KR100730241B1 - 흡착 패드 - Google Patents

흡착 패드 Download PDF

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Publication number
KR100730241B1
KR100730241B1 KR1020030060694A KR20030060694A KR100730241B1 KR 100730241 B1 KR100730241 B1 KR 100730241B1 KR 1020030060694 A KR1020030060694 A KR 1020030060694A KR 20030060694 A KR20030060694 A KR 20030060694A KR 100730241 B1 KR100730241 B1 KR 100730241B1
Authority
KR
South Korea
Prior art keywords
support
pad
vacuum
substrate
adsorption
Prior art date
Application number
KR1020030060694A
Other languages
English (en)
Korean (ko)
Other versions
KR20040063756A (ko
Inventor
후쿠시마아키라
간다도시로
오다니요시히코
Original Assignee
에스펙 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스펙 가부시키가이샤 filed Critical 에스펙 가부시키가이샤
Publication of KR20040063756A publication Critical patent/KR20040063756A/ko
Application granted granted Critical
Publication of KR100730241B1 publication Critical patent/KR100730241B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B47/00—Suction cups for attaching purposes; Equivalent means using adhesives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020030060694A 2003-01-07 2003-09-01 흡착 패드 KR100730241B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003001399A JP3917528B2 (ja) 2003-01-07 2003-01-07 吸着パッド
JPJP-P-2003-00001399 2003-01-07

Publications (2)

Publication Number Publication Date
KR20040063756A KR20040063756A (ko) 2004-07-14
KR100730241B1 true KR100730241B1 (ko) 2007-06-19

Family

ID=32819431

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020030060694A KR100730241B1 (ko) 2003-01-07 2003-09-01 흡착 패드

Country Status (4)

Country Link
JP (1) JP3917528B2 (zh)
KR (1) KR100730241B1 (zh)
CN (1) CN1329263C (zh)
TW (1) TWI309226B (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007242787A (ja) * 2006-03-07 2007-09-20 Disco Abrasive Syst Ltd ウエーハの分割方法
KR100765007B1 (ko) * 2006-03-26 2007-10-09 엘지이노텍 주식회사 Ｒｆｉｄ 송수신 시스템
JP4770663B2 (ja) * 2006-09-20 2011-09-14 株式会社安川電機 基板吸着装置およびそれを用いた基板搬送ロボット
KR100809718B1 (ko) * 2007-01-15 2008-03-06 삼성전자주식회사 이종 칩들을 갖는 적층형 반도체 칩 패키지 및 그 제조방법
JP5069552B2 (ja) * 2007-12-25 2012-11-07 株式会社リコー 光学ユニットおよび画像読取装置ならびに画像形成装置
JP5379589B2 (ja) * 2009-07-24 2013-12-25 東京エレクトロン株式会社 真空吸着パッド、搬送アーム及び基板搬送装置
JP6224437B2 (ja) * 2013-11-26 2017-11-01 東京エレクトロン株式会社 基板搬送装置
CN103646905A (zh) * 2013-12-11 2014-03-19 中国电子科技集团公司第二研究所 晶圆片识别旋转定位吸附台
KR101587461B1 (ko) * 2014-03-28 2016-01-21 (주)대성하이텍 유리판 가공용 지그
CN103967919B (zh) * 2014-05-06 2016-02-03 无锡微焦科技有限公司 真空吸盘
CN104959870A (zh) * 2015-07-31 2015-10-07 苏州市玄天环保科技有限公司 一种带孔平面物体吸附装置
KR102570475B1 (ko) * 2023-02-14 2023-08-24 (주)브이텍 진공 시스템용 체크밸브 조립체

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136636U (zh) 1987-02-27 1988-09-08

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3977904B2 (ja) * 1997-09-10 2007-09-19 松下電器産業株式会社 電子部品実装機の部品吸着ヘッド
JP2001260065A (ja) * 2000-03-17 2001-09-25 Advantest Corp 部品保持装置
JP4291497B2 (ja) * 2000-05-11 2009-07-08 株式会社妙徳 吸着パッド
JP3883171B2 (ja) * 2000-06-16 2007-02-21 富士通アクセス株式会社 吸着パッド
JP4547649B2 (ja) * 2000-07-31 2010-09-22 Ｓｍｃ株式会社 吸着用パッド

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136636U (zh) 1987-02-27 1988-09-08

Also Published As

Publication number Publication date
CN1329263C (zh) 2007-08-01
CN1517286A (zh) 2004-08-04
TWI309226B (en) 2009-05-01
JP3917528B2 (ja) 2007-05-23
JP2004209612A (ja) 2004-07-29
TW200412319A (en) 2004-07-16
KR20040063756A (ko) 2004-07-14

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