DE50214516D1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number
DE50214516D1
DE50214516D1 DE50214516T DE50214516T DE50214516D1 DE 50214516 D1 DE50214516 D1 DE 50214516D1 DE 50214516 T DE50214516 T DE 50214516T DE 50214516 T DE50214516 T DE 50214516T DE 50214516 D1 DE50214516 D1 DE 50214516D1
Authority
DE
Germany
Prior art keywords
turbomolecular pump
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50214516T
Other languages
English (en)
Inventor
Peter Fahrenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to DE50214516T priority Critical patent/DE50214516D1/de
Application granted granted Critical
Publication of DE50214516D1 publication Critical patent/DE50214516D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE50214516T 2001-02-16 2002-01-26 Turbomolekularpumpe Expired - Lifetime DE50214516D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50214516T DE50214516D1 (de) 2001-02-16 2002-01-26 Turbomolekularpumpe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10107341A DE10107341A1 (de) 2001-02-16 2001-02-16 Vakuumpumpe
DE50214516T DE50214516D1 (de) 2001-02-16 2002-01-26 Turbomolekularpumpe

Publications (1)

Publication Number Publication Date
DE50214516D1 true DE50214516D1 (de) 2010-08-19

Family

ID=7674321

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10107341A Withdrawn DE10107341A1 (de) 2001-02-16 2001-02-16 Vakuumpumpe
DE50214516T Expired - Lifetime DE50214516D1 (de) 2001-02-16 2002-01-26 Turbomolekularpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE10107341A Withdrawn DE10107341A1 (de) 2001-02-16 2001-02-16 Vakuumpumpe

Country Status (4)

Country Link
US (1) US6699009B2 (de)
EP (1) EP1236906B1 (de)
JP (1) JP4673538B2 (de)
DE (2) DE10107341A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10142567A1 (de) * 2001-08-30 2003-03-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP5420323B2 (ja) * 2009-06-23 2014-02-19 株式会社大阪真空機器製作所 分子ポンプ
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ
JP6390478B2 (ja) * 2015-03-18 2018-09-19 株式会社島津製作所 真空ポンプ
EP3339652B1 (de) * 2016-12-22 2020-07-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit einer innenverkleidung zur aufnahme von ablagerungen
US10655638B2 (en) * 2018-03-15 2020-05-19 Lam Research Corporation Turbomolecular pump deposition control and particle management

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3508483A1 (de) * 1985-03-09 1986-10-23 Leybold-Heraeus GmbH, 5000 Köln Gehaeuse fuer eine turbomolekularvakuumpumpe
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
US5577883A (en) * 1992-06-19 1996-11-26 Leybold Aktiengesellschaft Gas friction vacuum pump having a cooling system
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
DE19702456B4 (de) * 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE19724323A1 (de) * 1997-06-10 1998-12-17 Leybold Vakuum Gmbh Flanschverbindung

Also Published As

Publication number Publication date
JP4673538B2 (ja) 2011-04-20
EP1236906B1 (de) 2010-07-07
US6699009B2 (en) 2004-03-02
DE10107341A1 (de) 2002-08-29
EP1236906A1 (de) 2002-09-04
US20020114695A1 (en) 2002-08-22
JP2002276586A (ja) 2002-09-25

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