KR100692264B1 - 포지티브형 감방사선성 수지 조성물 - Google Patents

포지티브형 감방사선성 수지 조성물 Download PDF

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Publication number
KR100692264B1
KR100692264B1 KR1020000011410A KR20000011410A KR100692264B1 KR 100692264 B1 KR100692264 B1 KR 100692264B1 KR 1020000011410 A KR1020000011410 A KR 1020000011410A KR 20000011410 A KR20000011410 A KR 20000011410A KR 100692264 B1 KR100692264 B1 KR 100692264B1
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KR
South Korea
Prior art keywords
group
acid
compound
formula
polymer
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Expired - Lifetime
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KR1020000011410A
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English (en)
Korean (ko)
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KR20000076784A (ko
Inventor
탄시로
아오아이토시아키
후지모리토루
Original Assignee
후지필름 가부시키가이샤
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Classifications

    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47FSPECIAL FURNITURE, FITTINGS, OR ACCESSORIES FOR SHOPS, STOREHOUSES, BARS, RESTAURANTS OR THE LIKE; PAYING COUNTERS
    • A47F3/00Show cases or show cabinets
    • A47F3/04Show cases or show cabinets air-conditioned, refrigerated
    • A47F3/0404Cases or cabinets of the closed type
    • A47F3/0408Cases or cabinets of the closed type with forced air circulation
    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47FSPECIAL FURNITURE, FITTINGS, OR ACCESSORIES FOR SHOPS, STOREHOUSES, BARS, RESTAURANTS OR THE LIKE; PAYING COUNTERS
    • A47F3/00Show cases or show cabinets
    • A47F3/001Devices for lighting, humidifying, heating, ventilation
    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47FSPECIAL FURNITURE, FITTINGS, OR ACCESSORIES FOR SHOPS, STOREHOUSES, BARS, RESTAURANTS OR THE LIKE; PAYING COUNTERS
    • A47F3/00Show cases or show cabinets
    • A47F3/04Show cases or show cabinets air-conditioned, refrigerated
    • A47F3/0482Details common to both closed and open types
    • A47F3/0495Spraying, trickling or humidifying means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V33/00Structural combinations of lighting devices with other articles, not otherwise provided for
    • F21V33/0088Ventilating systems
    • F21V33/0092Ventilating systems with heating or cooling devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/04Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating air, e.g. by convection
    • F25D17/06Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating air, e.g. by convection by forced circulation
    • F25D17/08Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating air, e.g. by convection by forced circulation using ducts
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D27/00Lighting arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2317/00Details or arrangements for circulating cooling fluids; Details or arrangements for circulating gas, e.g. air, within refrigerated spaces, not provided for in other groups of this subclass
    • F25D2317/06Details or arrangements for circulating cooling fluids; Details or arrangements for circulating gas, e.g. air, within refrigerated spaces, not provided for in other groups of this subclass with forced air circulation
    • F25D2317/066Details or arrangements for circulating cooling fluids; Details or arrangements for circulating gas, e.g. air, within refrigerated spaces, not provided for in other groups of this subclass with forced air circulation characterised by the air supply
    • F25D2317/0665Details or arrangements for circulating cooling fluids; Details or arrangements for circulating gas, e.g. air, within refrigerated spaces, not provided for in other groups of this subclass with forced air circulation characterised by the air supply from the top
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2400/00General features of, or devices for refrigerators, cold rooms, ice-boxes, or for cooling or freezing apparatus not covered by any other subclass
    • F25D2400/18Aesthetic features

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • Materials For Photolithography (AREA)
KR1020000011410A 1999-03-08 2000-03-08 포지티브형 감방사선성 수지 조성물 Expired - Lifetime KR100692264B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP99-60286 1999-03-08
JP6028699A JP4067215B2 (ja) 1999-03-08 1999-03-08 ポジ型感放射線性樹脂組成物

Publications (2)

Publication Number Publication Date
KR20000076784A KR20000076784A (ko) 2000-12-26
KR100692264B1 true KR100692264B1 (ko) 2007-03-09

Family

ID=13137772

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000011410A Expired - Lifetime KR100692264B1 (ko) 1999-03-08 2000-03-08 포지티브형 감방사선성 수지 조성물

Country Status (2)

Country Link
JP (1) JP4067215B2 (enExample)
KR (1) KR100692264B1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110040143A (ko) * 2009-10-13 2011-04-20 금호석유화학 주식회사 폴리아세탈 수지, 그 합성 방법 및 포토레지스트 조성물

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4602496B2 (ja) * 1999-05-24 2010-12-22 ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. ポリビニルフェノール類のアセタール化物及び/又はカーボネート化物の製造方法及び感放射線性樹脂組成物
TW562999B (en) * 2001-05-09 2003-11-21 Fuji Photo Film Co Ltd Positive resist composition for electronic or X-rays
US20060172223A1 (en) * 2004-11-24 2006-08-03 Rohm And Haas Electronic Materials Llc Photoresist compositions
JP4602063B2 (ja) * 2004-12-16 2010-12-22 東京応化工業株式会社 電子線又はeuv用ポジ型レジスト組成物およびレジストパターン形成方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02272457A (ja) * 1989-04-13 1990-11-07 Fuji Photo Film Co Ltd 感電離放射線性樹脂組成物
JPH04219757A (ja) * 1990-03-13 1992-08-10 Basf Ag 感放射線性混合物
JPH1090902A (ja) * 1996-07-18 1998-04-10 Olin Microelectron Chem Inc 放射線感受性組成物
KR19980086901A (ko) * 1997-05-09 1998-12-05 무네유키 마사유키 포지티브 감광성 조성물

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02272457A (ja) * 1989-04-13 1990-11-07 Fuji Photo Film Co Ltd 感電離放射線性樹脂組成物
JPH04219757A (ja) * 1990-03-13 1992-08-10 Basf Ag 感放射線性混合物
JPH1090902A (ja) * 1996-07-18 1998-04-10 Olin Microelectron Chem Inc 放射線感受性組成物
KR19980086901A (ko) * 1997-05-09 1998-12-05 무네유키 마사유키 포지티브 감광성 조성물

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110040143A (ko) * 2009-10-13 2011-04-20 금호석유화학 주식회사 폴리아세탈 수지, 그 합성 방법 및 포토레지스트 조성물
KR101677058B1 (ko) 2009-10-13 2016-11-18 금호석유화학 주식회사 폴리아세탈 수지, 그 합성 방법 및 포토레지스트 조성물

Also Published As

Publication number Publication date
JP4067215B2 (ja) 2008-03-26
KR20000076784A (ko) 2000-12-26
JP2000258913A (ja) 2000-09-22

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