DE60325158D1 - Turbomolekularpumpe und Flansch - Google Patents
Turbomolekularpumpe und FlanschInfo
- Publication number
- DE60325158D1 DE60325158D1 DE60325158T DE60325158T DE60325158D1 DE 60325158 D1 DE60325158 D1 DE 60325158D1 DE 60325158 T DE60325158 T DE 60325158T DE 60325158 T DE60325158 T DE 60325158T DE 60325158 D1 DE60325158 D1 DE 60325158D1
- Authority
- DE
- Germany
- Prior art keywords
- flange
- turbomolecular pump
- turbomolecular
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/02—Surge control
- F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002308829 | 2002-10-23 | ||
JP2003296803A JP4484470B2 (ja) | 2002-10-23 | 2003-08-20 | 分子ポンプ、及びフランジ |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60325158D1 true DE60325158D1 (de) | 2009-01-22 |
Family
ID=32072540
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60325158T Expired - Lifetime DE60325158D1 (de) | 2002-10-23 | 2003-10-15 | Turbomolekularpumpe und Flansch |
Country Status (5)
Country | Link |
---|---|
US (1) | US7059823B2 (de) |
EP (1) | EP1413761B1 (de) |
JP (1) | JP4484470B2 (de) |
KR (1) | KR100997015B1 (de) |
DE (1) | DE60325158D1 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4499388B2 (ja) * | 2003-08-27 | 2010-07-07 | エドワーズ株式会社 | 分子ポンプおよび結合装置 |
JP2006063969A (ja) * | 2004-07-30 | 2006-03-09 | Shimadzu Corp | 回転式真空ポンプ、真空装置およびポンプ接続構造 |
JP4609082B2 (ja) * | 2005-01-25 | 2011-01-12 | 株式会社島津製作所 | フランジおよびこのフランジを備えたターボ分子ポンプ |
GB0520750D0 (en) | 2005-10-12 | 2005-11-23 | Boc Group Plc | Vacuum pumping arrangement |
FR2893094B1 (fr) * | 2005-11-10 | 2011-11-11 | Cit Alcatel | Dispositif de fixation pour une pompe a vide |
DE102005059636A1 (de) * | 2005-12-14 | 2007-06-21 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP4949746B2 (ja) * | 2006-03-15 | 2012-06-13 | エドワーズ株式会社 | 分子ポンプ、及びフランジ |
JP2007278164A (ja) * | 2006-04-06 | 2007-10-25 | Shimadzu Corp | 締結構造および回転式真空ポンプ |
JP2007278163A (ja) * | 2006-04-06 | 2007-10-25 | Shimadzu Corp | 締結構造および回転式真空ポンプ |
EP2017480A1 (de) * | 2007-06-15 | 2009-01-21 | VARIAN S.p.A. | Geteilte Verbindung für Vakuumpumpen und Verfahren zur Gewinnung der besagten Verbindung |
DE102007059257A1 (de) * | 2007-12-08 | 2009-06-10 | Pfeiffer Vacuum Gmbh | Anordnung mit Vakuumpumpe |
JP4978489B2 (ja) * | 2008-01-30 | 2012-07-18 | 株式会社島津製作所 | ケーシングのフランジ構造、ターボ分子ポンプおよび真空ポンプ |
DE102008035972A1 (de) * | 2008-07-31 | 2010-02-04 | Pfeiffer Vacuum Gmbh | Vakuumpumpanordnung |
DE102008058149A1 (de) | 2008-11-20 | 2010-05-27 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
DE102008058151A1 (de) | 2008-11-20 | 2010-05-27 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
DE202008016905U1 (de) * | 2008-12-19 | 2010-05-12 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
KR101133432B1 (ko) * | 2009-10-30 | 2012-04-09 | 한국전력공사 | 응력 저감형 회전체 |
US8961104B2 (en) * | 2009-11-02 | 2015-02-24 | Shimadzu Corporation | Vacuum pump |
KR101979043B1 (ko) * | 2011-10-31 | 2019-05-15 | 에드워즈 가부시키가이샤 | 고정 부재 및 진공 펌프 |
NL2008180C2 (en) | 2012-01-25 | 2013-07-29 | Ihc Holland Ie Bv | Pump and a method of manufacturing such a pump. |
JP6992569B2 (ja) * | 2018-02-14 | 2022-01-13 | 株式会社島津製作所 | 真空ポンプおよびバランス調整方法 |
JP7377640B2 (ja) | 2019-07-22 | 2023-11-10 | エドワーズ株式会社 | 真空ポンプ、及び、真空ポンプに用いられるロータ並びに回転翼 |
GB2592043A (en) * | 2020-02-13 | 2021-08-18 | Edwards Ltd | Axial flow vacuum pump |
JP2021161917A (ja) | 2020-03-31 | 2021-10-11 | エドワーズ株式会社 | 真空ポンプおよび真空ポンプの配管構造部 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4086012A (en) * | 1976-09-20 | 1978-04-25 | The United States Of America As Represented By The Secretary Of The Navy | Rotational energy absorbing coupling |
JPS59147673U (ja) | 1983-03-25 | 1984-10-02 | 三菱自動車工業株式会社 | ステアリング装置 |
JP3426734B2 (ja) * | 1994-10-17 | 2003-07-14 | 三菱重工業株式会社 | ターボ分子ポンプ |
JP3879169B2 (ja) * | 1997-03-31 | 2007-02-07 | 株式会社島津製作所 | ターボ分子ポンプ |
US6485254B1 (en) * | 2000-10-19 | 2002-11-26 | Applied Materials, Inc. | Energy dissipating coupling |
JP2002327698A (ja) | 2001-04-27 | 2002-11-15 | Boc Edwards Technologies Ltd | 真空ポンプ |
JP4004779B2 (ja) | 2001-11-16 | 2007-11-07 | Bocエドワーズ株式会社 | 真空ポンプ |
JP4126212B2 (ja) | 2001-11-19 | 2008-07-30 | エドワーズ株式会社 | 真空ポンプ |
-
2003
- 2003-08-20 JP JP2003296803A patent/JP4484470B2/ja not_active Expired - Lifetime
- 2003-10-15 US US10/685,713 patent/US7059823B2/en not_active Expired - Lifetime
- 2003-10-15 DE DE60325158T patent/DE60325158D1/de not_active Expired - Lifetime
- 2003-10-15 EP EP03256507A patent/EP1413761B1/de not_active Expired - Lifetime
- 2003-10-22 KR KR1020030073856A patent/KR100997015B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP4484470B2 (ja) | 2010-06-16 |
US7059823B2 (en) | 2006-06-13 |
EP1413761B1 (de) | 2008-12-10 |
EP1413761A2 (de) | 2004-04-28 |
KR100997015B1 (ko) | 2010-11-25 |
US20040081569A1 (en) | 2004-04-29 |
KR20040036594A (ko) | 2004-04-30 |
EP1413761A3 (de) | 2005-06-15 |
JP2004162696A (ja) | 2004-06-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |