KR101052491B1 - 어레이 테스트 장치 - Google Patents

어레이 테스트 장치 Download PDF

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Publication number
KR101052491B1
KR101052491B1 KR1020090126735A KR20090126735A KR101052491B1 KR 101052491 B1 KR101052491 B1 KR 101052491B1 KR 1020090126735 A KR1020090126735 A KR 1020090126735A KR 20090126735 A KR20090126735 A KR 20090126735A KR 101052491 B1 KR101052491 B1 KR 101052491B1
Authority
KR
South Korea
Prior art keywords
stator
vibration
support
test module
reaction force
Prior art date
Application number
KR1020090126735A
Other languages
English (en)
Korean (ko)
Other versions
KR20110070062A (ko
Inventor
박종현
Original Assignee
주식회사 탑 엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 탑 엔지니어링 filed Critical 주식회사 탑 엔지니어링
Priority to KR1020090126735A priority Critical patent/KR101052491B1/ko
Priority to CN2009102602334A priority patent/CN102103277A/zh
Priority to TW098145059A priority patent/TW201122463A/zh
Publication of KR20110070062A publication Critical patent/KR20110070062A/ko
Application granted granted Critical
Publication of KR101052491B1 publication Critical patent/KR101052491B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
KR1020090126735A 2009-12-18 2009-12-18 어레이 테스트 장치 KR101052491B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020090126735A KR101052491B1 (ko) 2009-12-18 2009-12-18 어레이 테스트 장치
CN2009102602334A CN102103277A (zh) 2009-12-18 2009-12-25 阵列测试装置
TW098145059A TW201122463A (en) 2009-12-18 2009-12-25 Array test apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020090126735A KR101052491B1 (ko) 2009-12-18 2009-12-18 어레이 테스트 장치

Publications (2)

Publication Number Publication Date
KR20110070062A KR20110070062A (ko) 2011-06-24
KR101052491B1 true KR101052491B1 (ko) 2011-07-29

Family

ID=44156174

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090126735A KR101052491B1 (ko) 2009-12-18 2009-12-18 어레이 테스트 장치

Country Status (3)

Country Link
KR (1) KR101052491B1 (zh)
CN (1) CN102103277A (zh)
TW (1) TW201122463A (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130035623A (ko) * 2011-09-30 2013-04-09 주식회사 탑 엔지니어링 어레이 테스트 장치
US9164043B2 (en) 2012-12-10 2015-10-20 Shenzhen China Star Optoelectronics Technology Co., Ltd. Detecting method and detecting device
CN102980897A (zh) * 2012-12-10 2013-03-20 深圳市华星光电技术有限公司 检测方法及检测装置
US10477747B2 (en) * 2016-09-29 2019-11-12 Assembléon B.V. Component placement device and method of driving the same
CN106706660A (zh) * 2017-02-04 2017-05-24 信利（惠州）智能显示有限公司 一种基板异物和光学浓度的检测方法及装置
CN107941820A (zh) * 2017-12-21 2018-04-20 苏州精濑光电有限公司 一种面板缺陷检查装置
CN110596147A (zh) * 2019-08-23 2019-12-20 深圳市华星光电技术有限公司 降低阵列电性测试机静电产生的方法
CN110455828A (zh) * 2019-09-02 2019-11-15 蚌埠中光电科技有限公司 一种大尺寸tft基板玻璃无损微波纹度检测方法
CN110985932B (zh) * 2019-12-05 2022-04-19 苏州精濑光电有限公司 一种能够切换灯光的灯箱组件

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050073663A (ko) * 2004-01-09 2005-07-18 비오이 하이디스 테크놀로지 주식회사 어레이 기판 테스트 장비
KR100768912B1 (ko) 2006-09-29 2007-10-23 양 전자시스템 주식회사 프로브 검사장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH049691A (ja) * 1990-04-26 1992-01-14 Toshiba Corp マスク保持装置
US6844635B2 (en) * 2002-05-24 2005-01-18 Dover Instrument Corporation Reaction force transfer system
JP2005331402A (ja) * 2004-05-20 2005-12-02 Sumitomo Heavy Ind Ltd ステージ装置
CN200993706Y (zh) * 2006-12-27 2007-12-19 英志企业股份有限公司 手动式面板寻址检测结构
CN101299125B (zh) * 2008-07-03 2010-10-13 塔工程有限公司 阵列测试器
KR101470591B1 (ko) * 2008-08-04 2014-12-11 주식회사 탑 엔지니어링 어레이 테스트 장치
KR20100056125A (ko) * 2008-11-19 2010-05-27 주식회사 탑 엔지니어링 반력상쇄장치 및 이를 구비한 페이스트 디스펜서

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050073663A (ko) * 2004-01-09 2005-07-18 비오이 하이디스 테크놀로지 주식회사 어레이 기판 테스트 장비
KR100768912B1 (ko) 2006-09-29 2007-10-23 양 전자시스템 주식회사 프로브 검사장치

Also Published As

Publication number Publication date
TW201122463A (en) 2011-07-01
CN102103277A (zh) 2011-06-22
KR20110070062A (ko) 2011-06-24

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