KR100808513B1 - 혼 홀더 요동형 본딩장치 - Google Patents

혼 홀더 요동형 본딩장치 Download PDF

Info

Publication number
KR100808513B1
KR100808513B1 KR1020070006522A KR20070006522A KR100808513B1 KR 100808513 B1 KR100808513 B1 KR 100808513B1 KR 1020070006522 A KR1020070006522 A KR 1020070006522A KR 20070006522 A KR20070006522 A KR 20070006522A KR 100808513 B1 KR100808513 B1 KR 100808513B1
Authority
KR
South Korea
Prior art keywords
horn holder
horn
holder
arc
support point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020070006522A
Other languages
English (en)
Korean (ko)
Other versions
KR20070091525A (ko
Inventor
고헤이 세야마
Original Assignee
가부시키가이샤 신가와
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 신가와 filed Critical 가부시키가이샤 신가와
Publication of KR20070091525A publication Critical patent/KR20070091525A/ko
Application granted granted Critical
Publication of KR100808513B1 publication Critical patent/KR100808513B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004Wire welding
    • B23K20/005Capillary welding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00Subject matter not provided for in other groups of this subclass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/42Printed circuits
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/0711Apparatus therefor
    • H10W72/07141Means for applying energy, e.g. ovens or lasers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/0711Apparatus therefor
    • H10W72/07173Means for moving chips, wafers or other parts, e.g. conveyor belts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/075Connecting or disconnecting of bond wires
    • H10W72/07531Techniques
    • H10W72/07532Compression bonding, e.g. thermocompression bonding
    • H10W72/07533Ultrasonic bonding, e.g. thermosonic bonding
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S228/00Metal fusion bonding
    • Y10S228/904Wire bonding

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Wire Bonding (AREA)
KR1020070006522A 2006-03-06 2007-01-22 혼 홀더 요동형 본딩장치 Expired - Fee Related KR100808513B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006058925A JP4616779B2 (ja) 2006-03-06 2006-03-06 ホーンホルダ揺動型ボンディング装置
JPJP-P-2006-00058925 2006-03-06

Publications (2)

Publication Number Publication Date
KR20070091525A KR20070091525A (ko) 2007-09-11
KR100808513B1 true KR100808513B1 (ko) 2008-02-29

Family

ID=38470644

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070006522A Expired - Fee Related KR100808513B1 (ko) 2006-03-06 2007-01-22 혼 홀더 요동형 본딩장치

Country Status (4)

Country Link
US (2) US7578421B2 (https=)
JP (1) JP4616779B2 (https=)
KR (1) KR100808513B1 (https=)
TW (1) TW200805527A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5085801B1 (ja) * 2012-04-10 2012-11-28 新興機械株式会社 超音波接合装置
EP4357067A4 (en) * 2022-08-31 2025-07-09 Wuxi Lead Intelligent Equipment Co Ltd TAB WELDING DEVICE

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030079700A (ko) * 2002-04-02 2003-10-10 가부시키가이샤 신가와 본딩장치
KR20030091703A (ko) * 2002-05-23 2003-12-03 가부시키가이샤 신가와 본딩장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3901475C2 (de) * 1989-01-19 1994-07-14 Danfoss As Fluidgesteuerte Servoanordnung
JP2588068B2 (ja) * 1991-02-27 1997-03-05 株式会社カイジョー ワイヤボンディング装置及びその方法
JPH09326424A (ja) * 1996-06-06 1997-12-16 Matsushita Electric Ind Co Ltd ワイヤボンディング装置
JP3654261B2 (ja) * 2002-05-09 2005-06-02 松下電器産業株式会社 電子部品のボンディング装置およびボンディングツール
JP4010186B2 (ja) * 2002-05-30 2007-11-21 日本電気株式会社 ボンディング装置
JP4141394B2 (ja) * 2004-02-20 2008-08-27 株式会社新川 ボンディングアーム揺動型ボンディング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030079700A (ko) * 2002-04-02 2003-10-10 가부시키가이샤 신가와 본딩장치
KR20030091703A (ko) * 2002-05-23 2003-12-03 가부시키가이샤 신가와 본딩장치

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
한국특허공개공보 1020030079700호
한국특허공개공보 1020030091703호

Also Published As

Publication number Publication date
TWI342056B (https=) 2011-05-11
US7578421B2 (en) 2009-08-25
JP4616779B2 (ja) 2011-01-19
US20090272498A1 (en) 2009-11-05
JP2007242657A (ja) 2007-09-20
US20070205252A1 (en) 2007-09-06
KR20070091525A (ko) 2007-09-11
TW200805527A (en) 2008-01-16

Similar Documents

Publication Publication Date Title
KR20200010067A (ko) 감소된 진동 전달을 가지는 구동 시스템
KR100808513B1 (ko) 혼 홀더 요동형 본딩장치
CN104271296A (zh) 带锯机
JP3742359B2 (ja) ボンディング装置
JP3666592B2 (ja) ボンディング装置
JP2008220066A (ja) アクチュエータ
JP2013119299A (ja) ワイパー装置及びカメラユニット
KR100626186B1 (ko) 본딩 암 요동형 본딩장치
WO2015146867A1 (ja) ワイパシステム制御方法及びワイパシステム
JP6043561B2 (ja) パラレルリンクロボット
JP4141401B2 (ja) ボンディング装置
JP2008185621A (ja) 光偏向器
JP4010186B2 (ja) ボンディング装置
CN114388407B (zh) 一种键合头装置及键合机
JPH11275844A (ja) 電磁式リニアアクチュエータおよびボールボンディング装置
US11712740B2 (en) Built-in type supersonic spindle and excitation method using same
JP2007281177A (ja) ホーンホルダ揺動型ボンディング装置
JPH0584193U (ja) 超音波駆動装置
JP2007220698A (ja) ボンディング装置
JP2003347350A (ja) ボンディング装置
JPH06151498A (ja) ワイヤボンディング装置
JP2006048858A (ja) 対物レンズ駆動装置、光ピックアップ装置及び光ディスク装置
JP2009087822A (ja) 継電器
JP2009272501A (ja) 回転機構

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20120130

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20130223

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20130223

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

PN2301 Change of applicant

St.27 status event code: A-5-5-R10-R13-asn-PN2301

St.27 status event code: A-5-5-R10-R11-asn-PN2301

R11 Change to the name of applicant or owner or transfer of ownership requested

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R11-ASN-PN2301 (AS PROVIDED BY THE NATIONAL OFFICE)

R13 Change to the name of applicant or owner recorded

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R13-ASN-PN2301 (AS PROVIDED BY THE NATIONAL OFFICE)

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000