KR100916986B1 - 알카리 현상액의 농도측정방법 및 현상액 조제방법 - Google Patents

알카리 현상액의 농도측정방법 및 현상액 조제방법 Download PDF

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Publication number
KR100916986B1
KR100916986B1 KR20030018961A KR20030018961A KR100916986B1 KR 100916986 B1 KR100916986 B1 KR 100916986B1 KR 20030018961 A KR20030018961 A KR 20030018961A KR 20030018961 A KR20030018961 A KR 20030018961A KR 100916986 B1 KR100916986 B1 KR 100916986B1
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concentration
developer
measuring
developing
alkali
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Korean (ko)
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KR20030078694A (ko
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야마구치노리오
이가라시미치오
이노우에타케시
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파나소닉 칸쿄 엔지니어링 가부시키가이샤
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/16—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using titration
    • G01N31/162—Determining the equivalent point by means of a discontinuity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/16—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using titration
    • G01N31/162—Determining the equivalent point by means of a discontinuity
    • G01N31/164—Determining the equivalent point by means of a discontinuity by electrical or electrochemical means

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  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR20030018961A 2002-03-29 2003-03-26 알카리 현상액의 농도측정방법 및 현상액 조제방법 Expired - Fee Related KR100916986B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002097479A JP4097973B2 (ja) 2002-03-29 2002-03-29 アルカリ現像液の濃度測定方法
JPJP-P-2002-00097479 2002-03-29

Publications (2)

Publication Number Publication Date
KR20030078694A KR20030078694A (ko) 2003-10-08
KR100916986B1 true KR100916986B1 (ko) 2009-09-14

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KR20030018961A Expired - Fee Related KR100916986B1 (ko) 2002-03-29 2003-03-26 알카리 현상액의 농도측정방법 및 현상액 조제방법

Country Status (3)

Country Link
JP (1) JP4097973B2 (enExample)
KR (1) KR100916986B1 (enExample)
TW (1) TW200305794A (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4097973B2 (ja) * 2002-03-29 2008-06-11 松下環境空調エンジニアリング株式会社 アルカリ現像液の濃度測定方法
JP4366490B2 (ja) * 2003-08-22 2009-11-18 長瀬産業株式会社 現像液供給方法及び装置
JP2006189646A (ja) * 2005-01-06 2006-07-20 Nagase & Co Ltd レジスト現像液中の炭酸塩の除去方法、除去装置、及びレジスト現像液の濃度管理方法
JP5000246B2 (ja) * 2005-09-28 2012-08-15 株式会社半導体エネルギー研究所 排液処理方法及び処理装置
JP6721157B2 (ja) * 2015-07-22 2020-07-08 株式会社平間理化研究所 現像液の成分濃度測定方法及び装置、並びに、現像液管理方法及び装置
JP6551784B2 (ja) * 2015-08-31 2019-07-31 パナソニックＩｐマネジメント株式会社 レジスト剥離液中の炭酸濃度管理方法および炭酸濃度管理装置
JP6551787B2 (ja) * 2015-09-28 2019-07-31 パナソニックＩｐマネジメント株式会社 レジスト剥離液中の炭酸濃度管理方法および炭酸濃度管理装置
CN106596840B (zh) * 2016-12-15 2019-01-22 深圳市华星光电技术有限公司 显影液碱液浓度测量方法及调节方法
JP2018120893A (ja) * 2017-01-23 2018-08-02 株式会社平間理化研究所 現像液の成分濃度測定装置、及び現像液管理装置
JP2018120900A (ja) * 2017-01-23 2018-08-02 株式会社平間理化研究所 現像液管理装置
JP2018120895A (ja) * 2017-01-23 2018-08-02 株式会社平間理化研究所 現像装置
JP2018120901A (ja) * 2017-01-23 2018-08-02 株式会社平間理化研究所 現像装置
JP6624762B2 (ja) * 2019-01-30 2019-12-25 株式会社平間理化研究所 現像液の管理方法及び装置
CN120594741B (zh) * 2025-08-06 2025-10-10 信联电子材料科技股份有限公司 一种tmah显影液碳酸检测方法、装置及系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05142781A (ja) * 1991-11-19 1993-06-11 Konica Corp 感光材料の現像廃液の処理方法及び該処理方法に用いる自動現像機
JP2001154373A (ja) * 1999-11-26 2001-06-08 Fuji Photo Film Co Ltd 感光性平版印刷版の処理方法
JP4097973B2 (ja) * 2002-03-29 2008-06-11 松下環境空調エンジニアリング株式会社 アルカリ現像液の濃度測定方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05142781A (ja) * 1991-11-19 1993-06-11 Konica Corp 感光材料の現像廃液の処理方法及び該処理方法に用いる自動現像機
JP2001154373A (ja) * 1999-11-26 2001-06-08 Fuji Photo Film Co Ltd 感光性平版印刷版の処理方法
JP4097973B2 (ja) * 2002-03-29 2008-06-11 松下環境空調エンジニアリング株式会社 アルカリ現像液の濃度測定方法

Also Published As

Publication number Publication date
TW200305794A (en) 2003-11-01
JP2003295470A (ja) 2003-10-15
TWI313794B (enExample) 2009-08-21
KR20030078694A (ko) 2003-10-08
JP4097973B2 (ja) 2008-06-11

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