KR101059940B1 - 타겟 구조 및 타겟 구조의 제조 방법 - Google Patents

타겟 구조 및 타겟 구조의 제조 방법 Download PDF

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Publication number
KR101059940B1
KR101059940B1 KR1020107019956A KR20107019956A KR101059940B1 KR 101059940 B1 KR101059940 B1 KR 101059940B1 KR 1020107019956 A KR1020107019956 A KR 1020107019956A KR 20107019956 A KR20107019956 A KR 20107019956A KR 101059940 B1 KR101059940 B1 KR 101059940B1
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KR
South Korea
Prior art keywords
target
flow path
fluid flow
backing plate
fixed
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Expired - Fee Related
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KR1020107019956A
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English (en)
Korean (ko)
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KR20100114923A (ko
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준 우에노
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준 우에노
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Publication of KR20100114923A publication Critical patent/KR20100114923A/ko
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
KR1020107019956A 2009-01-22 2010-01-19 타겟 구조 및 타겟 구조의 제조 방법 Expired - Fee Related KR101059940B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009011919A JP4382867B1 (ja) 2009-01-22 2009-01-22 ターゲット構造及びターゲット構造の製造方法
JPJP-P-2009-011919 2009-01-22
PCT/JP2010/050555 WO2010084857A1 (ja) 2009-01-22 2010-01-19 ターゲット構造及びターゲット構造の製造方法

Publications (2)

Publication Number Publication Date
KR20100114923A KR20100114923A (ko) 2010-10-26
KR101059940B1 true KR101059940B1 (ko) 2011-08-29

Family

ID=41549762

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107019956A Expired - Fee Related KR101059940B1 (ko) 2009-01-22 2010-01-19 타겟 구조 및 타겟 구조의 제조 방법

Country Status (5)

Country Link
JP (1) JP4382867B1 (https=)
KR (1) KR101059940B1 (https=)
CN (1) CN101960043A (https=)
TW (1) TW201033388A (https=)
WO (1) WO2010084857A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5596118B2 (ja) * 2010-07-23 2014-09-24 Ｊｘ日鉱日石金属株式会社 ターゲットの裏面に溝を備えた磁性材スパッタリングターゲット
JP5721815B2 (ja) * 2011-04-12 2015-05-20 株式会社アルバック ターゲット及びターゲットの製造方法
KR101079621B1 (ko) * 2011-06-30 2011-11-03 박경일 타겟과 백킹 플레이트의 비접착식 체결구조
CN102501045B (zh) * 2011-10-20 2014-10-08 宁波江丰电子材料股份有限公司 镍靶材组件的加工方法及加工装置
CN104588807B (zh) * 2013-10-31 2016-07-20 宁波江丰电子材料股份有限公司 背板的形成方法和背板
WO2017016575A1 (en) * 2015-07-24 2017-02-02 Applied Materials, Inc. Cooling and utilization optimization of heat sensitive bonded metal targets
EP3375007A4 (en) * 2015-11-12 2019-07-31 Honeywell International Inc. CARRIER PLATE ASSEMBLY WITH COOLING STRUCTURE FOR SPUTTER TARGETS
CN108018534B (zh) * 2017-12-12 2020-12-11 中国电子科技集团公司第四十八研究所 一种用于装夹靶材的磁控溅射镀膜装夹装置
TWI687534B (zh) * 2018-09-07 2020-03-11 住華科技股份有限公司 背板、使用其之濺射靶材及其使用方法
JP7362327B2 (ja) * 2019-07-18 2023-10-17 東京エレクトロン株式会社 ターゲット構造体及び成膜装置
CN110828021B (zh) * 2019-11-04 2024-09-06 中国原子能科学研究院 一种用于医用同位素生产靶的水冷机构
CN111455335B (zh) * 2020-04-24 2022-10-21 河北恒博新材料科技股份有限公司 一种平面靶材的绑定方法
CN112323026A (zh) * 2020-10-29 2021-02-05 珠海和泽科技有限公司 靶材背板及其制作方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0401622B1 (de) * 1989-06-05 1995-08-23 Balzers Aktiengesellschaft Verfahren zum Kühlen von Targets sowie Kühleinrichtung für Targets
JPH0625839A (ja) * 1992-01-10 1994-02-01 Sony Corp スパッタ装置及びカソード
JP3747447B2 (ja) * 1996-11-08 2006-02-22 ソニー株式会社 スパッタ装置
JP2000026962A (ja) * 1998-07-09 2000-01-25 Matsushita Electric Ind Co Ltd スパッタリング装置

Also Published As

Publication number Publication date
TWI359202B (https=) 2012-03-01
JP4382867B1 (ja) 2009-12-16
KR20100114923A (ko) 2010-10-26
WO2010084857A1 (ja) 2010-07-29
CN101960043A (zh) 2011-01-26
JP2010168621A (ja) 2010-08-05
TW201033388A (en) 2010-09-16

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