KR100858921B1 - 반도체 집적 회로 시험 장치 및 방법 - Google Patents

반도체 집적 회로 시험 장치 및 방법 Download PDF

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Publication number
KR100858921B1
KR100858921B1 KR1020070028160A KR20070028160A KR100858921B1 KR 100858921 B1 KR100858921 B1 KR 100858921B1 KR 1020070028160 A KR1020070028160 A KR 1020070028160A KR 20070028160 A KR20070028160 A KR 20070028160A KR 100858921 B1 KR100858921 B1 KR 100858921B1
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KR
South Korea
Prior art keywords
fail
under test
device under
output
address
Prior art date
Application number
KR1020070028160A
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English (en)
Korean (ko)
Other versions
KR20070115593A (ko
Inventor
아키라 시미즈
Original Assignee
요코가와 덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 요코가와 덴키 가부시키가이샤 filed Critical 요코가와 덴키 가부시키가이샤
Publication of KR20070115593A publication Critical patent/KR20070115593A/ko
Application granted granted Critical
Publication of KR100858921B1 publication Critical patent/KR100858921B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
    • G11C2029/5602—Interface to device under test
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
    • G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)
  • For Increasing The Reliability Of Semiconductor Memories (AREA)
KR1020070028160A 2006-05-30 2007-03-22 반도체 집적 회로 시험 장치 및 방법 KR100858921B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00149509 2006-05-30
JP2006149509A JP2007322141A (ja) 2006-05-30 2006-05-30 半導体集積回路試験装置及び方法

Publications (2)

Publication Number Publication Date
KR20070115593A KR20070115593A (ko) 2007-12-06
KR100858921B1 true KR100858921B1 (ko) 2008-09-17

Family

ID=38855109

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070028160A KR100858921B1 (ko) 2006-05-30 2007-03-22 반도체 집적 회로 시험 장치 및 방법

Country Status (2)

Country Link
JP (1) JP2007322141A (ja)
KR (1) KR100858921B1 (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0148621B1 (ko) * 1993-09-03 1998-12-01 오오우라 히로시 반도체 메모리 시험장치
KR20030032815A (ko) * 2001-10-16 2003-04-26 미쓰비시덴키 가부시키가이샤 반도체 시험장치
KR20030036028A (ko) * 2001-10-31 2003-05-09 휴렛-팩커드 컴퍼니(델라웨어주법인) 메모리 평면 및 메모리 장치
KR20040023486A (ko) * 2002-09-11 2004-03-18 가부시키가이샤 히타치세이사쿠쇼 메모리 시스템
JP2005276317A (ja) * 2004-03-24 2005-10-06 Advantest Corp 試験装置及び試験方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0148621B1 (ko) * 1993-09-03 1998-12-01 오오우라 히로시 반도체 메모리 시험장치
KR20030032815A (ko) * 2001-10-16 2003-04-26 미쓰비시덴키 가부시키가이샤 반도체 시험장치
KR20030036028A (ko) * 2001-10-31 2003-05-09 휴렛-팩커드 컴퍼니(델라웨어주법인) 메모리 평면 및 메모리 장치
KR20040023486A (ko) * 2002-09-11 2004-03-18 가부시키가이샤 히타치세이사쿠쇼 메모리 시스템
JP2005276317A (ja) * 2004-03-24 2005-10-06 Advantest Corp 試験装置及び試験方法

Also Published As

Publication number Publication date
JP2007322141A (ja) 2007-12-13
KR20070115593A (ko) 2007-12-06

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