KR100997015B1 - 분자 펌프, 및 플랜지 - Google Patents

분자 펌프, 및 플랜지 Download PDF

Info

Publication number
KR100997015B1
KR100997015B1 KR1020030073856A KR20030073856A KR100997015B1 KR 100997015 B1 KR100997015 B1 KR 100997015B1 KR 1020030073856 A KR1020030073856 A KR 1020030073856A KR 20030073856 A KR20030073856 A KR 20030073856A KR 100997015 B1 KR100997015 B1 KR 100997015B1
Authority
KR
South Korea
Prior art keywords
bolt
rotor
flange
molecular pump
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020030073856A
Other languages
English (en)
Korean (ko)
Other versions
KR20040036594A (ko
Inventor
사카구치요시유키
오쿠데라사토시
나미키히로타카
가바사와다카시
미와타도오루
Original Assignee
에드워즈 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에드워즈 가부시키가이샤 filed Critical 에드워즈 가부시키가이샤
Publication of KR20040036594A publication Critical patent/KR20040036594A/ko
Application granted granted Critical
Publication of KR100997015B1 publication Critical patent/KR100997015B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
KR1020030073856A 2002-10-23 2003-10-22 분자 펌프, 및 플랜지 Expired - Lifetime KR100997015B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00308829 2002-10-23
JP2002308829 2002-10-23
JP2003296803A JP4484470B2 (ja) 2002-10-23 2003-08-20 分子ポンプ、及びフランジ
JPJP-P-2003-00296803 2003-08-20

Publications (2)

Publication Number Publication Date
KR20040036594A KR20040036594A (ko) 2004-04-30
KR100997015B1 true KR100997015B1 (ko) 2010-11-25

Family

ID=32072540

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020030073856A Expired - Lifetime KR100997015B1 (ko) 2002-10-23 2003-10-22 분자 펌프, 및 플랜지

Country Status (5)

Country Link
US (1) US7059823B2 (enrdf_load_stackoverflow)
EP (1) EP1413761B1 (enrdf_load_stackoverflow)
JP (1) JP4484470B2 (enrdf_load_stackoverflow)
KR (1) KR100997015B1 (enrdf_load_stackoverflow)
DE (1) DE60325158D1 (enrdf_load_stackoverflow)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4499388B2 (ja) * 2003-08-27 2010-07-07 エドワーズ株式会社 分子ポンプおよび結合装置
JP2006063969A (ja) * 2004-07-30 2006-03-09 Shimadzu Corp 回転式真空ポンプ、真空装置およびポンプ接続構造
JP4609082B2 (ja) * 2005-01-25 2011-01-12 株式会社島津製作所 フランジおよびこのフランジを備えたターボ分子ポンプ
GB0520750D0 (en) * 2005-10-12 2005-11-23 Boc Group Plc Vacuum pumping arrangement
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
DE102005059636A1 (de) * 2005-12-14 2007-06-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP4949746B2 (ja) * 2006-03-15 2012-06-13 エドワーズ株式会社 分子ポンプ、及びフランジ
JP2007278164A (ja) * 2006-04-06 2007-10-25 Shimadzu Corp 締結構造および回転式真空ポンプ
JP2007278163A (ja) * 2006-04-06 2007-10-25 Shimadzu Corp 締結構造および回転式真空ポンプ
EP2017480A1 (en) * 2007-06-15 2009-01-21 VARIAN S.p.A. Split joint for vacuum pumps and method for obtaining said joint
DE102007059257A1 (de) * 2007-12-08 2009-06-10 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe
JP4978489B2 (ja) * 2008-01-30 2012-07-18 株式会社島津製作所 ケーシングのフランジ構造、ターボ分子ポンプおよび真空ポンプ
DE102008035972A1 (de) * 2008-07-31 2010-02-04 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
DE102008058151A1 (de) 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008058149A1 (de) 2008-11-20 2010-05-27 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE202008016905U1 (de) * 2008-12-19 2010-05-12 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
KR101133432B1 (ko) * 2009-10-30 2012-04-09 한국전력공사 응력 저감형 회전체
US8961104B2 (en) * 2009-11-02 2015-02-24 Shimadzu Corporation Vacuum pump
CN103857918B (zh) * 2011-10-31 2016-08-24 埃地沃兹日本有限公司 固定部件及真空泵
NL2008180C2 (en) * 2012-01-25 2013-07-29 Ihc Holland Ie Bv Pump and a method of manufacturing such a pump.
JP6992569B2 (ja) * 2018-02-14 2022-01-13 株式会社島津製作所 真空ポンプおよびバランス調整方法
JP7377640B2 (ja) 2019-07-22 2023-11-10 エドワーズ株式会社 真空ポンプ、及び、真空ポンプに用いられるロータ並びに回転翼
GB2592043A (en) * 2020-02-13 2021-08-18 Edwards Ltd Axial flow vacuum pump
JP2021161917A (ja) 2020-03-31 2021-10-11 エドワーズ株式会社 真空ポンプおよび真空ポンプの配管構造部

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59147673U (ja) 1983-03-25 1984-10-02 三菱自動車工業株式会社 ステアリング装置
JPH10274189A (ja) * 1997-03-31 1998-10-13 Shimadzu Corp ターボ分子ポンプ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4086012A (en) 1976-09-20 1978-04-25 The United States Of America As Represented By The Secretary Of The Navy Rotational energy absorbing coupling
JP3426734B2 (ja) * 1994-10-17 2003-07-14 三菱重工業株式会社 ターボ分子ポンプ
US6485254B1 (en) * 2000-10-19 2002-11-26 Applied Materials, Inc. Energy dissipating coupling
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP4004779B2 (ja) * 2001-11-16 2007-11-07 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP4126212B2 (ja) * 2001-11-19 2008-07-30 エドワーズ株式会社 真空ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59147673U (ja) 1983-03-25 1984-10-02 三菱自動車工業株式会社 ステアリング装置
JPH10274189A (ja) * 1997-03-31 1998-10-13 Shimadzu Corp ターボ分子ポンプ

Also Published As

Publication number Publication date
US7059823B2 (en) 2006-06-13
KR20040036594A (ko) 2004-04-30
EP1413761A3 (en) 2005-06-15
DE60325158D1 (de) 2009-01-22
EP1413761A2 (en) 2004-04-28
EP1413761B1 (en) 2008-12-10
US20040081569A1 (en) 2004-04-29
JP4484470B2 (ja) 2010-06-16
JP2004162696A (ja) 2004-06-10

Similar Documents

Publication Publication Date Title
KR100997015B1 (ko) 분자 펌프, 및 플랜지
KR100549514B1 (ko) 터보 분자 펌프
KR101268797B1 (ko) 분자 펌프 및 플랜지
EP1900944B1 (en) Turbo-molecular pump and method of assembling turbo-molecular pump
EP2623791B1 (en) Exhaust pump
KR20130114566A (ko) 배기 펌프
EP2722527B1 (en) Vacuum pump and rotor therefor
CN114051560B (zh) 真空泵及用于真空泵的转子以及旋转翼
JP5137365B2 (ja) 真空ポンプ及びフランジ
JP2009287576A (ja) 分子ポンプ、及びフランジ
JP5577798B2 (ja) ターボ分子ポンプ
JP4609082B2 (ja) フランジおよびこのフランジを備えたターボ分子ポンプ
JP2006037930A (ja) ターボ分子ポンプ
JP6079041B2 (ja) ターボ分子ポンプ、及び、ターボ分子ポンプ用の補強部材
JP2007278163A (ja) 締結構造および回転式真空ポンプ
JP2002285988A (ja) 分子ポンプ
JP2003155996A (ja) 真空ポンプ
JP2011033027A (ja) ターボ分子ポンプ・ロータ
JP2003148377A (ja) 真空ポンプ

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20031022

PG1501 Laying open of application
N231 Notification of change of applicant
PN2301 Change of applicant

Patent event date: 20040607

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20080922

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 20031022

Comment text: Patent Application

N231 Notification of change of applicant
PN2301 Change of applicant

Patent event date: 20081017

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20100305

Patent event code: PE09021S01D

AMND Amendment
E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20100706

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20100305

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I

J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

Patent event date: 20100805

Comment text: Request for Trial against Decision on Refusal

Patent event code: PJ02012R01D

Patent event date: 20100706

Comment text: Decision to Refuse Application

Patent event code: PJ02011S01I

Appeal kind category: Appeal against decision to decline refusal

Decision date: 20101006

Appeal identifier: 2010101006018

Request date: 20100805

AMND Amendment
PB0901 Examination by re-examination before a trial

Comment text: Amendment to Specification, etc.

Patent event date: 20100906

Patent event code: PB09011R02I

Comment text: Request for Trial against Decision on Refusal

Patent event date: 20100805

Patent event code: PB09011R01I

Comment text: Amendment to Specification, etc.

Patent event date: 20100506

Patent event code: PB09011R02I

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

Patent event date: 20101006

Comment text: Decision to Grant Registration

Patent event code: PB07012S01D

Patent event date: 20100914

Comment text: Transfer of Trial File for Re-examination before a Trial

Patent event code: PB07011S01I

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20101122

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20101122

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
FPAY Annual fee payment

Payment date: 20131031

Year of fee payment: 4

PR1001 Payment of annual fee

Payment date: 20131031

Start annual number: 4

End annual number: 4

FPAY Annual fee payment

Payment date: 20141103

Year of fee payment: 5

PR1001 Payment of annual fee

Payment date: 20141103

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20151016

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20151016

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20161019

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20161019

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20171018

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20171018

Start annual number: 8

End annual number: 8

FPAY Annual fee payment

Payment date: 20191029

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 20191029

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20201028

Start annual number: 11

End annual number: 11

PR1001 Payment of annual fee

Payment date: 20211027

Start annual number: 12

End annual number: 12

PC1801 Expiration of term

Termination date: 20240422

Termination category: Expiration of duration