KR101030847B1 - 진동자 장치의 제조 방법 - Google Patents

진동자 장치의 제조 방법 Download PDF

Info

Publication number
KR101030847B1
KR101030847B1 KR1020090006183A KR20090006183A KR101030847B1 KR 101030847 B1 KR101030847 B1 KR 101030847B1 KR 1020090006183 A KR1020090006183 A KR 1020090006183A KR 20090006183 A KR20090006183 A KR 20090006183A KR 101030847 B1 KR101030847 B1 KR 101030847B1
Authority
KR
South Korea
Prior art keywords
vibration
movable element
axis
protrusion
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020090006183A
Other languages
English (en)
Korean (ko)
Other versions
KR20090015179A (ko
Inventor
다까히사 가또오
유끼오 후루까와
다까히로 아끼야마
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20090015179A publication Critical patent/KR20090015179A/ko
Application granted granted Critical
Publication of KR101030847B1 publication Critical patent/KR101030847B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mathematical Physics (AREA)
  • Computer Hardware Design (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
  • Micromachines (AREA)
  • Exposure Or Original Feeding In Electrophotography (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
KR1020090006183A 2006-06-07 2009-01-23 진동자 장치의 제조 방법 Expired - Fee Related KR101030847B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JPJP-P-2006-158004 2006-06-07
JP2006158004 2006-06-07
JPJP-P-2007-065950 2007-03-15
JP2007065950 2007-03-15
JP2007130619A JP5121301B2 (ja) 2006-06-07 2007-05-16 揺動体装置、光偏向器、及びそれを用いた光学機器
JPJP-P-2007-130619 2007-05-16

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020070055486A Division KR20070117487A (ko) 2006-06-07 2007-06-07 진동자 장치, 광 편향기 및 그를 이용한 광학기기

Publications (2)

Publication Number Publication Date
KR20090015179A KR20090015179A (ko) 2009-02-11
KR101030847B1 true KR101030847B1 (ko) 2011-04-22

Family

ID=39978264

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090006183A Expired - Fee Related KR101030847B1 (ko) 2006-06-07 2009-01-23 진동자 장치의 제조 방법

Country Status (4)

Country Link
JP (2) JP5121301B2 (enrdf_load_stackoverflow)
KR (1) KR101030847B1 (enrdf_load_stackoverflow)
AT (1) ATE446528T1 (enrdf_load_stackoverflow)
DE (2) DE602007002362D1 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2330456A4 (en) * 2008-09-25 2012-04-11 Konica Minolta Opto Inc OPTICAL SCANNER
JP2010230792A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 光学デバイス、光スキャナー及び画像形成装置
JP6060577B2 (ja) * 2012-09-13 2017-01-18 Jsr株式会社 ネガ型レジストパターン形成方法
JP5922603B2 (ja) * 2013-03-04 2016-05-24 日本電信電話株式会社 マイクロミラー素子およびマイクロミラーアレイ
JP5993509B2 (ja) * 2015-10-05 2016-09-14 京セラドキュメントソリューションズ株式会社 光走査装置及び該光走査装置を備えた画像形成装置、並びに、光走査装置の振動ミラー部の質量調整方法。
JP6959525B2 (ja) * 2017-12-21 2021-11-02 ミツミ電機株式会社 光走査装置
JP6651110B1 (ja) * 2019-05-28 2020-02-19 Ｄｏｌｐｈｉｎ株式会社 物体検出装置
JP2021060556A (ja) 2019-10-09 2021-04-15 パイオニア株式会社 光反射体
JP6890856B1 (ja) * 2020-03-04 2021-06-18 国立大学法人東北大学 全方位走査ミラー
CN113495335B (zh) * 2020-03-18 2023-08-25 扬明光学股份有限公司 光路调整机构及其制造方法
JP7695131B2 (ja) * 2021-07-13 2025-06-18 スタンレー電気株式会社 光走査装置、光走査装置の製造方法及び調整方法
DE102021212327A1 (de) * 2021-11-02 2023-05-04 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Einrichtung zum Ermitteln dynamischer Parameter einer MEMS-Vorrichtung, und MEMS-Vorrichtung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003084226A (ja) * 2001-09-14 2003-03-19 Ricoh Co Ltd 光走査装置
JP2005326745A (ja) * 2004-05-17 2005-11-24 Canon Inc 光偏向装置およびその制御方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0875475A (ja) * 1994-09-01 1996-03-22 Omron Corp 共振子、当該共振子を用いた光走査装置、視覚認識装置、振動センサ及び振動ジャイロ
EP1012890A4 (en) * 1997-04-01 2000-06-28 Xros Inc SETTING OPERATING SIZES OF A MICRO-MADE TORSION OSCILLATOR
US6384406B1 (en) * 1999-08-05 2002-05-07 Microvision, Inc. Active tuning of a torsional resonant structure
JP4516673B2 (ja) * 2000-07-28 2010-08-04 シチズンファインテックミヨタ株式会社 プレーナ型ガルバノミラーの製造方法
AU2003215417A1 (en) * 2002-03-26 2003-10-08 Optiscan Pty Ltd Light scanning device
JP2005181926A (ja) * 2003-12-24 2005-07-07 Canon Inc 光偏向器及びその製造方法、それを用いた光学機器
JP4027359B2 (ja) * 2003-12-25 2007-12-26 キヤノン株式会社 マイクロ揺動体、光偏向器、画像形成装置
JP2006178408A (ja) * 2004-11-25 2006-07-06 Ricoh Co Ltd スキャナ素子、光走査装置および画像形成装置
JP2006230048A (ja) * 2005-02-15 2006-08-31 Seiko Epson Corp アクチュエータの共振周波数の調整方法およびアクチュエータ
JP2006243034A (ja) * 2005-02-28 2006-09-14 Ricoh Co Ltd 光走査装置、および画像形成装置
JP4881073B2 (ja) * 2006-05-30 2012-02-22 キヤノン株式会社 光偏向器、及びそれを用いた光学機器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003084226A (ja) * 2001-09-14 2003-03-19 Ricoh Co Ltd 光走査装置
JP2005326745A (ja) * 2004-05-17 2005-11-24 Canon Inc 光偏向装置およびその制御方法

Also Published As

Publication number Publication date
JP2008254162A (ja) 2008-10-23
DE602007002362D1 (de) 2009-10-22
ATE446528T1 (de) 2009-11-15
DE602007002846D1 (de) 2009-12-03
JP5400925B2 (ja) 2014-01-29
JP5121301B2 (ja) 2013-01-16
KR20090015179A (ko) 2009-02-11
JP2012226359A (ja) 2012-11-15

Similar Documents

Publication Publication Date Title
KR101030847B1 (ko) 진동자 장치의 제조 방법
KR20070117487A (ko) 진동자 장치, 광 편향기 및 그를 이용한 광학기기
US7518774B2 (en) Optical deflector and optical instrument using the same
US7355774B2 (en) Optical deflector and optical apparatus using the same
KR100901237B1 (ko) 광 편향기 및 이를 이용하는 광학 기구
US7656570B2 (en) Optical deflector and optical instrument using the same
JP5500016B2 (ja) 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP2012042666A (ja) 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP2009134243A (ja) 揺動体装置の製造方法、該製造方法により製造された揺動体装置によって構成される光偏向器及び光学機器
KR100939499B1 (ko) 요동체 장치, 광 편향기, 및 광 편향기를 이용한화상형성장치
US8081366B2 (en) Oscillating device, light deflector, and image forming apparatus using the same
JP5084385B2 (ja) ねじりバネ、光偏向器及びそれを用いた画像形成装置
JP2009163198A (ja) 揺動体装置の製造方法、光偏向器、画像形成装置
CN101598852A (zh) 振荡器装置、光偏转器以及使用光偏转器的光学器械

Legal Events

Date Code Title Description
A107 Divisional application of patent
PA0107 Divisional application

St.27 status event code: A-0-1-A10-A16-div-PA0107

St.27 status event code: A-0-1-A10-A18-div-PA0107

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

Fee payment year number: 1

St.27 status event code: A-2-2-U10-U11-oth-PR1002

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20140326

Year of fee payment: 4

PR1001 Payment of annual fee

Fee payment year number: 4

St.27 status event code: A-4-4-U10-U11-oth-PR1001

PR1001 Payment of annual fee

Fee payment year number: 5

St.27 status event code: A-4-4-U10-U11-oth-PR1001

FPAY Annual fee payment

Payment date: 20160324

Year of fee payment: 6

PR1001 Payment of annual fee

Fee payment year number: 6

St.27 status event code: A-4-4-U10-U11-oth-PR1001

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

Not in force date: 20170416

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

St.27 status event code: A-4-4-U10-U13-oth-PC1903

PC1903 Unpaid annual fee

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20170416

St.27 status event code: N-4-6-H10-H13-oth-PC1903

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000