KR100966682B1 - 균일한 조직을 갖는 내화성 금속판 및 이 금속판의 제작방법 - Google Patents
균일한 조직을 갖는 내화성 금속판 및 이 금속판의 제작방법 Download PDFInfo
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- KR100966682B1 KR100966682B1 KR1020037010851A KR20037010851A KR100966682B1 KR 100966682 B1 KR100966682 B1 KR 100966682B1 KR 1020037010851 A KR1020037010851 A KR 1020037010851A KR 20037010851 A KR20037010851 A KR 20037010851A KR 100966682 B1 KR100966682 B1 KR 100966682B1
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- refractory metal
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- 238000000034 method Methods 0.000 title claims abstract description 40
- 239000003870 refractory metal Substances 0.000 title claims description 23
- 230000008569 process Effects 0.000 claims abstract description 24
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 24
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 12
- 239000010955 niobium Substances 0.000 claims abstract description 12
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000010791 quenching Methods 0.000 claims abstract description 12
- 238000005477 sputtering target Methods 0.000 claims abstract description 11
- 230000000171 quenching effect Effects 0.000 claims abstract description 9
- 238000005242 forging Methods 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000013078 crystal Substances 0.000 claims description 7
- 238000005096 rolling process Methods 0.000 claims description 7
- 229910001257 Nb alloy Inorganic materials 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 238000001953 recrystallisation Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 229910001362 Ta alloys Inorganic materials 0.000 claims 2
- 230000000977 initiatory effect Effects 0.000 claims 1
- 238000009827 uniform distribution Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 abstract description 19
- 238000005520 cutting process Methods 0.000 abstract description 2
- 238000003825 pressing Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 12
- 239000010408 film Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 8
- 239000000047 product Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000386 microscopy Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- 238000009721 upset forging Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000005555 metalworking Methods 0.000 description 1
- RHDUVDHGVHBHCL-UHFFFAOYSA-N niobium tantalum Chemical compound [Nb].[Ta] RHDUVDHGVHBHCL-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/02—Alloys based on vanadium, niobium, or tantalum
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
- C22F1/18—High-melting or refractory metals or alloys based thereon
Abstract
Description
Claims (33)
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- 두께, 중앙 및 가장자리를 가지고, 적어도 99.99% 순도의 탄탈 및 니오븀으로 구성되는 그룹으로부터 선택된 금속을 포함하고, 38 마이크로미터 이하의 평균 결정립 크기를 가지며, 상기 두께를 통해 균일한 조직을 가지고, 상기 중앙으로부터 가장자리까지 균일한 조직을 가지는 내화성 금속판이며,i) {100}과 {111} 결정 배향을 갖는 결정립의 일정한 혼합을 가지고,ii) 상기 내화성 금속판의 두께에 수직인 평면과, 상기 내화성 금속판의 두께에 대각선인 평면으로부터 선택된 내화성 금속판의 평면의 표면에 걸쳐 30 퍼센트 미만으로 변하면서, 중앙으로부터 판의 가장자리까지 두께를 통해 판 내에 우선된 방향이 없어 우세한 {100} 또는 {111} 배향이 존재하지 않게 균일한 {100} 및 {111} 결정 배향의 분포를 가지고,iii) 상기 내화성 금속판의 두께에 걸쳐 30% 미만으로 변하는 {100} 및 {111} 결정 배향의 분포를 가지는 내화성 금속판.
- 제26항에 있어서, 상기 내화성 금속판은 단조, 압연 및 담금질을 포함하는 공정에 의해 얻어지는 내화성 금속판.
- 제26항에 있어서, 상기 내화성 금속판은 적어도 99.99% 순도를 갖는, 탄탈, 탄탈의 합금, 니오븀 및 니오븀의 합금으로 구성되는 그룹으로부터 선택된 금속을 포함하는 내화성 금속판.
- 제26항 내지 제28항 중 어느 한 항에 따른 내화성 금속판을 포함하는 스퍼터링 타겟.
- 중앙으로부터 판의 가장자리까지 두께를 통해 판 내에 우선된 방향이 없어 우세한 {100} 또는 {111} 배향이 존재하지 않게 균일한 조직을 가지면서 미세 야금학적 구조를 갖는, 적어도 99.99% 순도의 탄탈, 탄탈 합금, 니오븀 및 니오븀 합금으로 구성되는 그룹으로부터 선택된 금속을 포함하는 내화성 금속판을 제작하는 방법이며,a) 내화성 금속 개시 빌릿을 제공하는 단계와,b) 상기 빌릿을 35% 내지 50% 축소된 필요한 빌릿 두께로 단조함으로써 제1 공작물을 형성하도록 내화성 금속 개시 빌릿의 길이를 축소시키는 제1 축소 단계[제1 단조(14)]와,c) 적어도 1370℃의 제1 온도에서 상기 제1 공작물을 재결정화 담금질하는 단계와,d) 제2 공작물을 형성하도록 상기 내화성 금속 개시 빌릿의 직경과 동일한 직경으로 제1 공작물의 직경을 축소시키는 제2 축소 단계(복귀 단조)와,e) 적어도 875℃의 제2 온도에서 제2 공작물을 재결정화 담금질하는 단계와,f) 필요한 결정립 구조 및 조직 균일성을 달성하기 위해 필요한 만큼 b) 내지 e) 단계를 반복하는 단계와,g) 제1 판을 형성하도록 제2 공작물을 제1 두께로 축소하는 제3 축소 단계와,h) 제2 판을 형성하도록 교차 압연에 의해 제1 판의 제1 두께를 제2 두께로 축소시키는 제4 축소 단계와,i) 적어도 875℃의 온도에서 제2 판을 재결정화 담금질하는 단계를 포함하는 내화성 금속판 제작 방법.
- 제30항에 있어서, b) 내지 g) 단계는 적어도 1회 반복되는 내화성 금속판 제작 방법.
- 제30항에 있어서, 상기 금속 빌릿은 상기 빌릿의 최소 재결정화 온도 미만의 온도에서 단조되는 내화성 금속판 제작 방법.
- 제30항에 있어서, 상기 금속 빌릿은 적어도 99.99% 순도의 탄탈, 탄탈의 합금, 니오븀 및 니오븀의 합금으로 구성되는 그룹으로부터 선택된 금속을 포함하는 내화성 금속판 제작 방법.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26998301P | 2001-02-20 | 2001-02-20 | |
US60/269,983 | 2001-02-20 | ||
PCT/US2002/005033 WO2002070765A1 (en) | 2001-02-20 | 2002-02-20 | Refractory metal plates with uniform texture and methods of making the same |
Publications (2)
Publication Number | Publication Date |
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KR20030090645A KR20030090645A (ko) | 2003-11-28 |
KR100966682B1 true KR100966682B1 (ko) | 2010-06-29 |
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Application Number | Title | Priority Date | Filing Date |
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KR1020037010851A KR100966682B1 (ko) | 2001-02-20 | 2002-02-20 | 균일한 조직을 갖는 내화성 금속판 및 이 금속판의 제작방법 |
Country Status (21)
Country | Link |
---|---|
US (1) | US20020112789A1 (ko) |
EP (1) | EP1366203B1 (ko) |
JP (1) | JP4327460B2 (ko) |
KR (1) | KR100966682B1 (ko) |
CN (2) | CN1238547C (ko) |
AT (1) | ATE339532T1 (ko) |
AU (1) | AU2002257005B2 (ko) |
BR (1) | BR0207384A (ko) |
CA (1) | CA2438819A1 (ko) |
CZ (1) | CZ20032246A3 (ko) |
DE (1) | DE60214683T2 (ko) |
ES (1) | ES2272707T3 (ko) |
HK (1) | HK1066833A1 (ko) |
HU (1) | HUP0303269A3 (ko) |
IL (1) | IL157279A0 (ko) |
MX (1) | MXPA03007490A (ko) |
NO (1) | NO20033547L (ko) |
NZ (1) | NZ527628A (ko) |
PT (1) | PT1366203E (ko) |
WO (1) | WO2002070765A1 (ko) |
ZA (1) | ZA200306399B (ko) |
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US20190161850A1 (en) * | 2017-11-30 | 2019-05-30 | Tosoh Smd, Inc. | Ultra-fine grain size tantalum sputtering targets with improved voltage performance and methods thereby |
CN113574203A (zh) * | 2019-03-26 | 2021-10-29 | Jx金属株式会社 | 铌溅射靶 |
CN110983218B (zh) * | 2019-12-25 | 2021-09-03 | 西部超导材料科技股份有限公司 | 一种组织均匀的小规格纯铌棒材的制备方法 |
CN112143990B (zh) * | 2020-09-04 | 2022-01-07 | 中国航发北京航空材料研究院 | 一种钛合金β相大尺寸单晶的制备方法 |
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- 2002-02-20 BR BR0207384-6A patent/BR0207384A/pt not_active Application Discontinuation
- 2002-02-20 AU AU2002257005A patent/AU2002257005B2/en not_active Expired - Fee Related
- 2002-02-20 ES ES02726582T patent/ES2272707T3/es not_active Expired - Lifetime
- 2002-02-20 KR KR1020037010851A patent/KR100966682B1/ko active IP Right Grant
- 2002-02-20 CN CNB028051009A patent/CN1238547C/zh not_active Expired - Fee Related
- 2002-02-20 AT AT02726582T patent/ATE339532T1/de active
- 2002-02-20 US US10/079,286 patent/US20020112789A1/en not_active Abandoned
- 2002-02-20 PT PT02726582T patent/PT1366203E/pt unknown
- 2002-02-20 MX MXPA03007490A patent/MXPA03007490A/es active IP Right Grant
- 2002-02-20 EP EP02726582A patent/EP1366203B1/en not_active Revoked
- 2002-02-20 DE DE60214683T patent/DE60214683T2/de not_active Expired - Lifetime
- 2002-02-20 WO PCT/US2002/005033 patent/WO2002070765A1/en active IP Right Grant
- 2002-02-20 JP JP2002570787A patent/JP4327460B2/ja not_active Expired - Lifetime
- 2002-02-20 CN CNA200510128891XA patent/CN1789476A/zh active Pending
- 2002-02-20 CA CA002438819A patent/CA2438819A1/en not_active Abandoned
- 2002-02-20 HU HU0303269A patent/HUP0303269A3/hu unknown
- 2002-02-20 NZ NZ527628A patent/NZ527628A/en unknown
- 2002-02-20 IL IL15727902A patent/IL157279A0/xx unknown
- 2002-02-20 CZ CZ20032246A patent/CZ20032246A3/cs unknown
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2003
- 2003-08-11 NO NO20033547A patent/NO20033547L/no not_active Application Discontinuation
- 2003-08-18 ZA ZA200306399A patent/ZA200306399B/en unknown
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Also Published As
Publication number | Publication date |
---|---|
CN1789476A (zh) | 2006-06-21 |
ES2272707T3 (es) | 2007-05-01 |
CA2438819A1 (en) | 2002-09-12 |
ZA200306399B (en) | 2004-08-18 |
JP2004526863A (ja) | 2004-09-02 |
CN1238547C (zh) | 2006-01-25 |
HUP0303269A3 (en) | 2004-05-28 |
HUP0303269A2 (hu) | 2004-01-28 |
NO20033547D0 (no) | 2003-08-11 |
IL157279A0 (en) | 2004-02-19 |
WO2002070765A1 (en) | 2002-09-12 |
US20020112789A1 (en) | 2002-08-22 |
NO20033547L (no) | 2003-09-26 |
KR20030090645A (ko) | 2003-11-28 |
NZ527628A (en) | 2004-07-30 |
EP1366203A1 (en) | 2003-12-03 |
JP4327460B2 (ja) | 2009-09-09 |
EP1366203B1 (en) | 2006-09-13 |
HK1066833A1 (en) | 2005-04-01 |
CN1535322A (zh) | 2004-10-06 |
PT1366203E (pt) | 2006-12-29 |
AU2002257005B2 (en) | 2007-05-31 |
MXPA03007490A (es) | 2004-09-06 |
ATE339532T1 (de) | 2006-10-15 |
DE60214683T2 (de) | 2007-09-13 |
DE60214683D1 (de) | 2006-10-26 |
EP1366203A4 (en) | 2004-07-28 |
CZ20032246A3 (cs) | 2004-03-17 |
BR0207384A (pt) | 2004-02-10 |
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