TWI271505B - Method for examining land pattern and apparatus for examining the same - Google Patents
Method for examining land pattern and apparatus for examining the same Download PDFInfo
- Publication number
- TWI271505B TWI271505B TW094145474A TW94145474A TWI271505B TW I271505 B TWI271505 B TW I271505B TW 094145474 A TW094145474 A TW 094145474A TW 94145474 A TW94145474 A TW 94145474A TW I271505 B TWI271505 B TW I271505B
- Authority
- TW
- Taiwan
- Prior art keywords
- image
- hole
- circle
- pattern
- target
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 39
- 238000012545 processing Methods 0.000 claims description 70
- 238000007689 inspection Methods 0.000 claims description 60
- 230000009467 reduction Effects 0.000 claims description 52
- 239000002131 composite material Substances 0.000 claims description 22
- 230000002194 synthesizing effect Effects 0.000 claims description 14
- 238000011946 reduction process Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- 230000000873 masking effect Effects 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims description 2
- 229910052770 Uranium Inorganic materials 0.000 claims 1
- 238000010367 cloning Methods 0.000 claims 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 26
- 230000008569 process Effects 0.000 abstract description 14
- 239000000758 substrate Substances 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 18
- 230000003287 optical effect Effects 0.000 description 16
- 230000007246 mechanism Effects 0.000 description 10
- 238000001514 detection method Methods 0.000 description 9
- 230000002950 deficient Effects 0.000 description 5
- RGCKGOZRHPZPFP-UHFFFAOYSA-N alizarin Chemical compound C1=CC=C2C(=O)C3=C(O)C(O)=CC=C3C(=O)C2=C1 RGCKGOZRHPZPFP-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 241000251468 Actinopterygii Species 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 241000255789 Bombyx mori Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 241000239226 Scorpiones Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 206010013023 diphtheria Diseases 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 210000004195 gingiva Anatomy 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 210000002445 nipple Anatomy 0.000 description 1
- 239000002420 orchard Substances 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000001932 seasonal effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- UQDJGEHQDNVPGU-UHFFFAOYSA-N serine phosphoethanolamine Chemical compound [NH3+]CCOP([O-])(=O)OCC([NH3+])C([O-])=O UQDJGEHQDNVPGU-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
-
- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01F—ADDITIONAL WORK, SUCH AS EQUIPPING ROADS OR THE CONSTRUCTION OF PLATFORMS, HELICOPTER LANDING STAGES, SIGNS, SNOW FENCES, OR THE LIKE
- E01F8/00—Arrangements for absorbing or reflecting air-transmitted noise from road or railway traffic
- E01F8/0005—Arrangements for absorbing or reflecting air-transmitted noise from road or railway traffic used in a wall type arrangement
- E01F8/0023—Details, e.g. foundations
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005091990A JP4518494B2 (ja) | 2005-03-28 | 2005-03-28 | ランドパターン検査方法及び検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200636207A TW200636207A (en) | 2006-10-16 |
| TWI271505B true TWI271505B (en) | 2007-01-21 |
Family
ID=37030156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094145474A TWI271505B (en) | 2005-03-28 | 2005-12-21 | Method for examining land pattern and apparatus for examining the same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4518494B2 (enExample) |
| KR (1) | KR100660400B1 (enExample) |
| CN (1) | CN100507530C (enExample) |
| TW (1) | TWI271505B (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5234639B2 (ja) * | 2009-01-31 | 2013-07-10 | 株式会社メガトレード | スルーホールの検査装置 |
| CN101995223B (zh) * | 2009-08-25 | 2013-05-08 | 比亚迪股份有限公司 | 一种芯片外观检测方法及系统 |
| CN102595024B (zh) * | 2011-12-16 | 2014-10-22 | 飞狐信息技术（天津）有限公司 | 一种数字视频图像修复方法与装置 |
| CN104020222B (zh) * | 2014-06-18 | 2016-06-22 | 长春光华微电子设备工程中心有限公司 | 全自动超声波铝丝压焊机焊接质量检测系统 |
| CN104535587A (zh) * | 2014-12-23 | 2015-04-22 | 安徽科鸣三维科技有限公司 | 一种基于机器视觉的pcba焊点检测方法 |
| JP6496159B2 (ja) * | 2015-02-23 | 2019-04-03 | 株式会社Ｓｃｒｅｅｎホールディングス | パターン検査装置およびパターン検査方法 |
| TWI521476B (zh) * | 2015-04-17 | 2016-02-11 | 銘傳大學 | 週期性圖案之自動光學檢測方法 |
| CN106651989B (zh) * | 2016-12-21 | 2020-04-21 | 北京信息科技大学 | 用于微小孔对中的嵌套圆拟合方法及装置 |
| CN109950165B (zh) * | 2019-02-19 | 2021-06-04 | 长江存储科技有限责任公司 | 测试结构和测试方法 |
| CN118070749B (zh) * | 2024-04-17 | 2024-07-23 | 淄博芯材集成电路有限责任公司 | 一种基板收缩方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01269035A (ja) * | 1988-04-21 | 1989-10-26 | Ibiden Co Ltd | プリント回路基板の検査装置 |
| JP2001267722A (ja) * | 2000-03-23 | 2001-09-28 | Ngk Spark Plug Co Ltd | プリント配線板の検査方法 |
| JP3589424B1 (ja) * | 2003-12-22 | 2004-11-17 | 株式会社メガトレード | 基板検査装置 |
-
2005
- 2005-03-28 JP JP2005091990A patent/JP4518494B2/ja not_active Expired - Fee Related
- 2005-12-21 TW TW094145474A patent/TWI271505B/zh not_active IP Right Cessation
-
2006
- 2006-01-19 CN CNB200610005927XA patent/CN100507530C/zh not_active Expired - Fee Related
- 2006-01-23 KR KR1020060006935A patent/KR100660400B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR100660400B1 (ko) | 2006-12-22 |
| CN1841049A (zh) | 2006-10-04 |
| JP4518494B2 (ja) | 2010-08-04 |
| JP2006275612A (ja) | 2006-10-12 |
| CN100507530C (zh) | 2009-07-01 |
| KR20060103823A (ko) | 2006-10-04 |
| TW200636207A (en) | 2006-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |