JP4518494B2 - ランドパターン検査方法及び検査装置 - Google Patents

ランドパターン検査方法及び検査装置 Download PDF

Info

Publication number
JP4518494B2
JP4518494B2 JP2005091990A JP2005091990A JP4518494B2 JP 4518494 B2 JP4518494 B2 JP 4518494B2 JP 2005091990 A JP2005091990 A JP 2005091990A JP 2005091990 A JP2005091990 A JP 2005091990A JP 4518494 B2 JP4518494 B2 JP 4518494B2
Authority
JP
Japan
Prior art keywords
image
hole
land
circle
land pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005091990A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006275612A5 (enExample
JP2006275612A (ja
Inventor
祐司 赤木
潤 大西
勝示 乾野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Screen Holdings Co Ltd
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd, Dainippon Screen Manufacturing Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2005091990A priority Critical patent/JP4518494B2/ja
Priority to TW094145474A priority patent/TWI271505B/zh
Priority to CNB200610005927XA priority patent/CN100507530C/zh
Priority to KR1020060006935A priority patent/KR100660400B1/ko
Publication of JP2006275612A publication Critical patent/JP2006275612A/ja
Publication of JP2006275612A5 publication Critical patent/JP2006275612A5/ja
Application granted granted Critical
Publication of JP4518494B2 publication Critical patent/JP4518494B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01F—ADDITIONAL WORK, SUCH AS EQUIPPING ROADS OR THE CONSTRUCTION OF PLATFORMS, HELICOPTER LANDING STAGES, SIGNS, SNOW FENCES, OR THE LIKE
    • E01F8/00—Arrangements for absorbing or reflecting air-transmitted noise from road or railway traffic
    • E01F8/0005—Arrangements for absorbing or reflecting air-transmitted noise from road or railway traffic used in a wall type arrangement
    • E01F8/0023—Details, e.g. foundations

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP2005091990A 2005-03-28 2005-03-28 ランドパターン検査方法及び検査装置 Expired - Fee Related JP4518494B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005091990A JP4518494B2 (ja) 2005-03-28 2005-03-28 ランドパターン検査方法及び検査装置
TW094145474A TWI271505B (en) 2005-03-28 2005-12-21 Method for examining land pattern and apparatus for examining the same
CNB200610005927XA CN100507530C (zh) 2005-03-28 2006-01-19 焊盘图案检查方法以及检查装置
KR1020060006935A KR100660400B1 (ko) 2005-03-28 2006-01-23 랜드 패턴 검사 방법 및 검사 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005091990A JP4518494B2 (ja) 2005-03-28 2005-03-28 ランドパターン検査方法及び検査装置

Publications (3)

Publication Number Publication Date
JP2006275612A JP2006275612A (ja) 2006-10-12
JP2006275612A5 JP2006275612A5 (enExample) 2008-03-06
JP4518494B2 true JP4518494B2 (ja) 2010-08-04

Family

ID=37030156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005091990A Expired - Fee Related JP4518494B2 (ja) 2005-03-28 2005-03-28 ランドパターン検査方法及び検査装置

Country Status (4)

Country Link
JP (1) JP4518494B2 (enExample)
KR (1) KR100660400B1 (enExample)
CN (1) CN100507530C (enExample)
TW (1) TWI271505B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5234639B2 (ja) * 2009-01-31 2013-07-10 株式会社メガトレード スルーホールの検査装置
CN101995223B (zh) * 2009-08-25 2013-05-08 比亚迪股份有限公司 一种芯片外观检测方法及系统
CN102595024B (zh) * 2011-12-16 2014-10-22 飞狐信息技术（天津）有限公司 一种数字视频图像修复方法与装置
CN104020222B (zh) * 2014-06-18 2016-06-22 长春光华微电子设备工程中心有限公司 全自动超声波铝丝压焊机焊接质量检测系统
CN104535587A (zh) * 2014-12-23 2015-04-22 安徽科鸣三维科技有限公司 一种基于机器视觉的pcba焊点检测方法
JP6496159B2 (ja) * 2015-02-23 2019-04-03 株式会社Ｓｃｒｅｅｎホールディングス パターン検査装置およびパターン検査方法
TWI521476B (zh) * 2015-04-17 2016-02-11 銘傳大學 週期性圖案之自動光學檢測方法
CN106651989B (zh) * 2016-12-21 2020-04-21 北京信息科技大学 用于微小孔对中的嵌套圆拟合方法及装置
CN109950165B (zh) * 2019-02-19 2021-06-04 长江存储科技有限责任公司 测试结构和测试方法
CN118070749B (zh) * 2024-04-17 2024-07-23 淄博芯材集成电路有限责任公司 一种基板收缩方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01269035A (ja) * 1988-04-21 1989-10-26 Ibiden Co Ltd プリント回路基板の検査装置
JP2001267722A (ja) * 2000-03-23 2001-09-28 Ngk Spark Plug Co Ltd プリント配線板の検査方法
JP3589424B1 (ja) * 2003-12-22 2004-11-17 株式会社メガトレード 基板検査装置

Also Published As

Publication number Publication date
KR100660400B1 (ko) 2006-12-22
CN1841049A (zh) 2006-10-04
JP2006275612A (ja) 2006-10-12
CN100507530C (zh) 2009-07-01
KR20060103823A (ko) 2006-10-04
TWI271505B (en) 2007-01-21
TW200636207A (en) 2006-10-16

Similar Documents

Publication Publication Date Title
US20060018534A1 (en) Technique for detecting a defect of an object by area segmentation of a color image of the object
JP4518494B2 (ja) ランドパターン検査方法及び検査装置
KR960013357B1 (ko) 화상데이타 검사방법 및 장치
JP2011007728A (ja) 欠陥検出方法、欠陥検出装置、および欠陥検出プログラム
JP4230880B2 (ja) 欠陥検査方法
KR100821038B1 (ko) 차분 비교 검사방법 및 차분 비교 검사장치
JP2014062837A (ja) 欠陥検査装置及び欠陥レビュー装置
JP2002042112A (ja) 回路基板の部品実装検査方法及びそのシステム
JP4982125B2 (ja) 欠陥検査方法及びパターン抽出方法
JP5096940B2 (ja) プリント配線板の検査方法及びその装置
KR101630078B1 (ko) 데이터 연산 방법, 데이터 연산 장치 및 결함 검사 장치
JP7068897B2 (ja) 検査装置及び検査方法
JPS6147362B2 (enExample)
JP2500758B2 (ja) プリント基板パタ―ン検査装置
JP2002198406A (ja) 外観検査方法
JP2676990B2 (ja) 配線パターン検査装置
JP7285988B2 (ja) 検査装置及び検査方法
JP3274132B2 (ja) 外観検査用基準パターンの作成方法
JPH06249792A (ja) プリント基板パターン検査装置
JP2003065970A (ja) 異物検査方法およびその装置
JP2006234554A (ja) パターン検査方法およびパターン検査装置
JP5276385B2 (ja) 欠陥検査装置及び欠陥検査方法
KR100901327B1 (ko) 메탈 마스크의 제조 방법
JPH0829355A (ja) 外観検査装置及び外観検査方法
JP2006329679A (ja) 製品パターン検査方法および装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071218

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080116

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100512

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100514

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100514

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130528

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4518494

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130528

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130528

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140528

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees