KR100876257B1 - 광학적 측정 방법 및 그 장치 - Google Patents
광학적 측정 방법 및 그 장치 Download PDFInfo
- Publication number
- KR100876257B1 KR100876257B1 KR1020057000344A KR20057000344A KR100876257B1 KR 100876257 B1 KR100876257 B1 KR 100876257B1 KR 1020057000344 A KR1020057000344 A KR 1020057000344A KR 20057000344 A KR20057000344 A KR 20057000344A KR 100876257 B1 KR100876257 B1 KR 100876257B1
- Authority
- KR
- South Korea
- Prior art keywords
- light
- measurement object
- transparent
- back surface
- optical system
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N2021/8908—Strip illuminator, e.g. light tube
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002198074A JP4104924B2 (ja) | 2002-07-08 | 2002-07-08 | 光学的測定方法およびその装置 |
JPJP-P-2002-00198074 | 2002-07-08 | ||
PCT/JP2003/008675 WO2004005902A1 (ja) | 2002-07-08 | 2003-07-08 | 光学的測定方法およびその装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050035243A KR20050035243A (ko) | 2005-04-15 |
KR100876257B1 true KR100876257B1 (ko) | 2008-12-26 |
Family
ID=30112417
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057000344A KR100876257B1 (ko) | 2002-07-08 | 2003-07-08 | 광학적 측정 방법 및 그 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4104924B2 (ja) |
KR (1) | KR100876257B1 (ja) |
CN (1) | CN100570342C (ja) |
TW (1) | TW200409912A (ja) |
WO (1) | WO2004005902A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7200190B2 (en) * | 2003-06-30 | 2007-04-03 | Motorola, Inc. | Unbiased signal to interference ratio in wireless communications devices and methods therefor |
JP4417205B2 (ja) * | 2004-08-27 | 2010-02-17 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP5082552B2 (ja) * | 2007-04-05 | 2012-11-28 | コニカミノルタホールディングス株式会社 | 光学的測定装置及び光学的測定方法 |
KR101209857B1 (ko) * | 2009-02-20 | 2012-12-10 | 삼성코닝정밀소재 주식회사 | 유리 표면 이물 검사 장치 및 방법 |
US7929129B2 (en) | 2009-05-22 | 2011-04-19 | Corning Incorporated | Inspection systems for glass sheets |
TWI485392B (zh) * | 2010-02-08 | 2015-05-21 | Ygk Corp | Foreign body inspection device and inspection method |
KR101685703B1 (ko) * | 2010-02-25 | 2016-12-12 | 가부시끼가이샤 야마나시 기쥬쯔 고오보오 | 이물질 검사 장치 및 검사 방법 |
DE102011103003A1 (de) * | 2011-05-24 | 2012-11-29 | Lufthansa Technik Ag | Verfahren und Vorrichtung zur Rissprüfung eines Flugzeug- oder Gasturbinen-Bauteils |
JP2013140061A (ja) * | 2012-01-02 | 2013-07-18 | Yamanashi Gijutsu Kobo:Kk | 透明平板基板の表裏異物の検出方法及びその方法を用いた異物検査装置 |
KR20150056713A (ko) | 2013-11-15 | 2015-05-27 | 삼성전자주식회사 | 영상표시장치의 비파괴 검사 시스템 및 방법과 이를 위한 비파괴 검사 장치 |
CN107076544B (zh) * | 2014-06-17 | 2020-09-15 | 贺利氏石英北美有限责任公司 | 用于测量透明筒状制品的设备及方法 |
CN110073203B (zh) * | 2016-11-02 | 2022-07-08 | 康宁股份有限公司 | 检查透明基材上的缺陷的方法和设备 |
JP2018128326A (ja) * | 2017-02-07 | 2018-08-16 | 大塚電子株式会社 | 光学スペクトル測定装置および光学スペクトル測定方法 |
CN107764841B (zh) * | 2017-11-17 | 2024-03-01 | 仝人智能科技(江苏)有限公司 | 一种检测并区分透明玻璃盖板上下表面缺陷的装置及方法 |
KR102580487B1 (ko) * | 2018-06-18 | 2023-09-21 | 주식회사 케이씨텍 | 패드 모니터링 장치 및 이를 포함하는 패드 모니터링 시스템, 패드 모니터링 방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09258197A (ja) * | 1996-03-18 | 1997-10-03 | Hitachi Electron Eng Co Ltd | ガラス基板の表裏欠陥識別方法 |
JPH1048144A (ja) * | 1996-07-31 | 1998-02-20 | Dainippon Printing Co Ltd | ガラス基板検査装置 |
JP2000074849A (ja) * | 1998-08-31 | 2000-03-14 | Toshiba Corp | 異物検出方法およびその装置 |
JP2001208702A (ja) * | 2000-01-31 | 2001-08-03 | Nippon Sheet Glass Co Ltd | 欠点検査方法及び欠点検査装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52130381A (en) * | 1976-04-26 | 1977-11-01 | Hitachi Ltd | Device for detecting faulty part on plate surface |
JPH06281418A (ja) * | 1993-03-24 | 1994-10-07 | Asahi Glass Co Ltd | 凹凸を有する板状透明体の光学的厚さ測定方法 |
JP4599507B2 (ja) * | 2000-08-23 | 2010-12-15 | 旭硝子株式会社 | ガラス板の形状測定方法及び形状測定装置 |
-
2002
- 2002-07-08 JP JP2002198074A patent/JP4104924B2/ja not_active Expired - Lifetime
-
2003
- 2003-07-08 TW TW092118645A patent/TW200409912A/zh not_active IP Right Cessation
- 2003-07-08 CN CNB038161745A patent/CN100570342C/zh not_active Expired - Lifetime
- 2003-07-08 KR KR1020057000344A patent/KR100876257B1/ko active IP Right Grant
- 2003-07-08 WO PCT/JP2003/008675 patent/WO2004005902A1/ja active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09258197A (ja) * | 1996-03-18 | 1997-10-03 | Hitachi Electron Eng Co Ltd | ガラス基板の表裏欠陥識別方法 |
JPH1048144A (ja) * | 1996-07-31 | 1998-02-20 | Dainippon Printing Co Ltd | ガラス基板検査装置 |
JP2000074849A (ja) * | 1998-08-31 | 2000-03-14 | Toshiba Corp | 異物検出方法およびその装置 |
JP2001208702A (ja) * | 2000-01-31 | 2001-08-03 | Nippon Sheet Glass Co Ltd | 欠点検査方法及び欠点検査装置 |
Also Published As
Publication number | Publication date |
---|---|
CN1666100A (zh) | 2005-09-07 |
WO2004005902A1 (ja) | 2004-01-15 |
JP2004037400A (ja) | 2004-02-05 |
CN100570342C (zh) | 2009-12-16 |
KR20050035243A (ko) | 2005-04-15 |
JP4104924B2 (ja) | 2008-06-18 |
TW200409912A (en) | 2004-06-16 |
TWI320099B (ja) | 2010-02-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100876257B1 (ko) | 광학적 측정 방법 및 그 장치 | |
JPH03267745A (ja) | 表面性状検出方法 | |
WO2006108137A2 (en) | Glass inspection systems and methods for using same | |
US20210341353A1 (en) | System and method for inspecting optical power and thickness of ophthalmic lenses immersed in a solution | |
US20110310244A1 (en) | System and method for detecting a defect of a substrate | |
US20080062422A1 (en) | Optical Inspection Of Flat Media Using Direct Image Technology | |
JP3269288B2 (ja) | 光学的検査方法および光学的検査装置 | |
KR101482580B1 (ko) | 유리병 검사 장치 및 텔레센트릭 렌즈 유닛 | |
JPH10160683A (ja) | 異物検査方法とその装置 | |
KR100974111B1 (ko) | 표면들을 광학적으로 조사하기 위한 광학 센서 및 상기조사를 위한 방법 | |
JP2010271133A (ja) | 光走査式平面検査装置 | |
KR102279169B1 (ko) | 검출 장치 및 검출 방법 | |
JP2005274173A (ja) | ウエハー基板、液晶ディスプレイ用透明ガラス等の被検査物の表面上の異物・表面検査方法およびその装置 | |
JPH06281593A (ja) | 表面検査方法及びその装置 | |
KR20100026619A (ko) | 디스플레이용 평판 유리 검사 장치 및 그 방법 | |
TWI485392B (zh) | Foreign body inspection device and inspection method | |
JP2006106015A (ja) | 透光性シート状物の欠陥検査装置 | |
JP2002303579A (ja) | 物品の表面状態の検査方法及びその装置 | |
KR101103347B1 (ko) | 평판 유리 표면 이물질 검사 장치 | |
JPH08136876A (ja) | 基板検査装置 | |
KR20110097182A (ko) | 이물질 검사 장치 및 검사 방법 | |
JPH0776751B2 (ja) | メタリック製品の表面欠点検出方式 | |
JP2007024559A (ja) | レンズユニット、形状検出装置、形状検出方法およびシートの製造方法 | |
JPH09218162A (ja) | 表面欠陥検査装置 | |
JPH03286383A (ja) | パターン比較装置及び表面欠陥検査装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20121106 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20131008 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20141212 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20151211 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20161209 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20171208 Year of fee payment: 10 |