TWI367374B - Apparatus for applying solution and method for applying solution - Google Patents

Apparatus for applying solution and method for applying solution

Info

Publication number
TWI367374B
TWI367374B TW093101056A TW93101056A TWI367374B TW I367374 B TWI367374 B TW I367374B TW 093101056 A TW093101056 A TW 093101056A TW 93101056 A TW93101056 A TW 93101056A TW I367374 B TWI367374 B TW I367374B
Authority
TW
Taiwan
Prior art keywords
applying solution
applying
solution
Prior art date
Application number
TW093101056A
Other languages
English (en)
Chinese (zh)
Other versions
TW200416460A (en
Inventor
Daisuke Matsushima
Norio Toyoshima
Shinji Kajiwara
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200416460A publication Critical patent/TW200416460A/zh
Application granted granted Critical
Publication of TWI367374B publication Critical patent/TWI367374B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Coating Apparatus (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ink Jet (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW093101056A 2003-01-29 2004-01-15 Apparatus for applying solution and method for applying solution TWI367374B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003020763A JP4224314B2 (ja) 2003-01-29 2003-01-29 溶液の塗布装置及び塗布方法

Publications (2)

Publication Number Publication Date
TW200416460A TW200416460A (en) 2004-09-01
TWI367374B true TWI367374B (en) 2012-07-01

Family

ID=32950303

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093101056A TWI367374B (en) 2003-01-29 2004-01-15 Apparatus for applying solution and method for applying solution

Country Status (4)

Country Link
JP (1) JP4224314B2 (ja)
KR (1) KR100966130B1 (ja)
CN (1) CN100398219C (ja)
TW (1) TWI367374B (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4437805B2 (ja) * 2006-09-13 2010-03-24 シャープ株式会社 インク吐出装置及びインク吐出制御方法
JP2010210870A (ja) * 2009-03-10 2010-09-24 Stanley Electric Co Ltd 機能性薄膜、液晶表示装置および機能性薄膜成膜方法
CN104511388B (zh) * 2014-12-29 2017-08-04 深圳市华星光电技术有限公司 光阻涂布设备及光阻涂布方法
JP6692182B2 (ja) * 2016-02-29 2020-05-13 日本マタイ株式会社 機能性フィルムの製造方法
JP2021153085A (ja) * 2020-03-24 2021-09-30 株式会社Ｓｃｒｅｅｎホールディングス パターン形成装置、パターン形成方法、および吐出データ生成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5198471A (en) * 1989-09-11 1993-03-30 Rensselaer Polytechnic Institute Polymer recycling by selective dissolution
JP3744967B2 (ja) * 1995-06-14 2006-02-15 キヤノン株式会社 インクジェット方式によるプリント回路板の作成方法及びその装置
JP3865087B2 (ja) * 1996-10-29 2007-01-10 大日本塗料株式会社 基板の塗装方法
JP2000251678A (ja) * 1999-02-25 2000-09-14 Canon Inc 電子源及び画像形成装置の製造方法及び製造装置
JP4797246B2 (ja) * 2001-01-05 2011-10-19 大日本印刷株式会社 カラーフィルタ製造用の塗布装置

Also Published As

Publication number Publication date
KR100966130B1 (ko) 2010-06-25
JP2004230266A (ja) 2004-08-19
JP4224314B2 (ja) 2009-02-12
KR20040070022A (ko) 2004-08-06
TW200416460A (en) 2004-09-01
CN1536414A (zh) 2004-10-13
CN100398219C (zh) 2008-07-02

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees