KR100660400B1 - 랜드 패턴 검사 방법 및 검사 장치 - Google Patents

랜드 패턴 검사 방법 및 검사 장치 Download PDF

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Publication number
KR100660400B1
KR100660400B1 KR1020060006935A KR20060006935A KR100660400B1 KR 100660400 B1 KR100660400 B1 KR 100660400B1 KR 1020060006935 A KR1020060006935 A KR 1020060006935A KR 20060006935 A KR20060006935 A KR 20060006935A KR 100660400 B1 KR100660400 B1 KR 100660400B1
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KR
South Korea
Prior art keywords
image
hole
land
circle
shrinkage
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Expired - Fee Related
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KR1020060006935A
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English (en)
Korean (ko)
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KR20060103823A (ko
Inventor
유지 아카기
준 오니시
가츠지 겐노
Original Assignee
다이니폰 스크린 세이조우 가부시키가이샤
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Publication of KR20060103823A publication Critical patent/KR20060103823A/ko
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Publication of KR100660400B1 publication Critical patent/KR100660400B1/ko
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    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01F—ADDITIONAL WORK, SUCH AS EQUIPPING ROADS OR THE CONSTRUCTION OF PLATFORMS, HELICOPTER LANDING STAGES, SIGNS, SNOW FENCES, OR THE LIKE
    • E01F8/00—Arrangements for absorbing or reflecting air-transmitted noise from road or railway traffic
    • E01F8/0005—Arrangements for absorbing or reflecting air-transmitted noise from road or railway traffic used in a wall type arrangement
    • E01F8/0023—Details, e.g. foundations

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  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
KR1020060006935A 2005-03-28 2006-01-23 랜드 패턴 검사 방법 및 검사 장치 Expired - Fee Related KR100660400B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00091990 2005-03-28
JP2005091990A JP4518494B2 (ja) 2005-03-28 2005-03-28 ランドパターン検査方法及び検査装置

Publications (2)

Publication Number Publication Date
KR20060103823A KR20060103823A (ko) 2006-10-04
KR100660400B1 true KR100660400B1 (ko) 2006-12-22

Family

ID=37030156

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060006935A Expired - Fee Related KR100660400B1 (ko) 2005-03-28 2006-01-23 랜드 패턴 검사 방법 및 검사 장치

Country Status (4)

Country Link
JP (1) JP4518494B2 (enExample)
KR (1) KR100660400B1 (enExample)
CN (1) CN100507530C (enExample)
TW (1) TWI271505B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5234639B2 (ja) * 2009-01-31 2013-07-10 株式会社メガトレード スルーホールの検査装置
CN101995223B (zh) * 2009-08-25 2013-05-08 比亚迪股份有限公司 一种芯片外观检测方法及系统
CN102595024B (zh) * 2011-12-16 2014-10-22 飞狐信息技术（天津）有限公司 一种数字视频图像修复方法与装置
CN104020222B (zh) * 2014-06-18 2016-06-22 长春光华微电子设备工程中心有限公司 全自动超声波铝丝压焊机焊接质量检测系统
CN104535587A (zh) * 2014-12-23 2015-04-22 安徽科鸣三维科技有限公司 一种基于机器视觉的pcba焊点检测方法
JP6496159B2 (ja) * 2015-02-23 2019-04-03 株式会社Ｓｃｒｅｅｎホールディングス パターン検査装置およびパターン検査方法
TWI521476B (zh) * 2015-04-17 2016-02-11 銘傳大學 週期性圖案之自動光學檢測方法
CN106651989B (zh) * 2016-12-21 2020-04-21 北京信息科技大学 用于微小孔对中的嵌套圆拟合方法及装置
CN109950165B (zh) * 2019-02-19 2021-06-04 长江存储科技有限责任公司 测试结构和测试方法
CN118070749B (zh) * 2024-04-17 2024-07-23 淄博芯材集成电路有限责任公司 一种基板收缩方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01269035A (ja) * 1988-04-21 1989-10-26 Ibiden Co Ltd プリント回路基板の検査装置
JP2001267722A (ja) * 2000-03-23 2001-09-28 Ngk Spark Plug Co Ltd プリント配線板の検査方法
JP3589424B1 (ja) * 2003-12-22 2004-11-17 株式会社メガトレード 基板検査装置

Also Published As

Publication number Publication date
CN1841049A (zh) 2006-10-04
JP4518494B2 (ja) 2010-08-04
JP2006275612A (ja) 2006-10-12
CN100507530C (zh) 2009-07-01
KR20060103823A (ko) 2006-10-04
TWI271505B (en) 2007-01-21
TW200636207A (en) 2006-10-16

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