KR101011850B1 - 대형 기판 홀더 - Google Patents

대형 기판 홀더 Download PDF

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Publication number
KR101011850B1
KR101011850B1 KR1020040017622A KR20040017622A KR101011850B1 KR 101011850 B1 KR101011850 B1 KR 101011850B1 KR 1020040017622 A KR1020040017622 A KR 1020040017622A KR 20040017622 A KR20040017622 A KR 20040017622A KR 101011850 B1 KR101011850 B1 KR 101011850B1
Authority
KR
South Korea
Prior art keywords
grate
substrate holder
main body
vibration
holder
Prior art date
Application number
KR1020040017622A
Other languages
English (en)
Korean (ko)
Other versions
KR20040082305A (ko
Inventor
조가사키수야
Original Assignee
올림푸스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 올림푸스 가부시키가이샤 filed Critical 올림푸스 가부시키가이샤
Publication of KR20040082305A publication Critical patent/KR20040082305A/ko
Application granted granted Critical
Publication of KR101011850B1 publication Critical patent/KR101011850B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Vibration Prevention Devices (AREA)
KR1020040017622A 2003-03-18 2004-03-16 대형 기판 홀더 KR101011850B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00074040 2003-03-18
JP2003074040A JP4276867B2 (ja) 2003-03-18 2003-03-18 基板ホルダ及びこれを備えた表面検査装置

Publications (2)

Publication Number Publication Date
KR20040082305A KR20040082305A (ko) 2004-09-24
KR101011850B1 true KR101011850B1 (ko) 2011-01-31

Family

ID=33289785

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040017622A KR101011850B1 (ko) 2003-03-18 2004-03-16 대형 기판 홀더

Country Status (4)

Country Link
JP (1) JP4276867B2 (ja)
KR (1) KR101011850B1 (ja)
CN (1) CN1532532B (ja)
TW (1) TWI332931B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI307929B (en) * 2005-05-12 2009-03-21 Olympus Corp Substrate inspection apparatus
JP2009231437A (ja) * 2008-03-21 2009-10-08 Olympus Corp マクロ検査装置、マクロ検査システム、及び、マクロ検査方法
US9228256B2 (en) * 2009-12-11 2016-01-05 Kgt Graphit Technologie Gmbh Substrate support
KR101881408B1 (ko) * 2016-08-22 2018-07-23 주성엔지니어링(주) 기판지지홀더 및 이를 사용한 기판처리장치
TWI658532B (zh) * 2017-08-09 2019-05-01 明安國際企業股份有限公司 基板承置匣
KR102607248B1 (ko) * 2018-06-25 2023-11-30 어플라이드 머티어리얼스, 인코포레이티드 기판을 위한 캐리어 및 기판을 운반하기 위한 방법
TWD210557S (zh) 2020-01-21 2021-03-21 志聖工業股份有限公司 熱製程用承載盤

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09189641A (ja) * 1996-01-08 1997-07-22 Olympus Optical Co Ltd 基板ホルダ
JP2000007146A (ja) 1998-06-18 2000-01-11 Olympus Optical Co Ltd ガラス基板保持具
WO2003006971A1 (fr) * 2001-07-02 2003-01-23 Olympus Optical Co., Ltd. Dispositif de support de substrat

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2370524Y (zh) * 1999-01-07 2000-03-22 神基科技股份有限公司 具防震结构的数据存储装置
JP2003049558A (ja) * 2001-08-07 2003-02-21 Kazuhiko Kasai 制振間柱

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09189641A (ja) * 1996-01-08 1997-07-22 Olympus Optical Co Ltd 基板ホルダ
JP2000007146A (ja) 1998-06-18 2000-01-11 Olympus Optical Co Ltd ガラス基板保持具
WO2003006971A1 (fr) * 2001-07-02 2003-01-23 Olympus Optical Co., Ltd. Dispositif de support de substrat

Also Published As

Publication number Publication date
JP4276867B2 (ja) 2009-06-10
CN1532532A (zh) 2004-09-29
TWI332931B (en) 2010-11-11
CN1532532B (zh) 2010-12-08
JP2004281907A (ja) 2004-10-07
KR20040082305A (ko) 2004-09-24
TW200418703A (en) 2004-10-01

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