KR100717358B1 - 기판 적재용 카세트 - Google Patents
기판 적재용 카세트 Download PDFInfo
- Publication number
- KR100717358B1 KR100717358B1 KR1020050062542A KR20050062542A KR100717358B1 KR 100717358 B1 KR100717358 B1 KR 100717358B1 KR 1020050062542 A KR1020050062542 A KR 1020050062542A KR 20050062542 A KR20050062542 A KR 20050062542A KR 100717358 B1 KR100717358 B1 KR 100717358B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- support bar
- substrate support
- cassette
- frame
- Prior art date
Links
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/026—Racks equipped with a displaceable load carrying surface to facilitate loading or unloading
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G61/00—Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (6)
- 보텀 프레임;상기 보텀 프레임의 상부에 일정간격 이격된 상태로 위치하는 톱프레임;상기 톱프레임과 상기 보텀 프레임의 사이에 위치하여 상기 톱프레임과 상기 보텀 프레임을 이격된 상태로 고정하기 위한 복수개의 사이드 프레임;양단이 상기 사이드 프레임에 회전 가능하도록 설치되며, 기판의 저면을 지지하기 위해 세로방향으로 그리고 가로방향으로 일정 간격을 갖고서 배치된 복수개의 기판 지지바; 및상기 복수의 기판 지지바 중 어느 하나의 세로열에 배치된 복수개의 기판 지지바 각각을 회전시켜 적재된 기판의 유출이 가능하도록 하는 복수개의 회전수단이 구비되어 있으며,상기 회전수단 각각은 전동모터, 상기 전동모터에 의해 구동되는 구동축, 및 상기 구동축의 동력을 가로방향으로 배치된 복수개의 기판 지지바 중 적어도 어느 하나에 전달하는 전달기구를 포함하고 있는 것을 특징으로 하는 기판 적재용 카세트.
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050062542A KR100717358B1 (ko) | 2005-07-12 | 2005-07-12 | 기판 적재용 카세트 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050062542A KR100717358B1 (ko) | 2005-07-12 | 2005-07-12 | 기판 적재용 카세트 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070008774A KR20070008774A (ko) | 2007-01-18 |
KR100717358B1 true KR100717358B1 (ko) | 2007-05-10 |
Family
ID=38010697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050062542A KR100717358B1 (ko) | 2005-07-12 | 2005-07-12 | 기판 적재용 카세트 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100717358B1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102452546A (zh) * | 2010-10-21 | 2012-05-16 | 株式会社Siti | 任意抽取式基板匣盒 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1095490A (ja) * | 1996-09-19 | 1998-04-14 | Nikko Kogyo Kk | 板体収納箱 |
KR200328186Y1 (ko) | 2003-05-27 | 2003-09-26 | (주)상아프론테크 | 평판디스플레이용 글래스 카세트 |
JP2004119571A (ja) * | 2002-09-25 | 2004-04-15 | Dainippon Printing Co Ltd | 板材保管用カセット装置 |
JP2004146578A (ja) * | 2002-10-24 | 2004-05-20 | Yodogawa Hu-Tech Kk | カセット用基板支持部材および基板用カセット |
KR100521995B1 (ko) | 2005-03-23 | 2005-10-17 | 주식회사 에스에프에이 | 카세트 탑재장치 |
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2005
- 2005-07-12 KR KR1020050062542A patent/KR100717358B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1095490A (ja) * | 1996-09-19 | 1998-04-14 | Nikko Kogyo Kk | 板体収納箱 |
JP2004119571A (ja) * | 2002-09-25 | 2004-04-15 | Dainippon Printing Co Ltd | 板材保管用カセット装置 |
JP2004146578A (ja) * | 2002-10-24 | 2004-05-20 | Yodogawa Hu-Tech Kk | カセット用基板支持部材および基板用カセット |
KR200328186Y1 (ko) | 2003-05-27 | 2003-09-26 | (주)상아프론테크 | 평판디스플레이용 글래스 카세트 |
KR100521995B1 (ko) | 2005-03-23 | 2005-10-17 | 주식회사 에스에프에이 | 카세트 탑재장치 |
Also Published As
Publication number | Publication date |
---|---|
KR20070008774A (ko) | 2007-01-18 |
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