DE602007002362D1 - Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser - Google Patents
Oszillator, optische Ablenkeinheit und optisches Instrument mit dieserInfo
- Publication number
- DE602007002362D1 DE602007002362D1 DE602007002362T DE602007002362T DE602007002362D1 DE 602007002362 D1 DE602007002362 D1 DE 602007002362D1 DE 602007002362 T DE602007002362 T DE 602007002362T DE 602007002362 T DE602007002362 T DE 602007002362T DE 602007002362 D1 DE602007002362 D1 DE 602007002362D1
- Authority
- DE
- Germany
- Prior art keywords
- oscillation
- optical
- oscillator
- projected parts
- oscillation part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title abstract 3
- 230000010355 oscillation Effects 0.000 abstract 9
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
- G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Signal Processing (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
- Laser Beam Printer (AREA)
- Micromachines (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006158004 | 2006-06-07 | ||
JP2007065950 | 2007-03-15 | ||
JP2007130619A JP5121301B2 (ja) | 2006-06-07 | 2007-05-16 | 揺動体装置、光偏向器、及びそれを用いた光学機器 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602007002362D1 true DE602007002362D1 (de) | 2009-10-22 |
Family
ID=39978264
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007002362T Active DE602007002362D1 (de) | 2006-06-07 | 2007-06-05 | Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser |
DE602007002846T Active DE602007002846D1 (de) | 2006-06-07 | 2007-06-05 | Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602007002846T Active DE602007002846D1 (de) | 2006-06-07 | 2007-06-05 | Oszillator, optische Ablenkeinheit und optisches Instrument mit dieser |
Country Status (4)
Country | Link |
---|---|
JP (2) | JP5121301B2 (de) |
KR (1) | KR101030847B1 (de) |
AT (1) | ATE446528T1 (de) |
DE (2) | DE602007002362D1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8559089B2 (en) | 2008-09-25 | 2013-10-15 | Konica Minolta Opto, Inc. | Optical scanner |
JP2010230792A (ja) * | 2009-03-26 | 2010-10-14 | Seiko Epson Corp | 光学デバイス、光スキャナー及び画像形成装置 |
JP6060577B2 (ja) * | 2012-09-13 | 2017-01-18 | Jsr株式会社 | ネガ型レジストパターン形成方法 |
JP5922603B2 (ja) * | 2013-03-04 | 2016-05-24 | 日本電信電話株式会社 | マイクロミラー素子およびマイクロミラーアレイ |
JP5993509B2 (ja) * | 2015-10-05 | 2016-09-14 | 京セラドキュメントソリューションズ株式会社 | 光走査装置及び該光走査装置を備えた画像形成装置、並びに、光走査装置の振動ミラー部の質量調整方法。 |
JP6959525B2 (ja) * | 2017-12-21 | 2021-11-02 | ミツミ電機株式会社 | 光走査装置 |
JP6651110B1 (ja) | 2019-05-28 | 2020-02-19 | Dolphin株式会社 | 物体検出装置 |
JP6890856B1 (ja) * | 2020-03-04 | 2021-06-18 | 国立大学法人東北大学 | 全方位走査ミラー |
CN113495335B (zh) * | 2020-03-18 | 2023-08-25 | 扬明光学股份有限公司 | 光路调整机构及其制造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0875475A (ja) * | 1994-09-01 | 1996-03-22 | Omron Corp | 共振子、当該共振子を用いた光走査装置、視覚認識装置、振動センサ及び振動ジャイロ |
WO1998044571A1 (en) * | 1997-04-01 | 1998-10-08 | Xros, Inc. | Adjusting operating characteristics of micromachined torsional oscillators |
US6384406B1 (en) * | 1999-08-05 | 2002-05-07 | Microvision, Inc. | Active tuning of a torsional resonant structure |
JP4516673B2 (ja) * | 2000-07-28 | 2010-08-04 | シチズンファインテックミヨタ株式会社 | プレーナ型ガルバノミラーの製造方法 |
JP4390174B2 (ja) * | 2001-09-14 | 2009-12-24 | 株式会社リコー | 光走査装置 |
US7248390B2 (en) * | 2002-03-26 | 2007-07-24 | Pentax Corporation | Light scanning device |
JP2005181926A (ja) * | 2003-12-24 | 2005-07-07 | Canon Inc | 光偏向器及びその製造方法、それを用いた光学機器 |
JP4027359B2 (ja) * | 2003-12-25 | 2007-12-26 | キヤノン株式会社 | マイクロ揺動体、光偏向器、画像形成装置 |
JP2005326745A (ja) * | 2004-05-17 | 2005-11-24 | Canon Inc | 光偏向装置およびその制御方法 |
JP2006178408A (ja) * | 2004-11-25 | 2006-07-06 | Ricoh Co Ltd | スキャナ素子、光走査装置および画像形成装置 |
JP2006230048A (ja) * | 2005-02-15 | 2006-08-31 | Seiko Epson Corp | アクチュエータの共振周波数の調整方法およびアクチュエータ |
JP2006243034A (ja) * | 2005-02-28 | 2006-09-14 | Ricoh Co Ltd | 光走査装置、および画像形成装置 |
JP4881073B2 (ja) * | 2006-05-30 | 2012-02-22 | キヤノン株式会社 | 光偏向器、及びそれを用いた光学機器 |
-
2007
- 2007-05-16 JP JP2007130619A patent/JP5121301B2/ja not_active Expired - Fee Related
- 2007-06-05 DE DE602007002362T patent/DE602007002362D1/de active Active
- 2007-06-05 DE DE602007002846T patent/DE602007002846D1/de active Active
- 2007-06-05 AT AT07109640T patent/ATE446528T1/de not_active IP Right Cessation
-
2009
- 2009-01-23 KR KR1020090006183A patent/KR101030847B1/ko not_active IP Right Cessation
-
2012
- 2012-06-08 JP JP2012130823A patent/JP5400925B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP5121301B2 (ja) | 2013-01-16 |
KR101030847B1 (ko) | 2011-04-22 |
JP2012226359A (ja) | 2012-11-15 |
JP5400925B2 (ja) | 2014-01-29 |
KR20090015179A (ko) | 2009-02-11 |
DE602007002846D1 (de) | 2009-12-03 |
JP2008254162A (ja) | 2008-10-23 |
ATE446528T1 (de) | 2009-11-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |