KR101073768B1 - 카본 나노튜브 배향 집합체의 제조 장치 및 제조 방법 - Google Patents

카본 나노튜브 배향 집합체의 제조 장치 및 제조 방법 Download PDF

Info

Publication number
KR101073768B1
KR101073768B1 KR1020107006379A KR20107006379A KR101073768B1 KR 101073768 B1 KR101073768 B1 KR 101073768B1 KR 1020107006379 A KR1020107006379 A KR 1020107006379A KR 20107006379 A KR20107006379 A KR 20107006379A KR 101073768 B1 KR101073768 B1 KR 101073768B1
Authority
KR
South Korea
Prior art keywords
catalyst
gas
unit
growth
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020107006379A
Other languages
English (en)
Korean (ko)
Other versions
KR20100091943A (ko
Inventor
아키요시 시부야
게이이치 가와타
고헤이 아라카와
겐지 하타
모토오 유무라
Original Assignee
내셔날 인스티튜트 오브 어드밴스드 인더스트리얼 사이언스 앤드 테크놀로지
니폰 제온 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 내셔날 인스티튜트 오브 어드밴스드 인더스트리얼 사이언스 앤드 테크놀로지, 니폰 제온 가부시키가이샤 filed Critical 내셔날 인스티튜트 오브 어드밴스드 인더스트리얼 사이언스 앤드 테크놀로지
Publication of KR20100091943A publication Critical patent/KR20100091943A/ko
Application granted granted Critical
Publication of KR101073768B1 publication Critical patent/KR101073768B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0004—Apparatus specially adapted for the manufacture or treatment of nanostructural devices or systems or methods for manufacturing the same
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0009—Forming specific nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0061—Methods for manipulating nanostructures
    • B82B3/0066—Orienting nanostructures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/164—Preparation involving continuous processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/08—Aligned nanotubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
    • C01P2004/13—Nanotubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Composite Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
KR1020107006379A 2008-04-16 2009-04-02 카본 나노튜브 배향 집합체의 제조 장치 및 제조 방법 Active KR101073768B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2008-107327 2008-04-16
JP2008107327 2008-04-16
JPJP-P-2009-029129 2009-02-10
JP2009029129 2009-02-10

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020117011866A Division KR101460398B1 (ko) 2008-04-16 2009-04-02 카본 나노튜브 배향 집합체의 제조 장치 및 제조 방법

Publications (2)

Publication Number Publication Date
KR20100091943A KR20100091943A (ko) 2010-08-19
KR101073768B1 true KR101073768B1 (ko) 2011-10-13

Family

ID=41199047

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020107006379A Active KR101073768B1 (ko) 2008-04-16 2009-04-02 카본 나노튜브 배향 집합체의 제조 장치 및 제조 방법
KR1020117011866A Active KR101460398B1 (ko) 2008-04-16 2009-04-02 카본 나노튜브 배향 집합체의 제조 장치 및 제조 방법

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020117011866A Active KR101460398B1 (ko) 2008-04-16 2009-04-02 카본 나노튜브 배향 집합체의 제조 장치 및 제조 방법

Country Status (6)

Country Link
US (2) US7897209B2 (https=)
EP (1) EP2263974B1 (https=)
JP (2) JP4581146B2 (https=)
KR (2) KR101073768B1 (https=)
CN (1) CN102741161B (https=)
WO (1) WO2009128349A1 (https=)

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010076885A1 (ja) * 2008-12-30 2010-07-08 独立行政法人産業技術総合研究所 単層カーボンナノチューブ配向集合体、バルク状単層カーボンナノチューブ配向集合体、粉体状単層カーボンナノチューブ配向集合体、およびその製造方法
US20110318487A1 (en) * 2009-02-10 2011-12-29 Hirokazu Takai Substrate for producing aligned carbon nanotube aggregates and method for producing the aligned carbon nanotube aggregates
JP2010192581A (ja) * 2009-02-17 2010-09-02 National Institute Of Advanced Industrial Science & Technology 電磁波放射体・電磁波吸収体
PE20121017A1 (es) 2009-04-17 2012-08-08 Seerstone Llc Metodo para la produccion de carbono solido mediante la reduccion de oxidos de carbono
DE102010005560A1 (de) * 2010-01-22 2011-07-28 Bayer MaterialScience AG, 51373 Herstellung von CNT
CN102781828B (zh) 2010-03-01 2015-09-09 日本瑞翁株式会社 碳纳米管取向集合体的制造方法
KR101221979B1 (ko) 2010-08-19 2013-01-15 고려대학교 산학협력단 수퍼캐패시터용 탄소나노튜브 제조 방법 및 이를 포함하는 수퍼캐패시터
US10526628B2 (en) 2010-10-06 2020-01-07 United States Of America As Represented By The Secretary Of The Army Enzyme-mediated assimilation of DNA-functionalized single-walled carbon nanotubes (SWNTs)
WO2012081601A1 (ja) * 2010-12-15 2012-06-21 独立行政法人産業技術総合研究所 カーボンナノチューブ集合体、３次元形状カーボンナノチューブ集合体、それを用いたカーボンナノチューブ成形体、組成物及びカーボンナノチューブ分散液
JP5622101B2 (ja) * 2010-12-15 2014-11-12 日本ゼオン株式会社 カーボンナノチューブ配向集合体の製造方法
WO2012081600A1 (ja) * 2010-12-15 2012-06-21 独立行政法人産業技術総合研究所 カーボンナノチューブの製造装置および製造方法
US9214709B2 (en) 2010-12-21 2015-12-15 CastCAP Systems Corporation Battery-capacitor hybrid energy storage system for high temperature applications
US12215572B2 (en) 2010-12-21 2025-02-04 Fastcap Ultracapacitors Llc Power system for high temperature applications with rechargeable energy storage
US8760851B2 (en) 2010-12-21 2014-06-24 Fastcap Systems Corporation Electrochemical double-layer capacitor for high temperature applications
US9001495B2 (en) 2011-02-23 2015-04-07 Fastcap Systems Corporation High power and high energy electrodes using carbon nanotubes
AU2012258672A1 (en) 2011-05-24 2014-01-16 Fastcap Systems Corporation Power system for high temperature applications with rechargeable energy storage
JP5700819B2 (ja) * 2011-05-31 2015-04-15 日本ゼオン株式会社 カーボンナノチューブ配向集合体の製造方法
WO2012165514A1 (ja) 2011-05-31 2012-12-06 日本ゼオン株式会社 カーボンナノチューブ配向集合体の製造装置及び製造方法
JP2014523841A (ja) 2011-06-07 2014-09-18 ファーストキャップ・システムズ・コーポレイション ウルトラキャパシタのためのエネルギー貯蔵媒体
US9558894B2 (en) 2011-07-08 2017-01-31 Fastcap Systems Corporation Advanced electrolyte systems and their use in energy storage devices
KR102285708B1 (ko) 2011-07-08 2021-08-04 패스트캡 시스템즈 코포레이션 고온 에너지 저장 장치
US9017634B2 (en) 2011-08-19 2015-04-28 Fastcap Systems Corporation In-line manufacture of carbon nanotubes
KR101924850B1 (ko) * 2011-08-24 2018-12-04 니폰 제온 가부시키가이샤 카본 나노튜브 배향 집합체의 제조장치 및 제조방법
JP5717860B2 (ja) 2011-09-14 2015-05-13 株式会社フジクラ カーボンナノファイバ形成用構造体、カーボンナノファイバ構造体及びその製造方法並びにカーボンナノファイバ電極
JP5779721B2 (ja) 2011-09-16 2015-09-16 エンパイア テクノロジー ディベロップメント エルエルシー グラフェン欠陥を修正するための方法及びシステム
US20130071565A1 (en) * 2011-09-19 2013-03-21 Applied Nanostructured Solutions, Llc Apparatuses and Methods for Large-Scale Production of Hybrid Fibers Containing Carbon Nanostructures and Related Materials
EP2776673B1 (en) 2011-11-03 2022-01-19 Fastcap Systems Corporation A logging apparatus
FR2985739B1 (fr) * 2012-01-12 2014-02-28 Centre Nat Rech Scient Renforcement de l'adhesion ou de la fixation de nanotubes de carbone a la surface d'un materiau par une couche de carbone
JP2013205052A (ja) * 2012-03-27 2013-10-07 Yazaki Corp 気体サンプル室及びガス濃度測定装置
NO2749379T3 (https=) 2012-04-16 2018-07-28
EP2838844A4 (en) 2012-04-16 2015-10-28 Seerstone Llc METHOD FOR TREATING A GAS CLEARANCE CONTAINING CARBON OXIDES
CN104302576B (zh) 2012-04-16 2017-03-08 赛尔斯通股份有限公司 用于捕捉和封存碳并且用于减少废气流中碳氧化物的质量的方法和系统
WO2013158160A1 (en) 2012-04-16 2013-10-24 Seerstone Llc Method for producing solid carbon by reducing carbon dioxide
EP2838837A4 (en) 2012-04-16 2015-12-23 Seerstone Llc METHOD AND STRUCTURES FOR REDUCING CARBON OXIDES WITH IRON-FREE CATALYSTS
US9896341B2 (en) 2012-04-23 2018-02-20 Seerstone Llc Methods of forming carbon nanotubes having a bimodal size distribution
US9604848B2 (en) 2012-07-12 2017-03-28 Seerstone Llc Solid carbon products comprising carbon nanotubes and methods of forming same
US10815124B2 (en) 2012-07-12 2020-10-27 Seerstone Llc Solid carbon products comprising carbon nanotubes and methods of forming same
CN107215882A (zh) 2012-07-13 2017-09-29 赛尔斯通股份有限公司 用于形成氨和固体碳产物的方法和系统
US9779845B2 (en) 2012-07-18 2017-10-03 Seerstone Llc Primary voltaic sources including nanofiber Schottky barrier arrays and methods of forming same
WO2014039509A2 (en) 2012-09-04 2014-03-13 Ocv Intellectual Capital, Llc Dispersion of carbon enhanced reinforcement fibers in aqueous or non-aqueous media
WO2014085378A1 (en) 2012-11-29 2014-06-05 Seerstone Llc Reactors and methods for producing solid carbon materials
CN103011133B (zh) * 2013-01-09 2015-01-07 华北电力大学 一种低成本的碳纳米管阵列的制备方法
CA2895651A1 (en) * 2013-01-17 2014-07-24 Saudi Basic Industries Corporation Carbon nano-tube production from carbon dioxide
US9206672B2 (en) 2013-03-15 2015-12-08 Fastcap Systems Corporation Inertial energy generator for supplying power to a downhole tool
WO2014151144A1 (en) 2013-03-15 2014-09-25 Seerstone Llc Carbon oxide reduction with intermetallic and carbide catalysts
WO2014151138A1 (en) 2013-03-15 2014-09-25 Seerstone Llc Reactors, systems, and methods for forming solid products
WO2014150944A1 (en) 2013-03-15 2014-09-25 Seerstone Llc Methods of producing hydrogen and solid carbon
US9586823B2 (en) 2013-03-15 2017-03-07 Seerstone Llc Systems for producing solid carbon by reducing carbon oxides
WO2014151119A2 (en) 2013-03-15 2014-09-25 Seerstone Llc Electrodes comprising nanostructured carbon
KR20160024871A (ko) * 2013-06-27 2016-03-07 니폰 제온 가부시키가이샤 카본 나노튜브의 제조 방법
WO2015045427A1 (ja) 2013-09-30 2015-04-02 日本ゼオン株式会社 炭素ナノ構造体の製造方法及びカーボンナノチューブ
US10872737B2 (en) 2013-10-09 2020-12-22 Fastcap Systems Corporation Advanced electrolytes for high temperature energy storage device
CN103673590A (zh) * 2013-12-06 2014-03-26 湖北大清捷能环保窑炉有限公司 一种蜂窝式scr脱硝催化剂煅烧炉和scr脱硝催化剂的干燥方法
US11270850B2 (en) 2013-12-20 2022-03-08 Fastcap Systems Corporation Ultracapacitors with high frequency response
EP3084481B8 (en) 2013-12-20 2024-01-03 Fastcap Systems Corporation Electromagnetic telemetry device
GB201412656D0 (en) * 2014-07-16 2014-08-27 Imp Innovations Ltd Process
WO2016057983A2 (en) 2014-10-09 2016-04-14 Fascap Systems Corporation Nanostructured electrode for energy storage device
KR20230164229A (ko) 2015-01-27 2023-12-01 패스트캡 시스템즈 코포레이션 넓은 온도 범위 울트라커패시터
CN105070619B (zh) * 2015-07-17 2017-05-03 兰州空间技术物理研究所 一种铁基金属合金衬底上碳纳米管阵列阴极的制备方法
JP6754573B2 (ja) 2016-01-05 2020-09-16 リンテック株式会社 引出装置
JP6685727B2 (ja) * 2016-01-05 2020-04-22 リンテック株式会社 引出装置および引出方法
WO2018022999A1 (en) 2016-07-28 2018-02-01 Seerstone Llc. Solid carbon products comprising compressed carbon nanotubes in a container and methods of forming same
EP4243122A3 (en) 2016-12-02 2023-11-15 Fastcap Systems Corporation Composite electrode
JP7015641B2 (ja) * 2017-04-26 2022-02-15 大陽日酸株式会社 炭素系微細構造物、及び炭素系微細構造物の製造方法
CA3053093A1 (en) * 2017-03-09 2018-09-13 Taiyo Nippon Sanso Corporation Carbon nanotube, carbon-based fine structure, and substrate having carbon nanotube, and method respectively for producing these products
JP6912904B2 (ja) * 2017-03-09 2021-08-04 大陽日酸株式会社 カーボンナノチューブの製造方法、カーボンナノチューブ、及び配向カーボンナノチューブ付き基材
JP6476245B2 (ja) * 2017-08-08 2019-02-27 株式会社アルバック 炭素ナノ構造体成長用のｃｖｄ装置及び炭素ナノ構造体の製造方法
WO2019211280A2 (de) * 2018-04-30 2019-11-07 Aixtron Se Vorrichtung zum beschichten eines substrates mit einer kohlenstoffhaltigen beschichtung
FI129565B (en) * 2019-04-24 2022-04-29 Canatu Oy Apparatuses and method for oriented deposition
US11557765B2 (en) 2019-07-05 2023-01-17 Fastcap Systems Corporation Electrodes for energy storage devices
CN114929621B (zh) * 2020-02-28 2024-02-20 日本瑞翁株式会社 碳纳米管集合体的制造方法
US10981794B1 (en) * 2020-03-24 2021-04-20 Yazaki Corporation Stable aqueous dispersion of carbon
US20240140803A1 (en) * 2021-03-10 2024-05-02 Zeon Corporation Method and apparatus for producing carbon nanotube aggregates
EP4108632A1 (en) * 2021-06-24 2022-12-28 Aida AS Device, in particular pe cvd apparatus for continuous production of high_performance carbon thread
CN114803540B (zh) * 2022-06-01 2023-03-24 詹亚鹏 一种基于机器人装炉系统工作站的无人车间
CN116395673B (zh) * 2023-03-07 2023-09-15 青岛昊鑫新能源科技有限公司 一种碳纳米管生产反应器
CN118663161B (zh) * 2024-08-14 2024-11-15 杭州嘉悦智能设备有限公司 碳纳米管生产设备
CN119408966B (zh) * 2024-11-08 2025-09-26 宁波烯沃新材料科技有限公司 一种碳纳米管纤维的收集装置及收集方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001220674A (ja) 1999-12-02 2001-08-14 Ricoh Co Ltd カーボンナノチューブ及びその作製方法、電子放出源
JP2003238125A (ja) 2002-02-13 2003-08-27 Toray Ind Inc カーボンナノチューブの連続製造方法および製造装置
US20040149209A1 (en) * 2001-04-04 2004-08-05 Liming Dai Process and apparatus for the production of carbon nanotubes

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5747119A (en) * 1993-02-05 1998-05-05 Kabushiki Kaisha Toshiba Vapor deposition method and apparatus
US5810928A (en) * 1994-11-21 1998-09-22 Mitsubishi Corporation Method of measuring gas component concentrations of special material gases for semiconductor, a semiconductor equipment, and an apparatus for supplying special material gases for semiconductor
US6352592B1 (en) * 1998-01-16 2002-03-05 Silicon Valley Group, Thermal Systems Llc Free floating shield and semiconductor processing system
EP1149932A3 (en) * 2000-01-26 2003-09-10 Iljin Nanotech Co., Ltd. Thermal chemical vapor deposition apparatus and method of synthesizing carbon nanotubes using the same
JP2001288572A (ja) * 2000-01-31 2001-10-19 Canon Inc 堆積膜形成装置および堆積膜形成方法
US6423565B1 (en) * 2000-05-30 2002-07-23 Kurt L. Barth Apparatus and processes for the massproduction of photovotaic modules
US6413487B1 (en) 2000-06-02 2002-07-02 The Board Of Regents Of The University Of Oklahoma Method and apparatus for producing carbon nanotubes
US7160531B1 (en) * 2001-05-08 2007-01-09 University Of Kentucky Research Foundation Process for the continuous production of aligned carbon nanotubes
JP3768867B2 (ja) 2001-12-03 2006-04-19 株式会社リコー カーボンナノチューブの作製方法
US7250148B2 (en) * 2002-07-31 2007-07-31 Carbon Nanotechnologies, Inc. Method for making single-wall carbon nanotubes using supported catalysts
CN1290763C (zh) * 2002-11-29 2006-12-20 清华大学 一种生产碳纳米管的方法
FI121334B (fi) * 2004-03-09 2010-10-15 Canatu Oy Menetelmä ja laitteisto hiilinanoputkien valmistamiseksi
US20050238810A1 (en) 2004-04-26 2005-10-27 Mainstream Engineering Corp. Nanotube/metal substrate composites and methods for producing such composites
JP4548014B2 (ja) 2004-06-30 2010-09-22 日立造船株式会社 カーボンナノチューブの連続製造方法およびその装置
US7780821B2 (en) * 2004-08-02 2010-08-24 Seagate Technology Llc Multi-chamber processing with simultaneous workpiece transport and gas delivery
CN1288076C (zh) * 2004-10-26 2006-12-06 中国科学院长春应用化学研究所 一种碳纳米管材料的制备方法
JPWO2006052009A1 (ja) * 2004-11-10 2008-05-29 株式会社ニコン カーボンナノチューブ集合体及びその製造方法
CN1323029C (zh) * 2004-12-10 2007-06-27 中国科学院长春应用化学研究所 燃烧聚烯烃合成碳纳米管的方法
JP5443756B2 (ja) * 2005-06-28 2014-03-19 ザ ボード オブ リージェンツ オブ ザ ユニバーシティ オブ オクラホマ カーボンナノチューブを成長および収集するための方法
JP4832046B2 (ja) 2005-09-30 2011-12-07 日立造船株式会社 連続熱ｃｖｄ装置
JP2007091556A (ja) 2005-09-30 2007-04-12 Hitachi Zosen Corp カーボン系薄膜の連続製造装置
JP2007112677A (ja) * 2005-10-21 2007-05-10 Takao Kamiyama ナノカーボンの連続製造装置及びその連続製造方法
JP4811712B2 (ja) * 2005-11-25 2011-11-09 独立行政法人産業技術総合研究所 カーボンナノチューブ・バルク構造体及びその製造方法
CN100434360C (zh) * 2005-12-09 2008-11-19 中国科学院理化技术研究所 多壁碳纳米管、栗子状碳纳米管集合体和碳纳米管球的制备方法
JP4973208B2 (ja) * 2006-03-29 2012-07-11 東レ株式会社 気相反応装置
US20080175993A1 (en) * 2006-10-13 2008-07-24 Jalal Ashjaee Reel-to-reel reaction of a precursor film to form solar cell absorber
US8182608B2 (en) * 2007-09-26 2012-05-22 Eastman Kodak Company Deposition system for thin film formation

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001220674A (ja) 1999-12-02 2001-08-14 Ricoh Co Ltd カーボンナノチューブ及びその作製方法、電子放出源
US20040149209A1 (en) * 2001-04-04 2004-08-05 Liming Dai Process and apparatus for the production of carbon nanotubes
JP2003238125A (ja) 2002-02-13 2003-08-27 Toray Ind Inc カーボンナノチューブの連続製造方法および製造装置

Also Published As

Publication number Publication date
JP5471959B2 (ja) 2014-04-16
KR20110063590A (ko) 2011-06-10
CN102741161A (zh) 2012-10-17
JP4581146B2 (ja) 2010-11-17
EP2263974A1 (en) 2010-12-22
US7897209B2 (en) 2011-03-01
WO2009128349A1 (ja) 2009-10-22
EP2263974B1 (en) 2014-06-18
JPWO2009128349A1 (ja) 2011-08-04
US20100196600A1 (en) 2010-08-05
EP2263974A4 (en) 2010-12-22
KR20100091943A (ko) 2010-08-19
US20110116995A1 (en) 2011-05-19
CN102741161B (zh) 2014-06-25
KR101460398B1 (ko) 2014-11-12
JP2010248073A (ja) 2010-11-04

Similar Documents

Publication Publication Date Title
KR101073768B1 (ko) 카본 나노튜브 배향 집합체의 제조 장치 및 제조 방법
JP5649225B2 (ja) カーボンナノチューブ配向集合体の製造装置
KR101711676B1 (ko) 카본 나노 튜브 배향 집합체의 제조 장치
JP5590603B2 (ja) カーボンナノチューブ配向集合体の製造装置
KR20140059756A (ko) 카본 나노 튜브 배향 집합체의 제조 장치 및 제조 방법
CN104870362A (zh) 碳纳米管的制造方法
JP5700819B2 (ja) カーボンナノチューブ配向集合体の製造方法
JP5622101B2 (ja) カーボンナノチューブ配向集合体の製造方法
JP2012126598A (ja) 噴出装置、カーボンナノチューブ配向集合体の製造装置及び製造方法

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

A201 Request for examination
A302 Request for accelerated examination
AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PA0302 Request for accelerated examination

St.27 status event code: A-1-2-D10-D17-exm-PA0302

St.27 status event code: A-1-2-D10-D16-exm-PA0302

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

A107 Divisional application of patent
AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

J201 Request for trial against refusal decision
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A18-div-PA0104

St.27 status event code: A-0-1-A10-A16-div-PA0104

PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20140923

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20150917

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20160921

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

FPAY Annual fee payment

Payment date: 20170920

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

FPAY Annual fee payment

Payment date: 20180920

Year of fee payment: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 14

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 15

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 15