KR101019878B1 - 프로브 장치, 프로브 방법 및 기억 매체 - Google Patents

프로브 장치, 프로브 방법 및 기억 매체 Download PDF

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Publication number
KR101019878B1
KR101019878B1 KR1020080047168A KR20080047168A KR101019878B1 KR 101019878 B1 KR101019878 B1 KR 101019878B1 KR 1020080047168 A KR1020080047168 A KR 1020080047168A KR 20080047168 A KR20080047168 A KR 20080047168A KR 101019878 B1 KR101019878 B1 KR 101019878B1
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KR
South Korea
Prior art keywords
probe
probe card
inspection
test head
ionizer
Prior art date
Application number
KR1020080047168A
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English (en)
Korean (ko)
Other versions
KR20090031196A (ko
Inventor
이사오 고우노
가즈키 하나와
Original Assignee
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20090031196A publication Critical patent/KR20090031196A/ko
Application granted granted Critical
Publication of KR101019878B1 publication Critical patent/KR101019878B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020080047168A 2007-09-21 2008-05-21 프로브 장치, 프로브 방법 및 기억 매체 KR101019878B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007245915A JP2009076776A (ja) 2007-09-21 2007-09-21 プローブ装置及びプローブ方法
JPJP-P-2007-00245915 2007-09-21

Publications (2)

Publication Number Publication Date
KR20090031196A KR20090031196A (ko) 2009-03-25
KR101019878B1 true KR101019878B1 (ko) 2011-03-04

Family

ID=40493641

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080047168A KR101019878B1 (ko) 2007-09-21 2008-05-21 프로브 장치, 프로브 방법 및 기억 매체

Country Status (4)

Country Link
JP (1) JP2009076776A (zh)
KR (1) KR101019878B1 (zh)
CN (1) CN101393251B (zh)
TW (1) TWI427295B (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101968518B (zh) * 2009-07-27 2012-08-08 京元电子股份有限公司 具同心圆探针座的半导体测试设备
JP6289962B2 (ja) * 2013-07-11 2018-03-07 東京エレクトロン株式会社 プローブ装置
CN107976576A (zh) * 2016-10-24 2018-05-01 精工爱普生株式会社 电子元器件传送装置以及电子元器件检查装置
CN108885238A (zh) * 2017-01-19 2018-11-23 深圳市汇顶科技股份有限公司 一种用于矩阵排列芯片的测试装置
WO2018154941A1 (ja) * 2017-02-22 2018-08-30 新東工業株式会社 テストシステム
KR101897638B1 (ko) * 2017-08-21 2018-09-13 (주)씨온테크 반도체 소자의 전기적 특성 자동 측정용 고정밀 테스트 장치
TWI655444B (zh) * 2017-12-20 2019-04-01 亞亞科技股份有限公司 IC inspection machine with temporary fixing effect
US10698025B2 (en) * 2018-07-20 2020-06-30 Formfactor Beaverton, Inc. Probe systems and methods that utilize a flow-regulating structure for improved collection of an optical image of a device under test
WO2022269783A1 (ja) * 2021-06-23 2022-12-29 三菱電機株式会社 検査装置
CN113725131B (zh) * 2021-11-02 2022-02-08 西安奕斯伟材料科技有限公司 晶圆预处理装置及晶圆缺陷检测方法
CN114966147B (zh) * 2022-05-27 2023-12-22 江苏艾科半导体有限公司 一种芯片测试探针台保护罩

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251280U (zh) * 1985-09-19 1987-03-30
JP2006133119A (ja) 2004-11-08 2006-05-25 Internatl Business Mach Corp <Ibm> Ｔｆｔの検査装置および検査方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996029607A1 (fr) * 1995-03-18 1996-09-26 Tokyo Electron Limited Procede et appareil de controle d'un substrat
JPH0982766A (ja) * 1995-09-18 1997-03-28 Sony Corp プロービング測定装置
JP3842468B2 (ja) * 1998-12-08 2006-11-08 株式会社日本マイクロニクス プローブの清掃方法及び装置
JP2002340974A (ja) * 2001-05-17 2002-11-27 Matsushita Electric Ind Co Ltd 半導体素子の電気特性測定装置、及び半導体素子の電気特性測定方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251280U (zh) * 1985-09-19 1987-03-30
JP2006133119A (ja) 2004-11-08 2006-05-25 Internatl Business Mach Corp <Ibm> Ｔｆｔの検査装置および検査方法

Also Published As

Publication number Publication date
CN101393251B (zh) 2011-10-26
TW200914835A (en) 2009-04-01
JP2009076776A (ja) 2009-04-09
CN101393251A (zh) 2009-03-25
TWI427295B (zh) 2014-02-21
KR20090031196A (ko) 2009-03-25

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