A are formed in the second back side metal layer 17A.

  And as shown in FIG.11 (c), the through-hole 18H is formed by performing the etching process to the insulating layer 18. As shown in FIG. As a result, the through hole 18H and the previously formed through hole 11H communicate with each other, and an opening 15H for forming an electrode structure is formed.

  Then, the resist film 28A is removed from the second back side metal layer 17A, and as shown in FIG. 12A, the second back side metal layer 17A is newly formed on the surface of the second back side metal layer 17A. A resist film 28B having a pattern hole communicating with the pattern hole 17H was formed.

Further, as shown in FIG. 12 (b), the surface side metal layer 16A is used as a common electrode, and electroplating is performed on the opening 15H for forming the electrode structure, so that the front surface electrode portion, the short circuit portion, and the back surface electrode portion are collectively. The electrode structure portion 22 is formed.

Then, the resist film 28B is removed from the stacked body 10B, and as shown in FIG. 12C, an etching resist film 29A is newly formed on the second back side metal layer 17A.
Further, as shown in FIG. 13 (a), the portion exposed through the pattern hole 29H of the resist film 29A of the second back surface side metal layer 17A is subjected to an etching process to remove the second portion. The back side metal layer 17A is separated into a metal frame plate portion and an electrode structure.

Then, as shown in FIG. 13B, the resist film 29A is removed, and a protective resist film 34A is newly formed on the back surface side of the stacked body 10B.
Further, as shown in FIG. 13C, the protective film 40A laminated on the entire surface of the surface side metal layer 16A is peeled off, and the surface side metal layer 16A is removed by performing an etching process.

  Then, as shown in FIG. 14A, the insulating sheet 11A is etched to reduce its thickness, and the surface electrode portion 15a is protruded. At this time, the insulating sheet 11A is thinned, but not all is removed, but a part is left.

  As a result, the insulating sheet 11A remaining thinly remains to maintain a state in which the partially remaining first back side metal layer 19A is buried in the insulating sheet 11A and the insulating layer 18A.

Therefore, the remaining part of the first back surface side metal layer 19 </ b> A is not exposed on the surface of the insulating layer 18.
Further, as shown in FIG. 14B, the protective resist film 34A provided on the back surface side of the stacked body 10B is removed.

And as shown in FIG.14 (c), the resist film 29 is formed in the upper surface of the laminated body 10B so that the insulating sheet 11A and a part of insulating layer 18A may be exposed.
Further, as shown in FIG. 15A, by etching the insulating sheet 11A and the insulating layer 18A in this state, a part of the second back side metal layer 17A is exposed.

  Then, by removing the resist film 29 from the surface of the insulating sheet 11A, as shown in FIG. 15B, the holding portion 15e is buried in the insulating layer 18A, and the surface of the holding portion 15e. The sheet-like probe 10 covered with the insulating sheet 11A is obtained.

Next, the manufacturing method of the 2nd Example of the sheet-like probe 10 of this invention is demonstrated.
The embodiment shown in FIGS. 16 (a) to 17 (c) is basically the same as the method for manufacturing the sheet-like probe described above, with the difference shown in FIG. 15 (b). As shown, the holding portion 15e is not buried between the insulating sheet 11A and the insulating layer 18A, but the insulating layer 11A and the holding portion 15e are flush with each other by removing the insulating sheet 11A. It is a point.

In this embodiment, since the steps from FIG. 8A to FIG. 13B are the same as those in the first embodiment, detailed description of the same steps is omitted.
As shown in FIG. 16 (a), similarly to FIG. 13 (c), an electrode structure in which the opening 15H for forming the electrode structure is electroplated, and the front surface electrode portion, the short-circuit portion, and the back surface electrode portion are integrated. The body portion 22 is formed, the back electrode portion 15b of the electrode structure is formed by the second back surface side metal layer 17A, and a protective resist film 34A is newly formed on the back surface side of the stacked body 10B.

Furthermore, the protective film 40A laminated on the entire surface of the surface-side metal layer 16A is peeled off, and the surface-side metal layer 16A is removed by etching.
Then, as shown in FIG. 16B, the insulating sheet 11A is etched to remove the entire insulating sheet 11A.

As a result, the surface electrode portion 15a is projected, and the insulating layer 18A and the holding portion 15e are flush with each other.
Further, as shown in FIG. 16C, the protective resist film 34A provided on the back surface side of the stacked body 10B is removed.

Then, as shown in FIG. 17A, a resist film 29 is formed on the upper surface of the stacked body 10B so as to expose a part of the insulating sheet 11A and the insulating layer 18A.
Further, as shown in FIG. 17B, by etching the insulating sheet 11A and the insulating layer 18A in this state, a part of the second back side metal layer 17A is exposed.

  Then, by removing the resist film 29 from the surface of the insulating sheet 11A, as shown in FIG. 17C, the sheet-like probe 10 in which the insulating layer 18A and the holding portion 15e are flush with each other is obtained. can get.

Next, the manufacturing method of the 3rd Example of the sheet-like probe 10 of this invention is demonstrated.
The embodiment shown in FIGS. 18 (a) to 19 (c) is basically the same as the method for manufacturing the sheet-like probe described above, but the difference is shown in FIG. 15 (b). As described above, the holding portion 15e is not buried between the insulating sheet 11A and the insulating layer 18A, but the insulating sheet 11A is completely removed and a part of the insulating layer 18A is removed to thereby hold the holding portion 15e. Is that it is partially buried in the insulating layer 18A.

In this embodiment, since the steps from FIG. 8A to FIG. 13B are the same, the detailed description of the same steps is omitted.
As shown in FIG. 18 (a), similarly to FIG. 13 (c), an electrode structure in which the opening 15H for forming the electrode structure is electroplated to collect the front electrode portion, the short-circuit portion, and the back electrode portion. The body portion 22 is formed, the back electrode portion 15b of the electrode structure is formed by the second back surface side metal layer 17A, and a protective resist film 34A is newly formed on the back surface side of the stacked body 10B.

Furthermore, the protective film 40A laminated on the entire surface of the surface-side metal layer 16A is peeled off, and the surface-side metal layer 16A is removed by etching.
Then, as shown in FIG. 18B, the insulating sheet 11A is etched to remove the entire insulating sheet 11A, and a part of the insulating layer 18A is further etched to remove it. The surface electrode portion 15a is protruded, and the holding portion 15e is partially embedded in the insulating layer 18A.

Further, as shown in FIG. 18C, the protective resist film 34A provided on the back surface side of the stacked body 10B is removed.
Then, as shown in FIG. 19A, a resist film 29 is formed on the upper surface of the laminate 10B so as to expose the insulating sheet 11A and a part of the insulating layer 18A.

Further, as shown in FIG. 19B, by etching the insulating sheet 11A and the insulating layer 18A in this state, a part of the second back side metal layer 17A is exposed.
Then, by removing the resist film 29 from the surface of the insulating sheet 11A, as shown in FIG. 19C, the sheet-like probe 10 in which the holding portion 15e is partially buried in the insulating layer 18A is obtained. can get.

Next, the manufacturing method of the 4th Example of the sheet-like probe 10 of this invention is demonstrated.
The embodiment shown in FIGS. 20 (a) to 25 (b) is basically the same as the method for manufacturing the sheet-like probe described above, with the difference shown in FIG. 10 (a). There is no first back side metal layer 19A remaining partially.

In this embodiment, since the steps from FIG. 8A to FIG. 9A are the same, detailed description of the same steps is omitted.
As shown in FIG. 20A, after the steps from FIG. 8A to FIG. 9A, the surface electrode portion forming recess 10K is formed in the same manner as in FIG. 9B. To the state.

And as shown in FIG.20 (b), the 1st back surface side metal layer 19A is etched and the part is removed.
Thereafter, as shown in FIG. 20 (c), the insulating layer 11A side of the laminated sheet 10C is arranged on the lower surface of the insulating sheet 11A of the laminated body 10A so that the surface electrode portion forming recess 10K side is located. Then, the laminated body 10B is formed.

In this state, the through hole 11H is closed by the insulating layer 18 and is in a hollow state.
Then, as shown in FIG. 21A, a plurality of pattern holes 28H are formed on the surface of the second back-side metal layer 17A of the laminate 10B according to the pattern corresponding to the pattern of the electrode structure 15 to be formed. The etched resist film 28A is formed.

  Furthermore, by etching the portion exposed through the pattern hole 28H of the resist film 28A on the second back side metal layer 17A and removing the portion, as shown in FIG. A plurality of pattern holes 17H communicating with the pattern holes 28H of the resist film 28A are formed in the second back side metal layer 17A.

  Then, as shown in FIG. 21C, the through hole 18H is formed by etching the insulating layer 18. As a result, the through hole 18H and the previously formed through hole 11H communicate with each other, and an opening 15H for forming an electrode structure is formed.

  Then, the resist film 28A is removed from the second back side metal layer 17A, and as shown in FIG. 22A, the second back side metal layer 17A is newly formed on the surface of the second back side metal layer 17A. A resist film 28B having a pattern hole communicating with the pattern hole 17H was formed.

  Further, as shown in FIG. 22 (b), the surface side metal layer 16A is used as a common electrode, and electroplating is performed on the opening 15H for forming the electrode structure, so that the surface electrode portion, the short-circuit portion, and the back electrode portion are collectively The electrode structure portion 22 is formed.

Then, the resist film 28B is removed from the stacked body 10B, and as shown in FIG. 22C, an etching resist film 29A is newly formed on the second back side metal layer 17A.
Further, as shown in FIG. 23 (a), the portion exposed through the pattern hole 29H of the resist film 29A of the second back surface side metal layer 17A is etched to remove the portion, thereby The back side metal layer 17A is separated into a metal frame plate portion and an electrode structure.

Then, as shown in FIG. 23B, the resist film 29A is removed, and a protective resist film 34A is newly formed on the back surface side of the stacked body 10B.
Further, as shown in FIG. 23C, the protective film 40A laminated on the entire surface of the surface side metal layer 16A is peeled off, and the surface side metal layer 16A is subjected to an etching process to remove the portion.

  Then, as shown in FIG. 24A, the insulating sheet 11A is etched to reduce its thickness, and the surface electrode portion 15a is projected. At this time, the insulating sheet 11A is thinned, but not all is removed, but a part is left.

Thereby, the state where the upper end portion of the short-circuit portion 15c is buried in the insulating sheet 11A and the insulating layer 18A is maintained by the insulating sheet 11A remaining thin.
Further, as shown in FIG. 24B, the protective resist film 34A provided on the back side of the stacked body 10B is removed.

Then, as shown in FIG. 24C, a resist film 29 is formed on the upper surface of the stacked body 10B so as to expose a part of the insulating sheet 11A and the insulating layer 18A.
Further, as shown in FIG. 25A, by etching the insulating sheet 11A and the insulating layer 18 in this state, a part of the second back side metal layer 17A is exposed.

  Then, by removing the resist film 29 from the surface of the insulating sheet 11A, as shown in FIG. 25B, the shoulder portion 15d is buried in the insulating layer 18A, and the surface of the shoulder portion 15d. The sheet-like probe 10 covered with the insulating sheet 11A is obtained.

Next, the manufacturing method of the 5th Example of the sheet-like probe 10 of this invention is demonstrated.
The embodiment shown in FIGS. 26 (a) to 27 (c) is basically the same as the method for manufacturing the sheet-like probe described above, but the difference is shown in FIG. 14 (b). By removing the insulating sheet 11A having a reduced thickness by performing the etching process, there is no step between the shoulder and the insulating layer.

In this embodiment, the steps from FIG. 20A to FIG. 23B are the same as those in the fourth embodiment, and therefore detailed description of the same steps is omitted.
By performing the above-described fourth embodiment and the steps from FIG. 20A to FIG. 23B, electroplating is performed on the opening 15H for forming the electrode structure, and the surface electrode portion, the short-circuit portion, An electrode structure portion 22 in which the back surface electrode portions are collectively formed is formed, the second back surface side metal layer 17A is separated into electrode structures, and a back surface electrode portion 15b is formed.

  Thereafter, as shown in FIG. 26A, in the same manner as in FIG. 23C, the protective film 40A laminated on the entire surface of the surface-side metal layer 16A is peeled off, and the surface-side metal layer 16A is etched. To remove the part.

  Thereafter, as shown in FIG. 26B, the insulating sheet 11A is removed by etching, and the surface electrode portion 15a is projected. At this time, the etching process is performed until the surface of the insulating layer 18 and the end of the surface electrode portion 15a are substantially the same.

Further, as shown in FIG. 26C, the protective resist film 34A provided on the back surface side of the stacked body 10B is removed.
Then, as shown in FIG. 27A, a resist film 29 is formed on the upper surface of the stacked body 10B so as to expose a part of the insulating sheet 11A and the insulating layer 18A.

Furthermore, as shown in FIG. 27B, by etching the insulating sheet 11A and the insulating layer 18 in this state, a part of the second back side metal layer 17A is exposed.
Then, by removing the resist film 29 from the surface of the insulating sheet 11A, the sheet-like probe 10 in which the insulating layer 18A and the shoulder portion 15d are flush with each other as shown in FIG. can get.

In addition, the sheet-like probe (see FIG. 28A) in which the contact film is supported by the support portion with the metal frame plate obtained by any one of the above manufacturing methods is the peripheral portion of the sheet-like probe 10, that is, On the outer peripheral edge of the metal frame plate 25, a flat plate ring-shaped support member 2 having rigidity is provided as shown in FIG. 28 (b), for example, via an adhesive.
3. About inspection equipment for probe cards and circuit devices:
FIG. 29 is a cross-sectional view showing an embodiment of the circuit device inspection device of the present invention and a probe card used therefor, FIG. 30 is a cross-sectional view showing a state before and after assembly of the probe card, and FIG. It is sectional drawing which showed the structure of the principal part of a probe card.

  This inspection apparatus is used to perform an electrical inspection of each integrated circuit on the wafer 6 on which a plurality of integrated circuits are formed in the state of the wafer 6. The probe card 1 of the inspection apparatus includes an inspection circuit board 20, an anisotropic conductive connector 30 disposed on the surface of the inspection circuit board 20, and a sheet disposed on the surface of the anisotropic conductive connector 30. The probe 10 is provided.

On the surface of the inspection circuit board 20, a plurality of inspection electrodes 32 are formed according to the pattern of the electrodes to be inspected of all the integrated circuits formed on the wafer 6 to be inspected.
Examples of the substrate material of the circuit board 20 for inspection include a composite resin substrate material such as glass fiber reinforced epoxy resin, glass fiber reinforced phenol resin, glass fiber reinforced polyimide resin, glass fiber reinforced bismaleimide triazine resin, and glass. Ceramic substrate materials such as silicon dioxide and alumina, and laminated substrate materials obtained by laminating a resin such as an epoxy resin and a polyimide resin using a metal plate as a core material.

The probe card 1 for use in the burn-in test has a linear thermal expansion coefficient of 3 × 10 ⁻⁵ / K or less, preferably 1 × 10 ⁻⁷ to 1 × 10 ⁻⁵ / K, more preferably 1 × 10 as a substrate material. It is desirable to use one having a density of ^{−6 to} 6 × 10 ⁻⁶ / K.

As shown in FIG. 29, the anisotropic conductive connector 30 includes a disk-shaped frame plate 31 in which a plurality of through holes are formed.
The through hole of the frame plate 31 is formed corresponding to each integrated circuit formed on the wafer 6 to be inspected, for example.

Inside the through hole, an anisotropic conductive sheet 35 having conductivity in the thickness direction is arranged independently of the adjacent anisotropic conductive sheet 35 in a state of being supported on the periphery of the through hole. .
The frame plate 31 is formed with positioning holes (not shown) for positioning the sheet-like probe 10 and the inspection circuit board 20.

  Although the thickness of the frame board 31 changes with materials, it is preferable that it is 20-600 micrometers, More preferably, it is 40-400 micrometers. When this thickness is less than 20 μm, the strength required when using the anisotropic conductive connector 30 may not be obtained, and the durability tends to be low.

  On the other hand, when the thickness exceeds 600 μm, the anisotropic conductive sheet 35 formed in the through hole becomes excessively thick, and the good conductivity of the connecting conductive portion and the insulation between the adjacent connecting conductive portions are obtained. It may not be obtained.

The shape and dimensions in the surface direction of the through holes of the frame plate 31 are designed according to the dimensions, pitch and pattern of the electrodes to be inspected of the wafer 6 to be inspected.
The material of the frame plate 31 is preferably a material that does not easily deform the frame plate 31 and has a rigidity that allows the shape of the frame plate 31 to be stably maintained. Specific examples include a metal material, a ceramic material, and a resin material. .

  Specific examples of the metal material include metals such as iron, copper, nickel, titanium, and aluminum, or alloys or alloy steels in which two or more of these are combined. When the frame plate 31 is formed of a metal material, an insulating film may be applied to the surface of the frame plate 31.

In the probe card 1 for use in the burn-in test, the material of the frame plate 31 has a linear thermal expansion coefficient of 3 × 10 ⁻⁵ / K or less, preferably 1 × 10 ⁻⁷ to 1 × 10 ⁻⁵ / K, more preferably Is preferably 1 × 10 ⁻⁶ to 8 × 10 ⁻⁶ / K.

  Specific examples of such materials include Invar type alloys such as Invar, Elinvar type alloys such as Erin bar, magnetic metal alloys such as Super Invar, Kovar, and 42 alloy, or alloy steel.

As shown in FIG. 31, the anisotropic conductive sheet 35 includes a plurality of connecting conductive portions 36 extending in the thickness direction and insulating portions 37 that insulate the conductive portions 36 from each other.
The conductive portion 36 contains the conductive particles 36a exhibiting magnetism densely in an aligned state in the thickness direction. Further, the conductive portion 36 protrudes from both surfaces of the anisotropic conductive sheet 35, and a protruding portion 38 is formed on both surfaces.

  The thickness of the anisotropic conductive sheet 35 (the thickness of the conductive portion 36 when the conductive portion 36 protrudes from the surface) is preferably 50 to 3000 μm, more preferably 70 to 2500 μm, and particularly preferably 100 to 2000 μm. If this thickness is 50 μm or more, the anisotropic conductive sheet 35 having sufficient strength can be obtained with certainty.

Moreover, if this thickness is 3000 micrometers or less, the electroconductive part 36 which has a required electroconductivity characteristic will be obtained reliably.
The protruding height of the protruding portion 38 is preferably 100% or less of the shortest width or diameter of the protruding portion 38, and more preferably 70% or less.

By forming the projecting portion 38 having such a projecting height, conductivity is reliably obtained without buckling when the projecting portion 38 is pressurized.
The thickness of one of the bifurcated portions supported by the frame plate 31 of the anisotropic conductive sheet 35 is preferably 5 to 600 μm, more preferably 10 to 500 μm, and particularly preferably 20 to 400 μm.

Further, as shown in the drawing, the anisotropic conductive sheet 35 may be supported only on one side of the frame plate 31 in addition to the case where the anisotropic conductive sheet 35 is supported on both sides of the frame plate 31.
As the elastic polymer material forming the anisotropic conductive sheet 35, a heat-resistant polymer material having a crosslinked structure is preferable.

Examples of the curable polymer substance-forming material that can be used to obtain such a crosslinked polymer substance include silicone rubber, polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile- Conjugated diene rubbers such as butadiene copolymer rubbers and hydrogenated products thereof, block copolymer rubbers such as styrene-butadiene-diene block copolymer rubbers, styrene-isoprene block copolymers, and hydrogenated products thereof, Examples include chloroprene rubber, urethane rubber, polyester rubber, epichlorohydrin rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, and soft liquid epoxy rubber. Among these, silicone rubber is preferable from the viewpoint of moldability and electrical characteristics.

As the silicone rubber, those obtained by crosslinking or condensing liquid silicone rubber are preferable. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ⁻¹ sec, and may be a condensation type, an addition type, a vinyl group or a hydroxyl group. Specific examples include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, and methylphenyl vinyl silicone raw rubber.

Further, a curing catalyst can be contained in the polymer substance-forming material.
Examples of such a curing catalyst include organic peroxides such as benzoyl peroxide, bisdicyclobenzoyl peroxide, dicumyl peroxide and ditertiary butyl peroxide, fatty acid azo compounds, and hydrosilylation catalysts.

  The amount of the curing catalyst used is appropriately selected in consideration of the type of polymer substance forming material, the type of curing catalyst, and other curing treatment conditions, but usually 3 to 100 parts by weight of the polymer substance forming material. 15 parts by weight.

  As the conductive particles 36a contained in the conductive portion 36 of the anisotropic conductive sheet 35, particles exhibiting magnetism are preferable. Examples of such particles exhibiting magnetism include metal particles such as iron, nickel, and cobalt, alloy particles thereof, or particles containing these metals.

  These particles are used as core particles, and the surface of the core particles is plated with a metal having good conductivity such as gold, silver, palladium, rhodium, or non-magnetic metal particles, inorganic particles such as glass beads, or polymer particles. It is also possible to use particles in which a core particle is plated with a conductive magnetic material such as nickel or cobalt on the surface of the core particle, or particles in which the core particle is coated with both a conductive magnetic material and a metal having good conductivity.

  Of these, nickel particles are used as core particles, and the surface thereof is plated with a metal having good conductivity such as gold or silver. The surface of the core particles can be coated with the conductive metal by, for example, electroless plating.

  The conductive particles obtained by coating the surface of the core particles with a conductive metal have a conductive metal coverage on the particle surface (ratio of the conductive metal coating area to the surface area of the core particles) from the viewpoint of obtaining good conductivity. % Or more, more preferably 45% or more, and particularly preferably 47 to 95%.

  The coating amount of the conductive metal is preferably 2.5 to 50% by weight of the core particles, more preferably 3 to 45% by weight, still more preferably 3.5 to 40% by weight, particularly preferably 5 to 30%. % By weight.

  The particle diameter of the conductive particles 36a is preferably 1 to 500 μm, more preferably 2 to 400 μm, still more preferably 5 to 300 μm, and particularly preferably 10 to 150 μm.

Moreover, it is preferable that the particle diameter distribution (Dw / Dn) of the electroconductive particle 36a is 1-10, More preferably, it is 1-7, More preferably, it is 1-5, Most preferably, it is 1-4.
By using the conductive particles 36a that satisfy such conditions, the anisotropic conductive sheet 35 can be easily deformed under pressure, and sufficient electrical contact can be obtained between the conductive particles 36a in the conductive portion 36. It is done.

The conductive particles 36a are preferably spherical, star-shaped, or a lump shape of secondary particles in which primary particles are aggregated in that they can be easily dispersed in the polymer material-forming material.
Moreover, you may process the surface of the electroconductive particle 36a with coupling agents, such as a silane coupling agent. Thereby, the adhesiveness of the electroconductive particle 36a and an elastic polymer substance becomes high, and durability in the repeated use of the elastic anisotropic conductive film 50 obtained becomes high.

  The content ratio of the conductive particles 36a in the conductive portion 36 is 10 to 60%, preferably 15 to 50% in terms of volume fraction. When this ratio is less than 10%, the conductive part 36 having a sufficiently small electric resistance value may not be obtained.

On the other hand, when this ratio exceeds 60%, the obtained conductive part 36 is likely to be fragile, and the necessary elasticity may not be obtained.
In the polymer substance-forming material, an inorganic filler such as normal silica powder, colloidal silica, airgel silica, alumina, or the like can be contained as necessary. By including such an inorganic filler, the thixotropic property of the molding material is ensured and the viscosity thereof is increased. Further, the dispersion stability of the conductive particles 36a is improved, and the strength of the anisotropic conductive sheet 35 obtained by the curing process is increased.

The anisotropic conductive connector 30 can be manufactured by a method described in, for example, Japanese Patent Application Laid-Open No. 2002-334732.
As shown in FIGS. 29 and 30, a pressure plate 3 that pressurizes the probe card 1 downward is provided on the back surface of the inspection circuit board 20 of the probe card 1. A wafer mounting table 4 on which the wafer 6 is mounted is provided.

A heater 5 is connected to each of the pressure plate 3 and the wafer mounting table 4.
As shown in FIG. 29, the ring-shaped support member 2 of the sheet-like probe 10 is fitted into a circumferential fitting step portion provided on the pressure plate 3. A guide pin 50 is inserted into the positioning hole of the anisotropic conductive connector 30.

  As a result, the anisotropic conductive connector 30 is arranged so that the respective conductive portions 36 of the anisotropic conductive sheet 35 are in contact with the respective test electrodes 21 of the circuit board 20 for inspection. On the surface, the sheet-like probe 10 is arranged so that each electrode structure 15 comes into contact with each conductive portion 36 of the anisotropic conductive sheet 35 of the anisotropic conductive connector 30, and the three members are fixed in this state.

  A wafer 6 to be inspected is placed on the wafer mounting table 4, and the probe card 1 is pressed downward by the pressure plate 3, whereby each surface electrode portion 15 a of the electrode structure 15 of the sheet-like probe 10 is transferred to the wafer 6. Each of the electrodes 7 to be tested is brought into pressure contact.

  In this state, each conductive portion 36 of the anisotropic conductive sheet 35 of the anisotropic conductive connector 30 is formed by the inspection electrode 21 of the inspection circuit board 20 and the back surface electrode portion 15a of the electrode structure 15 of the sheet-like probe 10. It is pinched and compressed in the thickness direction.

  As a result, a conductive path is formed in the conductive portion 36 in the thickness direction, and the inspection electrode 7 of the wafer 6 and the inspection electrode 21 of the inspection circuit board 20 are electrically connected. Thereafter, the wafer 6 is heated to a predetermined temperature by the heater 5 via the wafer mounting table 4 and the pressure plate 3, and in this state, each of the plurality of integrated circuits formed on the wafer 6 is electrically inspected. .

  According to this wafer inspection apparatus, even if the wafer 6 has a large area of, for example, a diameter of 8 inches or more and the pitch of the electrodes 7 to be inspected is extremely small, a good electrical connection state to the wafer 6 in the burn-in test. Can be maintained stably, and a required electrical inspection can be reliably performed for each of the plurality of integrated circuits on the wafer 6.

  In the present embodiment, the inspection electrodes of the probe card 1 are connected to the electrodes to be inspected of all the integrated circuits formed on the wafer 6 and the electrical inspection is performed collectively, but all of the inspection electrodes formed on the wafer 6 are performed. The inspection electrodes of the probe card 1 may be connected to the electrodes to be inspected 7 of a plurality of integrated circuits selected from the integrated circuits, and inspection may be performed for each selected region.

  The number of integrated circuits to be selected is appropriately selected in consideration of the size of the wafer 6, the number of integrated circuits formed on the wafer 6, the number of electrodes 7 to be inspected of each integrated circuit, etc. There are 32, 64, and 128.

  Further, in the anisotropic conductive sheet 35, in addition to the conductive portion 36 formed according to the pattern corresponding to the pattern of the electrode 7 to be inspected, a non-connection conductive portion 36 that is not electrically connected to the electrode 7 to be inspected is formed. May be.

  The probe card 1 and the circuit device inspection apparatus according to the present invention are for inspecting circuits formed on semiconductor integrated circuit devices such as semiconductor chips, package LSIs such as BGA and CSP, MCMs, etc. in addition to wafer inspection. It is good also as a structure of.

Specific examples of the present invention will be described below, but the present invention is not limited to these examples.
A. About making test wafers:
A total of 393 square integrated circuits L each having a size of 8 mm × 8 mm were formed on a silicon wafer 6 having a diameter of 8 inches.

  Each integrated circuit L formed on the wafer 6 has an electrode region to be inspected at the center thereof, and the electrode region to be inspected is a rectangular 40 having a vertical dimension of 200 μm and a horizontal dimension of 70 μm. The electrodes 7 to be inspected are arranged in a row in the horizontal direction at a pitch of 120 μm.

The total number of electrodes 7 to be inspected on the entire wafer 6 is 15720, and all the electrodes 7 to be inspected are electrically insulated from each other.
Hereinafter, this wafer is referred to as “test wafer W1”.

  Further, instead of electrically insulating all the electrodes to be inspected 7 from each other, two of the 40 electrodes to be inspected 7 of the integrated circuit L, counting from the outermost electrode 7 to be inspected, every two. Except for being electrically connected to each other, 393 integrated circuits L having the same configuration as the test wafer W1 were formed on the wafer 6.

Hereinafter, this wafer is referred to as “test wafer W2.”
B. About making a sheet-like probe:
Example 1
Polyimide sheet (Toray DuPont Co., Ltd. “Kapton” registered trademark Polyimide film type 100EN A copper layer with a thickness of 8 μm on both sides) is processed to have a diameter of 20 cm on each side of a polyimide sheet with a diameter of 20 cm and a thickness of 25 μm. A laminated polyimide sheet (hereinafter, referred to as “laminated body 10A”) in which a metal layer made of copper having a thickness of 8 μm was laminated was prepared (see FIG. 8A).

  The laminated body 10A has a first back surface side metal layer 19A made of copper having a thickness of 8 μm on one surface of an insulating sheet 11A made of a polyimide sheet having a thickness of 25 μm, and a surface side made of copper having a thickness of 8 μm on the other surface. It has the metal layer 16A.

  For the laminate 10A, a protective film 40A is formed on the entire surface of the surface-side metal layer 16A by a protective seal made of polyethylene terephthalate having a thickness of 25 μm, and for the test on the entire back surface of the first back-side metal layer 19A. According to a pattern corresponding to the pattern of the electrode 7 to be inspected formed on the wafer W1, a resist film 12A having 26116 circular pattern holes 12H having a diameter of 50 μm was formed (see FIG. 8B).

  Here, in the formation of the resist film 12A, the exposure process is performed by irradiating 80 mJ of ultraviolet light with a high-pressure mercury lamp, and the development process is performed by immersing in a developer composed of a 1% aqueous sodium hydroxide solution for 40 seconds twice. Done by repeating.

  Next, the first backside metal layer 19A is etched using ferric chloride-based etching solution under the conditions of 50 ° C. and 30 seconds, whereby 26116 pieces communicated with the pattern holes 12H of the resist film 12A. A pattern hole 19H was formed (see FIG. 8C).

  After that, the insulating sheet 11A is subjected to an etching treatment at 80 ° C. for 10 minutes using an amine-based polyimide etching solution (“TPE-3000” manufactured by Toray Engineering Co., Ltd.), whereby the insulating sheet 11A is subjected to etching. 26116 through holes 11H communicating with the pattern holes 19H of the first back surface side metal layer 19A were formed (see FIG. 9A).

  Each of the through-holes 11H has a tapered shape having a diameter that decreases from the back surface to the surface of the insulating sheet 11A. The opening diameter on the back surface side is 50 μm, and the opening diameter on the front surface side is 20 μm (average value). It was a thing.

Next, the resist film 12A was removed from the laminate 10A by immersing the laminate 10A in a 45 ° C. sodium hydroxide solution for 2 minutes (see FIG. 9B).
Thereafter, a rectangular resist having a dimension of 160 μm × 70 μm is applied to the laminated body 10A so as to cover the through hole 11H of the first backside metal layer 19A with a dry film resist (Hitachi Chemical: Photec RY-3210) having a thickness of 10 μm. A pattern 14 was formed (see FIG. 9C).

  In the formation of the resist pattern 14, the exposure process is performed by irradiating 80 mJ ultraviolet rays with a high-pressure mercury lamp, and the development process is repeated twice by immersing in a developer composed of a 1% aqueous sodium hydroxide solution for 40 seconds. Went by.

  Further, after that, the insulating sheet 11A was subjected to an etching process using a ferric chloride etching solution under the conditions of 50 ° C. and 30 seconds to remove most of the first back side metal layer 19A ( FIG. 10 (a)).

Then, the resist pattern 14 was removed from the laminate 10A by immersing the laminate 10A in a sodium hydroxide solution at 45 ° C. for 2 minutes (see FIG. 10B).
Further, an insulating layer made of a thermoplastic polyimide film (Nippon Steel Chemical Co., Ltd., trade name “Espanex”) having a diameter of 20.4 cm and a thickness of 25 μm from above the insulating sheet 11A provided in the laminate 10A. 18 is laminated, a metal sheet made of 42 alloy having a diameter of 22 cm and a thickness of 10 μm is laminated on the insulating layer 18, and heated and pressed at 165 ° C. and 40 kgf / cm ² for 1 hour. 10B was formed (see FIG. 10C).

In this state, the through hole 11H is closed by the insulating layer 18 and is in a hollow state.
Then, on the surface of the second back surface side metal layer 17A of this laminate 10B, there are formed 26116 circular pattern holes 28H having a diameter of 80 μm according to the pattern corresponding to the pattern of the electrode structure 15 to be formed. A resist film 28A was formed (see FIG. 11A).

  Next, the second backside metal layer 17A is etched using ferric chloride-based etching solution under the conditions of 50 ° C. and 30 seconds, whereby 26116 pieces communicated with the pattern holes 28H of the resist film 28A. A pattern hole 17H was formed (see FIG. 11B).

  Then, the insulating layer 18 is subjected to an etching treatment at 80 ° C. for 10 minutes using an amine-based polyimide etching solution (manufactured by Toray Engineering Co., Ltd., “TPE-3000”). 26116 through holes 18H communicating with the pattern holes 17H of the second back side metal layer 17A were formed (see FIG. 11C).

And the resist film 28A was removed from the laminated body 10B by immersing the laminated body 10B in which the through-hole 18H was formed in a 45 degreeC sodium hydroxide solution for 2 minutes.
Thereafter, a resist film 28B having a pattern hole having a size of 80 μm × 150 μm and communicating with the pattern hole 17H of the second back side metal layer 17A is formed on the surface of the second back side metal layer 17A (FIG. 12). (See (a)).

As a result, the through hole 18H and the previously formed through hole 11H communicated to form an opening 15H for forming an electrode structure.
Next, the laminate 10B is dipped in a plating bath containing nickel sulfamate, and the laminate 10B is subjected to an electrolytic plating process using the surface-side metal layer 16A as an electrode to form an electrode structure forming opening 15H. The electrode structure part 22 which bundled up the surface electrode part, the short circuit part, and the back surface electrode part was formed by filling the metal with (see FIG. 12B).

  Subsequently, the resist film 28B was removed from the laminate 10B by immersing the laminate 10B in which the electrode structure portion 22 was formed in a sodium hydroxide solution at 45 ° C. for 2 minutes. Thereafter, a resist film 29A for etching was newly formed on the second back side metal layer 17A (see FIG. 12C).

  Further, the second back surface side metal layer 17A is subjected to an etching process using a ferric chloride-based etchant under the conditions of 50 ° C. and 30 seconds, whereby the second back surface side metal layer 17A and the metal frame plate portion are formed. The electrode structure was separated (see FIG. 13A).

Then, the resist film 29A is removed, and a protective resist film 34A is newly formed on the back surface side of the stacked body 10B.
The laminated body 10B was immersed in a 45 ° C. sodium hydroxide solution for 2 minutes to remove the resist film 29A from the laminated body 10B, and a new protective resist film 34A was formed on the back side of the laminated body 10B (FIG. 13 (b)).

  Furthermore, the protective film 40A laminated on the entire surface of the surface-side metal layer 16A is peeled off, and a ferric chloride-based etching solution is used for the surface-side metal layer 16A of the laminate 10B at 50 ° C. for 30 seconds. It removed by performing the etching process on conditions (refer FIG.13 (c)).

  Thereafter, the insulating sheet 11A is subjected to an etching treatment at 80 ° C. for 6 minutes using an amine-based polyimide etching solution (“TPE-3000” manufactured by Toray Engineering Co., Ltd.), whereby the insulating sheet 11A The surface portion was removed, the thickness of the insulating sheet was changed from 25 μm to 5 μm, and the surface electrode portion 15a was protruded (see FIG. 14A).

Furthermore, the resist film 34A was removed from the laminate 10B by immersing the laminate 10B in a 45 ° C. sodium hydroxide solution for 2 minutes (see FIG. 14B).
Then, a resist film is formed with a dry film resist having a thickness of 25 μm so as to cover the surface electrode portion 15a and the insulating sheet 11A of the laminated body 10B, and a resist film 29 patterned so as to cover a portion to be a contact film. (See FIG. 14C).

Each of the resist films 29 has a horizontal direction of 4600 μm and a vertical direction of 2000 μm.
In this state, by using an amine-based polyimide etching solution (“TPE-3000” manufactured by Toray Engineering Co., Ltd.) under the conditions of 80 ° C. and 10 minutes, each through-hole of the metal frame plate 25 is formed. A laminate 10C provided with a contact film on which the electrode structure 15 was formed was obtained (see FIG. 15A).

Then, the resist film 29 was removed by immersing the laminated body 10C in an aqueous sodium hydroxide solution at 45 ° C. for 2 minutes (see FIG. 15B).
Then, a silicone-based thermosetting adhesive (manufactured by Shin-Etsu Chemical Co., Ltd .: product name 1300T) is applied to the periphery of the sheet-like probe 10, that is, the outer periphery of the metal frame plate 25 so as to be separated from the insulating layer 18 and maintained at 150 ° C. In this state, a ring-shaped support member 2 made of silicon nitride having an outer diameter of 220 mm, an inner diameter of 205 mm, and a thickness of 2 mm was disposed on the portion where the silicone-based thermosetting adhesive was applied.

Furthermore, the sheet-like probe 10 according to the present invention was manufactured by holding the metal frame plate 25 and the support member 2 at 180 ° C. for 2 hours while applying pressure.
In the above, as a dry film resist, H-K350 manufactured by Hitachi Chemical Co., Ltd. was used in a portion not particularly described.

The specifications of the obtained sheet-like probe 10 are as follows.
The metal frame plate 25 has a disk shape with a diameter of 22 cm and a thickness of 10 μm, and is made of 42 alloy.

  The number of through-holes 12 in the metal frame plate 25 is 393, each having a horizontal dimension of 6400 μm and a vertical dimension of 320 μm. The insulating layer 18 of each of the 393 contact films 9 is made of polyimide and has dimensions of 7.5 mm in the horizontal direction, 7.5 mm in the vertical direction, and 12.5 μm in thickness.

Each of the electrode structures 15 of the contact film 9 has 40 pieces (total of 15720 pieces) and is arranged in a row at a pitch of 120 μm in the horizontal direction.
In the obtained sheet-like probe 10, the thickness d of the insulating layer 18A is 25 μm, the shape of the surface electrode portion 15a of the electrode structure 15 is a truncated cone, the diameter R1 at the tip is 20 μm, and the diameter R2 at the base is The protruding height t1 from the surface of the insulating sheet 11 is 60 μm and 20 μm.

The holding part 15e has a rectangular shape, and the dimensions are a horizontal width of 70 μm, a vertical width of 160 μm, and a thickness t2 of 8 μm.
The short-circuit portion 15c has a truncated cone shape, and the diameter R3 at one end on the front surface side is 60 μm and the diameter R4 at the other end on the back surface side is 80 μm.

The shape of the back electrode part 15b is rectangular, and the dimensions thereof are a horizontal width of 80 μm, a vertical width of 150 μm, and a thickness t3 of 20 μm.
The outer diameter of the upper end portion of the short-circuit portion 15c is 60 μm, the outer diameter of the base end portion of the surface electrode portion 15a is 50 μm, and the shoulder portion 15d is provided with a diameter different by 10 μm.

The thickness H of the insulating layer 18 is 30 μm, and the insulating layer made of the insulating sheet 11 having a thickness of 5 μm exists above the holding portion 15 e.
The arrangement pitch P of the electrode structures 15 is 120 μm.

Moreover, the thermal linear expansion coefficient is as follows.
Insulating layer 18 H1: Polyimide = about 5 × 10 ⁻⁵ / K
Metal frame plate 25 H2: 42 alloy = about 5 × 10 ⁻⁶ / K
Support member 2 H3: silicon nitride = 3.5 × 10 ⁻⁶ / K
Calculation value of each condition in Example 1 Condition (1): H1 = 5 × 10 ⁻⁵ / K
Condition (2): H2 / H1 = (5 × 10 ⁻⁶ ) / (5 × 10 ⁻⁵ ) = 0.1
Condition (3): H3 / H1 = (3.5 × 10 ⁻⁶ ) / (5 × 10 ⁻⁵ ) = 0.07
Condition (4): H3 / H2 = (3.5 × 10 ⁻⁶ ) / (5 × 10 ⁻⁶ ) = 0.7
In this way, a total of four sheet-like probes were manufactured.
These sheet-like probes are referred to as “sheet-like probe I1” to “sheet-like probe I4”.

(Example 2)
In Example 1, an amine-based polyimide etching solution (“TPE-3000” manufactured by Toray Engineering Co., Ltd.) was used as the etching treatment condition for the insulating sheet 11A of the laminate 10B shown in FIG. The sheet-like probe was obtained in the same manner as in Example 1 except that the temperature was changed to 80 ° C. for 8 minutes, and the etching was advanced to the interface between the insulating sheet 11A and the insulating layer 18 to remove the insulating sheet 11A. .

  In the obtained sheet-like probe 10, the thickness d of the insulating layer 18A is 25 μm, the shape of the surface electrode portion 15a of the electrode structure 15 is a truncated cone, the diameter R1 at the tip is 20 μm, and the diameter R2 at the base is The protruding height t1 from the surface of the insulating layer 18 is 60 μm and 25 μm.

The holding part 15e has a rectangular shape, and the dimensions are a horizontal width of 70 μm, a vertical width of 160 μm, and a thickness t2 of 8 μm.
The short-circuit portion 15c has a truncated cone shape, and the diameter R3 at one end on the front surface side is 60 μm and the diameter R4 at the other end on the back surface side is 80 μm.

The shape of the back electrode part 15b is rectangular, and the dimensions thereof are a horizontal width of 80 μm, a vertical width of 150 μm, and a thickness t3 of 20 μm.
The outer diameter of the upper end portion of the short-circuit portion 15c is 60 μm, the outer diameter of the base end portion of the surface electrode portion 15a is 50 μm, and the shoulder portion 15d is provided with a diameter different by 10 μm.

The thickness H of the insulating layer 18 is 25 μm, and the surface of the holding portion 15e and the surface of the insulating layer 18 are substantially flush with each other. The arrangement pitch P of the electrode structures 15 is 120 μm.
These sheet-like probes are referred to as “sheet-like probe J1” to “sheet-like probe J4”.

Example 3
In Example 1, an amine-based polyimide etching solution (“TPE-3000” manufactured by Toray Engineering Co., Ltd.) was used as the etching treatment condition for the insulating sheet 11A of the laminate 10B shown in FIG. In the same manner as in Example 1, except that the insulating sheet 11A is removed and the etching is further advanced to remove a part of the surface portion of the insulating layer 18, the sheet-like probe is changed to 80 ° C for 10 minutes. Got.

  In the obtained sheet-like probe 10, the thickness d of the insulating layer 18A is 25 μm, the shape of the surface electrode portion 15a of the electrode structure 15 is a truncated cone, the diameter R1 at the tip is 20 μm, and the diameter R2 at the base is The protrusion height t1 from the surface of the insulating layer 18 is about 30 μm.

The holding part 15e has a rectangular shape, and the dimensions are a horizontal width of 70 μm, a vertical width of 160 μm, and a thickness t2 of 8 μm.
The short-circuit portion 15c has a truncated cone shape, and the diameter R3 at one end on the front surface side is 60 μm and the diameter R4 at the other end on the back surface side is 80 μm.

The shape of the back electrode part 15b is rectangular, and the dimensions thereof are a horizontal width of 80 μm, a vertical width of 150 μm, and a thickness t3 of 20 μm.
The outer diameter of the upper end portion of the short-circuit portion 15c is 60 μm, the outer diameter of the base end portion of the surface electrode portion 15a is 50 μm, and the shoulder portion 15d is provided with a diameter different by 10 μm.

The thickness H of the insulating layer 18 is about 20 μm, and the holding portion 15e has a total thickness t2 = 8 μm, the thickness of about 5 μm is exposed from the insulating layer 18, and the thickness of about 3 μm is embedded in the insulating layer. there were. The arrangement pitch P of the electrode structures 15 is 120 μm.
These sheet-like probes are referred to as “sheet-like probe K1” to “sheet-like probe K4”.

Example 4
In Example 1, after removing the resist film 12A from the laminated body 10A shown in FIG. 9C, the first backside metal is formed by etching with a ferric chloride-based etchant without forming the resist pattern. A sheet-like probe was obtained in the same manner as in Example 1 except that the layer 19A was completely removed and the holding portion was not formed.

The obtained sheet-like probe is the same as that of Example 1 except that the holding portion does not exist.
These sheet-like probes are referred to as “sheet-like probe L1” to “sheet-like probe L4”.

(Comparative Example 1)
A laminated body 70 having a front-side metal layer 72, a second back-side metal layer 74, and a first back-side metal layer 76 as shown in FIG. 32 (a) and comprising an insulating sheet 78 and an insulating layer 80 was prepared. .

  The laminated body 70 includes a front-side metal layer 72 made of copper having a thickness of 4 μm, an insulating layer 80 made of polyimide having a thickness of 12.5 μm, a first back-side metal layer 76 made of copper having a thickness of 4 μm, The insulating layer 80 is made of polyimide having a thickness of 37.5 μm, and the second back side metal layer 74 is made of 42 alloy having a thickness of 10 μm.

  According to the method described in Japanese Patent Application Laid-Open No. 2004-172589, a pattern hole having a diameter of 90 μm is formed on the laminated body 70 on the second back side metal layer 74 side, and the insulating layer 80 and the first back side metal are sequentially formed. A continuous through hole was formed in the layer 76 and the insulating sheet 78, and the surface-side metal layer 72 was exposed on the bottom surface of the through hole.

As a result, an electrode structure forming recess 82 in which the short-circuit portion and the surface electrode portion are collectively formed was created (see FIG. 32B).
Next, the laminate 70 is immersed in a plating bath containing nickel sulfamate, and the laminate 70 is subjected to electrolytic plating using the surface-side metal layer 72 as an electrode to form each electrode structure forming recess 82. Metal was filled (see FIG. 32 (c)).

Next, the surface-side metal layer 72 was removed, and the insulating sheet 78 was removed by etching (see FIG. 32D).
Next, the first back side metal layer 76 is etched to form the holding portion 84, and the second back side metal layer 74 is etched to remove a part thereof to form the back electrode portion 86 and the support portion 88. Then, the insulating layer 80 was etched to divide the insulating layer 80 into each contact film (see FIG. 32E).

  Thereafter, a cyanoacrylate adhesive (manufactured by Toagosei Co., Ltd., product name: Aron Alpha (registered trademark) product number) was applied to the surface of a support plate made of ring-shaped silicon nitride having an outer diameter of 22 cm, an inner diameter of 20.5 cm, and a thickness of 2 mm. : # 200) was dropped to form an adhesive layer, and a laminate 70 having a contact film formed thereon was laminated and held at 25 ° C. for 30 minutes, whereby the adhesive layer was cured to produce a sheet-like probe. .

  In the obtained sheet-like probe, the thickness d of the insulating layer is 37.5 μm, the shape of the surface electrode part of the electrode structure is a truncated cone, the diameter of the proximal end is 37 μm, and the diameter of the distal end is 13 μm (average value) And the holding portion 84 has a horizontal width of 60 μm, a vertical width of 200 μm, a thickness of 4 μm, a short-circuited portion having a truncated cone shape, and a diameter of one end on the surface side of 37 μm, The diameter of the other end on the back side is 90 μm, the shape of the back electrode part is a rectangular flat plate, the horizontal width is 90 μm, the vertical width is 200 μm, and the thickness is 20 μm.

In this way, a total of four sheet-like probes were manufactured.
These sheet-like probes are referred to as “sheet-like probe M1” to “sheet-like probe M4”.

(Comparative Example 2)
In Comparative Example 1, the laminated body 70 is made of a front-side metal layer 72 made of copper having a thickness of 4 μm, an insulating sheet 78 made of polyimide having a thickness of 17.5 μm, and a first back-side metal made of copper having a thickness of 4 μm. The layer 76, the insulating layer 80 made of polyimide having a thickness of 48 μm, and the second back side metal layer 74 made of 42 alloy having a thickness of 10 μm were changed.

  Further, in the same manner as in Comparative Example 1, a recess 82 for forming an electrode structure is formed, and the laminate 70 is immersed in a plating bath containing nickel sulfamate. As an electrode, an electroplating process was performed to try to fill each electrode structure forming recess 82 with metal.

However, the electrode structure forming recess 82 was hardly filled with metal.
Further, when the electrode structure forming recess 82 of the laminate 70 was observed, the surface-side metal layer 72 was hardly exposed at the bottom.

C. About making anisotropically conductive connectors:
<Preparation of magnetic core particles>
Magnetic core particles were prepared as follows using commercially available nickel particles (manufactured by Westim, “FC1000”).

Nickel particles 0.5 kg were collected by an air classifier “Turbo Classifier TC-15N” manufactured by Nissin Engineering Co., Ltd.
The obtained nickel particles have a number average particle size of 7.4 μm, a particle size variation coefficient of 27%, a BET specific surface area of 0.46 × 10 ³ m ² / kg, and a saturation magnetization of 0.6 Wb / m ² . there were.
This nickel particle is referred to as “magnetic core particle [A]”.

<Preparation of conductive particles>
Into the treatment tank of the powder plating apparatus, 100 g of magnetic core particles [A] are added, and further 2 L of 0.32N hydrochloric acid aqueous solution is added and stirred to obtain a slurry containing magnetic core particles [A]. More conductive particles were prepared.

The conductive particles were dried by a dryer set at 90 ° C. to obtain conductive particles.
The obtained conductive particles had a number average particle size of 7.3 μm, a BET specific surface area of 0.38 × 10 ³ m ² / kg, (the mass of gold forming the coating layer) / (magnetic core particles [A]. The mass) was 0.3.
This conductive particle is referred to as “conductive particle (a)”.

<Fabrication of frame plate>
Under the following conditions, an 8-inch diameter frame plate 31 having 393 anisotropic conductive film arranging through holes formed corresponding to each electrode area to be inspected of the test wafer W1 was manufactured.

The material of the frame plate 31 is Kovar (linear thermal expansion coefficient 5 × 10 ⁻⁶ / K), and its thickness is 60 μm.
Each through-hole has a horizontal dimension of 5400 μm and a vertical dimension of 320 μm.

A circular air inflow hole is formed at the center position between the anisotropic conductive film arrangement holes adjacent in the vertical direction, and the diameter thereof is 1000 μm.
<Preparation of molding material>
30 parts by weight of conductive particles [a] were added to and mixed with 100 parts by weight of addition-type liquid silicone rubber, and then subjected to defoaming treatment under reduced pressure to prepare a molding material.

  In the above, the addition-type liquid silicone rubber used is a two-component type composed of a liquid A and a liquid B each having a viscosity of 250 Pa · s. The cured product has a compression set of 5% and a durometer A hardness. Is 32 and the tear strength is 25 kN / m.

The properties of the addition-type liquid silicone rubber and its cured product were measured as follows.
(A) The viscosity of the addition-type liquid silicone rubber was measured at 23 ± 2 ° C. using a B-type viscometer.
(B) The compression set of the cured silicone rubber was measured as follows.

The liquid A and the liquid B of the two-component addition type liquid silicone rubber were stirred and mixed at an equal ratio.
Next, this mixture is poured into a mold, and after the defoaming treatment is performed on the mixture under reduced pressure, a curing treatment is performed at 120 ° C. for 30 minutes, so that the thickness is 12.7 mm and the diameter is 29 mm. A cylindrical body made of a cured silicone rubber was prepared, and post-curing was performed on the cylindrical body at 200 ° C. for 4 hours.

The cylindrical body thus obtained was used as a test piece, and compression set at 150 ± 2 ° C. was measured in accordance with JIS K 6249.
(C) The tear strength of the cured silicone rubber was measured as follows.

A sheet having a thickness of 2.5 mm was produced by curing and post-curing the addition-type liquid silicone rubber under the same conditions as in (b) above. A crescent-shaped test piece was produced by punching from this sheet, and the tear strength at 23 ± 2 ° C. was measured according to JIS K 6249.
(D) The durometer A hardness is a value at 23 ± 2 ° C. in accordance with JIS K 6249 using five sheets prepared in the same manner as in (c) above and using the obtained stack as a test piece. Was measured.

<Production of anisotropic conductive connector>
Using the frame plate 31 produced above and the molding material prepared above, the frame plate 31 is disposed in each through hole and fixed to the periphery thereof according to the method described in JP-A-2002-324600. The anisotropic conductive connector 30 was manufactured by forming 393 anisotropic conductive sheets 35 supported in this manner.

The molding material layer was cured under conditions of 100 ° C. and 1 hour while applying a 2T magnetic field in the thickness direction by an electromagnet.
The anisotropic conductive sheet 35 thus obtained will be specifically described. Each of the anisotropic conductive sheets 35 has a lateral dimension of 7000 μm and a longitudinal dimension of 1200 μm, and 40 conductive parts 36 are insulating parts. In a state of being insulated from each other by 37, they are arranged in a row in the horizontal direction at a pitch of 120 μm.

  Each of the conductive portions 36 has a horizontal dimension of 40 μm, a vertical dimension of 200 μm, a thickness of 150 μm, a protruding portion 38 having a protruding height of 25 μm, and an insulating portion 37 having a thickness of 100 μm.

Further, a non-connecting conductive portion is disposed between the conductive portion 36 located on the outermost side in the lateral direction and the frame plate 31.
Each of the non-connecting conductive portions has a horizontal dimension of 60 μm, a vertical dimension of 200 μm, and a thickness of 150 μm.

Furthermore, the thickness of each supported portion of the anisotropic conductive sheet 35 (one thickness of the bifurcated portion) is 20 μm.
Moreover, when the content rate of the electroconductive particle 36a in the electroconductive part 36 of each anisotropically conductive sheet 35 was investigated, it was about 25% in the volume fraction about all the electroconductive parts 36. FIG.

In this way, a total of 12 anisotropically conductive connectors were manufactured.
These anisotropically conductive connectors are referred to as “anisotropically conductive connector C1” to “anisotropically conductive connector C20”.
D. About making circuit boards for inspection:
A test circuit board 20 in which the test electrode 32 is formed according to the pattern of the test electrode of the test wafer W1 using alumina ceramics (linear thermal expansion coefficient 4.8 × 10 ⁻⁶ / K) as the substrate material is produced. did.

The inspection circuit board 20 has a rectangular shape with an overall dimension of 30 cm × 30 cm, and the inspection electrode has a horizontal dimension of 60 μm and a vertical dimension of 200 μm.
The obtained inspection circuit board is referred to as “inspection circuit board T1”.
E. About sheet-like probe evaluation:
<Test 1 (insulation between adjacent electrode structures)>
For each of the sheet-like probes I1, I2, J1, J2, K1, K2, L1, L2, M1, and M2, the insulation between adjacent electrode structures was evaluated as follows.

  At room temperature (25 ° C.), a test wafer W1 is placed on a test stand, and each of the surface electrode portions 15a is used for testing the sheet-like probe 10 on the surface of the test wafer W1 as shown in FIG. The wafer W1 is positioned so as to be positioned on the electrode 7 to be inspected, and the anisotropic conductive connector 30 is placed on the sheet-like probe 10 with each of the conductive portions 36 on the back electrode portion 15b of the sheet-like probe 10. And positioned so as to be located in

  Then, on the anisotropic conductive connector 30, the inspection circuit board T <b> 1 is aligned and arranged so that each of the inspection electrodes 21 is positioned on the conductive portion 36 of the anisotropic conductive connector 30.

  Further, the test circuit board T1 was pressed downward with a load of 125 kg (the load applied to each electrode structure was an average of about 8 g. The anisotropic conductive connector 30 is shown in Table 1 below. It was used.

  A voltage is sequentially applied to each of the 15720 test electrodes 21 on the test circuit board T1, and the electrical resistance between the test electrode 21 to which the voltage is applied and the other test electrodes 21 is measured. Measured as the electrical resistance between the electrode structures 15 (hereinafter referred to as “insulation resistance”), and the ratio of measurement points (hereinafter referred to as “insulation defect ratio”) where the insulation resistance at all measurement points is 10 MΩ or less. Asked.

When the insulation resistance is 10 MΩ or less, it is practically difficult to use the integrated circuit formed on the wafer 6 for electrical inspection.
The test results are shown in Table 1.

<Test 2 (Connection stability of electrode structure)>
For the sheet-like probes I3, I4, J3, J4, K3, K4, L3, L4, M3, and M4, the connection stability of the electrode structure to the electrode to be inspected was evaluated as follows.

  At room temperature (25 ° C.), the test wafer W2 is placed on a test bench equipped with an electric heater, and a sheet-like probe 10 is placed on the surface of the test wafer W2, each of the surface electrode portions 15a being a test wafer W2. And aligned so as to be positioned on the electrode 7 to be inspected.

  Further, the anisotropic conductive connector 30 is arranged on the sheet-like probe 10 so that each of the conductive portions 36 is located on the back electrode portion 15 b of the sheet-like probe 10.

  On the anisotropic conductive connector 30, the inspection circuit board T <b> 1 is aligned and disposed so that each of the inspection electrodes 21 is positioned on the conductive portion 36 of the anisotropic conductive connector 30.

  Further, the test circuit board T1 was pressed downward with a load of 125 kg (an average load of about 8 g per electrode structure). As the anisotropic conductive connector 30, the one shown in Table 2 below was used.

  And about 15720 test electrodes 21 of test circuit board T1, two test electrodes 21 electrically connected to each other through sheet-like probe 10, anisotropic conductive connector 30, and test wafer W2 are used. The electrical resistance was measured sequentially.

  Then, a half value of the measured electric resistance value is referred to as an electric resistance (hereinafter referred to as “conduction resistance”) between the inspection electrode 21 of the inspection circuit board T1 and the inspection target electrode 7 of the test wafer W2. ) And the ratio of measurement points at which the conduction resistance at all measurement points is 1Ω or more (hereinafter referred to as “connection failure ratio”) was determined.

This operation is referred to as “operation (1)”.
Next, the pressure on the inspection circuit board T1 was released, and then the temperature of the test stand was raised to 125 ° C. Further, the test circuit board T1 is left to stand until the temperature is stabilized, and then the test circuit board T1 is pressed downward with a load of 125 kg (an average load applied to each electrode structure is about 8 g). Similarly, the connection failure ratio was obtained.

This operation is referred to as “operation (2)”.
Next, the pressure on the inspection circuit board T1 was released, and then the test table was cooled to room temperature (25 ° C.).

This operation is referred to as “operation (3)”.
And said operation (1), operation (2), and operation (3) were made into 1 cycle, and it performed 100 cycles continuously in total.

The time required for one cycle was about 1.5 hours.
When the conduction resistance is 1Ω or more, it is practically difficult to use it for electrical inspection of the integrated circuit formed on the wafer.

The test results are shown in Table 2.
In addition, after the test 2 was completed, the state of each electrode structure and holding portion of the sheet-like probes I3, I4, J3, J4, K3, K4, L3, and L4 was visually observed using a stereomicroscope. .

With respect to the sheet-like probes I3, I4, J3, J4, K3, K4, L3, and L4, none of the electrode structures were detached from the insulating layer, and it was confirmed that they had high durability.
As for the holding part, with respect to the sheet-like probes I3 and I4 according to Example 1, none of the holding parts of the electrode structure was deformed, and the adhesion of the holding part was extremely good.

  About the holding parts of the sheet-like probes J3, J4, K3, and K4, about 10 sheet structure holding parts of the sheet-like probes J3 and J4 according to Example 2 are deformed and peeled off from the insulating film. With respect to the sheet-like probes K3 and K4 according to Example 3, about 30 holding portions were deformed and peeled off from the insulating film.

  In contrast, for the sheet-like probe M3, about 200 electrode structures out of 15720 electrode structures are dropped from the insulating film, and for the sheet-like probe M4, about 150 electrode structures. The body had fallen off the insulating film.

  Regarding the holding part, in both the sheet-like probes M3 and M4, in the electrode structure of 5% or more (1000 or more) of the whole, the holding part was deformed and peeled off from the insulating film.

1A and 1B are diagrams showing an embodiment of a sheet-like probe according to the present invention. FIG. 1A is a plan view, and FIG. 1B is a cross-sectional view taken along line XX in FIG. . FIG. 2 is an enlarged plan view showing a contact film of the sheet-like probe of FIG. FIG. 3 is a partial cross-sectional view taken along line XX of FIG. FIG. 4 is a plan view for explaining the shape of the metal frame plate of the sheet-like probe. FIG. 5 is a view showing another embodiment of the sheet-like probe of the present invention, FIG. 5 (a) is a plan view, and FIG. 5 (b) is a sectional view taken along line XX of FIG. 5 (a). It is. FIG. 6 is a view showing another embodiment of the sheet-like probe of the present invention, FIG. 6 (a) is a plan view, and FIG. 6 (b) is a sectional view taken along line XX of FIG. 6 (a). It is. 7 is a view showing another embodiment of the sheet-like probe of the present invention, FIG. 7 (a) is a plan view, and FIG. 7 (b) is a sectional view taken along line XX of FIG. 7 (a). It is. FIG. 8 is a cross-sectional view illustrating a method for manufacturing a sheet-like probe. FIG. 9 is a cross-sectional view illustrating a method for manufacturing a sheet-like probe. FIG. 10 is a cross-sectional view illustrating a method for manufacturing a sheet-like probe. FIG. 11 is a cross-sectional view illustrating a method for manufacturing a sheet-like probe. FIG. 12 is a cross-sectional view illustrating a method for manufacturing a sheet-like probe. FIG. 13 is a cross-sectional view illustrating a method for manufacturing a sheet-like probe. FIG. 14 is a cross-sectional view illustrating a method for manufacturing a sheet-like probe. FIG. 15 is a cross-sectional view illustrating a method for manufacturing a sheet-like probe. FIG. 16 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 17 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 18 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 19 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 20 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 21 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 22 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 23 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 24 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 25 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 26 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 27 is a cross-sectional view illustrating another method for manufacturing a sheet-like probe. FIG. 28 is a cross-sectional view illustrating a method for attaching a metal frame plate to a sheet-like probe. FIG. 29 is a cross-sectional view showing an embodiment of the circuit device inspection device of the present invention and the probe card used therein. 30 is a cross-sectional view showing each state before and after assembly in the probe card of FIG. FIG. 31 is a cross-sectional view showing the main configuration of the probe card of FIG. FIG. 32 is a cross-sectional view illustrating a method for manufacturing a sheet-like probe in a comparative example. FIG. 33 is a cross-sectional view of a conventional sheet-like probe. FIG. 34 is a cross-sectional view of a conventional sheet-like probe. FIG. 35 is a cross-sectional view showing an outline of a conventional sheet-like probe manufacturing method. FIG. 36 is a schematic cross-sectional view for explaining a situation where an oxide film is formed on the electrode to be inspected on the wafer. FIG. 37 is a schematic cross-sectional view for explaining a state in which a conventional sheet-like probe is brought into contact with a test electrode of a wafer. FIG. 38 is a schematic cross-sectional view for explaining a state in which a conventional sheet-like probe is brought into contact with a test electrode of a wafer. FIG. 39 is a schematic cross-sectional view for explaining the positional deviation between a conventional electrode structure of a sheet-like probe and an electrode to be inspected on a wafer.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Probe card 2 ... Supporting member 3 ... Pressure plate 4 ... Wafer mounting base 5 ... Heater 6 ... Wafer 7 ... Inspection electrode 9 ... Contact film | membrane 10 ... Sheet probe 10A ... Laminated body 10B ... Laminated body 10C ... Laminated body 10K ... Recess for forming surface electrode part 11A ... Insulating sheet 11H ... Through hole 12 ... Through hole 12A ... · Resist film 12H · · Pattern hole 14 · · · Resist pattern 15 · · · electrode structure 15a · · Front electrode portion 15b · · Back electrode portion 15c · · Short-circuit portion 15d · · Shoulder portion 15e · · Holding portion 15H · · Opening portion 16A · · Front side metal layer 17A · · Second back side metal layer 17H · · Pattern hole 18 ... Insulating layer 18A · · Insulating layer 18H · · Through hole 19A · · First back side metal layer 19H ..Pattern hole 20 ... Circuit board for inspection 21 ... Inspection electrode 22 ... Electrode structure part 24 ... Supporting part 25 ... Metal frame plate 28A ... Resist film 28B ... Resist film 28H ... Pattern hole 29A ··· Resist film 29H ··· Pattern hole 30 · · · anisotropic conductive connector 31 · · · Frame plate 32 · · · Inspection electrode 34A · · · Resist film 35 · · · anisotropic conductive sheet 36 · · · conductive Part 36a ... Conductive particles 37 ... Insulating part 38 ... Protruding part 40A ... Protection film 50 ... Guide pin 70 ... Laminate 72 ... Surface side metal layer 74 ... Back side Metal layer 76 ... Back side metal layer 78 ... Insulating sheet 80 ... Insulating layer 82 ... Recess for electrode structure formation 84 ... Holding part 86 ... Back electrode part 88 ...・ Supporting part 100 ... Sea Probe 102 ... Electrode structure 104 ... Insulating sheet 106 ... Support member 108 ... Front electrode part 110 ... Back electrode part 112 ... Short-circuit part 202 ... Electrode structure 204 .... Insulating sheet 206 ... Support member 300 ... Sheet-like probe 302 ... Metal plate 304 for frame plate formation ... Resin sheet 306 for insulating layer formation ... Laminated body 308 ... Through hole 310 ... Short circuit part 312 ... Front electrode part 314 ... Through hole 316 ... Metal frame plate 318 ... Back electrode part 320 ... Electrode structure 322 ... Insulating layer 324 ... Contact point Film 400 ... Wafer 402 ... Electrode to be inspected 404 ... Oxide film 500 ... Sheet-like probe 502 ... Surface electrode portion 504 ... Electrode structure

Claims (5)

Preparing a laminate in which a surface-side metal layer is formed on the surface of the insulating sheet and a first back-side metal layer is formed on the back surface;
Forming a recess for forming a surface electrode portion from the first back surface side metal layer side according to a pattern corresponding to a pattern of an electrode structure to be formed on the surface side metal layer in the laminate;
Forming a resist pattern so as to cover the recess for forming the surface electrode part of the laminate from the first backside metal layer side;
A state in which a part of the first backside metal layer remains in the peripheral portion of the recess for forming the front surface electrode portion by etching the exposed portion other than the resist pattern of the first backside metal layer of the laminate. And a process of
Forming the insulating layer and the second back-side metal layer from above the surface electrode portion forming recess to close the surface electrode portion forming recess with the insulating layer to form a hollow state;
Forming an opening for forming an electrode structure larger than the recess for forming the surface electrode in the insulating layer;
Forming an electrode structure portion by electroplating the opening for forming the electrode structure; and
Separating the second back side metal layer into a metal frame plate portion and an electrode structure;
By etching the insulating sheet to reduce the thickness of the insulating sheet, the surface electrode portion of the electrode structure is projected and part of the surface electrode portion forming recess remains in the peripheral portion. The step of making the first back side metal layer buried in the insulating sheet;
And a step of providing a ring-shaped support member on the outer periphery of the metal frame plate apart from the insulating layer. In the step of embedding the first back side metal layer in the insulating sheet,
The method for manufacturing a sheet-like probe according to claim 1 , wherein the first back surface side metal layer is substantially the same as the surface of the insulating layer. In the step of embedding the first back side metal layer in the insulating sheet,
2. The method of manufacturing a sheet-like probe according to claim 1 , wherein the first back surface side metal layer is partially embedded in the insulating layer. Preparing a laminate in which a surface-side metal layer is formed on the surface of the insulating sheet and a first back-side metal layer is formed on the back surface;
Forming a front surface electrode portion forming recess from the first back surface side metal layer side according to a pattern corresponding to a pattern of an electrode structure to be formed on the front surface side metal layer in the laminate;
Forming the insulating layer and the second back-side metal layer from above the surface electrode portion forming recess to close the surface electrode portion forming recess with the insulating layer to form a hollow state;
Forming a shoulder between the surface electrode portion forming recess and the opening by forming an opening for forming the electrode structure larger than the surface electrode portion forming recess in the insulating layer; When,
Forming an electrode structure portion by electroplating the opening for forming the electrode structure; and
Separating the second back side metal layer into a metal frame plate portion and an electrode structure;
Etching the insulating sheet to reduce the thickness of the insulating sheet, thereby causing the surface electrode portion of the electrode structure to protrude and the shoulder to be buried in the insulating sheet When,
And a step of providing a ring-shaped support member on the outer periphery of the metal frame plate apart from the insulating layer. In the step of making the shoulder portion buried in the insulating sheet,
The method for manufacturing a sheet-like probe according to claim 4 , wherein the shoulder portion is substantially the same as the surface of the insulating layer.

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