JP4097973B2 - アルカリ現像液の濃度測定方法 - Google Patents
アルカリ現像液の濃度測定方法 Download PDFInfo
- Publication number
- JP4097973B2 JP4097973B2 JP2002097479A JP2002097479A JP4097973B2 JP 4097973 B2 JP4097973 B2 JP 4097973B2 JP 2002097479 A JP2002097479 A JP 2002097479A JP 2002097479 A JP2002097479 A JP 2002097479A JP 4097973 B2 JP4097973 B2 JP 4097973B2
- Authority
- JP
- Japan
- Prior art keywords
- concentration
- developer
- alkali
- component
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000003513 alkali Substances 0.000 title claims description 118
- 238000000691 measurement method Methods 0.000 title description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 33
- 239000001569 carbon dioxide Substances 0.000 claims description 19
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 19
- 238000004448 titration Methods 0.000 claims description 18
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 17
- 150000005323 carbonate salts Chemical class 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000006386 neutralization reaction Methods 0.000 claims description 11
- 150000003839 salts Chemical class 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000004973 liquid crystal related substance Substances 0.000 claims description 9
- 238000003918 potentiometric titration Methods 0.000 claims description 6
- 229960004424 carbon dioxide Drugs 0.000 description 19
- 238000011161 development Methods 0.000 description 17
- 230000018109 developmental process Effects 0.000 description 17
- 239000000243 solution Substances 0.000 description 17
- 238000005259 measurement Methods 0.000 description 16
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 13
- 230000000694 effects Effects 0.000 description 13
- -1 hydroxide ions Chemical class 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 8
- 150000005622 tetraalkylammonium hydroxides Chemical class 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- 239000002699 waste material Substances 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- 238000010790 dilution Methods 0.000 description 5
- 239000012895 dilution Substances 0.000 description 5
- 230000008929 regeneration Effects 0.000 description 5
- 238000011069 regeneration method Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- 238000007726 management method Methods 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 238000011002 quantification Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000012086 standard solution Substances 0.000 description 2
- 239000012085 test solution Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 2
- KIZQNNOULOCVDM-UHFFFAOYSA-M 2-hydroxyethyl(trimethyl)azanium;hydroxide Chemical compound [OH-].C[N+](C)(C)CCO KIZQNNOULOCVDM-UHFFFAOYSA-M 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- WDIHJSXYQDMJHN-UHFFFAOYSA-L barium chloride Chemical compound [Cl-].[Cl-].[Ba+2] WDIHJSXYQDMJHN-UHFFFAOYSA-L 0.000 description 1
- 229910001626 barium chloride Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- RKTGAWJWCNLSFX-UHFFFAOYSA-M bis(2-hydroxyethyl)-dimethylazanium;hydroxide Chemical compound [OH-].OCC[N+](C)(C)CCO RKTGAWJWCNLSFX-UHFFFAOYSA-M 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- OEYIOHPDSNJKLS-UHFFFAOYSA-N choline Chemical compound C[N+](C)(C)CCO OEYIOHPDSNJKLS-UHFFFAOYSA-N 0.000 description 1
- 229960001231 choline Drugs 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- JQDCIBMGKCMHQV-UHFFFAOYSA-M diethyl(dimethyl)azanium;hydroxide Chemical compound [OH-].CC[N+](C)(C)CC JQDCIBMGKCMHQV-UHFFFAOYSA-M 0.000 description 1
- MYRLVAHFNOAIAI-UHFFFAOYSA-M diethyl-bis(2-hydroxyethyl)azanium;hydroxide Chemical compound [OH-].OCC[N+](CC)(CC)CCO MYRLVAHFNOAIAI-UHFFFAOYSA-M 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- KVFVBPYVNUCWJX-UHFFFAOYSA-M ethyl(trimethyl)azanium;hydroxide Chemical compound [OH-].CC[N+](C)(C)C KVFVBPYVNUCWJX-UHFFFAOYSA-M 0.000 description 1
- KGVNNTSVYGJCRV-UHFFFAOYSA-M ethyl-tris(2-hydroxyethyl)azanium;hydroxide Chemical compound [OH-].OCC[N+](CC)(CCO)CCO KGVNNTSVYGJCRV-UHFFFAOYSA-M 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052806 inorganic carbonate Inorganic materials 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 239000012488 sample solution Substances 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- VHLDQAOFSQCOFS-UHFFFAOYSA-M tetrakis(2-hydroxyethyl)azanium;hydroxide Chemical compound [OH-].OCC[N+](CCO)(CCO)CCO VHLDQAOFSQCOFS-UHFFFAOYSA-M 0.000 description 1
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
- GRNRCQKEBXQLAA-UHFFFAOYSA-M triethyl(2-hydroxyethyl)azanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CCO GRNRCQKEBXQLAA-UHFFFAOYSA-M 0.000 description 1
- JAJRRCSBKZOLPA-UHFFFAOYSA-M triethyl(methyl)azanium;hydroxide Chemical compound [OH-].CC[N+](C)(CC)CC JAJRRCSBKZOLPA-UHFFFAOYSA-M 0.000 description 1
- FVJLCPJDDAGIJE-UHFFFAOYSA-N tris(2-hydroxyethyl)-methylazanium Chemical compound OCC[N+](C)(CCO)CCO FVJLCPJDDAGIJE-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/16—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using titration
- G01N31/162—Determining the equivalent point by means of a discontinuity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/16—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using titration
- G01N31/162—Determining the equivalent point by means of a discontinuity
- G01N31/164—Determining the equivalent point by means of a discontinuity by electrical or electrochemical means
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002097479A JP4097973B2 (ja) | 2002-03-29 | 2002-03-29 | アルカリ現像液の濃度測定方法 |
| KR20030018961A KR100916986B1 (ko) | 2002-03-29 | 2003-03-26 | 알카리 현상액의 농도측정방법 및 현상액 조제방법 |
| TW92106924A TW200305794A (en) | 2002-03-29 | 2003-03-27 | Method for determining the concentration of alkaline developer and method for preparing developer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002097479A JP4097973B2 (ja) | 2002-03-29 | 2002-03-29 | アルカリ現像液の濃度測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003295470A JP2003295470A (ja) | 2003-10-15 |
| JP4097973B2 true JP4097973B2 (ja) | 2008-06-11 |
Family
ID=29239963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002097479A Expired - Fee Related JP4097973B2 (ja) | 2002-03-29 | 2002-03-29 | アルカリ現像液の濃度測定方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4097973B2 (enExample) |
| KR (1) | KR100916986B1 (enExample) |
| TW (1) | TW200305794A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100916986B1 (ko) * | 2002-03-29 | 2009-09-14 | 파나소닉 칸쿄 엔지니어링 가부시키가이샤 | 알카리 현상액의 농도측정방법 및 현상액 조제방법 |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4366490B2 (ja) * | 2003-08-22 | 2009-11-18 | 長瀬産業株式会社 | 現像液供給方法及び装置 |
| JP2006189646A (ja) * | 2005-01-06 | 2006-07-20 | Nagase & Co Ltd | レジスト現像液中の炭酸塩の除去方法、除去装置、及びレジスト現像液の濃度管理方法 |
| JP5000246B2 (ja) * | 2005-09-28 | 2012-08-15 | 株式会社半導体エネルギー研究所 | 排液処理方法及び処理装置 |
| JP6721157B2 (ja) * | 2015-07-22 | 2020-07-08 | 株式会社平間理化研究所 | 現像液の成分濃度測定方法及び装置、並びに、現像液管理方法及び装置 |
| JP6551784B2 (ja) * | 2015-08-31 | 2019-07-31 | パナソニックＩｐマネジメント株式会社 | レジスト剥離液中の炭酸濃度管理方法および炭酸濃度管理装置 |
| JP6551787B2 (ja) * | 2015-09-28 | 2019-07-31 | パナソニックＩｐマネジメント株式会社 | レジスト剥離液中の炭酸濃度管理方法および炭酸濃度管理装置 |
| CN106596840B (zh) * | 2016-12-15 | 2019-01-22 | 深圳市华星光电技术有限公司 | 显影液碱液浓度测量方法及调节方法 |
| JP2018120893A (ja) * | 2017-01-23 | 2018-08-02 | 株式会社平間理化研究所 | 現像液の成分濃度測定装置、及び現像液管理装置 |
| JP2018120895A (ja) * | 2017-01-23 | 2018-08-02 | 株式会社平間理化研究所 | 現像装置 |
| JP2018120901A (ja) * | 2017-01-23 | 2018-08-02 | 株式会社平間理化研究所 | 現像装置 |
| JP2018120900A (ja) * | 2017-01-23 | 2018-08-02 | 株式会社平間理化研究所 | 現像液管理装置 |
| JP6624762B2 (ja) * | 2019-01-30 | 2019-12-25 | 株式会社平間理化研究所 | 現像液の管理方法及び装置 |
| CN120594741B (zh) * | 2025-08-06 | 2025-10-10 | 信联电子材料科技股份有限公司 | 一种tmah显影液碳酸检测方法、装置及系统 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05142781A (ja) * | 1991-11-19 | 1993-06-11 | Konica Corp | 感光材料の現像廃液の処理方法及び該処理方法に用いる自動現像機 |
| JP2001154373A (ja) * | 1999-11-26 | 2001-06-08 | Fuji Photo Film Co Ltd | 感光性平版印刷版の処理方法 |
| JP4097973B2 (ja) * | 2002-03-29 | 2008-06-11 | 松下環境空調エンジニアリング株式会社 | アルカリ現像液の濃度測定方法 |
-
2002
- 2002-03-29 JP JP2002097479A patent/JP4097973B2/ja not_active Expired - Fee Related
-
2003
- 2003-03-26 KR KR20030018961A patent/KR100916986B1/ko not_active Expired - Fee Related
- 2003-03-27 TW TW92106924A patent/TW200305794A/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100916986B1 (ko) * | 2002-03-29 | 2009-09-14 | 파나소닉 칸쿄 엔지니어링 가부시키가이샤 | 알카리 현상액의 농도측정방법 및 현상액 조제방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI313794B (enExample) | 2009-08-21 |
| KR20030078694A (ko) | 2003-10-08 |
| KR100916986B1 (ko) | 2009-09-14 |
| JP2003295470A (ja) | 2003-10-15 |
| TW200305794A (en) | 2003-11-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4097973B2 (ja) | アルカリ現像液の濃度測定方法 | |
| KR101446619B1 (ko) | 현상액의 농도 조절 방법과 제조 장치 및 현상액 | |
| JP2011128455A (ja) | 炭酸系塩類濃度測定装置、アルカリ現像液管理システム、及び、炭酸系塩類濃度測定方法 | |
| JP3869730B2 (ja) | 処理液調製供給方法及び装置 | |
| JPH048788B2 (enExample) | ||
| JP4366490B2 (ja) | 現像液供給方法及び装置 | |
| JPH0612435B2 (ja) | 放射線感光部材の処理法およびその処理装置 | |
| JP4026376B2 (ja) | 現像液の供給装置 | |
| CN101452224B (zh) | 氢氧化四甲铵显影液的回收系统及其方法 | |
| JP3917601B2 (ja) | 薬液の認定方法および半導体装置の製造方法 | |
| JP4281439B2 (ja) | 現像液の供給装置 | |
| CN108803258B (zh) | 显影控制系统及显影控制方法 | |
| TWI697743B (zh) | 光阻劑成分濃度測定裝置及濃度測定方法 | |
| JP2831882B2 (ja) | エッチングパターンの作成方法 | |
| US6800409B2 (en) | System and method for recycling developer solution containing tetra-methyl-ammonia hydroxide (TMAH) | |
| JP4299696B2 (ja) | 過硫酸塩類濃度の測定方法 | |
| CN1996152A (zh) | 实时监控有效显影液浓度的方法 | |
| JP2009191312A (ja) | エッチング制御装置 | |
| Nakano et al. | Development of ArF immersion exposure tool | |
| KR20010017300A (ko) | 분광법을 이용한 수중 용존 산소농도 측정방법 | |
| JPH02240654A (ja) | 着色フォトレジストの現像装置 | |
| KR100560380B1 (ko) | 테트라-메틸-암모니아-수산화물을 함유하는 감광 저항현상 용액을 재생하기 위한 시스템 및 방법 | |
| JP2018120901A (ja) | 現像装置 | |
| JPH10239241A (ja) | エッチング量測定装置 | |
| JPH0394142A (ja) | 無電解銅メッキ液の銅濃度測定用装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050204 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071106 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071213 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080115 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080121 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080212 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080312 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 4097973 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110321 Year of fee payment: 3 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110321 Year of fee payment: 3 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110321 Year of fee payment: 3 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120321 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130321 Year of fee payment: 5 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130321 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140321 Year of fee payment: 6 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |