KR100984452B1 - 마이크로 유체 시스템용 지지 유니트 및 그 제조방법 - Google Patents

마이크로 유체 시스템용 지지 유니트 및 그 제조방법 Download PDF

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Publication number
KR100984452B1
KR100984452B1 KR1020047013114A KR20047013114A KR100984452B1 KR 100984452 B1 KR100984452 B1 KR 100984452B1 KR 1020047013114 A KR1020047013114 A KR 1020047013114A KR 20047013114 A KR20047013114 A KR 20047013114A KR 100984452 B1 KR100984452 B1 KR 100984452B1
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South Korea
Prior art keywords
adhesive layer
support
hollow
microfluidic system
support unit
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Expired - Fee Related
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KR1020047013114A
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English (en)
Korean (ko)
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KR20040089663A (ko
Inventor
카와조에히로시
나카소아키시
아리케시게하루
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히다치 가세고교 가부시끼가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00119—Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00788—Three-dimensional assemblies, i.e. the reactor comprising a form other than a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00822—Metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00819—Materials of construction
    • B01J2219/00833—Plastic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00851—Additional features
    • B01J2219/00858—Aspects relating to the size of the reactor
    • B01J2219/0086—Dimensions of the flow channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00851—Additional features
    • B01J2219/00869—Microreactors placed in parallel, on the same or on different supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0832—Geometry, shape and general structure cylindrical, tube shaped
    • B01L2300/0838—Capillaries
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0874—Three dimensional network
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0481—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure squeezing of channels or chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0633—Valves, specific forms thereof with moving parts
    • B01L2400/0655—Valves, specific forms thereof with moving parts pinch valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/051—Micromixers, microreactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/032—Gluing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Clinical Laboratory Science (AREA)
  • Organic Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Medicines Containing Material From Animals Or Micro-Organisms (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
KR1020047013114A 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트 및 그 제조방법 Expired - Fee Related KR100984452B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00048580 2002-02-25
JP2002048580 2002-02-25
JP2002292978 2002-10-04
JPJP-P-2002-00292978 2002-10-04
JPJP-P-2003-00046414 2003-02-24
JP2003046414A JP3933058B2 (ja) 2002-02-25 2003-02-24 マイクロ流体システム用支持ユニット及びその製造方法
PCT/JP2003/002066 WO2003070623A1 (fr) 2002-02-25 2003-02-25 Unite de support de systeme microfluidique et son procede de fabrication

Related Child Applications (3)

Application Number Title Priority Date Filing Date
KR1020067016792A Division KR100984956B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020067016791A Division KR100984938B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020067016790A Division KR100984919B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트

Publications (2)

Publication Number Publication Date
KR20040089663A KR20040089663A (ko) 2004-10-21
KR100984452B1 true KR100984452B1 (ko) 2010-09-29

Family

ID=27761226

Family Applications (8)

Application Number Title Priority Date Filing Date
KR1020067016791A Expired - Fee Related KR100984938B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020067016792A Expired - Fee Related KR100984956B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020047013114A Expired - Fee Related KR100984452B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트 및 그 제조방법
KR1020097025349A Expired - Fee Related KR101009209B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트 및 그 제조방법
KR1020077030259A Expired - Fee Related KR100984403B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020077030260A Ceased KR20080009764A (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020077030261A Expired - Fee Related KR100984431B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020067016790A Expired - Fee Related KR100984919B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트

Family Applications Before (2)

Application Number Title Priority Date Filing Date
KR1020067016791A Expired - Fee Related KR100984938B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020067016792A Expired - Fee Related KR100984956B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트

Family Applications After (5)

Application Number Title Priority Date Filing Date
KR1020097025349A Expired - Fee Related KR101009209B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트 및 그 제조방법
KR1020077030259A Expired - Fee Related KR100984403B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020077030260A Ceased KR20080009764A (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020077030261A Expired - Fee Related KR100984431B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트
KR1020067016790A Expired - Fee Related KR100984919B1 (ko) 2002-02-25 2003-02-25 마이크로 유체 시스템용 지지 유니트

Country Status (10)

Country Link
US (9) US20050249637A1 (enExample)
EP (8) EP1486455B1 (enExample)
JP (1) JP3933058B2 (enExample)
KR (8) KR100984938B1 (enExample)
CN (5) CN1639054B (enExample)
AT (5) ATE514478T1 (enExample)
AU (1) AU2003211695A1 (enExample)
DE (1) DE60326323D1 (enExample)
TW (1) TW579367B (enExample)
WO (1) WO2003070623A1 (enExample)

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JP4687653B2 (ja) * 2004-11-30 2011-05-25 日立化成工業株式会社 分析前処理用部品
CN101664662A (zh) * 2004-12-09 2010-03-10 日立化成工业株式会社 微流体系统用支持单元及其制造方法
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JP5012186B2 (ja) * 2007-05-08 2012-08-29 日立化成工業株式会社 マイクロ流体システム用支持ユニットの製造方法
JP2008281366A (ja) * 2007-05-08 2008-11-20 Hitachi Chem Co Ltd マイクロ流体システム用支持ユニット
JP5217323B2 (ja) * 2007-09-14 2013-06-19 株式会社明電舎 バイポーラ積層型電気二重層キャパシタ
JP5262064B2 (ja) * 2007-10-30 2013-08-14 富士ゼロックス株式会社 マイクロリアクターを用いた反応方法及びマイクロリアクター
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CN104412110A (zh) * 2012-07-09 2015-03-11 索尼公司 微芯片和用于制造微芯片的方法
KR101475906B1 (ko) * 2014-04-30 2014-12-23 박동현 마이크로플루이딕스 칩 기반의 잔류농약 검출용 전처리 키트 및 이를 이용한 잔류농약 검출 방법
US10585518B2 (en) * 2014-10-15 2020-03-10 Microsoft Technology Licensing, Llc Display module support
US10272426B2 (en) * 2015-04-21 2019-04-30 Jsr Corporation Method of producing microfluidic device, microfluidic device, and photosensitive resin composition
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