KR100966130B1 - 용액의 도포 장치 및 도포 방법 - Google Patents

용액의 도포 장치 및 도포 방법 Download PDF

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Publication number
KR100966130B1
KR100966130B1 KR1020040005339A KR20040005339A KR100966130B1 KR 100966130 B1 KR100966130 B1 KR 100966130B1 KR 1020040005339 A KR1020040005339 A KR 1020040005339A KR 20040005339 A KR20040005339 A KR 20040005339A KR 100966130 B1 KR100966130 B1 KR 100966130B1
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KR
South Korea
Prior art keywords
solution
nozzle
substrate
pattern
head
Prior art date
Application number
KR1020040005339A
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English (en)
Korean (ko)
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KR20040070022A (ko
Inventor
마쓰시마다이스케
도요시마노리오
가지와라신지
Original Assignee
시바우라 메카트로닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 시바우라 메카트로닉스 가부시키가이샤 filed Critical 시바우라 메카트로닉스 가부시키가이샤
Publication of KR20040070022A publication Critical patent/KR20040070022A/ko
Application granted granted Critical
Publication of KR100966130B1 publication Critical patent/KR100966130B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Coating Apparatus (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ink Jet (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
KR1020040005339A 2003-01-29 2004-01-28 용액의 도포 장치 및 도포 방법 KR100966130B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2003-00020763 2003-01-29
JP2003020763A JP4224314B2 (ja) 2003-01-29 2003-01-29 溶液の塗布装置及び塗布方法

Publications (2)

Publication Number Publication Date
KR20040070022A KR20040070022A (ko) 2004-08-06
KR100966130B1 true KR100966130B1 (ko) 2010-06-25

Family

ID=32950303

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040005339A KR100966130B1 (ko) 2003-01-29 2004-01-28 용액의 도포 장치 및 도포 방법

Country Status (4)

Country Link
JP (1) JP4224314B2 (ja)
KR (1) KR100966130B1 (ja)
CN (1) CN100398219C (ja)
TW (1) TWI367374B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210119302A (ko) * 2020-03-24 2021-10-05 가부시키가이샤 스크린 홀딩스 패턴 형성 장치, 패턴 형성 방법, 및 토출 데이터 생성 방법

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4437805B2 (ja) * 2006-09-13 2010-03-24 シャープ株式会社 インク吐出装置及びインク吐出制御方法
JP2010210870A (ja) * 2009-03-10 2010-09-24 Stanley Electric Co Ltd 機能性薄膜、液晶表示装置および機能性薄膜成膜方法
CN104511388B (zh) * 2014-12-29 2017-08-04 深圳市华星光电技术有限公司 光阻涂布设备及光阻涂布方法
JP6692182B2 (ja) * 2016-02-29 2020-05-13 日本マタイ株式会社 機能性フィルムの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH098436A (ja) * 1995-06-14 1997-01-10 Canon Inc インクジェット方式によるプリント回路板の作成方法及びその装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5198471A (en) * 1989-09-11 1993-03-30 Rensselaer Polytechnic Institute Polymer recycling by selective dissolution
JP3865087B2 (ja) * 1996-10-29 2007-01-10 大日本塗料株式会社 基板の塗装方法
JP2000251678A (ja) * 1999-02-25 2000-09-14 Canon Inc 電子源及び画像形成装置の製造方法及び製造装置
JP4797246B2 (ja) * 2001-01-05 2011-10-19 大日本印刷株式会社 カラーフィルタ製造用の塗布装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH098436A (ja) * 1995-06-14 1997-01-10 Canon Inc インクジェット方式によるプリント回路板の作成方法及びその装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210119302A (ko) * 2020-03-24 2021-10-05 가부시키가이샤 스크린 홀딩스 패턴 형성 장치, 패턴 형성 방법, 및 토출 데이터 생성 방법
KR102476630B1 (ko) * 2020-03-24 2022-12-09 가부시키가이샤 스크린 홀딩스 패턴 형성 장치, 패턴 형성 방법, 및 토출 데이터 생성 방법

Also Published As

Publication number Publication date
JP2004230266A (ja) 2004-08-19
JP4224314B2 (ja) 2009-02-12
TWI367374B (en) 2012-07-01
KR20040070022A (ko) 2004-08-06
TW200416460A (en) 2004-09-01
CN1536414A (zh) 2004-10-13
CN100398219C (zh) 2008-07-02

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